Patent Inventor: John A. Woollam

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Non-destructive approach to ellipsometric monitoring of a film coating on the inner surface of a tube shaped sample
Inventor: Pribil, et al. | Patent Number: 7768660

Automated ellipsometer and the like systems
Inventor: Johs, et al. | Patent Number: 7746472

Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems
Inventor: Johs, et al. | Patent Number: 7746471

Spectroscopic ellipsometer and polarimeter systems
Inventor: Woollam, et al. | Patent Number: 7633625

Sample investigating system
Inventor: Liphardt, et al. | Patent Number: 7623237

Spectroscopic ellipsometer and polarimeter systems
Inventor: Woollam, et al. | Patent Number: 7616319

System for and method of investigating the exact same point on a sample substrate with multiple wavelengths
Inventor: Liphardt, et al. | Patent Number: 7522279

System for and method of investigating the exact same point on a sample substrate with multiple wavelengths
Inventor: Pfeiffer, et al. | Patent Number: 7508510

Automated ellipsometer and the like systems
Inventor: Johs, et al. | Patent Number: 7505134

Sample masking in ellipsometer and the like systems including detection of substrate backside reflections
Inventor: Liphardt, et al. | Patent Number: 7477388

System and method of selectively monitoring sample front and backside reflections in ellipsometer and the like systems
Inventor: Welch, et al. | Patent Number: 7385698

Sample analysis methodology utilizing electromagnetic radiation
Inventor: Woollam, et al. | Patent Number: 7385697

System for reducing stress induced effects during determination of fluid optical constants
Inventor: Tiwald, et al. | Patent Number: 7349092

Control of beam spot size in ellipsometer and the like systems
Inventor: Liphardt, et al. | Patent Number: 7345762

Spectroscopic ellipsometer and polarimeter systems
Inventor: Liphardt, et al. | Patent Number: 7336361

Spectrophotometer, ellipsometer, polarimeter and the like systems
Inventor: Woollam, et al. | Patent Number: 7327456

Aspects of producing, directing, conditioning, impinging and detecting spectroscopic electromagnetic radiation from small spots on samples
Inventor: Liphardt, et al. | Patent Number: 7317529

System for sequentially providing aberation corrected electromagnetic radiation to a spot on a sample at multiple angles of incidence
Inventor: Liphardt, et al. | Patent Number: 7304792

Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence
Inventor: Liphardt, et al. | Patent Number: 7304737

$Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters$

Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters
Inventor: Johs, et al. | Patent Number: 7295313

Use of ellipsometry and surface plasmon resonance in monitoring thin film deposition or removal from a substrate surface
Inventor: Woollam, et al. | Patent Number: 7283234

Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems
Inventor: Johs, et al. | Patent Number: 7277171

Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems
Inventor: Green, et al. | Patent Number: 7274450

Method of calibrating effects of multi-AOI-system for easy changing angles-of-incidence in ellipsometers and the like
Inventor: Johs, et al. | Patent Number: 7265838

Ellipsometer or polarimeter and the like system with multiple detector element detector in environmental control chamber including secure sample access
Inventor: Woollam, et al. | Patent Number: 7253900

Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter
Inventor: Liphardt, et al. | Patent Number: 7245376

Broadband ellipsometer or polarimeter system including at least one multiple element lens
Inventor: Liphardt, et al. | Patent Number: 7215424

Control of beam spot size in ellipsometer and the like systems
Inventor: Liphardt, et al. | Patent Number: 7215423

Combined use of oscillating means and ellipsometry to determine uncorrelated effective thickness and optical constants of material deposited from a fluid
Inventor: Woollam, et al. | Patent Number: 7209234

Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses
Inventor: Johs, et al. | Patent Number: 7193710

Spectroscopic ellipsometer and polarimeter systems
Inventor: Woollam, et al. | Patent Number: 7158231

System for and method of investigating the exact same point on a sample substrate with at least two wavelengths
Inventor: Liphardt, et al. | Patent Number: 7057717

Combined use of oscillating means and ellipsometry to determine uncorrelated effective thickness and optical constants of accumulated material
Inventor: Woollam, et al. | Patent Number: 7030982

Spectrophotometer, ellipsometer, polarimeter and the like systems
Inventor: Woollam, et al. | Patent Number: 6982792

$Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters$

Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters
Inventor: Johs, et al. | Patent Number: 6940595

System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation
Inventor: Woollam, et al. | Patent Number: 6937341

Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems
Inventor: Johs, et al. | Patent Number: 6859278

System and method for improving data acquisition capability in spectroscopic rotatable element, rotating element, modulation element, and other ellipsometer and polarimeter and the like systems
Inventor: Green, et al. | Patent Number: 5956145

Multiple order dispersive optics system and method of use
Inventor: Johs, et al. | Patent Number: 5805285

System and method for improving data acquisition capability in spectroscopic ellipsometers
Inventor: Green, et al. | Patent Number: 5757494

Electromagnetic beam directing means-sample analysis system stage, and method of use
Inventor: Thompson, et al. | Patent Number: 5706087

Multiple order dispersive optics system and method of use
Inventor: Johs, et al. | Patent Number: 5666201

Ellipsometer
Inventor: Ducharme, et al. | Patent Number: 5657126

Ellipsometer/polarimeter based process monitor and control system suitable for simultaneous retrofit on molecular beam epitaxy system RHEED/LEED interface system, and method of use
Inventor: Woollam, et al. | Patent Number: 5582646

System and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer system
Inventor: Green, et al. | Patent Number: 5521706

System and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer system
Inventor: Johs, et al. | Patent Number: 5504582

Small modulation ellipsometry
Inventor: Ducharme, et al. | Patent Number: 5416588

Ellipsometer
Inventor: Woollam, et al. | Patent Number: 5373359

Atomic hydrogen storage method and apparatus
Inventor: Woollam | Patent Number: 4229196

Atomic hydrogen storage
Inventor: Woollam | Patent Number: 4193827

Atomic hydrogen storage method and apparatus
Inventor: Woollam | Patent Number: 4077788

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