Patent Inventor: Shinichi Tachi
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Method and apparatus for dry etching
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Plasma processing method
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Plasma processing apparatus and plasma processing method
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Method of manufacturing a semiconductor device and manufacturing system
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Method for manufacturing semiconductor device
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Apparatus for cleaning semiconductor wafers in a vacuum environment
Inventor: Momonoi, et al. | Patent Number: 6643893
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Method for cleaning semiconductor wafers in a vacuum environment
Inventor: Yokogawa, et al. | Patent Number: 6629538
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Dry chemical-mechanical polishing method
Inventor: Yamamoto, et al. | Patent Number: 6579154
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Dry etching device and dry etching method
Inventor: Izawa, et al. | Patent Number: 6573190
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Method and apparatus for dry etching
Inventor: Kumihashi, et al. | Patent Number: 6562722
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Plasma processing system and method for manufacturing a semiconductor device by using the same
Inventor: Yokogawa, et al. | Patent Number: 6551445
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Plasma processing method
Inventor: Mori, et al. | Patent Number: 6511608
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Dry etching device and method of producing semiconductor devices
Inventor: Izawa, et al. | Patent Number: 6506687
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Plasma treatment apparatus and plasma treatment method
Inventor: Izawa, et al. | Patent Number: 6475918
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Method and apparatus for dry etching
Inventor: Kumihashi, et al. | Patent Number: 6333273
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Plasma processing apparatus and plasma processing method
Inventor: Kaji, et al. | Patent Number: 6197151
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Method and apparatus for dry etching
Inventor: Kumihashi, et al. | Patent Number: 6136721
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Plasma processing method and apparatus
Inventor: Mori, et al. | Patent Number: 6136214
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Plasma processing apparatus and plasma processing method
Inventor: Kaji, et al. | Patent Number: 6129806
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Plasma processing apparatus
Inventor: Yokogawa, et al. | Patent Number: 6033481
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Method and apparatus for dry etching
Inventor: Kumihashi, et al. | Patent Number: 6008133
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Plasma processing apparatus
Inventor: Yokogawa, et al. | Patent Number: 5891252
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Method and apparatus for dry etching
Inventor: Kumihashi, et al. | Patent Number: 5795832
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Semiconductor memory device having improved isolation between electrodes, and process for fabricating the same
Inventor: Miki, et al. | Patent Number: 5736449
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Dry etching method
Inventor: Okudaira, et al. | Patent Number: 5705029
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Method for dry etching
Inventor: Kumihashi, et al. | Patent Number: 5650038
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Dry etching method
Inventor: Tachi, et al. | Patent Number: 5643473
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Semiconductor memory device having improved isolation between electrodes, and process for fabricating the same
Inventor: Miki, et al. | Patent Number: 5499207
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Method and apparatus for dry etching
Inventor: Kumihashi, et al. | Patent Number: 5474650
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Dry-etching method and apparatus
Inventor: Kumihashi, et al. | Patent Number: 5409562
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Dry etching apparatus and method
Inventor: Kumihashi, et al. | Patent Number: 5368685
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Method for dry etching
Inventor: Kumihashi, et al. | Patent Number: 5354418
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Dry etching method
Inventor: Okudaira, et al. | Patent Number: 5354416
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Semiconductor device and process of producing the same
Inventor: Miki, et al. | Patent Number: 5343353
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Method and apparatus for dry etching
Inventor: Kumihashi, et al. | Patent Number: 5318667
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Plasma treatment method and apparatus
Inventor: Kumihashi, et al. | Patent Number: 5242539
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Dry etching method
Inventor: Tachi, et al. | Patent Number: 5147500
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Dry etching method
Inventor: Tachi, et al. | Patent Number: 4992136
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Method of dry etching
Inventor: Tachi, et al. | Patent Number: 4986877
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Dry etching by alternately etching and depositing
Inventor: Okudaira, et al. | Patent Number: 4985114
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Dry etching apparatus
Inventor: Kanetomo, et al. | Patent Number: 4956043
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Etching method
Inventor: Tachi, et al. | Patent Number: 4943344
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Plasma treating method and apparatus therefor
Inventor: Kudo, et al. | Patent Number: 4911812
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Process for surface treatment
Inventor: Tachi, et al. | Patent Number: 4857137
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Gas for selectively etching silicon nitride and process for selectively etching silicon nitride with the gas
Inventor: Kawamoto, et al. | Patent Number: 4529476
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Dry etching method
Inventor: Tachi | Patent Number: 4406733