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Patent Inventor: Shinrou Ohta
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Polishing monitoring method and polishing apparatus
Inventor: Kobayashi, et al. | Patent Number: 8078419
Polishing method
Inventor: Ohta, et al. | Patent Number: 7960188
Polishing apparatus and polishing method
Inventor: Ohta, et al. | Patent Number: 7780503
Substrate polishing apparatus
Inventor: Hirokawa, et al. | Patent Number: 7547242
Substrate polishing apparatus
Inventor: Hirokawa, et al. | Patent Number: 7507144
Substrate polishing apparatus
Inventor: Hirokawa, et al. | Patent Number: 7214122
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