Vacuum Processing Apparatus - Patent 8152926
1. Field of the Invention The present invention relates to a vacuum processing apparatus which can perform a desired process for a substrate after... ... more>>
Tags: Vacuum processing apparatus,
Lee,
et al.,
Young Jong Lee,
Jun Young Choi,
Hyoung-Kyu Son,
Jeong-Bin Lee,
Gyeong-Hoon Kim,
Hyung-Soo Kim,
Myung-Woo Han,
Application number 12 578-820,
Coating Apparatus,
Adhesive Bonding And Miscellaneous Ch...,
Handling: Hand And Hoist-Line Implements
6 views
language: English
3 views
language: English
11 views
language: English
5 views
language: English
11 views
language: English
Multi-gas Flow Diffuser - Patent 8147614
1. Field of the Invention Embodiments of the present invention generally relate to an apparatus and a method for distributing a process gas in a... ... more>>
Tags: Multi-gas flow diffuser,
White,
et al.,
John M. White,
Carl Sorensen,
Robin Tiner,
Beom Soo Park,
Soo Young Choi,
Application number 12 794-756,
Coating Apparatus,
Adhesive Bonding And Miscellaneous Ch...
3 views
language:
Cluster Tool Architecture For Processing A Substrate - Patent 8146530
1. Field of the Invention Embodiments of the invention generally relate to an integrated processing system containing multiple processing stations... ... more>>
Tags: Cluster tool architecture for process...,
Ishikawa,
et al.,
Tetsuya Ishikawa,
Rick J. Roberts,
Helen R. Armer,
Leon Volfovski,
Jay D. Pinson,
Michael Rice,
David H. Quach,
Mohsen S. Salek,
Robert Lowrance,
John A. Backer,
William Tyler Weaver,
Charles Carlson,
Chongyang Wang,
Jeffrey Hudgens,
Harald Herchen,
Brian Lu,
Application number 12 254-778,
Coating Apparatus,
Material Or Article Handling
5 views
language: English
Liquid Application Apparatus And Printing Apparatus - Patent 8146529
1. Field of the Invention The present invention relates to a liquid application apparatus and a printing apparatus, and more particularly, to a... ... more>>
Tags: Liquid application apparatus and prin...,
Hakamata,
et al.,
Keisei Hakamata,
Tetsuyo Ohashi,
Hideaki Nagahara,
Hiroshi Yoshino,
Takeshi Sekino,
Application number 12 357-876,
Coating Apparatus,
Incremental Printing Of Symbolic Info...
5 views
language:
1 views
language: English
Substrate Holding Apparatus, Substrate Holding Method, And Substrate Processing Apparatus - Patent 8141513
The present invention relates to a substrate holding apparatus and a substrate holding method suitable for use in processing a surface (surface to be ... more>>
Tags: Substrate holding apparatus,
substrate holding method,
and substrate processing apparatus,
Sekimoto,
et al.,
Masahiko Sekimoto,
Seiji Katsuoka,
Naoki Dai,
Teruyuki Watanabe,
Takahiro Ogawa,
Kenichi Suzuki,
Kenichi Kobayashi,
Yasuyuki Motoshima,
Ryo Kato,
Application number 12 983-474,
Coating Apparatus
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language:
Plasma Processing Apparatus, Plasma Processing Method, And Storage Medium - Patent 8141514
1. Field of the Invention The present invention relates to a plasma processing apparatus, a plasma processing method, and a storage medium. 2. ... ... more>>
Tags: Plasma processing apparatus,
plasma processing method,
and storage medium,
Honda,
et al.,
Masanobu Honda,
Naoki Matsumoto,
Satoshi Tanaka,
Yutaka Matsui,
Application number 11 686-551,
Coating Apparatus,
Adhesive Bonding And Miscellaneous Ch...
3 views
language: