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Patent Inventor: Petrus Marinus Christianus Maria Van Den Biggelaar
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Lithographic apparatus and device manufacturing method
Inventor: Baggen, et al. | Patent Number: 8014881
Lithographic apparatus having a drive system with coordinate transformation, and device manufacturing method
Inventor: Van Den Biggelaar | Patent Number: 7679719
Lithographic apparatus and device manufacturing method
Inventor: Van Den Biggelaar | Patent Number: 7446854
Lithographic apparatus and device manufacturing method
Inventor: Cox, et al. | Patent Number: 7295283
Lithographic motion control system and method
Inventor: Van Donkelaar, et al. | Patent Number: 7289858
Lithographic apparatus and device manufacturing method
Inventor: De Jongh, et al. | Patent Number: 7224428
Lithographic apparatus and device manufacturing method with feed-forward focus control
Inventor: Butler, et al. | Patent Number: 7113256
Lithographic apparatus and device manufacturing method
Inventor: Van Den Biggelaar, et al. | Patent Number: 7016019
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