Patent Examiner: Chacko-Davis; Deborah
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Gray level imaging masks, optical imaging apparatus for gray level imaging masks and methods for encoding mask and use of the masks
Inventor: Lizotte | Patent Number: 7364838
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Optimized mirror design for optical direct write
Inventor: Eib, et al. | Patent Number: 7270942
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Flash memory with reduced source resistance and fabrication method thereof
Inventor: Jung, et al. | Patent Number: 7056647
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Method to restore hydrophobicity in dielectric films and materials
Inventor: Hacker, et al. | Patent Number: 7029826
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Method and system for lithography using phase-change material
Inventor: Chen, et al. | Patent Number: 6828081
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Methods of fabricating microelectronic features by forming intermixed layers of water-soluble resins and resist materials
Inventor: Choi, et al. | Patent Number: 6818384
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Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdevice
Inventor: Hatada, et al. | Patent Number: 6811953
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Fabricating process of non-gap 3-D microstructure array mold core
Inventor: Lin, et al. | Patent Number: 6746823
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System for and method of constructing an alternating phase-shifting mask
Inventor: Ghandehari, et al. | Patent Number: 6664030
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Thermally conductive dielectric mounts for printed circuitry and semi-conductor devices and method of preparation
Inventor: Gundale, et al. | Patent Number: 6649325
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Transverse magnetic field for ionized sputter deposition
Inventor: Fu | Patent Number: 6579421
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System and method for making smooth diagonal components with a digital photolithography system
Inventor: Mei, et al. | Patent Number: 6537738
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Integrated copper fill process
Inventor: Gopalraja, et al. | Patent Number: 6485618
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Method for constructing multilayer circuit boards having air bridges
Inventor: Li, et al. | Patent Number: 6475703
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Fuel cells stack
Inventor: Ohara, et al. | Patent Number: 6444346
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Method and apparatus for forming a uniform layer on a workpiece during sputtering
Inventor: Grunes, et al. | Patent Number: 6409890
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High aspect ratio patterning of glass film
Inventor: Bellman, et al. | Patent Number: 6403286
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Moving exposure system and method for maskless lithography system
Inventor: Mei, et al. | Patent Number: 6379867
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Magnetron for low pressure, full face erosion
Inventor: Tepman, et al. | Patent Number: 6228235
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Solid electrolyte fuel cell
Inventor: Shiratori | Patent Number: 6218036
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Vacuum processing apparatus
Inventor: Katoh | Patent Number: 6207006
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Method and apparatus for ionized physical vapor deposition
Inventor: Drewery, et al. | Patent Number: 6197165