Patent Inventor: Erich Thallner

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Method and device for producing a nanopatterned disc
Inventor: Thallner | Patent Number: 8142701

Method for holding wafers and device for fixing two parallel arranged wafers relative to one another
Inventor: Thallner | Patent Number: 8118290

Handling device and handling method for wafers
Inventor: Thallner | Patent Number: 8087708

Method for bonding wafers
Inventor: Thallner | Patent Number: 7998833

Combination of a substrate and a wafer
Inventor: Thallner | Patent Number: 7910454

Handling device and handling method for wafers
Inventor: Thallner | Patent Number: 7909374

Method and device for bonding wafers
Inventor: Thallner | Patent Number: 7811898

Apparatus for imprinting and/or embossing substrates
Inventor: Thallner | Patent Number: 7722350

Device and method for bonding wafers
Inventor: Thallner | Patent Number: 7598152

Process and device for bonding wafers
Inventor: Thallner | Patent Number: 7547611

Adjusting device and arrangement for adjusting a wafer
Inventor: Thallner | Patent Number: 7432701

Alignment device
Inventor: Thallner | Patent Number: 7246445

Device for detaching a carrier from a semi-conductor disk
Inventor: Thallner | Patent Number: 6792991

Adjustment table
Inventor: Thallner | Patent Number: 6727983

Apparatus for coating substrates with materials, particularly for lacquering si-wafers
Inventor: Thallner | Patent Number: 6485568

Apparatus for treating silicon wafers
Inventor: Thallner | Patent Number: 6416579

Method and apparatus for the aligned joining of disk-shaped semiconductor substrates
Inventor: Thallner | Patent Number: 6214692

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