Patent Inventor: Yool Kang
-
Method for forming patterns of semiconductor device
Inventor: Koh, et al. | Patent Number: 7862988
-
Method of forming a semiconductor device
Inventor: Lee, et al. | Patent Number: 7842450
-
Nonvolatile memory device and method of manufacturing the same
Inventor: Koh, et al. | Patent Number: 7678650
-
Nonvolatile memory device and method of manufacturing the same
Inventor: Koh, et al. | Patent Number: 7560768
-
Methods for forming line patterns in semiconductor substrates
Inventor: Choi, et al. | Patent Number: 6803176
-
Photosensitive polymers and resist compositions comprising the photosensitive polymers
Inventor: Kim, et al. | Patent Number: 6787287
-
Photosensitive polymer having fused aromatic ring and photoresist composition containing the same
Inventor: Choi, et al. | Patent Number: 6753125
-
Methods for forming line patterns in semiconductor substrates
Inventor: Choi, et al. | Patent Number: 6485895
-
Photosensitive polymers and chemically amplified photoresist compositions using the same
Inventor: Choi, et al. | Patent Number: 6300036
-
Method for manufacturing a photoresist pattern defining a small opening and method for manufacturing semiconductor device using the same
Inventor: Choi, et al. | Patent Number: 6284438
-
Chemically amplified resist composition
Inventor: Kang, et al. | Patent Number: 6280903
-
Chemically amplified resist composition
Inventor: Kang, et al. | Patent Number: 6114084