Patent Assignee: SII NanoTechnology Inc.

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Charged particle beam apparatus and method adjusting axis of aperture
Inventor: Ogawa, et al. | Patent Number: 8124932

Piezoelectric actuator provided with a displacement meter, piezoelectric element, and positioning device
Inventor: Iyoki | Patent Number: 8115367

Conductivity measuring apparatus and conductivity measuring method
Inventor: Yasutake, et al. | Patent Number: 8111079

X-ray analysis apparatus and X-ray analysis method
Inventor: Matoba, et al. | Patent Number: 8068583

Circular cylinder type piezoelectric actuator and piezoelectric element and scanning probe microscope using those
Inventor: Iyoki | Patent Number: 8058780

Approach method for probe and sample in scanning probe microscope
Inventor: Iyoki, et al. | Patent Number: 8024816

X-ray analyzer and X-ray analysis method
Inventor: Matoba | Patent Number: 8000439

Scanning probe microscope
Inventor: Shikakura, et al. | Patent Number: 7997124

Composite charged particle beam apparatus, method of processing a sample and method of preparing a sample for a transmission electron microscope using the same
Inventor: Takahashi, et al. | Patent Number: 7973280

X-ray analyzer and X-ray analysis method
Inventor: Sakai, et al. | Patent Number: 7970101

Method of fabricating grabbing face of sample grabbing portion
Inventor: Munekane | Patent Number: 7951303

Sensor for observations in liquid environments and observation apparatus for use in liquid environments
Inventor: Watanabe, et al. | Patent Number: 7945965

Apparatus structure and scanning probe microscope including apparatus structure
Inventor: Wakiyama, et al. | Patent Number: 7945964

Method for fabricating EUVL mask
Inventor: Hagiwara, et al. | Patent Number: 7927769

Method of measuring length of measurement object article in micro-structure
Inventor: Munekane, et al. | Patent Number: 7923267

X-ray analyzer
Inventor: Tanaka, et al. | Patent Number: 7910888

Method of observing and method of working diamond stylus for working of atomic force microscope
Inventor: Takaoka | Patent Number: 7804067

Charged-particle beam apparatus
Inventor: Ogawa, et al. | Patent Number: 7804066

Differential scanning calorimeter
Inventor: Teramoto | Patent Number: 7802916

Superconducting radiometry apparatus
Inventor: Tanaka, et al. | Patent Number: 7789557

Optical displacement-detecting mechanism and probe microscope using the same
Inventor: Iyoki, et al. | Patent Number: 7787133

Thermal analyzer
Inventor: Nagasawa | Patent Number: 7781703

Sample operation apparatus
Inventor: Yasutake, et al. | Patent Number: 7770474

Focused ion beam apparatus
Inventor: Nakagawa, et al. | Patent Number: 7755065

Working method by focused ion beam and focused ion beam working apparatus
Inventor: Kozakai | Patent Number: 7750318

Thermal analysis equipment
Inventor: Nakatani | Patent Number: 7748894

Thermal analysis apparatus
Inventor: Nagasawa, et al. | Patent Number: 7744273

Nanobio device of imitative anatomy structure
Inventor: Munekane, et al. | Patent Number: 7736893

Composite charged-particle beam system
Inventor: Takahashi, et al. | Patent Number: 7718981

Method of making lamina specimen
Inventor: Fujii | Patent Number: 7700367

X-ray tube and X-ray analyzing apparatus
Inventor: Matoba | Patent Number: 7680248

Thermal analysis system and method of drying the same
Inventor: Nakatani, et al. | Patent Number: 7641384

X-ray tube and X-ray analysis apparatus
Inventor: Matoba, et al. | Patent Number: 7634054

Fluorescent X-ray analysis apparatus
Inventor: Matoba | Patent Number: 7634053

X-ray tube and X-ray analysis apparatus
Inventor: Matoba, et al. | Patent Number: 7627088

X-ray analysis apparatus and X-ray analysis method
Inventor: Matoba | Patent Number: 7623627

Scanning probe microscope displacement detecting mechanism and scanning probe microscope using same
Inventor: Iyoki, et al. | Patent Number: 7614287

Vibration-type cantilever holder and scanning probe microscope
Inventor: Shigeno, et al. | Patent Number: 7605368

Superconducting X-ray detector and X-ray analysis apparatus using the same
Inventor: Tanaka, et al. | Patent Number: 7589323

Scanning type probe microscope
Inventor: Ookubo | Patent Number: 7588605

Heat flow flux type differential scanning calorimeter
Inventor: Kinoshita | Patent Number: 7588366

X-ray analysis apparatus and X-ray analysis method
Inventor: Fukai, et al. | Patent Number: 7587025

Wafer holder and sample producing apparatus using it
Inventor: Suzuki | Patent Number: 7573047

Method of correcting opaque defect of photomask using atomic force microscope fine processing device
Inventor: Doi, et al. | Patent Number: 7571639

Atom probe apparatus and method for working sample preliminary for the same
Inventor: Kaito | Patent Number: 7550723

Focused ion beam apparatus and sample section forming and thin-piece sample preparing methods
Inventor: Tashiro, et al. | Patent Number: 7531796

Processing apparatus using focused charged particle beam
Inventor: Yamamoto, et al. | Patent Number: 7518125

Method and apparatus of measuring thin film sample and method and apparatus of fabricating thin film sample
Inventor: Ikku, et al. | Patent Number: 7518109

Working method utilizing irradiation of charged particle beam onto sample through passage in gas blowing nozzle
Inventor: Kaito | Patent Number: 7511289

Method of approaching probe and apparatus for realizing the same
Inventor: Munekane | Patent Number: 7511269

X-ray analysis apparatus
Inventor: Sasayama | Patent Number: 7508907

Probe microscope system suitable for observing sample of long body
Inventor: Fujihira, et al. | Patent Number: 7507957

Thermal analysis apparatus
Inventor: Takeuchi, et al. | Patent Number: 7500779

Method for manufacturing a split probe
Inventor: Sadayama, et al. | Patent Number: 7494575

Charged particle beam irradiation method and charged particle beam apparatus
Inventor: Muramatsu, et al. | Patent Number: 7488961

Charged particle beam scan and irradiation method, charged particle beam apparatus, workpiece observation method and workpiece processing method
Inventor: Kozakai, et al. | Patent Number: 7485880

Method for fabricating nanometer-scale structure
Inventor: Yasutake, et al. | Patent Number: 7476418

Method of determining processing position in charged particle beam apparatus, and infrared microscope used in the method
Inventor: Kiyohara, et al. | Patent Number: 7459699

Differential scanning calorimeter
Inventor: Nishimura | Patent Number: 7455449

Charged particle beam apparatus
Inventor: Takahashi, et al. | Patent Number: 7442942

Working method using scanning probe
Inventor: Yasutake, et al. | Patent Number: 7442925

Surface information measuring apparatus and surface information measuring method
Inventor: Yamamoto | Patent Number: 7441445

Fluorescent X-ray analysis apparatus
Inventor: Fukai, et al. | Patent Number: 7428293

Piezoelectric actuator and scanning probe microscope using the same
Inventor: Watanabe | Patent Number: 7427744

Fluorescent x-ray analysis apparatus
Inventor: Fukai, et al. | Patent Number: 7424093

Sample height regulating method, sample observing method, sample processing method and charged particle beam apparatus
Inventor: Tashiro, et al. | Patent Number: 7423266

Scanning probe microscope
Inventor: Watanabe | Patent Number: 7404313

Processing probe
Inventor: Wakiyama, et al. | Patent Number: 7378654

Photomask defect correction method employing a combined device of a focused electron beam device and an atomic force microscope
Inventor: Takaoka, et al. | Patent Number: 7375352

Cantilever holder and scanning probe microscope
Inventor: Kitajima, et al. | Patent Number: 7375322

Scanning probe microscope and scanning method
Inventor: Kitajima, et al. | Patent Number: 7373806

Manipulator needle portion repairing method
Inventor: Munekane | Patent Number: 7356900

Sample support prepared by semiconductor silicon process technique
Inventor: Iwasaki, et al. | Patent Number: 7345289

Surface characteristic analysis apparatus
Inventor: Shirakawabe, et al. | Patent Number: 7337656

Method and apparatus for manufacturing ultra fine three-dimensional structure
Inventor: Kaito | Patent Number: 7326445

Ion beam device and ion beam processing method, and holder member
Inventor: Kodama, et al. | Patent Number: 7297944

Optical axis adjusting mechanism for X-ray lens, X-ray analytical instrument, and method of adjusting optical axis of X-ray lens
Inventor: Sasayama, et al. | Patent Number: 7289597

Fine-adjustment mechanism for scanning probe microscopy
Inventor: Iyoki, et al. | Patent Number: 7288762

Scratch repairing processing method and scanning probe microscope (SPM) used therefor
Inventor: Watanabe, et al. | Patent Number: 7285792

Scanning probe microscope
Inventor: Shikakura, et al. | Patent Number: 7284415

Method of manufacturing light-propagating probe for near-field microscope
Inventor: Chiba, et al. | Patent Number: 7282157

Method of processing vertical cross-section using atomic force microscope
Inventor: Takaoka, et al. | Patent Number: 7278299

Ion beam device and ion beam processing method
Inventor: Kodama, et al. | Patent Number: 7276691

Differential scanning calorimeter with a second heater
Inventor: Nishimura, et al. | Patent Number: 7275862

Method and system for fabricating three-dimensional microstructure
Inventor: Iwasaki | Patent Number: 7267731

Processing method using probe of scanning probe microscope
Inventor: Takaoka, et al. | Patent Number: 7259372

Method and apparatus of evaluating layer matching deviation based on CAD information
Inventor: Matsuoka | Patent Number: 7257785

Scanning probe microscope and measuring method by means of the same
Inventor: Watanabe, et al. | Patent Number: 7251987

Superconducting X-ray detection apparatus and superconducting X-ray analyzer using the apparatus
Inventor: Odawara, et al. | Patent Number: 7241997

Gas blowing nozzle of charged particle beam apparatus and charged particle beam apparatus as well as working method
Inventor: Kaito | Patent Number: 7235783

Cooling mechanism, cooling apparatus having cooling mechanism, and thermal analyzer equipped with cooling apparatus
Inventor: Nishimura | Patent Number: 7234861

Method of removing particle of photomask using atomic force microscope
Inventor: Takaoka, et al. | Patent Number: 7232995

Electrical property evaluation apparatus
Inventor: Sugano | Patent Number: 7187166

Image noise removing method in FIB/SEM complex apparatus
Inventor: Ogawa, et al. | Patent Number: 7173261

Photomask correction method using composite charged particle beam, and device used in the correction method
Inventor: Sugiyama, et al. | Patent Number: 7172839

Scanning probe microscopy cantilever holder and scanning probe microscope using the cantilever holder
Inventor: Iyoki, et al. | Patent Number: 7170054

Composite system of scanning electron microscope and focused ion beam
Inventor: Oi, et al. | Patent Number: 7154106

Scanning probe device and processing method by scanning probe
Inventor: Watanabe, et al. | Patent Number: 7107826

Thermal analyzer with gas mixing chamber
Inventor: Nakamura | Patent Number: 7104680

Method for extracting objective image
Inventor: Aita | Patent Number: 7103209

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