Patent Examiner: Duda; Kathleen

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Method for forming film pattern
Inventor: Mori, et al. | Patent Number: 8153356

Immersion supporting plate cleaning method and a pattern forming method
Inventor: Ito | Patent Number: 8153355

Method and material for forming high etch resistant double exposure patterns
Inventor: Chang, et al. | Patent Number: 8153350

Process sequence for formation of patterned hard mask film (RFP) without need for photoresist or dry etch
Inventor: Nemani, et al. | Patent Number: 8153348

Immersion multiple-exposure method and immersion exposure system for separately performing multiple exposure of micropatterns and non-micropatterns
Inventor: Kondoh | Patent Number: 8148054

Double patterning for lithography to increase feature spatial density
Inventor: Vanleenhove, et al. | Patent Number: 8148052

Method and system for manufacturing openings on semiconductor devices
Inventor: Wu, et al. | Patent Number: 8148051

Method of forming fine patterns of semiconductor device
Inventor: Sim, et al. | Patent Number: 8142986

Method for manufacturing semiconductor device
Inventor: Kobayashi | Patent Number: 8142985

Method of manufacturing mechanical and micromechanical parts
Inventor: Gonin, et al. | Patent Number: 8137902

Method for manufacturing semiconductor device
Inventor: Gonda | Patent Number: 8137898

Methods of forming patterns
Inventor: Sills, et al. | Patent Number: 8133664

Pattern forming method and apparatus
Inventor: Yamamoto, et al. | Patent Number: 8133663

Superimpose photomask and method of patterning
Inventor: Chang, et al. | Patent Number: 8133661

Method for increasing the removal rate of photoresist layer
Inventor: Huang, et al. | Patent Number: 8129101

Immersion lithography
Inventor: De Vries, et al. | Patent Number: 8129097

Method for manufacturing conductive member pattern
Inventor: Nukanobu, et al. | Patent Number: 8129096

Method for manufacturing a semiconductor device
Inventor: Lee | Patent Number: 8129094

Prevention of photoresist scumming
Inventor: Yin, et al. | Patent Number: 8129093

Graded ARC for high NA and immersion lithography
Inventor: Yeh, et al. | Patent Number: 8125034

Methods of patterning positive photoresist
Inventor: Shirley, et al. | Patent Number: 8124326

Methods and apparatus for the manufacture of microstructures
Inventor: Speakman | Patent Number: 8124325

Method for patterning a photosensitive layer
Inventor: Lu, et al. | Patent Number: 8124323

Method for manufacturing semiconductor device, and method for processing etching-target film
Inventor: Soda | Patent Number: 8124322

Etching method for use in deep-ultraviolet lithography
Inventor: Roth, et al. | Patent Number: 8124321

Method of making a semiconductor device using negative photoresist
Inventor: Conley | Patent Number: 8119334

Lithographic method
Inventor: Van Der Heijden, et al. | Patent Number: 8119333

Method for fabricating electrical circuitry on ultra-thin plastic films
Inventor: Morris | Patent Number: 8114576

High resolution lithography system and method
Inventor: Lin, et al. | Patent Number: 8110345

Method for forming an opening
Inventor: Liu, et al. | Patent Number: 8110342

Patterning process and pattern surface coating composition
Inventor: Hatakeyama, et al. | Patent Number: 8105760

Method of forming micro pattern of semiconductor device
Inventor: Ahn | Patent Number: 8101338

Using electric-field directed post-exposure bake for double-patterning (D-P)
Inventor: Scheer, et al. | Patent Number: 8097402

Method for forming an electronic device
Inventor: Jackson, et al. | Patent Number: 8097400

Exposure methods
Inventor: Lee | Patent Number: 8092986

Mask and method for patterning a semiconductor wafer
Inventor: Haffner | Patent Number: 8092958

Exposure system and pattern formation method
Inventor: Endo, et al. | Patent Number: 8088565

Method for forming resist pattern
Inventor: Sho, et al. | Patent Number: 8084192

Method of making sub-resolution pillar structures using undercutting technique
Inventor: Wang, et al. | Patent Number: 8076056

Methods for planarizing unevenness on surface of wafer photoresist layer and wafers produced by the methods
Inventor: Bernard, et al. | Patent Number: 8071275

Pattern forming method
Inventor: Endou, et al. | Patent Number: 8067148

Method for forming a fine pattern in a semicondutor device
Inventor: Jung | Patent Number: 8067146

Method of manufacturing master plate, method of manufacturing microneedle patch and apparatus exposure apparatus
Inventor: Tomono | Patent Number: 8062835

Chalcogenide layer etching method
Inventor: Chen, et al. | Patent Number: 8062833

Patterning method of semiconductor device
Inventor: Yang | Patent Number: 8057987

Sheeting with composite image that floats
Inventor: Dunn, et al. | Patent Number: 8057980

Developing method and developing unit
Inventor: Ono, et al. | Patent Number: 8053180

Method for manufacturing patterned thin-film layer
Inventor: Wang | Patent Number: 8048617

Double patterning strategy for contact hole and trench in photolithography
Inventor: Hsu, et al. | Patent Number: 8048616

Soft mold, method of manufacturing the same, and patterning method using the same
Inventor: Chae | Patent Number: 8043799

Manufacturing method of semiconductor device
Inventor: Akimoto | Patent Number: 8043796

Manufacturing method of silicon carbide semiconductor apparatus
Inventor: Watanabe | Patent Number: 8039204

Positive-working photoimageable bottom antireflective coating
Inventor: Sui, et al. | Patent Number: 8039202

Dye and recording media utilizing the same
Inventor: Wang, et al. | Patent Number: 8039076

Method of recording information in optical recording medium, information recording, apparatus and optical recording medium
Inventor: Miura, et al. | Patent Number: 8034530

Method of manufacturing wiring circuit board
Inventor: Mizutani, et al. | Patent Number: 8026045

Method of forming photoresist pattern and method of manufacturing perpendicular magnetic recording head
Inventor: Kamijima | Patent Number: 8021829

Photoresist compositions and methods related to near field masks
Inventor: Huang, et al. | Patent Number: 8021828

Electroforming mold and method for manufacturing the same, and method for manufacturing electroformed component
Inventor: Niwa, et al. | Patent Number: 8021534

Lithographic method
Inventor: Van Haren, et al. | Patent Number: 8017310

Patterning non-planar surfaces
Inventor: Hogue, et al. | Patent Number: 8017308

Method for manufacturing minute structure, method for manufacturing liquid discharge head, and liquid discharge head
Inventor: Kubota, et al. | Patent Number: 8017307

Pattern forming method, semiconductor device manufacturing method and exposure mask set
Inventor: Ishibashi, et al. | Patent Number: 8017305

Efficient pitch multiplication process
Inventor: Fischer, et al. | Patent Number: 8012674

Thick film layers and methods relating thereto
Inventor: Patil, et al. | Patent Number: 8007990

Integrated circuit system employing multiple exposure dummy patterning technology
Inventor: Tan, et al. | Patent Number: 8003311

Masking techniques and templates for dense semiconductor fabrication
Inventor: Sandhu, et al. | Patent Number: 8003310

Lithographic apparatus and device manufacturing method for writing a digital image
Inventor: Van Groos | Patent Number: 8003308

Methods of forming electronic devices by ion implanting
Inventor: Apelgren, et al. | Patent Number: 8003306

Method for patterning a semiconductor wafer
Inventor: Scheer, et al. | Patent Number: 8003305

Manufacturing method for semiconductor device
Inventor: Imai, et al. | Patent Number: 8003301

Structure for pattern formation, method for pattern formation, and application thereof
Inventor: Kobayashi, et al. | Patent Number: 7998662

Exposure method
Inventor: Shih, et al. | Patent Number: 7998660

Structure with self aligned resist layer on an insulating surface and method of making same
Inventor: Edelstein, et al. | Patent Number: 7993817

Method for fabricating self-aligned nanostructure using self-assembly block copolymers, and structures fabricated therefrom
Inventor: Black, et al. | Patent Number: 7993816

Polymer or resist pattern, and metal film pattern, metal pattern and plastic mold using the same, and fabrication methods thereof
Inventor: Jeon, et al. | Patent Number: 7989154

Manufacturing method of optical waveguide
Inventor: Khan | Patent Number: 7989150

Component fabrication using thermal resist materials
Inventor: Burberry, et al. | Patent Number: 7989146

Method for forming fine pattern of semiconductor device
Inventor: Lee, et al. | Patent Number: 7989145

Method of manufacturing a semiconductor device having an organic thin film transistor
Inventor: Arai, et al. | Patent Number: 7989143

Pattern forming method
Inventor: Tsubaki | Patent Number: 7985534

Etch-enhanced technique for lift-off patterning
Inventor: Schmid, et al. | Patent Number: 7985530

Reduced pitch multiple exposure process
Inventor: Paxton, et al. | Patent Number: 7981595

Double patterning method
Inventor: Chan | Patent Number: 7981592

Semiconductor buried grating fabrication method
Inventor: Li, et al. | Patent Number: 7981591

Resist pattern forming method
Inventor: Namatsu, et al. | Patent Number: 7977036

Method for forming fine pattern of semiconductor device
Inventor: Jung | Patent Number: 7977035

Method of forming pattern of semiconductor device
Inventor: Kim | Patent Number: 7977033

Method to create region specific exposure in a layer
Inventor: Dimitrakopoulos, et al. | Patent Number: 7977032

Method for forming fine pattern of semiconductor device
Inventor: Bok | Patent Number: 7972766

Pattern forming method and a semiconductor device manufacturing method
Inventor: Kawano, et al. | Patent Number: 7972765

Imaging post structures using X and Y dipole optics and a single mask
Inventor: Chen, et al. | Patent Number: 7968277

Methods and devices for forming nanostructure monolayers and devices including such monolayers
Inventor: Chen, et al. | Patent Number: 7968273

System and method for photolithography in semiconductor manufacturing
Inventor: Su, et al. | Patent Number: 7968258

Self-aligned, sub-wavelength optical lithography
Inventor: Fattal, et al. | Patent Number: 7965381

Metal or metal compound pattern and forming method of pattern, and electron emitting device, electron source, and image-forming apparatus using the pattern
Inventor: Furuse, et al. | Patent Number: 7964336

Methods of minimizing etch undercut and providing clean metal liftoff
Inventor: Chau, et al. | Patent Number: 7960097

Sublithographic patterning method incorporating a self-aligned single mask process
Inventor: Abraham, et al. | Patent Number: 7960096

Plasma display panel manufacturing method
Inventor: Adachi | Patent Number: 7955787

Exposure method
Inventor: Kawashima | Patent Number: 7947433

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