Patent Inventor: Uwe Paul Schroeder
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Lithography masks, systems, and manufacturing methods
Inventor: Schroeder | Patent Number: 8153335
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Method for patterning a semiconductor wafer
Inventor: Scheer, et al. | Patent Number: 8003305
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Method of making a contact in a semiconductor device
Inventor: Klee, et al. | Patent Number: 7985676
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Masks and methods of manufacture thereof
Inventor: Schroeder, et al. | Patent Number: 7859645
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Lithography masks and methods
Inventor: Schroeder, et al. | Patent Number: 7846616
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Radio frequency (RF) circuit placement in semiconductor devices
Inventor: Schroeder, et al. | Patent Number: 7838959
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Method of making a contact in a semiconductor device
Inventor: Klee, et al. | Patent Number: 7678704
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Masks and methods of manufacture thereof
Inventor: Schroeder, et al. | Patent Number: 7648805
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Lithographic mask, and method for covering a mask layer
Inventor: Schroeder, et al. | Patent Number: 7405024
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Method for printing contacts on a substrate
Inventor: Schroeder | Patent Number: 7268080
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Method of forming isolated features of semiconductor devices
Inventor: Schroeder | Patent Number: 7259107
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Method and apparatus for producing rectangular contact holes utilizing side lobe formation
Inventor: Schroeder | Patent Number: 7224030
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Method for exposing a substrate with a structure pattern which compensates for the optical proximity effect
Inventor: Schroeder | Patent Number: 7157194
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Effective assist pattern for nested and isolated contacts
Inventor: Schacht, et al. | Patent Number: 7074528
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Method for forming a trench in a layer or a layer stack on a semiconductor wafer
Inventor: Schroeder, et al. | Patent Number: 7049241
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Method and apparatus for aerial image improvement in projection lithography using a phase shifting aperture
Inventor: Schroeder, et al. | Patent Number: 6897943
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Method for producing quadratic contact holes utilizing side lobe formation
Inventor: Schroeder | Patent Number: 6767682
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Resolution enhancement for alternating phase shift masks
Inventor: Schroeder, et al. | Patent Number: 6605396
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Semiconductor structures and manufacturing methods
Inventor: Summerer, et al. | Patent Number: 6590657
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`Via first` dual damascene process for copper metallization
Inventor: Brase, et al. | Patent Number: 6576550
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Liquid crystalline light-modulating device
Inventor: Afzali-Arkadani, et al. | Patent Number: 6540938
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Method of improving the etch resistance of chemically amplified photoresists by introducing silicon after patterning
Inventor: Schroeder, et al. | Patent Number: 6379869
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Method for producing square contact holes utilizing side lobe formation
Inventor: Schroeder | Patent Number: 6355503
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Top layer imaging lithography for semiconductor processing
Inventor: Butt, et al. | Patent Number: 6316168