Patent International Class: H01S 3/104
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Gas laser apparatus for lithography
Inventor: Tanaka, et al. | Patent Number: 6922428
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Six to ten KHz, or greater gas discharge laser system
Inventor: Watson, et al. | Patent Number: 6914919
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Gas discharge MOPA laser spectral analysis module
Inventor: Rao, et al. | Patent Number: 6912052
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High power deep ultraviolet laser with long life optics
Inventor: Yager, et al. | Patent Number: 6904073
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Laser oscillation apparatus, exposure apparatus, semiconductor device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method
Inventor: Nagai, et al. | Patent Number: 6870865
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Gas laser and optical system
Inventor: Pratt | Patent Number: 6865211
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Laser spectral engineering for lithographic process
Inventor: Spangler, et al. | Patent Number: 6853653
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Gas discharge ultraviolet laser with enclosed beam path with added oxidizer
Inventor: Pan, et al. | Patent Number: 6839372
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Line selected F2 two chamber laser system
Inventor: Knowles, et al. | Patent Number: 6801560
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Gas discharge laser with improved beam path
Inventor: Partlo, et al. | Patent Number: 6795474
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Fan for gas discharge laser
Inventor: Partlo, et al. | Patent Number: 6765946
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Four KHz gas discharge laser
Inventor: Newman, et al. | Patent Number: 6757316
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Gas discharge ultraviolet wavemeter with enhanced illumination
Inventor: Sandstrom, et al. | Patent Number: 6750972
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Laser with versatile output energy
Inventor: Schroeder, et al. | Patent Number: 6735232
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Bandwidth control technique for a laser
Inventor: Fomenkov, et al. | Patent Number: 6721340
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Energy stabilized gas discharge laser
Inventor: Stamm, et al. | Patent Number: 6714577
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Lithography laser system with in-place alignment tool
Inventor: Ershov, et al. | Patent Number: 6704340
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Lithography laser with beam delivery and beam pointing control
Inventor: Lublin, et al. | Patent Number: 6704339
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Laser lithography light source with beam delivery
Inventor: Klene, et al. | Patent Number: 6693939
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Control system for a two chamber gas discharge laser
Inventor: Fallon, et al. | Patent Number: 6690704
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Laser spectral engineering for lithographic process
Inventor: Kroyan, et al. | Patent Number: 6671294
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Laser wavelength control unit with piezoelectric driver
Inventor: Spangler, et al. | Patent Number: 6650666
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Very narrow band, two chamber, high rep rate gas discharge laser system
Inventor: Knowles, et al. | Patent Number: 6625191
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High repetition rate gas discharge laser with precise pulse timing control
Inventor: Das, et al. | Patent Number: 6618421
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Very narrow band, two chamber, high rep rate gas discharge laser system
Inventor: Myers, et al. | Patent Number: 6567450
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Injection seeded F2 laser with centerline wavelength control
Inventor: Sandstrom, et al. | Patent Number: 6556600
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Laser with device for modifying the distribution of laser light intensity across the laser beam cross-section
Inventor: Von Borstel, et al. | Patent Number: 6539045
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Laser wavelength control unit with piezoelectric driver
Inventor: Spangler, et al. | Patent Number: 6532247
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Fast wavelength correction technique for a laser
Inventor: Everage, et al. | Patent Number: 6529531
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Pulsed laser control system
Inventor: Niwano, et al. | Patent Number: 6522674
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Purge monitoring system for gas discharge laser
Inventor: Newman, et al. | Patent Number: 6504860
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Extreme repetition rate gas discharge laser with improved blower motor
Inventor: Oliver, et al. | Patent Number: 6477193
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Beam seal for line narrowed production laser
Inventor: Pan, et al. | Patent Number: 6466601
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Extreme repetition rate gas discharge laser
Inventor: Oliver, et al. | Patent Number: 6442181
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Laser power control with stretched initial pulses
Inventor: Gray | Patent Number: 6151345
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Gas supplementation method of excimer laser apparatus
Inventor: Ishihara, et al. | Patent Number: 6130904
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Gas discharge excitation laser device
Inventor: Iehisa, et al. | Patent Number: 6097747
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Transverse Zeeman laser
Inventor: Yan, et al. | Patent Number: 5995526
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Laser machining apparatus with feed forward and feedback control
Inventor: Takahashi, et al. | Patent Number: 5961857
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Laser machining apparatus and method of controlling same
Inventor: Takahashi, et al. | Patent Number: 5841096
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Method and device for generating a laser beam
Inventor: van Goor, et al. | Patent Number: 5818864
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Gas discharge laser control systems using multiple CPU's with shared memory on a common bus
Inventor: Mixon, et al. | Patent Number: 5764505
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Output control method for laser system
Inventor: Miyamoto, et al. | Patent Number: 5369655
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System for inhibiting quenching of laser beams in response to radiation events
Inventor: Karpinski, Jr. | Patent Number: 5283627
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Method and apparatus for supplying pulsed power to an ophthalmic laser system
Inventor: Dumond, et al. | Patent Number: 5280536
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Multiple discharge gas laser apparatus
Inventor: McLellan | Patent Number: 5268921
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Mixed gas ion laser
Inventor: Ostler | Patent Number: 5214658
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Frequency sweeping phase-locked-loop synthesizer power supply for CO.sub.2 waveguide laser
Inventor: Nourrcier | Patent Number: 5150372
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Method and apparatus for analyzing fluorine containing gases
Inventor: Hakuta, et al. | Patent Number: 5149659
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Method and system for controlling narrow-band oscillation excimer laser
Inventor: Wakabayashi, et al. | Patent Number: 5142543
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Long pulse, fast flow laser system and method
Inventor: Rudko | Patent Number: 5109388
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Method of preventing mis-emission of a laser beam in a laser robot
Inventor: Torii, et al. | Patent Number: 5093552
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Multiple discharge gas laser apparatus
Inventor: McLellan | Patent Number: 5088104
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Laser oscillator control method for changing a currently executing command program
Inventor: Yamazaki, et al. | Patent Number: 5065329
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Method for analyzing fluorine containing gases
Inventor: Hakuta, et al. | Patent Number: 5017499
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Laser oscillator control circuit
Inventor: Yamazaki | Patent Number: 4890291
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Laser frequency control
Inventor: Wissman, et al. | Patent Number: 4856010
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Laser pulse modulator
Inventor: Jarrell | Patent Number: 4815086
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Method and apparatus for laser processing of materials
Inventor: Sharp, et al. | Patent Number: 4752669
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Pulsed laser system
Inventor: McDonald | Patent Number: 4601037
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Pulsed laser system
Inventor: O'Harra, II | Patent Number: 4590598
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Multiline emission integral mirror laser
Inventor: Wang, et al. | Patent Number: 4575850
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Passively Q-switched laser having a variable pulse rate
Inventor: Hart, et al. | Patent Number: 4539685
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Multiple pulse tea laser
Inventor: Barnie, et al. | Patent Number: 4507788
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Silent discharge-type laser device
Inventor: Yagi, et al. | Patent Number: 4507537
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Gas laser apparatus
Inventor: Tanaka, et al. | Patent Number: 4488309
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Laser system with standby mode
Inventor: McMahan | Patent Number: 4430739
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Process for increasing the pulse repetition frequency in a laser
Inventor: Cirri | Patent Number: 4230993
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Frequency modulated electrical discharge laser
Inventor: Nelson, et al. | Patent Number: 4180784
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Gas discharge laser
Inventor: Keijser, et al. | Patent Number: 4152673
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Method and apparatus for controlling the intensity of a laser output beam
Inventor: Marlett, et al. | Patent Number: 4122409
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Method and apparatus for producing laser pulses with high reproducibility
Inventor: Andersson, et al. | Patent Number: 4112392
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Magnetic polarization of tubular laser
Inventor: Crisp, et al. | Patent Number: 4035741