Patent Inventor: Johann Greschner
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Charged particle-optical systems, methods and components
Inventor: Casares, et al. | Patent Number: 8039813
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Contact probe arrangement
Inventor: Bayer, et al. | Patent Number: 6356089
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Method of producing a calibration standard for 2-D and 3-D profilometry in the sub-nanometer range
Inventor: Bartha, et al. | Patent Number: 6218264
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Micromechanical sensor for AFM/STM profilometry
Inventor: Bayer, et al. | Patent Number: 6091124
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Micro-mechanically fabricated read/write head with a strengthening shell on the tip shaft
Inventor: Bayer, et al. | Patent Number: 6088320
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Method for fabricating a very dense chip package
Inventor: Pogge, et al. | Patent Number: 6087199
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Ion generator for ionographic print heads
Inventor: Bartha, et al. | Patent Number: 6061074
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Calibration standard for profilometers and manufacturing procedure
Inventor: Bayer, et al. | Patent Number: 6028008
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Membrane mask for electron beam lithography
Inventor: Greschner, et al. | Patent Number: 6004700
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Very dense chip package
Inventor: Pogge, et al. | Patent Number: 5998868
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Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it
Inventor: Bartha, et al. | Patent Number: 5960255
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Contact probe arrangement for functional electrical testing
Inventor: Elsner, et al. | Patent Number: 5939893
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Manufacturing method for membrane lithography mask with mask fields
Inventor: Bayer, et al. | Patent Number: 5935739
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Very dense integrated circuit package and method for forming the same
Inventor: Pogge, et al. | Patent Number: 5866443
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Adhesive bond for densely ordered elements
Inventor: Druschke, et al. | Patent Number: 5863636
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Process for the creation of a thermal SiO.sub.2 layer with extremely uniform layer thickness
Inventor: Bayer, et al. | Patent Number: 5817581
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Method of fabricating a field emission device
Inventor: Greschner, et al. | Patent Number: 5817201
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Very dense integrated circuit package
Inventor: Pogge, et al. | Patent Number: 5814885
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Method of fabricating a field emission device
Inventor: Bartha, et al. | Patent Number: 5791959
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Resonant sensor for determining multiple physical values
Inventor: Bayer, et al. | Patent Number: 5789666
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Field emission device with series resistor tip and method of manufacturing
Inventor: Greschner, et al. | Patent Number: 5783905
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Very dense integrated circuit package
Inventor: Pogge, et al. | Patent Number: 5770884
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Field emission device and method for fabricating it
Inventor: Bartha, et al. | Patent Number: 5717278
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Bulk removal, transport and storage fixture for small batch-fabricated devices
Inventor: Bartha, et al. | Patent Number: 5707537
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Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it
Inventor: Bartha, et al. | Patent Number: 5665905
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Method for producing deep vertical structures in silicon substrates
Inventor: Bartha, et al. | Patent Number: 5658472
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Force microscope and method for measuring atomic forces in multiple directions
Inventor: Bayer, et al. | Patent Number: 5646339
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Method for producing a multi-step structure in a substrate
Inventor: Bartha, et al. | Patent Number: 5641610
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Method for producing a multi-step structure in a substrate
Inventor: Bartha, et al. | Patent Number: 5635337
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Calibration standards for profilometers and methods of producing them
Inventor: Bayer, et al. | Patent Number: 5578745
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Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it
Inventor: Bartha, et al. | Patent Number: 5534359
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Micromechanical sensor and sensor fabrication process
Inventor: Bayer, et al. | Patent Number: 5455419
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System for stamping an optical storage disk
Inventor: Greschner, et al. | Patent Number: 5427599
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Ultrafine silicon tips for AFM/STM profilometry
Inventor: Bayer, et al. | Patent Number: 5382795
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Apparatus for plasma or reactive ion etching and method of etching substrates having a low thermal conductivity
Inventor: Bartha, et al. | Patent Number: 5304278
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Method of etching substrates having a low thermal conductivity
Inventor: Bartha, et al. | Patent Number: 5296091
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Pneumatically and electrostatically driven scanning tunneling microscope
Inventor: Greschner, et al. | Patent Number: 5283437
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Modular multilayer interwiring structure
Inventor: Bayer, et al. | Patent Number: 5283107
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Micromechanical sensor fabrication process
Inventor: Bayer, et al. | Patent Number: 5282924
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Method of producing ultrafine silicon tips for the AFM/STM profilometry
Inventor: Bayer, et al. | Patent Number: 5242541
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Method of manufacturing an optical Storage disk
Inventor: Greschner, et al. | Patent Number: 5213600
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Process for fabricating silicon carbide films with a predetermined stress
Inventor: Bartha, et al. | Patent Number: 5162133
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Method of producing micromechanical sensors for the AFM/STM profilometry
Inventor: Bartha, et al. | Patent Number: 5116462
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Method of producing micromechanical sensors for the AFM/STM profilometry and micromechanical AFM/STM sensor head
Inventor: Bayer, et al. | Patent Number: 5051379
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PECVD (plasma enhanced chemical vapor deposition) method for depositing of tungsten or layers containing tungsten by in situ formation of tungsten fluorides
Inventor: Bartha, et al. | Patent Number: 4969415
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PECVD (plasma enhanced chemical vapor deposition) method for depositing of tungsten or layers containing tungsten by in situ formation of tungsten fluorides
Inventor: Bartha, et al. | Patent Number: 4918033
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Process for fabricating arbitrarily shaped through holes in a component
Inventor: Wittlinger, et al. | Patent Number: 4871418
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Synthetic substrate with adhesive metal layer
Inventor: Greschner, et al. | Patent Number: 4857383
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Contact probe arrangement for electrically connecting a test system to the contact pads of a device to be tested
Inventor: Bayer, et al. | Patent Number: 4843315
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Micromechanical atomic force sensor head
Inventor: Duerig, et al. | Patent Number: 4806755
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Method of forming identically positioned alignment marks on opposite sides of a semiconductor wafer
Inventor: Elsner, et al. | Patent Number: 4732646
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Method of making adhesive metal layers on substrates of synthetic material and device produced thereby
Inventor: Greschner, et al. | Patent Number: 4642163
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Method of transferring a pattern into a radiation-sensitive layer
Inventor: Bohlen, et al. | Patent Number: 4591540
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Method of making trenches with substantially vertical sidewalls in silicon through reactive ion etching
Inventor: Behringer, et al. | Patent Number: 4589952
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Process for producing printed circuit boards with metallic conductor structures embedded in the insulating substrate
Inventor: Greschner, et al. | Patent Number: 4556628
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Contact device for releasably connecting electrical components
Inventor: Bohlen, et al. | Patent Number: 4522893
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Probe head arrangement for conductor line testing with at least one probe head comprising a plurality of resilient contacts
Inventor: Asch, et al. | Patent Number: 4520314
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Mask and system for mutually aligning objects in ray exposure systems
Inventor: Bohlen, et al. | Patent Number: 4513203
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Method of compensating the proximity effect in electron beam projection systems
Inventor: Bohlen, et al. | Patent Number: 4504558
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Method of making structures with dimensions in the sub-micrometer range
Inventor: Trumpp, et al. | Patent Number: 4502914
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Shadow projection mask for ion implantation and ion beam lithography
Inventor: Bohlen, et al. | Patent Number: 4448865
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Method of compensating the proximity effect in electron beam projection systems
Inventor: Bohlen, et al. | Patent Number: 4426584
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Method of making mask for structuring surface areas
Inventor: Bohlen, et al. | Patent Number: 4417946
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Structure with a silicon body having through openings
Inventor: Greschner, et al. | Patent Number: 4393127
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Alignment system for particle beam lithography
Inventor: Bohlen, et al. | Patent Number: 4370554
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Mask for structuring surface areas, and method of making it
Inventor: Bohlen, et al. | Patent Number: 4342817
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Method of shadow printing exposure
Inventor: Bohlen, et al. | Patent Number: 4334156
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Exposure process
Inventor: Bohlen, et al. | Patent Number: 4267259
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Method of exposure by means of corpuscular beam shadow printing
Inventor: Bohlen, et al. | Patent Number: 4169230