hmi_flyer by hedongchenchen


									1290 Messe MicroProductionLine GB Außenseite   7.3.03   700 x 210 mm   Schwarz Cyan Magenta Gelb

                  Contact persons:                                                                                                                                                                                             MicroTechnology 2003                  Important information                                               The HANNOVER FAIR                                     World Fair for
                                                                                                                                                                                                                               at a glance.                          for your visit.                                                     on the Internet.                                      Applied Microsystems
                                                                                                                                                               Metrology, Inline Inspection Systems:                                                                 Duration:      Monday, 7 April to Saturday, 12 April 2003                                                                 Technology and
                                                                                                                                                               Dr. Thomas Fries                                                                                      Opening hours: Monday to Friday, 9 a. m. to 6 p. m.                                                                       Nanotechnology
                                                                                                                                                               FRT GmbH                                                                                                             Saturday, 9 a. m. to 4 p. m.
                                                                                                                                                               Friedrich-Ebert-Straße,                                                                                                                                                                                                            2
                                                                                                                                                                                                                                                                                                                                                                                               7–1 April 2003
                                                                                                                                                               51429 Bergisch Gladbach, Germany                                                                      Tickets/admission
                                                                                                                                                                                                                                          One-day ticket           Advance sales                 € 18
                                                                                                                                                               • Instruments for surface measurements with optical                                                                            At the ticket office          € 23
                                                                                                                                                                  technologies                                                                                       Six-day ticket           Advance sales                 € 42
                                                                                                                                                               • Different sensors and add-ons for measurement systems                                                                        At the ticket office          € 50
                                                                                                                                                               • Image analysis software
                                                                                                                                                               • Surface analysis as subcontractor                                                                   School pupils (at least 15 years old)/students/persons doing
                                                                                                                                                               • Training and education in fields related to surface                                                 military service or compulsory community service                                                                          MICRO
                  3D MID laser systems:                                                            Base stages for Nanorobotics system                            measurements                                                                                       Day ticket                                           € 10
                  Nils Heininger                                                                   and 3D MID laser:                                                                                                                                                 Special ticket “GO FOR HIGH TECH”                    € 2            You can get full information on the HANNOVER          PRODUCTION
                  LPKF Laser & Electronics AG
                  Osteriede 7, 30827 Garbsen, Germany
                                                                                                   Dr. Gunther Blank
                                                                                                   LPKF Motion & Control GmbH
                                                                                                                                                               The Customer of the shown application,
                                                                                                                                                               Terahertz Detector Technology:
                                                                                                                                                                                                                                                                     – Six-day tickets: not available
                                                                                                                                                                                                                                                                     – Advance ticket sales: available for groups only
                                                                                                                                                                                                                                                                                                                                         FAIR 365 days a year on the Internet.
                                                                                                                                                                                                                                                                                                                                gives you a complete
                                                                      Mittelbergstr. 17, 98527 Suhl, Germany                      Dr. Karl Jacobs, Dr. Netty Honingh,                                                                     (no reductions)                                                   update on the range of exhibits, as well as opening
                  • StencilLaser systems                                                                                              Michael Brandt                                                                                        – Proof of status must be provided                                  hours, admission prices, accommodation, travel
                  • Laserdrilling and -cutting machines                                            • Precision Drives                                          I. Phys. Inst./KOSMA, Universität zu Köln, Zülpicher Str. 77,                                                                                                             arrangements, conferences, congresses and cultural
                  • PCB prototyping equipment                                                      • Control systems/Software                                  50937 Köln, Germany                                                                                   Combined travel and admission tickets                               attractions in and around Hannover, etc.              Hall 6 • Booth C31
                  • Microstructuring machines                                                      • Measuring Equipment                             ,,                                                    Admission tickets will entitle you to free travel in the
                  • 3D MID                                                                         • Special Systems                                                                                                                greater Hannover region.
                                                                                                                                                               Mixer elements for
                                                                                                                                                                                                                                                                                                                                                                                               Production in
                  Nanorobotics system:                                                             Micro Adhesive Bonding Technology:                          • KOSMA Telescope at Gornergrat/Switzerland                                                           Catalogue                                                                                                                 new dimensions
                                                                                                                                                                                                                               Hall 6: •   Microsystems technology
                  Dr. Volker Klocke                                                                Dr. Thomas Gesang                                           • Amundsen-Scott Telescope at South Pole
                                                                                                                                                                                                                                       •   Nanotechnology
                                                                                                                                                                                                                                                                     € 25 (excl. packaging & postage).                              Register online –
                  Klocke Nanotechnik                                                               FHG-IFAM, Institut für Fertigungstechnik, Wiener Str. 12,   • ESA Herschel Space Telescope                                                                        All prices include VAT. (If VAT rate changes, prices will
                  Pascalstr. 17, 52076 Aachen, Germany                                             28359 Bremen, Germany                                       • NASA/DLR SOFIA Airborne Telescope
                                                                                                                                                                                                                                       •   Sensors
                                                                                                                                                                                                                                                                     be adjusted accordingly.)
                                                                                                                                                                                                                                                                                                                                    and reap the benefits.
                                                                                                                                                                                                                                       •   Optics
                                                                                                                                                                                                                                                                                 If you register online in advance of the HANNOVER FAIR
                                                                                                                                                                                                                                       •   Processes
                  • Nanomotors, Nano-Manipulators                                                  • Design of adhesive joint                                  Coordination:                                                                                         Internet                                                       you will secure the following key benefits:
                                                                                                                                                                                                                                       •   Plant and services
                  • Nanorobotics, Microgrippers                                                    • Selection and modification of adhesives                   Klaus Zimmer                                                                                          For instant information about travel, accommodation and
                                                                                                                                                                                                                                       •   Laser technology
                  • Microassembly stages                                                           • Development of production process                         VDMA, Lyoner Str. 18,                                                                                 events in and around Hannover go to:                           • Free access to the exclusive Visitors’ Lounge,
                                                                                                                                                                                                                                       •   Photonics
                  • Wafer Prober                                                                   • Micro application of adhesives                            60528 Frankfurt/Main, Germany                                                                                                            where you can relax in a pleasant atmosphere
                  • Systems for Electron Microscopy                                                • Precision joining                                                                                                                Heading: “Travel + Accommodation”                              • New online visitor guide to the HANNOVER FAIR
                  • Micro Production System                                                        • Fast-, two step cure                                      • Market informations                                                                                                                                                  (can be downloaded to your PDA if required)
                                                                                                   • Micro quality control                                     • Talk shops: Micro meets Macro                                                                       Your direct partner for travel and accommodation               • Personal name badge (your personal “visiting card”)
                                                                                                                                                               • Value Chains: Convert micro into money                                                              To reserve accommodation, make travel arrangements
                                                                                                   Process Control Software:                                   • Technical networks in dialogue                                                                      or order admission tickets and catalogues you can contact
                                                                                                   Axel Schillo                                                                                                                                                      Travel2Fairs GmbH, Göttinger Chaussee 115,
                                                                                                   SH-System                                                                                                                                                         D-30459 Hannover, Tel. +49-511/33 64 45 10,
                                                                                                   Brabantstr. 48, 52070 Aachen, Germany                                                                                                                             Fax +49-511/33 64 45 12, E-mail:
                                                                                                                                                                                                                                       To make direct bookings go to             Further information is available at
                                                                                                                                                                                                                                                                     or and click on                 
                                                                                                                                                                                                                                                                     “Travel and Accommodation”.                                                                                                       2
                                                                                                                                                                                                                                                                                                                                                                                                    7–1 April 2003
1290 Messe MicroProductionLine GB Innenseite   7.3.03   700 x 210 mm   Schwarz Cyan Magenta Gelb

                  Miniature applications with great impact:                                                                             Micro Production Line live.                                                                                                                                       Applications:

                  On the HANNOVER FAIR 2003 a Micro Production Line will                           through the metallisation bath, the modified plastic surface of   • Integrated Wafer Prober can measure currents on                  All this special knowledge on micro adhesive bonding is           These ultra precise manufacturing technologies allow the             a) Cantilever with microtip, b) Glass fiber, c) Shear force sensor
                  demonstrate extremely precise manufacturing steps and                            the insulation zones lie cleanly adjacent to the metal surfaces     smallest chip structures.                                        provided by the Fraunhofer institute IFAM.                        production of devices that were impossible to make until now,           “Gap”= area that has to be filled with adhesive: Have fun!
                  produce demonstrators of micro-systems at the booth of                           of the circuit layout.                                            • “Nanofinger” determine the position of microparts                                                                                  for example:
                  VDMA (Hall 6, Booth C31). This Micro Production Line                                                                                                 without touching them.                                           Micro adhesive bonding modules are also part of the
                  includes:                                                                        After producing these 3D-structures, that form e. g. a housing    • Alignment units adjust the final orientation of microparts       Nanorobotics System from Klocke Nanotechnik.                                                                                           3D adhesive structures:
                  • Forming of mechanical and electrical microstructures,                          with conductor lines, microparts must be placed in high             with down to 1 nm resolution, e. g. to find the maximum                                                                            High Frequency Technology:
                  • Handling and assembly with Nanometer precision,                                precision onto them. For fiber glass assembly the demand in         intensity of a glass fiber.                                                                                                                                                                             An FRT sensor attached to the Nanorobotics Systems from
                  • Micro adhesive bonding technology,                                             reproducibility is 3 µm at the moment, a value that may be                                                                           Quality Control:                                                  The radio astronomy group KOSMA at the University of                 Klocke Nanotechnik is used to determine a 3-dimensional path
                  • Nanopositioning on large areas,                                                achievable with standard production technology.                                                                                                                                                        Cologne/Germany uses a Nanorobotic System from Klocke                                              on the surface of a micropart.
                  • Process Control Software by “drag and drop”,                                   Next generations will need 1 µm and a future-proof system         Process Control Software:                                          The quality control of microparts                                                                 Nanotechnik to assemble their                                      This path can then be covered
                  • Quality Control with nano-resolution.                                          should allow a reproducibility better than 1 µm. But thermal                                                                         cannot be done with classical                                                                     800 GHz mixers with a substrate                                    with an adhesive. Using a
                                                                                                   expansions in the classical design of meter sized robots and      The modular design of a production system should be supported      instruments: the analysis of                                                                      width and thickness below                                          conductive adhesive leads to
                  This line on the booth of the VDMA in the MicroTechnology                        actuators will already avoid a precise positioning.               by a software, that allows easy programming by “drag-and-drop”     structures and surface roughness                                                                  100 µm – less then a human                                         wires on micro-structures
                  Hall 6 demonstrates that the increase of                                                                                                           or teaching. Besides plenty of different sensors and actuators     should have Nanometer resolution.                                                                 hair – into a waveguide structure.                                 that are placed without heat
                  miniaturization needs new production                                                                                                               the vision system can be remote controlled with this software,     Such ultra precise quality control                                                                The SEM picture shows the precise                                  treatment directly during the
                  technologies for production and assembly.                                        Nanorobotics System:                                              developed by our partner SH-System.                                systems are offered by our partner                                                                centering and alignment inside       assembly process. The left picture shows how small structures
                                                                                                                                                                                                                                        FRT, supporting 3D-data of                                                                        the waveguide channel before         of conductive adhesives can be [IFAM].
                                                                                                   The reproducibility of nanorobotics by Klocke Nanotechnik is                                                                         roughness, contour/shape, and         Microprof (FRT)             the micro adhesive bonding. These detectors are used in
                  3D MID laser systems:                                                            better than 50 nm. A complete Nanorobotics system recognizes      Base stages for Nanorobotics system and 3D MID laser:              topography from surface structures.                               cryogenic receivers for astrophysical and atmospheric research
                                                                                                   microparts in bulk with Nanometer precision, handles them                                                                                                                                              in extreme environments, such as Gornergrat (3100 m) in
                  A product starts from basic material, forming of a housing,                      and assembles these parts to small systems.                       The 3D MID laser as well as the Nanorobotics system needs          The optical sensors of these instruments allow the non-           Switzerland or at the Amundsen-Scott South Pole Station.
                  followed by cables for power supply and signals. The                                                                                               a very precise base stage for positioning of quite large samples   contact and non-destructive acquisition of surface topography     Presently, these detectors are implemented into the ESA
                  3D-MID technology from LPKF Laser & Electronics offers                                                                                             without reducing the precision of the system. LPKF Motion &        with rapid data acquisition and a large working distance.         Herschel Space Telescope and the NASA-DLR SOFIA Airborne
                  these steps out of one hand. Injection moulded circuit                                                                                             Control is responsible for this part.                                                                                                Telescope. Researchers from the NASA Jet Propulsion Laboratory
                  carriers (MIDs) are produced from specially treated plastics                                                                                                                                                          Atomic force sensors, magnetic sensors or sensors to measure      evaluated the Nanorobotic System at KOSMA for the assembly           VCSEL-Diode, adhesively bonded     Endoscope objective with
                                                                                                                                                                                                                                                                                                                                                                               after active alignment (Spinner)   micro lenses (Richard-Wolf)
                  (thermoplastics): the circuits are activated on the plastic                                                                                                                                                           a film thickness are available for these instruments to collect   of their Terahertz oscillators.
                  by laser and then metallized in a chemical bath. LPKF                                                                                              Micro adhesive bonding:                                            3D-data with high resolution. The data of all sensors can be      To our own surprise, even 2 µm thick GaAs membranes,                 3D Circuit carriers:
                  made it possible for the first time to create a machine                                                                                                                                                               saved as profiles (2D) or as 3D-data. The data acquisition is     20 times thinner than a human hair, could be handled with
                  using this technology for the development of prototypes                                                                                            For the assembly of microparts screws are quite useless, in        metrological and traceable.                                       the gripper.                                                         The shown three-dimensional circuit carrier was produced by
                  as well as for series production. Three-dimensional circuit                                                                                        particular when they are 10 times bigger than the microsystem.                                                                                                                                                                           injection-moulding of the 3D
                  carriers can be produced with this machine in a few highly                                                                                         Micro adhesive bonding is in most cases the only possible          The FRT sensors are also part of the Nanorobotics Systems                                                                                                             structure, Laser structuring of
                  efficient and environmentally-friendly steps. The secret                                                                                           solution. But the properties of adhesives in small dimension       from Klocke Nanotechnik, e.g. to determine a 3-dimensional        Sharpen a hair …                                                                                    those areas that shall have
                  lies in the multiply-functionalized                                                                                                                can be totally different to those in classical macroscopic         path on the surface of a micropart. This path can then be                                                                                                             a metallic coating later and by
                                                                                                   Nanorobotics System (Klocke Nanotechnik)
                  MID plastics produced                                                                                                                              dimensions: In microscopic dimensions. Adhesives suitable          covered with an adhesive. Using a conductive adhesive leads                                      ... or bring a tip onto the end of                                   a selective metallisation step.
                  by LPKF. Laser light creates                                                     The modular design of this Nanorobotics System allows             for a similar macroscopic task, can be completely unsuitable       to “wires” on microstructures, placed without heat treatment                                     a glass fiber and focus it! This                                     The Micro Production Line shows

                                                                                                                                                                                                                                                                                                                                                                                                                                                                                              Printed in Germany 3/2003
                  metallisation nuclei on the                                                      plenty of configurations to grow with the production              on the microscopic scale.                                          directly during the assembly process.                                                            microassembly example of                                             these new machines and
                  component surface at the                                                         demands of a new micro-product. It can start from a simple        In the same way the handling of adhesive materials is different:                                                                                                    a detection element in Scanning       techniques working together to form new products. The                                 Deutsche Messe AG
                  same time as creating                                                            microassembly stage moving with 1 Nanometer resolution,           smallest amounts are necessary, they have to be placed very                                                                                                         Nearfield Optical Microscopes         cooperation of these machines is only made possible by a                              Messegelände
                  a surface structure which                                                        formed by a small manipulator and a microgripper. This stage      precisely and may be swallowed by capillarity into the                                                                                                              (SNOM) needs a resolution             close network of partners, who are able to deliver common                             D-30521 Hannover
                  ensures excellent adhesion                                                       can grow step by step up to a system with about 16 degrees        microstructure. The transport of a single drop with defined                                                                                                         better 20 nm2. A microtip is          solutions. This network is established in the German                                  Tel. +49-511/89-0
                  of the conductor lines                                                           of freedom in movement, integrated quality control and            size must be provided, as well as the fast inline curing                                                                             glued onto the end of a glass fiber by active alignment in           Microtechnology area since some years and forms the power                             Fax +49-511/89-3 26 26
                  created during subsequent                                                        up to 6 video microscopes, attached to a vision system for        of adhesives with a high precision of the bond or two stage                                                                          closed loop.                                                         of a strong virtual company.                                                

                                                     LPKF MicroLine Drill 160 3D
                  metallisation. After passing       (LPKF Laser & Electronics)                    pattern recognition.                                              cure processes.                                                                                                                                                                                                                                                                   2
                                                                                                                                                                                                                                                                                                                                                                                                                                                    7–1 April 2003

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