Patent Inventor: Thomas L. McDevitt
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Copper damascene and dual damascene interconnect wiring
Inventor: Gambino, et al. | Patent Number: 8106513
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CMP method
Inventor: McDevitt, et al. | Patent Number: 8088690
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Metal seed layer deposition
Inventor: Barkyoumb, et al. | Patent Number: 7879716
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Dual damascene wiring and method
Inventor: McDevitt, et al. | Patent Number: 7709905
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Method of fabricating copper damascene and dual damascene interconnect wiring
Inventor: Gambino, et al. | Patent Number: 7678683
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Suppression of localized metal precipitate formation and corresponding metallization depletion in semiconductor processing
Inventor: Chapple-Sokol, et al. | Patent Number: 7649262
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Suppression of localized metal precipitate formation and corresponding metallization depletion in semiconductor processing
Inventor: Chapple-Sokol, et al. | Patent Number: 7572650
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Crack stop for low K dielectrics
Inventor: Daubenspeck, et al. | Patent Number: 7521336
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Local plasma processing
Inventor: Gambino, et al. | Patent Number: 7375039
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Crack stop for low K dielectrics
Inventor: Daubenspeck, et al. | Patent Number: 7335577
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Metal seed layer deposition
Inventor: Barkyoumb, et al. | Patent Number: 7235487
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Dual damascene wiring and method
Inventor: McDevitt, et al. | Patent Number: 7223684
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Bilayer aluminum last metal for interconnects and wirebond pads
Inventor: Luce, et al. | Patent Number: 7183656
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Method of fabricating copper damascene and dual damascene interconnect wiring
Inventor: Gambino, et al. | Patent Number: 7176119
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Suppression of localized metal precipitate formation and corresponding metallization depletion in semiconductor processing
Inventor: Chapple-Sokol, et al. | Patent Number: 7173338
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Copper to aluminum interlayer interconnect using stud and via liner
Inventor: Burrell, et al. | Patent Number: 7087997
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Copper to aluminum interlayer interconnect using stud and via liner
Inventor: Burrell, et al. | Patent Number: 7037824
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Exposed pore sealing post patterning
Inventor: Cooney, III, et al. | Patent Number: 7015150
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Method for fabricating a triple damascene fuse
Inventor: Daubenspeck, et al. | Patent Number: 6991971
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Insulative cap for laser fusing
Inventor: Daubenspeck, et al. | Patent Number: 6946379
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Electrical detection of dicing damage
Inventor: Daubenspeck, et al. | Patent Number: 6833720
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Insulative cap for laser fusing
Inventor: Daubenspeck, et al. | Patent Number: 6784516
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Method of forming a metal-insulator-metal capacitor for dual damascene interconnect processing and the device so formed
Inventor: Gambino, et al. | Patent Number: 6762108
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Triple damascene fuse
Inventor: Daubenspeck, et al. | Patent Number: 6667533
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Interconnection structure and method for fabricating same
Inventor: Horak, et al. | Patent Number: 6653737
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Tri-layer dielectric fuse cap for laser deletion
Inventor: McDevitt, et al. | Patent Number: 6518643
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Method of forming a metal-insulator-metal capacitor for dual damascene interconnect processing and the device so formed
Inventor: Gambino, et al. | Patent Number: 6504203
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Interconnection structure and method for fabricating same
Inventor: Horak, et al. | Patent Number: 6436814
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Fluorine-free barrier layer between conductor and insulator for degradation prevention
Inventor: Cooney, III, et al. | Patent Number: 6310300
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Fluorine barrier layer between conductor and insulator for degradation prevention
Inventor: Cooney, III, et al. | Patent Number: 6214730
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Method for providing fluorine barrier layer between conductor and insulator for degradation prevention
Inventor: Cooney, III, et al. | Patent Number: 6066577
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Fluorine barrier layer between conductor and insulator for degradation prevention
Inventor: Cooney, III, et al. | Patent Number: 5930655
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Two step annealing process for decreasing contact resistance
Inventor: McDevitt, et al. | Patent Number: 5494860
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Method for applying photoresist
Inventor: Knight, et al. | Patent Number: 5486267
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Method of depositing conductors in high aspect ratio apertures using a collimator
Inventor: Lee, et al. | Patent Number: 5401675