Patent Inventor: Lambert Danner
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Apparatus and method for inspecting micro-structured devices on a semiconductor substrate
Inventor: Graf, et al. | Patent Number: 8154718
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Apparatus for illuminating and inspecting a surface
Inventor: Danner, et al. | Patent Number: 7561263
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Measuring instrument and method for operating a measuring instrument for optical inspection of an object
Inventor: Rinn, et al. | Patent Number: 7420670
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Device and method for inspecting an object
Inventor: Cemic, et al. | Patent Number: 7271889
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Illuminating device
Inventor: Veith, et al. | Patent Number: 7268940
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Illumination device, and coordinate measuring instrument having an illumination device
Inventor: Cemic, et al. | Patent Number: 7209243
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Illumination device; and coordinate measuring instrument having an illumination device
Inventor: Cemic, et al. | Patent Number: 6975409
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Critical dimension measuring instrument
Inventor: Cemic, et al. | Patent Number: 6943901
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Autofocus module and method for a microscope-based system
Inventor: Cemic, et al. | Patent Number: 6879440
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Illumination device for a DUV microscope and DUV microscope
Inventor: Danner, et al. | Patent Number: 6624930
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Optical measurement arrangement, in particular for layer thickness measurement
Inventor: Engel, et al. | Patent Number: 6618154
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Optical measurement arrangement having an ellipsometer
Inventor: Mikkelsen, et al. | Patent Number: 6600560