Patent Inventor: Clifford D. Fung
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Method for overpressure protected pressure sensor
Inventor: Grandmont, et al. | Patent Number: 6030851
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Single-sided differential pressure sensor
Inventor: Fung | Patent Number: 5969591
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Excitation of polysilicon based piezoresistive pressure sensors
Inventor: McHale, et al. | Patent Number: 5681997
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Method for manufacturing a semiconductor pressure sensor with single-crystal silicon diaphragm and single-crystal gage elements
Inventor: Fung | Patent Number: 5672551
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Semiconductor pressure sensor and related methodology with polysilicon diaphragm and single-crystal gage elements
Inventor: Fung | Patent Number: 5589810
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Removing sacrificial material through temporary channels as a method of making an overpressure-protected differential pressure sensor
Inventor: Fung, et al. | Patent Number: 5438875
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Overpressure-protected, differential pressure sensor
Inventor: Fung, et al. | Patent Number: 5357808
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Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same
Inventor: Fung, et al. | Patent Number: 5344523
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Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same
Inventor: Fung, et al. | Patent Number: 5323656
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Overpressure-protected, differential pressure sensor and method of making the same
Inventor: Fung, et al. | Patent Number: 5220838
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Sports scoring device including a flexible prezoelectric layer resilient layer
Inventor: French, et al. | Patent Number: 4761005