Motion and manipulation Motion and manipulation

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					                     Section 7.1                                                                                   Motion and manipulation             Motion and manipulation                                                                                                                           Section 7.1
                     Motion and manipulation                                                                                                                                                                                     Motion and manipulation
                     Introduction                                                                                                                                                                                                                                                            Reference tables
   Motion technology                                      motion instruments are ideal for              Load-lock systems are available with           Shaft deflection graphs
                                                          continuous or intermittent rotary and         circular or rectangular entry ports and                                                                                                                     6.4mm Shaft
   Precise motion and manipulation of                                                                                                                  These graphs represent the
                                                              linear motion within a vacuum             come equipped with magnetically coupled
   samples in an atmospheric                                                                                                                           deflection caused by a
                                                                   system. Sample motion is             sample transporters. Load-lock systems                                                                                                                                                           Permanent
   environment can be a challenging                                                                                                                    lateral or moment load                                       6.4
                                                                   measured along laser etched          are sample staging chambers used to                                                                                                                                                             deformation       2.3 Kg
   endeavour.The                                                                                                                                       applied to solid                                                                                                                                    occurs
                                                                   scales on an actuator housing.       introduce samples into larger vacuum
   complexity of the task                                                                                                                              cylindrical                                                  5.1




                                                                                                                                                                                                  Deflection (mm)
                                                                                                        systems without breaking the larger
   is greatly increased if                                          Caburn-MDC precision                                                               cross
                                                                                                        system’s vacuum.                                                                                            3.8
   the samples are                                                  micrometers are offered on                                                         section                                                                              Once past the elastic limit for a rod,                                        1.4 Kg
   isolated from                                                     select instruments.These           Port aligners are adjustable port flange       rods.                                                                                  permanent deformation occurs
                                                                                                                                                                                                                    2.5
   atmosphere inside a                                                    micrometers employ a          interfaces designed to correct mate-up                                                                                                                                                                            0.9 Kg
                                                                                                                                                       For test purposes, 6.4mm
   vacuum chamber while                                                   unique plus-minus scale       between components with alignment
                                                                                                                                                       diameter rods in lengths of 25.4 to                          1.3
   trying to effect precise                                               which divides the overall     imperfections. In-vacuum accessories are                                                                                                                                                                          0.5 Kg
                                                                                                                                                       229 and 9.5 and 12.7mm diameter
   manipulation on them through                                        travel of a device into          available for most motion and                                                                                 0
                                                                                                                                                       rods in lengths of 50 to 300mm
   the chamber wall, without                                  positive or negative travel as            manipulation products found in this
                                                                                                                                                       were tested. Rods were mounted                                     0   25.4           50.8      76.2      101.6     127.0     152.4      177.8      203.2      228.6
   compromising vacuum integrity.                         measured from a central starting              catalogue.
                                                                                                                                                       horizontally with one end fixed
   This section highlights Caburn-MDC’s
                                                          position. Products are offered in standard
                                                                                                        Cab-Fast® sample holders provide a             and supported while opposite ends                                                                       Moment arm (mm)
                                                          manual, pneumatic and motorized
   ongoing efforts in the development and                                                               quick, simple and flexible solution to         were left free and unsupported.
                                                          configurations.
   production of practical and dependable                                                               most sample transfer applications. Rotary      Rod end deflection
   air to vacuum sample motion and                        Product line                                  and linear in-vacuum accessories are           measurements were made
   manipulation solutions for the scientific                                                            components designed to expand the              after applying                                                                                               9.5mm Shaft
                                                          Basic rotary, linear and multi-motion
   and industrial vacuum community. It                                                                  capabilities of motion products presented      each sample load
                                                          devices. Rotary products are offered in
   provides scientists, vacuum technologists                                                              in this catalogue.                           to each                                                                                                                                                            5.4 Kg
                                                          standard, high temperature, pneumatic,                                                                                                                    6.4                                                                      No permanent
   and engineers with the most                                                                                                                         unsupported                                                                                                                            deformation
                                                          miniature, precision, magnetic and                 The motorization section includes                                                                                                                                                   occurs                   4.5 Kg
   comprehensive line of high and ultra-high                                                                                                           rod length.
                                                          direct drive configurations.                        motors and the necessary controls                                                                     5.1




                                                                                                                                                                                                  Deflection (mm)
   vacuum motion and manipulation                                                                                                                      Loads for the 6.4mm diameter
                                                          Linear products offer most                                         required to optimize                                                                                                                                                                         3.6 Kg
   instruments available from one source.                                                                                                              rods ranged from 0.4kg to 2.25kg
                                                          of the configurations                                              their operation. Motor                                                                 3.8
                                                                                                                                                       and 2.25kg to 11.4kg for the 9.5                                                Once past the elastic limit for a rod,
   At the heart of our motion and                         listed in the rotary                                              specifications for all                                                                                       permanent deformation occurs                                                     2.7 Kg
                                                                                                                                                       and 6.4mm diameter rods. Rod                                 2.5
   manipulation instrument design is the                  section with the                                               product motorization
                                                                                                                                                       material is 304 stainless steel, as
   reliability and performance of edge                    addition of                                                   options are detailed in this
                                                                                                                                                       used in the shaft construction of                            1.3
   welded stainless steel bellows. The use of             push-pull, rack                                          section. Motor specifications
                                                                                                                                                       all Caburn-MDC motion and
   edge welded stainless steel bellows has                and pinion and                                        are listed as support information
                                                                                                                                                       manipulation instruments.                                     0
   become a vacuum industry standard and                  tunnel access drives.                             for the products specifying their use.
   an essential component in the                          Multi-motion                                  In-vacuum stepper motors for both high         These graphs are for reference                                     0          50.8             101.6          152.4           203.2          254.0             304.8
   construction of quality vacuum                         products offer both rotary and linear         and ultra-high vacuum applications are         only and do not represent actual                                                                        Moment arm (mm)
   equipment.With the exception of a small                motion within the same instrument in          also offered.                                  motion instrument shaft deflection.
   number of direct drive products, all                   standard, precision and direct drives. Also                                                  They are provided as visual aids
   Caburn-MDC motion and manipulation                     available in the multi-motion products are                                                   for understanding the effects of
   actuator seals are fitted with edge                    various wobble stick configurations.                                                         lateral loading of any stainless steel
   welded stainless steel bellows.                                                                                                                     rod.                                                                                                        12.7mm Shaft
                                                          XYZ stages, load-lock systems, port
   Caburn-MDC rotary motion instruments                   aligners and in-vacuum accessories. Stages                                                   Since shaft deflection may have a
                                                                                                                                                                                                                    6.4                                                                                         Permanent
   allow the transmission of rotation                     are available in various configurations                                                      significant effect on the                                                                                                                               deformation
   through a chamber wall via a unique                    including V-Plane® modular building block                                                    positioning of samples,                                                                                                                                    occurs
                                                                                                                                                                                                                    5.1




                                                                                                                                                                                                  Deflection (mm)
   bellows sealed wobble shaft mechanism.                 stages. Single and multiple axes stages are                                                  careful consideration                                                                                                                                             11.3 Kg
   Drive shaft bearing supports on both the               also available in                                                                            must be given to shaft                                       3.8
                                                                                                                                                                                                                                                                                                                         9.1 Kg
   air and vacuum sides of the drive shaft                compact, standard                                                                            loading and whether                                                             Once past the elastic limit for a rod,
                                                                                                                                                                                                                                         permanent deformation occurs
   provide smooth rotary motion. Bearings                 and heavy duty                                                                               the shaft needs to be                                        2.5                                                                                                  6.8 Kg
   on all Caburn-MDC motion and                           models. Stages are                                                                           supported. Caburn-MDC
   manipulation instruments are coated with               used for two                                  Caution                                        recommends that all shafts in                                1.3
                                                                                                                                                                                                                                                                                                                         4.5 Kg
                                                                                                        Anodized aluminium
   a Dicronite® UHV compatible dry                        and three                                     finishes will begin to
                                                                                                                                                       excess of 300mm must have
   lubricant impinged on to the metal                     dimensional                                   discolour when                                 additional linear or radial support.                           0
   bearing surfaces. Linear motion is                     sample                                        baked in excess of
                                                                                                        150°C.                                                                                                            0          50.8             101.4           152.4          203.2          254.0             304.8
   transmitted through a chamber wall using               manipulation
                                                                                                        This is only a cosmetic
   precision fine pitch lead screws coupled               inside ultra-high                             condition which does not
                                                                                                                                                                                                                                                                Moment arm (mm)
   to bellows sealed, bearing supported                   vacuum systems.                               impact performance or
                                                                                                        reliability.
   shafts. Caburn-MDC rotary and linear


   All dimensions are nominal in millimetres unless specified                                                                                                                                                                                                                 All dimensions are nominal in millimetres unless specified

474 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                    Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 475
                     Section 7.1                                                                                 Motion and manipulation                 Motion and manipulation                                                                                                          Section 7.1
                     Motion and manipulation                                                                                                                                                                                    Motion and manipulation
                     Glossary                                                                                                                                                                                                                                                               Glossary
   Caburn-MDC precision micrometers measure along
   unique plus-minus laser etched scales.
                                                          Error                                                                    from opposite         Precision
                                                                                                                                  directions. It is                                                        Common motion deviations
                                                          The difference between an obtained                                                             Also known as repeatability, it is the
                                                                                                                               due to elastic forces
   Abbe error                                             performance parameter and the ideal or                                                         range of deviations in output position
                                                                                                                          accumulated in various
                                                          desired result. Errors fall into two                                                           that will occur for 95% of the motion                     Linear and rotary position
             Linear off-axis error introduced                                                                 drivetrain components, lead screw                                                                      error region is shown in                                                 Linear or rotary travel ending
                                                          primary categories, on-axis and off-                                                           excursions from the same error-free
                 through amplification of tilt                                                            wind-up, for instance. Often confused                                                                                         green                                                 position
                                                          axis errors.                                                                                   input. Accuracy and precision are not
                     and wobble with a long                                                               with backlash.                                                                                                                                                                      Drive train imperfections such
                                                                                                                                                         the same.                                                          Desired position
                      moment arm.This type                Friction                                                                                                                                                                                                                            as backlash, lead screw errors
                      of error occurs when                                                                Load capacity, stage                           Repeatability
                                                                                                                                                                                                                                                                                              and wobble can contribute to
                                                          Friction is defined as the                                                                                                                                                                                                          linear and rotary travel
                        the point under                                                                   The maximum centred load that can be                                                                                                                                                deviation
                                                          resistance to motion between surfaces in                                                       The ability of a motion instrument to
                        measurement is at a                                                               placed directly on an XYZ motion stage                                                                             Starting position
                                                          contact. Friction can be constant or it                                                        reliably achieve a commanded
                      relatively long distance                                                            and is typically limited by the load                                                                                                                                                Wobble is the angular
                                                          can vary with speed. Elements                                                                  position over many attempts                                                                                                          deviation of the shaft’s a
              from the axis of motion.                                                                    capacity of the bearings.
                                                          contributing to overall friction may be in                                                     regardless of the direction from                                                                                                     xis of rotation over one
                                                          the form of drag, sliding friction, system                                                     which the position is approached.                                                                                                    complete revolution
   Accuracy                                                                                               Load capacity, lateral or
                                                          wear or lubricant viscosity.                    moment                                                                                                                                                                              The amount of deviation
   The maximum expected difference                                                                                                                       Runout                                                                                                                               increases as the shaft is
   between the actual and a desired position              Friction, static                                Also called side or bending load capacity,     The linear, not angular, portion of off-
                                                                                                                                                                                                                                                                                              lengthened
   for a given input. Highly dependent on                                                                 it is the maximum load that can be
                                                          The friction that must be overcome to                                                          axis error. It is the deviation between
   method of actual position                                                                              applied perpendicular to a shaft’s axis of
                                                             impart motion to a body at rest. Since                                                      ideal straight line motion and actual                                                                                                Rotary and linear output
   measurement.                                                                                           motion.                                                                                                                                                                             can be affected by the
                                                                   static friction is higher than                                                        measured motion in a translation
                                                                                                                                                                                                                                                                                              amount of play in an
   Accuracy, absolute                                                 sliding friction, the force which   Load capacity, axial                           stage. Runout has two orthogonal                                                                                                     instrument’s drive train
                                                                          must be applied to impart                                                      components, straightness, a measure                                                                                                  mechanism
   The output of a system                                                                                 The maximum centred and balanced
                                                                          motion is greater than the                                                     of in-plane deviation, and flatness, the                                                                                             Play increases with the
   versus the commanded or                                                                                compressive or tensile load that can be                                                                                                                                             age of the product
                                                                          force required to keep the                                                     out-of-plane deviation.
   ideal input.                                                                                           applied to a stage’s or shaft’s longitudinal
                                                                          body in motion. As a result,
                                                                                                          or parallel axis of motion.                    Sensitivity
   Accuracy, on-axis                                                        when a force is initially
                                                                               applied, the body will     Minimum incremental motion                     The minimum input required to
   The uncertainty of position
                                                                               begin to move with a                                                      produce output motion or the ratio
   after all sources of linear error                                                                      The smallest motion a device is capable
                                                                            jump in some                                                                 between output motion and input
   are eliminated. Linear errors                                                                          of delivering reliably, not the smallest
                                                                       unpredictable and                                                                 drive. Applicable particularly to
   include: cosine error, lead screw pitch                                                                display resolution increment.
                                                              unrepeatable manner, producing non-                                                        manually actuated motion devices.
   error, abbe error and thermal expansion
                                                          linear, non-repeatable motion.                  Play
   effects.                                                                                                                                              Tilt
   Backlash                                               Gear ratio, drive train                         Uncontrolled movement due to                   The angular portion of off-axis error.
                                                                                                          looseness of mechanical parts. Usually                                                                                                                                              Port flange mount
                                                          A motion instrument’s drive train gear                                                         It is the deviation between ideal
   The maximum magnitude of an input that                                                                 increases with the components age. Play
                                                          ratio is the relationship between received                                                     straight line motion and actual
   produces no measurable output upon                                                                     is a contributor to backlash.
                                                          input motion and the delivered output                                                          measured motion in a translation
   reversing direction. Typically the result of
                                                          motion. Ratios are expressed in the             Position stability                             stage.Tilt and wobble have three
   poor meshing between drivetrain
                                                          numerical notation a:b, where “a”                                                              orthogonal components commonly                                                                                            0
   components as with lead screw threads.                                                                 The ability to maintain a constant                                                                                                                                                  Display resolution is the
                                                          represents the received motion or device                                                       referred to as roll, pitch, and yaw.                                                                                                 smallest motion detectable
                                                                                                          position over time. Variation from stable                                                                                                                               0
   Display resolution                                     input in revolutions or some other unit,
                                                                                                                                                         Wobble
                                                                                                                                                                                                                                                                                              by a motion instrument’s
                                                          and “b” represents the delivered or             position is called drift. Contributors to                                                                                                                                           scales or micrometers
   The smallest motion detectable by a                                                                    drift include worn parts, migration of
                                                          resulting output motion in revolutions                                                         Wobble is the angular deviation of                                Rotary drive input
   motion device’s precision rule,                                                                              lubricant, and thermal variation.
                                                          for rotary devices or 25.4 of                                                                  the axis of rotation over one                                            mechanism
   micrometer or motor controls.
                                                          travel in linear motion                                                                        complete revolution.
   Eccentricity                                           instruments.                                                                                                                                                      Linear drive input
                                                                                                                                                                                                                                   mechanism
   Sometimes called concentricity,                        Hysteresis
   eccentricity in a rotary device is the
   deviation of the centre of rotation from               The difference in
   its mean position as the device turns.                 the absolute
                                                          position of an object
                                                          for a given                                                                                                                                  ■   This illustration is provided for reference only
                                                          commanded input                                                                                                                              ■   Linear and rotary deviations have been exaggerated for illustration purposes
                                                          when approached




   All dimensions are nominal in millimetres unless specified                                                                                                                                                                                                       All dimensions are nominal in millimetres unless specified

476 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                        Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 477
                     Section 7.1                                                                             Motion and manipulation                 Motion and manipulation                                                                                         Section 7.1
                     Motion                                                                                                                                                                                                                                        Motion
                     Introduction                                                                                                                                                                                                                                 Introduction
                                                          temperature component removal. For          Magnetically coupled rotary motion             Compact high-temperature linear motion       Rack and pinion linear motion                     Multi-motion
                                                          maximum vacuum integrity, reliability and   feedthroughs provide basic rotation and        feedthroughs have a small foot-print and     feedthroughs are very similar to
                                                                                                                                                                                                                                                          Multi-motion feedthroughs are
                                                          extended service life all motion device     UHV compatibility without the use of           are constructed with high temperature        push-pull devices, but provide finer
                                                                                                                                                                                                                                                           instruments with more than one
                                                          actuator seals incorporate edge welded      bellows. This product is intended for          vacuum-grade materials. Linear position is   control of linear motion. The
                                                                                                                                                                                                                                                                  degree of freedom.This
                                                          stainless steel bellows.                    light-duty service not exceeding 0.1Nm         measured along a laser-etched stainless      90° rack and pinion drive
                                                                                                                                                                                                                                                                      product category
                                                                                                      of torque. Direct drive rotary motion          steel barrel graduated in 20 equally-        mechanism provides a
                                                          Rotary motion                                                                                                                                                                                               includes combinations of
                                                                                                      products provide basic rotation with HV        spaced increments. A full revolution of      quick-action drive
   Features                                                                                                                                                                                                                                                          linear, rotary and wobble
                                                          Standard rotary motion feedthroughs are     compatibility.Vacuum integrity is              the barrel translates into 1.25mm of         with greater
                                                                                                                                                                                                                                                                 motion.
   ■   Motion in vacuum                                   a practical and economical                  maintained by a single preloaded Viton®        linear travel. Formed stainless steel        control than
                                                          solution for rotary                         elastomer shaft seal. Fitted with dual         bellows, a 1.25mm fine pitch lead screw      push-pull                                                  Rotary-linear standard devices
   ■   Rotary motion
                                                          motion in most                              rotary bearing shaft supports, this device     design and the use of radial bearings        devices. For                                              offer 360° of rotation and 25mm
   ■   Linear motion                                      vacuum applications.                             can be manually or mechanically           provide this product with excellent          quick and                                            of linear travel via two separate drive
   ■   Multi-motion                                       Rotary motion                                    operated at intermittent speeds of        durability and performance. All drive        easy positioning the                              knob actuators. Both rotary and linear
                                                          position is                                       up to 300 rpm.                           mechanism components are located on          feedthrough body has                              positions are measured along a laser
                                                          measured                                                                                   the atmosphere side of the reentrant         been laser etched with                            etched actuator barrel and housing.The
    Motion In vacuum                                                                                          Differentially pumped direct drive                                                                                                    360° rotary scale is graduated in 5°
                                                          along a 360°                                                                               formed bellows.                              linear travel graduation marks in
                                                                                                             rotary motion feedthroughs                                                                                                             increments. The linear scale has both a
    Caburn-MDC motion products are                        laser etched                                                                                                                            increments of 0.025” (0.6mm). A 31.8mm
                                                                                                           provide 11 Nm maximum rotational          Miniature linear motion feedthroughs are
    vacuum compatible precision instruments               scale                                                                                                                                   turn on the handle generates 20mm                 linear and rotary scale component, the
                                                                                                       torque and 500 rpm maximum rotation.          specifically designed for light-duty
    ideal for demanding in-vacuum sample                  graduated in                                                                                                                            approximate of linear travel. The actuator        linear portion is graduated in 0.05”
                                                                                                      The rotary shaft is supported by two           service. Full revolution of the barrel
    handling applications.The motion                      5° increments.                                                                                                                          can be locked in position by tightening an        (1.3mm) increments while the rotary
                                                                                                      radial bearings located inboard of dual        translates into 0.6mm of linear travel.
    feedthrough product line presented in                 Welded                                                                                                                                  integral lock knob located on the                 portion is graduated in 0.001” (0.03mm)
                                                                                                      Viton® elastomer shaft seals. The region                                                                                                      increments. Full revolution of the linear
    this section is divided into three basic              stainless steel                                                                            Push-pull linear motion feedthroughs are     actuator housing.
                                                                                                      between the seals can be differentially                                                                                                       scale produces 0.6mm of travel.
    categories including rotary, linear and               bellows with a unique off-                                                                 the most basic of the manual motion
                                                                                                      pumped through a 3.2mm female pipe                                                          Pneumatic linear motion feedthroughs
    multi-motion instruments. Each product                axis wobble design, combined with rotary                                                   devices offered in this catalogue. They
                                                                                                      thread port provided to attain UHV                                                          provide two-position fast action linear           Precision rotary-linear motion
    category is comprised of one or more of               shaft bearing supports, provide rotary                                                     provide quick action linear motion via a
                                                                                                      compatibility to 1x10-9 mbar.                                                               motion. Typical motion applications               instruments are a step higher than the
    the following drive configurations:                   motion of unsurpassed reliability and                                                      stainless steel hand-held actuator shaft.
                                                                                                                                                                                                  would include on-off, open-close and in-          standard rotary-linear products.They
    standard, high-temperature, pneumatic,                performance. In contrast to standard        Linear motion                                  They are typically operated by observing
                                                                                                                                                                                                  out motions similar to those of                   offer greater precision with very low
    miniature, precision, magnetic and direct             rotary motion products, the high                                                           instrument motion through a vacuum
                                                                                                      Standard linear motion feedthroughs are                                                     in-vacuum shutters. Linear travel can be          backlash, a rotary display resolution of
    drive.                                                temperature standard rotary motion                                                         viewport. For quick and easy positioning
                                                                                                      the perfect solution for most linear                                                        shortened or lengthened via an integral           0.1°, and 12.7mm of micrometer
                                                          devices are constructed entirely of 304                                                    the feedthrough body has been laser
    Motorization is available for most motion                                                         displacement vacuum applications. Linear                                                    stroke adjustment knob. For quick and             precision linear travel with 0.001”
                                                          stainless steel to endure the rigors of                                                    etched with linear travel graduation
    instruments featured throughout this                                                              position is measured along both radial and                                                  easy positioning the feedthrough body             (0.03mm) resolution.
                                                          high temperature vacuum service.                                                           marks in increments of 0.025” (0.6mm).
    catalogue. Please note that motor                                                                 linear scales laser etched on actuator                                                      has been laser etched with linear travel
                                                                                                                                                     The actuator can be locked in position by                                                      Wobble stick multi-motion devices with
    controls are not included with                        Pneumatic drive rotary products are         barrel and housing. Radial and linear scales                                                graduation marks in increments of
                                                                                                                                                     tightening an integral lock knob located                                                       linear, angular wobble, rotary and
    motorization options and must be                      designed for in-vacuum shutters and         are graduated in 0.001” (0.03mm) and                                                        0.6mm.
                                                                                                                                                     on the actuator housing.                                                                       articulated pincer configurations are
    purchased separately.                                 other light-duty two-position motion        0.025” (0.6mm) increments respectively.
                                                                                                                                                                                                  Heavy duty manual, pneumatic and push             available in this product category.The
                                                          applications. Pneumatic drive rotation is   One revolution of the barrel translates
    Precision motion instruments detailed                                                                                                                                                         pull linear motion feedthroughs allow             most elaborate device provides 360°
                                                          adjustable from 30° to 90°.                 into 0.025” (0.6mm) of linear travel.The
    herein are available for either high or                                                                                                                                                       linear displacement of heavier samples            sample rotation, 114mm of push-pull
                                                                                                      housing’s linear scale also includes
    ultra-high vacuum service. High vacuum                Miniature rotary motion feedthroughs                                                                                                    and components. With the exception of             linear travel, 22° of angular tilt or wobble
                                                                                                      graduation in 1mm increments. Edge
    products are mounted on ISO standard                  are specifically designed for in-vacuum                                                                                                 the precision micrometer fitted unit,             and a mechanical pincer jaw with 22.4mm
                                                                                                      welded stainless steel bellows, a 40 pitch
    KF flanges.                                           light-duty service where torques will not                                                                                               these devices do not provide position             diameter sample capacity.
                                                                                                      lead screw design and the use of linear
                                                          exceed 0.1Nm. Their small footprint                                                                                                     indication. Position of samples or
    Ultra-high vacuum devices are fitted with                                                         bearing shaft support provide devices with
                                                          makes them ideal for applications with                                                                                                    components being moved must be
    industry standard, Conflat® compatible,                                                           excellent durability and performance.
                                                          severe space limitations.                                                                                                                      verified visually. Unlike conventional
    CF metal seal flanges. CF flanges are                                                             Unlike the standard motion products the
                                                                                                                                                                                                         motion feedthroughs, heavy duty
    designed with a standard knife-edge                   Precision rotary motion instruments are     high temperature linear motion
                                                                                                                                                                                                         models employ reentrant welded
    sealing geometry. Bakeout temperatures                a step higher than standard rotary          feedthroughs are constructed entirely of
                                                                                                                                                                                                     bellows construction.
    greater than those specified may be                   motion products. They offer greater         304 stainless steel to endure the rigors of
    achieved by disassembling and removing                precision with very low backlash and a      high temperature vacuum service.
    temperature sensitive components.                     display resolution of 0.1°.
    Please reference feedthrough instruction
    manuals or contact Caburn-MDC’s
    technical staff for higher temperature
    ratings and detailed instructions on
                                                                                                                                                                                                                                            Caution
    instrument disassembly and low                                                                                                                                                                                                          Anodized aluminium finishes will begin to discolour
                                                                                                                                                                                                                                            when baked in excess of 150°C.
                                                                                                                                                                                                                                            This is only a cosmetic condition which does not
                                                                                                                                                                                                                                            impact performance or reliability.


   All dimensions are nominal in millimetres unless specified                                                                                                                                                                                 All dimensions are nominal in millimetres unless specified

478 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                               Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 479
                     Section 7.1                                                                                   Motion and manipulation                        Motion and manipulation                                                                                                  Section 7.1
                     Rotary motion                                                                                                                                                                                                                               Rotary motion
                     Standard                                                                                                                                                                                                                                                                   Standard

                                                                                     UHV and HV series                                                            UHV Series              Flange           Flange                                               Wt                        Part
                                                                                                                                                                                          size             OD            A      B           M         N         kg       Reference        number       £        €        SFr.

                                                                                 Features                                                                         CF            100°C     DN16CF           34            40     109         143       118       0.5      BRM-133          670000       268      403      631
                                                                                                                                                                                          DN40CF           70            40     109         143       118       0.9      BRM-275          670002       280      419      657
                                                                                 ■    Continuous rotary motion
                                                                                 ■    Manual or motorized actuator                                                HV Series               Flange           Flange                                               Wt                        Part
                                                                                                                                                                                          size             OD            A      B           M         N         kg       Reference        number        £       €        SFr.
                                                                                 ■    Rotary position lock
                                                                                                                                                                  ISO KF        100°C     DN16KF           30            37     112         146       123       0.5      K075-BRM         670020        276     414      649
                                                                                 ■    UHV or HV-compatible materials                                                                      DN40KF           55            41     108         142       119       0.9      K150-BRM         670022        288     432      677
                                                                                 ■    Welded bellows seal
                                                                                 ■    Bakeable to 100°C
                                                                                                                                                                  Motorization options
                                                                                 ■    CF and ISO KF port mounts
                                                                                                                                                                                                                                    Option -03
                                                                                                                                                                   Option -03                                                       In-line stepper motor

                                                                                                                                                                                      M                         49


     BRM-133
                                                                                                                                                                                                                          57

                                                                                 Description
                                                                                 Caburn-MDC standard rotary motion feedthroughs are a                                                     1:1 Gear ratio
                                               Ø42
                                                                                 popular and economical solution for in-vacuum sample or
                                                                                                                                                                   Option -04
                                                                                 device rotation. They are constructed of the highest grade
                                               Ø19                               vacuum compatible materials. Position is measured along a                                        N

                                                                 Position lock   360° laser-etched, black anodized barrel graduated in                                                       48
                                                                                 5° increments. Welded stainless steel bellows, a unique                                                                                                               Motor             Add-on           Option
                                                                                 off-axis wobble design and the use of rotary shaft bearing                                                                                         Motorization1      specification     weight kg        Number        £       €        SFr.
                                                                                                                                                                                                      Ø41
                                                                                 supports provide devices of unsurpassed reliability and                                                                                            In-line stepper    D                 0.9              -03           298     447      701
                                                                                 performance. Automation can be achieved with one of four                                                                           94          1
                                                                                                                                                                                                                                    When ordering motorized options, add the option number and price to the desired UHV or HV
                                                                                 motorization options and controls.                                                                                                                 component part number listed above
                                                                                                                                                                                                      Ø45
                                        330      0      30                                                                                                                                                                          For example: 670036-03
                                                                                 Motor controls must be purchased separately.
                                                                                                                                                                                                                                    For total unit weight, add option weight to component weight
                                                                                                                                                                                           2.5:1 Gear ratio
                                                                                                                                                                                   79
                                                                                 Specifications
               B                                                                 Material
                                                                                 Flange / actuator body                          304ss /Anodized aluminium
                                                                                 Shaft seal                                         AM 350 welded bellows
                                                                                 Vacuum range UHV /HV                          1.3x10-11 mbar/1.3x10-8 mbar
                                                                                 Temperature range 1 UHV /HV                               -20°C to +100°C
                         Ø37                                                     Speed                                                                 20 rpm
                                                                                 Torque                                                                0.4 Nm
                                                                                 Axial load                                                              2.7 kg
                                                                                 Lateral load                                                            4.5 kg
                                                                                 Weight and dimensions                                               See table
               A                                                                 1
                                                                                     UHV units are bakeable to 230°C with actuator removed and 30°C maximum
                                                      Ø6.4
                                                                                     when motorized




 ■   Shown with DN40CF flange
 ■   Metal-seal flanges are non-rotatable with clearance holes




All dimensions are nominal in millimetres unless specified                                                                                                                                                                     All dimensions are nominal in millimetres unless specified Weights given are approximate


Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                          Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk
                              Section 7.1                                                                                            Motion and manipulation                    Motion and manipulation                                                                                                                                      Section 7.1
                              Rotary motion                                                                                                                                                                                                                                                                        Rotary motion
                              High temperature standard                                                                                                                                                                                                                                                                                       Pneumatic

                                                                                             UHV and HV series                                                                                                                                                                           UHV and HV series

                                                                                         Features                                                                                                                                                                                    Features
                                                                                         ■    Continuous rotary motion                                                                                                                                                               ■     Adjustable 90° rotary motion
                                                                                         ■    Manual actuator                                                                                                                                                                        ■     Pneumatic actuator with 24V DC solenoid
                                                                                         ■    Rotary position lock                                                                                                                                                                   ■     UHV or HV-compatible materials
                                                                                         ■    UHV-compatible materials                                                                                                                                                               ■     Welded bellows seal
                                                                                         ■    Welded bellows seal                                                                                                                                                                    ■     Bakeable to 100°C1
                                                                                         ■    Bakeable to 230°C                                                                                                                                                                      ■     CF and ISO KF port mounts
                                                                                         ■    CF port mounts                                                                                                                                                                         ■     Complete with 24V DC air control solenoid valve
                                                                                         ■    Guide tube included on extended models                                                                                                                                                 ■     240V AC air control solenoid valve optional




         HTBRM-275-10                         HTBRM-275                                                                                                                             ABRM-133                               Includes solenoid


                                                                                         Description                                                                                                                                                                                 Description
                              Ø42                                 Ø42                                                                                                                                                 128.5
                                                                                         Caburn-MDC high temperature rotary motion feedthroughs are the                                                                max                                                           Caburn-MDC pneumatic rotary feedthroughs are designed for in-
               Ø19                                                           Ø19         perfect solution for UHV sample rotation. They are constructed of                                                                                                                           vacuum shutters and other light-duty two-position rotary motion
                                                                                         304ss to endure the rigors of high temperature vacuum service.                                 28.5                                                                                         applications. Feedthrough rotation has two adjustable stops. One
                                         Position lock                                                                                                                                                                                                            90°
                                                                                         Rotation can be measured along a 360° laser etched barrel                                                                                                     60°              Finish end   adjusts the start position from 0° to 30°, and the other adjusts the
                                                                                                                                                                                                                                                                        adjustment
                                                                                         graduated in 5° increments. Welded stainless steel bellows, a unique                                  Air fitting                                       30°
                                                                                                                                                                                                                                                                                     finish position from 60° to 90°. One air control solenoid valve is
                        330    0    30   1:1 Gear ratio     330    0    30                                                                                                                     for 4.0
                                                                                         off-axis wobble design and the use of rotary shaft bearing supports                                   OD tube
                                                                                                                                                                                                                                                                                     also included. Feedthroughs are available on CF metal seal flanges or
                                                                                         provide a product of unsurpassed reliability and performance.                                         (2 places)                                   0°                                       ISO KF elastomer seal port mounts.
                                                                                                                                                                                                                                            Start end
         109                                                                       109   Extended length models are constructed with bearing fitted shaft                                                     64.5                         adjustment

                                                                                         support guide tubes for maximum rigidity.                                                                                                                           Shaft end view          Specifications
               Ø37                                Ø37                                                                                                                                                                                                                                Material
                                                                                         Specifications                                                                                                                                                                              Flange/actuator body                                             304ss /Anodized aluminium
                                                                                                                                                                                                                                                              Adjustable
                                                                                         Material                                                                                                                                                             stop                   Shaft seal/piston seal                                       AM 350 welded bellows/Viton®
                                                                                         Flange /actuator body                                                         304ss                                                                                  (2 places)
                                                                                                                                                                                                                                                                                     Vacuum range UHV/HV                                            1.3x10-11 mbar /1.3x10-8 mbar
         40                                                                              Shaft seal                                               AM 350 welded bellows                                                                                                              Temperature range UHV/HV      1
                                                                                                                                                                                                                                                                                                                                                                   -20°C to 100°C
                                                                                                                                                                                    Flange Length                                        Solenoid valve
                                                                                         Vacuum range UHV /HV                                               1.3x10-11 mbar          DN16CF       177                                     remotely mounted                            Torque                                                                       0.4 Nm maximum




                                                                                                                                                                                                                     330




                                                                                                                                                                                                                               30
                                                                                                                                                                                                                                         (not shown)




                                                                                                                                                                                                                           0
                                                                                         Temperature range 1 UHV /HV                                       -20°C to 230°C           DN40CF       177
                                                                                                                                                                                                                                                                                     Weight and dimensions                                                                  See table
                                                                                                                                                                                    DN16KF       184
                                                                                         Torque                                                                      0.3 Nm         DN40KF       180
                 Ø6.4
                                                                                         Axial load                                                                    2.7 kg
                                                                                         Lateral load                                                                  4.5 kg
                                                                                         Weight and dimensions                                                      See table                                Ø37
                                                                                                                                                                                                                                                                                                                 Wt                         Part
                                                                                   203                                                                                                                                                                                                   Description             kg        Reference        number           £       €         SFr.
                                                                                   254
                                                                                                                                                                                                                                                                                         UHV series
                                                                                    or
                                                                                   305                                                                                                                                                                                                   DN16CF                  0.9       ABRM-133         670050-01        757     1135      1778
                                                                                                                                                                                                                                Ø6.4                                                     DN40CF                  1.4       ABRM-275         670051-01        870     1305      2045
                                                                                             Shaft                 Wt                    Part                                                                                          Solenoid valves
                                                                                             length   Flange       kg    Reference       number     £        €         SFr.                                                            Air control
                                                                                                                                                                                                                                                                                         HV series
                                                                                             Standard UHV series
                                                   Ø19                                                                                                                              Flange Length                                                                                        DN16KF                  0.9       K075-ABRM        670052-01        749     1124      1761
                                                                                             40       DN16CF       0.5   HTBRM-133       670004     316      474       742
                                                                             51                                                                                                     DN16CF        40                                                                                     DN40KF                  1.4       K150-ABRM        670053-01        850     1275      1998
                                                   Ø6.4                                      40       DN40CF       0.9   HTBRM-275       670005     326      489       767
                                                                                                                                                                                    DN40CF        40
                                                                                                                                                                                                                                                                                     1
                                                                                                                                                                                    DN16KF        37                                                                                     UHV units are bakeable to 230°C with actuator removed
                                                                                                                                                                                    DN40KF        41                                                                                     Option -01 (24V DC air control solenoid valve) fitted as standard
                                                                                             Extended UHV series
                                                                                             203      DN40CF       3.6   HTBRM-275-8     670006     842      1263      1979     ■   Shown with DN16CF flange
                                                                                             254      DN40CF       3.6   HTBRM-275-10    670007     1042     1563      2448                                                                                                                                                                 Option
                                                                                                                                                                                ■   Metal-seal flanges are non-rotatable with
     ■   Metal-seal flanges are non-rotatable with clearance holes                                                                                                                                                                                                                       Description                                        number           £       €         SFr.
                                                                                             305      DN40CF       3.6   HTBRM-275-12    670008     1075     1613      2526         clearance holes
                                                                                                                                                                                                                                                                                         240V DC Air control control solenoid valve         -02              48      72        113




   All dimensions are nominal in millimetres unless specified Weights given are approximate                                                                                                                                                                                      All dimensions are nominal in millimetres unless specified Weights given are approximate

482 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                                           Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 483
                          Section 7.1                                                                                           Motion and manipulation                                   Motion and manipulation                                                                                                         Section 7.1
                          Rotary motion                                                                                                                                                                                                                                                           Rotary motion
                          Miniature                                                                                                                                                                                                                                                                                            Precision

                                                                                   UHV and HV series                                                                                                                                                                   UHV Series

                                                                               Features                                                                                                                                                                            Features
                                                                               ■     Continuous rotary motion                                                                                                                                                      ■     Continuous rotary motion
                                                                               ■     Manual or motorized actuator                                                                                                                                                  ■     Manual or motorized actuator
                                                                               ■     Rotary position lock                                                                                                                                                          ■     Rotary position lock
                                                                               ■     UHV or HV-compatible materials                                                                                                                                                ■     UHV-compatible materials
                                                                               ■     Welded bellows seal                                                                                                                                                           ■     Welded bellows seal
                                                                               ■     Bakeable to 100°C1                                                                                                                                                            ■     Bakeable to 230°C1
                                                                               ■     CF and ISO KF port mounts                                                                                                                                                     ■     DN40CF port mount
                                                                                                                                                                                                                                                                   ■     Low backlash design
                                                                               Description
                                                                               Caburn-MDC miniature rotary feedthroughs are specifically                                                                                                                           Description
                                                                               designed for in-vacuum light-duty applications where torques will                                                                                    Manual actuator                Precision rotary motion feedthroughs are low backlash instruments
      E-MBR-133                                                                not exceed 0.1 Nm. Feedthroughs are available in both manual or                                             E-PBRM1-10                                                              with a display resolution of 0.1°. Welded stainless steel bellows, a
                                                                               low voltage DC motor configurations. Motors can be fitted with                                                                                                                      unique off-axis wobble design and the use of rotary shaft bearing
                                                                               optional magnetic encoder. Motor controls must be purchased                                                                                                                         supports provide long life and smooth operation. Feedthroughs are
                                                                               separately.                                                                                                                                                                         available on Conflat® compatible CF metal seal flanges. Motorization
                                           Ø25                                                                                                                                                                             Ø76
                                                                                                                                                                                                                                                                   option is available. Motor controls must be purchased separately.
                                                           Position lock       Specifications
                                                                               Material                                                                                                                                                                            Specifications
                                                                               Flange /actuator body                                              304ss /Anodized aluminium                                                                                        Material
                                                                               Shaft seal/piston seal                                              AM 350 welded bellows/                                                                                          Flange/actuator knob                                               304ss /Anodized aluminium
                                                                               Vacuum range UHV /HV                                                           1.3x10-11 mbar                                                                                       Shaft seal                                                           AM 350 welded bellows
                                             0                                                                                                                                                   117
                                                                                                                                                                                                 117
                                                                               Temperature range 1 Manual                                                    -20°C to 100°C                                                                                        Vacuum range                                                                    1.3x10-11 mbar
              Flange      Length                                               Torque                                                                      0.18 Nm maximum
                                                                                                                                                                   S       Fr                                                                                      Temperature range                                                              -20°C to 230°C
              DN16CF          87                                                                                                                                             .
              DN16KF          90                                               Axial load                                                                           57
                                                                                                                                                                       7         0.9 kg                                                                            Torque                                                                      0.79 Nm maximum
                                                                                                                                                               98
                                                                               Lateral load                                                                        9             2.7 kg                                                        Position lock       Axial load                                                                                 2.3 kg
                                                                               Weight and dimensions                                                                     See table                                                                                 Lateral load                                                                               4.5 kg
                                                                                                                                                                                                                                          DN40CF flange,
                                                                                                                                                                                                                                          non-rotatable with
                                                                                                                                                                                                                                                                   Weight and dimensions                                                                   See table
                                                                                                                                                                                                                                          clearance holes
                                                                                                                                                                                                              Ø33



                                    Ø3.2                                                                                                                                                                      Ø9.5
                                                                                                                                                                                                 A
                                                                                                                                                                                                 A
                                                                                                             Wt                      Part
                                                                                   Description               kg     Reference        number            £       €                 SFr.                                                                                                            Wt                      Part
                                                                                   UHV Series                                                                                                                                                                          Description               kg     Reference        number            £        €         SFr.
       Flange     Length
                                                                                   DN16CF                    0.9    MBR-133          671500            333     500               783                                                                                   UHV Series
       DN16CF        25
       DN16KF        22                                                                                                                                                                                                          .250 – 28 x .50 deep                  254                       3.2    PBRM1-10         670024            1500     2200      3525
                                                                                                                                                                                                                                 (use vented screw)
                                                                                                                                                                                                                                                                       400                       3.2    PBRM1-15         670027            1600     2500      3760
                                                                                   HV Series
                                                                                                                                                                                                                                                                       600                       3.6    PBRM1-23         670030            1649     2500      3875
                   Flange      Length                                              DN16KF                    0.9    K075-MBR         671501            329     494               774
                                                        Option -01 & -02                                                                                                                                                                                               800                       3.6    PBRM1-31         670033            1872     2800      4399
                   DN16CF          154                  In-line 12V DC motor                                                                                                                                                      Option -01
                   DN16KF          157                                                                                                                                                                                            Side mount stepper
                                                                                                         Motor       Add-on          Option                                                                                       motor
                                                                                   Motorization2         spec.       weight kg       number            £       €                                                                                                                             Motor       Add-on          Option
                                                                                   Motor                 C           0.5             -01               246     368                                                                                                     Motorization2         spec.       weight kg       Number            £        €         SFr.
                                                 Ø25
                          0


                                                                                                                                                                                                       123               127
                                                                                   Motor and encoder     C           0.5             -02               421     632                                                                                                     Stepper motor         D           2.3             -01               1090     1478      2562
                       1:1 Gear ratio                                                                                                                                                                                                                              1
                                                                               1
                                                                                   UHV units are bakeable to 230°C with actuator removed and 30°C maximum when motorized                                                                                               Bakeable to 30°C maximum with motor option fitted
                                                                                                                                                                                                                                                                   2
        ■   Shown with DN16CF flange                                           2
                                                                                   When ordering motorized options, add the option number and price to the desired. UHV or                                                                                             When ordering motorized options, add the option number and price to the desired UHV
        ■   Metal-seal flanges are non-rotatable with                              HV component part number listed above                                                                                                                                               component part number listed above
            clearance holes                                                                                                                                                                            50:1 Gear ratio                                                 For example: 670026-01
                                                                                   For example: 671507-02
                                                                                   For total unit weight, add option weight to component weight                                                                                                                        For total unit weight, add option weight to component weight
                                                                                                                                                                                                                                                                   3
                                                                                                                                                                                                                                                                       Screws provided


   All dimensions are nominal in millimetres unless specified Weights given are approximate                                                                                                                                                                    All dimensions are nominal in millimetres unless specified Weights given are approximate

484 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                                      Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 485
                    Section 7.1                                                                                                 Motion and manipulation                               Motion and manipulation                                                                                                                       Section 7.1
                    Rotary motion                                                                                                                                                                                                                                                                          Rotary motion
                    Magnetic and direct                                                                                                                                                                                                                                                             Direct, differentially pumped

                                                        UHV                                                    Magnetic drive                                                                                                                                                      UHV and HV series
                                                    Features                                                                                                                                                                                                                   Features
                                                    ■    Continuous rotary motion                                                                 Ø57                                                                                                                          ■    Continuous rotary motion
                                                    ■    Manual actuator                                                                                                                                                                                                       ■    Manual actuator
                                                    ■    Bakeable to 100°C                                                                                                                                                                                                     ■    UHV or HV-compatible materials
                                                    ■    DN40CF port mount                                                61                                                                                                                                                   ■    Differentially pumped, Dual Viton® elastomer
                                                    ■    Magnetically coupled                                                                                                                                                                                                       shaft seal
                                                                                                                                                                                                                                                                               ■    Bakeable to 100°C1
                                                                                                                                                                                                                                                                               ■    CF and ISO KF port mounts
      MRM-275                                       Specifications                                                             47.5                      DN40CF flange,
                                                                                                                                                         non-rotatable
                                                    Materials                            UHV compatible                                                  with clearance
                                                                                                                                                         holes
                                                    Vacuum range                            1.3x10-11 mbar
                                                                                                                         111
   Description                                      Temperature range                     -20°C to 100°C
                                                                                                                                   Ø6.4
   Caburn-MDC magnetically coupled                  Speed                               50 rpm maximum
   rotary motion feedthroughs provide                                                                                                                                                     DDRM-275
                                                    Torque                            0.14 Nm maximum
   basic rotation and UHV compatibility             Axial load                            1.1kg maximum
   without the use of bellows. This                                                                                                                                                                                                                                            Description
                                                    Lateral load 2.3 kg @ 101.6mm extension max
   product is intended for manually
                                                                                                               ■   Position lock not available                                                                                                                                 Differentially pumped direct-drive rotary motion feedthroughs
   operated light-duty service not                                                                                                                                                                 Knob omitted
   exceeding 0.1Nm of torque. Conflat®                                                                                                                                                             for clarity in                                                              provide 11Nm and 500rpm maximum rotation. The rotary shaft is
                                                                                                                                                                                                   top view                                              Ø4.4 thro, 4 places
   compatible DN40CF diameter CF                                                                                                                                                                                                                         equally spaced on a   supported by two radial bearings located inboard of dual Viton®
                                                                                                         Wt                             Part                                                                                                             Ø43.7 bolt circle     elastomer shaft seals. The region between the seals can be
   metal seal flanges are the standard                  Description                                      kg    Reference                number           £         €           SFr.
   mount.                                               UHV Series
                                                                                                                                                                                                                                                                               differentially pumped through the 3.2mm female pipe thread port
                                                        Manual actuation DN40CF                          0.9   MRM-275                  671000           700       1000        1031                                                                      Position lock
                                                                                                                                                                                                                                                                               provided and thus attain UHV compatibility to 1.3x10-9 mbar.
                                                                                                                                                                                                                                                         not available
                                                                                                                                                                                                                                                                               Specifications
                                                        HV                                                     Direct drive                                                                                                                                                    Material
                                                                                                                                                                                                                                 Ø28.5
                                                                                                                                                                                                                                                                               Flange/actuator body                                                               304ss
                                                    Features                                                               5.6 flat, typ                                                                                         Ø51                                           Shaft seal                                                                     Viton®
                                                    ■    Continuous rotary motion                                                                                                                                                                        Ø61 knob, includes    Vacuum range UHV/HV                                                   1.3x10 mbar
                                                                                                                                                                                                                                                                                                                                                             -9
                                                                                                                                                                                                                                                         8-32 UNC socket
                                                    ■    Manual actuator                                                                                                                                                                                 head set screw        Temperature range UHV/HV     1
                                                                                                                                                                                                                                                                                                                                                   -20°C to 100°C
                                                                                                                                                        13 flat, typ
                                                    ■    Viton® elastomer shaft seal                                                                                                                                                                                           Speed                                                              (500rpm) 11 Nm
                                                                                                                         1”-20 UNEF
                                                    ■    Bakeable to 100°C                                                                                                                                                                                                     Torque                                                                      11.3 Nm
                                                                                                                                                                                                   23
                                                    ■    25.4mm bolt hole installation                                                                                    73                                                                                                   Axial load                                                                         1.1 kg
                                                                                                                                                                                                                                                                               Lateral load       higher loads at reduced rpm                                     2.3 kg
                                                                                                                                                                   41
                                                                                                                                O-ring                                                                                                                    / ”-27 NPT thread,
                                                                                                                                                                                                                                                         1 8                   Weight and dimensions                                                       See table
      FRM-125
                                                    Specifications                                                                                                                                                                                       hex socket head
                                                                                                                                                                                          Flange     Length
                                                    Materials                              HV compatible                                                                                  DN40CF 64
                                                                                                                                                                                          DN40KF 63
                                                    Vacuum range                               1.3x10-8 mbar
                                                                                                                                  6.4                              38
   Description                                      Temperature range                     -20°C to 100°C                                                Ø6.4
   Caburn-MDC direct drive rotary                   Speed                             300 rpm maximum
   motion feedthroughs provide basic                Torque                            0.71 Nm maximum                    25.4 maximum
                                                                                                                                                                                                                                         Ø6.4
                                                                                                                         wall thickness
   rotation and HV compatibility.                   Axial load                            1.1kg maximum                                                                                                             12.7 flat,
   Vacuum integrity is maintained by a                                                                         ■   Hex nut 38.1mm flat-to-flat (2 places).                                                                               5.6 flat, typ
                                                                                                                                                                                                                      typ                                                                                 Wt                       Part
                                                    Lateral load       higher loads at reduced rpm    2.3 kg
   single preloaded Viton® elastomer                                                                           ■   O-ring seals on vacuum side of chamber wall.                                                                                                                    Description            kg       Reference       number   £        €            SFr.
                                                                                                               ■   Position lock not available.                                           Flange     Length                                                                        UHV series
   shaft seal. Fitted with dual rotary
                                                                                                                                                                                          DN40CF 24
   bearing shaft supports, this product                                                                                                                                                   DN40KF 25
                                                                                                                                                                                                                                                                                   DN40CF                 0.9      DDRM-275        652100   550      833          1293

   can be manually or mechanically                                                                       Wt                             Part
   operated at intermittent speeds up                   Description                                      kg    Reference                number           £         €           SFr.   ■   Shown with DN40CF flange
                                                                                                                                                                                                                                                                                   HV series
   to 300rpm. It is mounted on the                      HV Series                                                                                                                     ■   Metal-seal flanges are non-rotatable with clearance holes
                                                                                                                                                                                                                                                                                   DN40KF                 0.9      K150-DDRM       652101   540      821          1269
   traditional 25.4mm baseplate mount.                  Manual actuation 25.4mm baseplate HV             0.9   FRM-125                  652000           270       405         665                                                                                             1
                                                                                                                                                                                                                                                                                   UHV units are bakeable to 150°C with actuator removed.



   All dimensions are nominal in millimetres unless specified Weights given are approximate                                                                                                                                                                                All dimensions are nominal in millimetres unless specified Weights given are approximate

486 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                                                 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 487
                      Section 7.1                                                                                                          Motion and manipulation                     Motion and manipulation                                                                                                               Section 7.1
                      Linear motion                                                                                                                                                                                                                                                                     Linear motion
                      Standard                                                                                                                                                                                                                                                                                                    Standard

                                                                                                  UHV and HV series                                                                    UHV Series                Flange          Linear          A                                                Wt                        Part
                                                                                                                                                                                                                 size            travel      Min – Max        B             M           N         kg          Reference     number        £       €        SFr.

                                                                                              Features                                                                                 CF        100°C           DN16CF          25          90        115    140           172         152       0.5         BLM-133-1     660000        354     531      832
                                                                                                                                                                                                                 DN16CF          51          90        141    178           210         184       0.9         BLM-133-2     660004        414     622      974
                                                                                              ■    25 to 152mm linear travel                                                                                     DN16CF          102         90        192    256           299         273       1.4         BLM-133-4     660008        572     859      1410
                                                                                              ■    Manual or motorized actuator                                                                                  DN16CF          152         90        242    319           375         350       1.8         BLM-133-6     660012        690     1035     1621
                                                                                                                                                                                                                 DN40CF          25          90        115    140           172         152       0.5         BLM-275-1     660002        363     544      852
                                                                                              ■    Linear position lock
                                                                                                                                                                                                                 DN40CF          51          90        141    178           210         184       0.9         BLM-275-2     660006        422     634      993
                                                                                              ■    UHV or HV-compatible materials                                                                                DN40CF          102         90        192    256           299         273       1.4         BLM-275-4     660010        613     919      1439
                                                                                              ■    Welded bellows seal                                                                                           DN40CF          152         90        242    319           375         350       1.8         BLM-275-6     660014        779     1169     1831

                                                                                              ■    Bakeable to 100°C + 180°C1
                                                                                              ■    CF and ISO KF port mounts                                                           HV Series                 Flange          Linear          A                                                Wt                        Part
                                                                                                                                                                                                                 size            travel      Min – Max        B             M           N         kg          Reference     number        £       €        SFr.

                                                                                                                                                                                       ISO KF 100°C              DN16KF          25          87        112    143           177         152       0.5         K075-BLM-1    660020        350     525      823
                                                                                                                                                                                                                 DN16KF          51          87        138    181           216         190       0.9         K075-BLM-2    660024        411     616      1025
                                                                                                                                                                                                                 DN16KF          102         87        189    270           304         279       1.4         K075-BLM-4    660028        568     853      1336
                                                                                                                                                                                                                 DN16KF          152         87        239    350           381         355       1.8         K075-BLM-6    660032        686     1029     1612
                                                                                                                                                                                                                 DN40KF          25          91        116    138           173         148       0.5         K150-BLM-1    660022        354     531      832
     BLM-133-1
                                                                                                                                                                                                                 DN40KF          51          91        142    177           211         186       0.9         K150-BLM-2    660026        391     587      1058
                                                                                                                                                                                                                 DN40KF          102         91        193    265           300         275       1.4         K150-BLM-4    660030        572     859      1485

                                         Ø42
                                                                                              Description                                                                                                        DN40KF          152         91        243    342           376         351       1.8         K150-BLM-6    660034        771     1156     1913

                                         Ø19                                                  Caburn-MDC standard linear motion feedthroughs are the perfect
                                                                  Position lock
                                                                                              solution for linear displacement of in-vacuum samples or devices.                        Motorization options
                                                                                              They are constructed of the highest grade vacuum compatible
                                                                                              materials. Linear position is measured along a laser etched black-                                                                                                      Option -03
                                                                                              anodized barrel graduated in 0.001” (0.03mm) increments. A full                           Option -03                                                                    In-line stepper motor
                                                                  (0.64mm travel/rev)         revolution of the barrel translates into 0.025” (0.6mm) of linear                                                                                   49
                                                                                                                                                                                                             M
                                                                                              travel. A linear scale on the body is also provided and is marked in
                                                                                              both inch and metric units. The inch scale is graduated in increments
                                                                  Linear scale and shaft      of 0.025” (0.6mm) while the metric scale is graduated in 1mm                                                                                               57
                                                                  flat shown in line for      increments. Welded stainless steel bellows, a 40 pitch lead screw
                                                                  clarity only
                                                                                              design and the use of linear bearing shaft support provide devices
                                                                  Actual orientation                                                                                                                                  1:1 Gear ratio
                                                                                              with excellent durability and performance. They are available on
                                                                  varies
           B                                                                                  industry standard Conflat® compatible CF metal seal flanges or ISO                        Option -04
                                                                                              KF port mounts. A utomation can be attained with one of four                                               N
                                                                                              motorization options and controls. Motor controls must be
                                                                                                                                                                                                                            48
                                                                                              purchased separately.
                                                                                                                                                                                                                                                                                              Motor             Add-on      Option
                                                                                              Specifications                                                                                                                           Ø41                            Motorization1           Specification     weight kg   Number        £       €        SFr.
                                                                                                                                                                                                                                                                      In-line stepper         D                 0.9         -03           324     487      762
                                                                                              Material                                                                                                                                             94

                   Ø37
                                                                                              Flange / actuator body                                     304ss /Anodized aluminium
                                                                                                                                                                                                                                       Ø45                        1
                                                                                                                                                                                                                                                                      When ordering motorized options, add the option number and price to the desired UHV or HV
                                                                                              Shaft seal                                                    AM 350 welded bellows                                                                                     component part number listed above
                                                                                              Vacuum range UHV /HV                                     1.3x10-11 mbar/1.3x10-8 mbar                                       2.5:1 Gear ratio                            For example: 670036-03
                                                                                                                                                                                                         79
                                                                                         19                                                                                                                                                                           For total unit weight, add option weight to component weight
                                                                                              Temperature range UHV /HV   1
                                                                                                                                                           -20°C to 100°C + 180°C
                                                                                  14.2        Axial load                                                                      2.3 kg
                            Ø6.4
                                                                                              Lateral load                                       2.3 kg @ 50.8 extension maximum
                                                                            4.6
                                                                                              Weight and dimensions                                                        See table
           A                                     6-32 tapped
                                                 thro, 2 places                               1
                                                                                                  UHV units are bakeable to 230°C with actuator removed and 30°C maximum
                                                                                                  when motorized


                                                          5.4


 ■   Shown with DN16CF flange
 ■   Metal-seal flanges are non-rotatable with clearance holes
 ■   Shaft flat is oriented visually between two flange bolt holes



All dimensions are nominal in millimetres unless specified                                                                                                                                                                                                    All dimensions are nominal in millimetres unless specified Weights given are approximate


Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                                         Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk
                            Section 7.1                                                                                                     Motion and manipulation                    Motion and manipulation                                                                                                         Section 7.1
                            Linear motion                                                                                                                                                                                                                                                        Linear motion
                            High temperature standard                                                                                                                                                                                                                                      High temperature compact

                                                                                                       UHV Series                                                                                                                                                          UHV Series

                                                                                                   Features                                                                                                                                                            Features
                                                                                                   ■    25 to 51mm linear travel                                                                                                                                       ■    51mm linear travel
                                                                                                   ■    Manual actuator                                                                                                                                                ■    Manual actuator
                                                                                                   ■    Linear position lock                                                                                                                                           ■    UHV-compatible materials
                                                                                                   ■    UHV-compatible materials                                                                                                                                       ■    Formed bellows seal
                                                                                                   ■    Welded bellows seal                                                                                                                                            ■    Bakeable to 230°C
                                                                                                   ■    Bakeable to 230°C                                                                                                                                              ■    CF port mounts
                                                                                                   ■    CF port mounts




         HBLM-133-1                                                                                                                                                                        E-LMD-133-2


                                                                                                   Description                                                                                                                                                         Description
                                            Ø42
                                                                                                   Caburn-MDC high-temperature linear motion feedthroughs are the                                                                                                      Compact high-temperature linear motion feedthroughs have the
                                            Ø19                                                    perfect solution for linear displacement of in-vacuum samples or                                                                                                    smallest atmosphere side envelope and are constructed with high
                                                                    Position lock                  devices. They are constructed of 304ss to endure the rigors of high                                                                                                 temperature vacuum grade materials. Linear position is measured
                                                                                                   temperature vacuum service. Linear position is measured along a                                                                                                     along a laser etched stainless steel barrel graduated in 20 equally
                                                                                                   laser etched stainless steel barrel graduated in 0.001” (0.03mm)                                                                              Ø30                   spaced increments. A full revolution of the barrel translates into
                                                                                                                                                                                               67 min
                                                                    (0.64mm travel/rev)
                                                                                                   increments. A full revolution of the barrel translates into 0.025”                         118 max
                                                                                                                                                                                                                                                                       1.25mm of linear travel. Air side linear clearance must be considered
                                                                                                   (0.6mm) of linear travel. A linear scale on the body is also provided                                                                                      66       to accommodate the rising lead screw mechanism. Formed stainless
                                                                                                   and is marked in both inch and metric units. The inch scale is                                                                                                      steel bellows, a 1.25mm pitch lead screw design and the use of
                                                                                                   graduated in increments of 0.025” while the metric scale is                                                                                                         radial bearings provide this product with excellent durability and
                                                                    Linear scale and               graduated in 1mm increments. Welded stainless steel bellows, a 40                                                                                                   performance. All drive mechanism components are located on the
                                                                    shaft flat shown in
                                                                    line for clarity only
                                                                                                   pitch lead screw design and the use of linear bearing shaft support                                                                                                 atmosphere side of the formed bellows.
            Travel Length                                                                          provide devices with excellent durability and performance.
              25      140
                                                                    Actual orientation
                                                                    varies
                                                                                                                                                                                                                                                                       Specifications
              51      178                                                                          Specifications                                                                                                                                                      Material
                                                                                                   Material                                                                                                                                                            Flange/actuator body                                                           304ss
                                                                                                   Flange /actuator body                                                       304ss                                                                                   Shaft seal                                 Type 312 stainless steel formed bellows
                                                                                                   Shaft seal                                           AM 350 welded bellows                                                                                          Vacuum range                                                          1x10-11 mbar
                                                                                                   Vacuum range                                                  1.3x10 mbar
                                                                                                                                                                         -11
                                                                                                                                                                                                                                                                       Temperature range                                                  -20°C to 230°C
                                                                                                                                                                                                                                                   Position lock
                                                                                                   Temperature range                                            -20°C to 230°C                111 min
                                                                                                                                                                                                                                                   not available       Axial load                                                         4.5 kg maximum
                      Ø37                                                                                                                                                                     162 max
                                                                                                   Axial load                                                   2.3 kg maximum                                                                                         Lateral load                                   2.3 kg @ 50.8 extension maximum
                                                                                                   Lateral load                               2.3 kg @ 50.8 extension maximum                                                                                          Weight and dimensions                                                       See table
                                                                                            19.1
                                                                                                   Weight and dimensions                                                See table
                                                                                    14.2
                                 Ø6.4


          Travel      Length                                                   19.8                                                                                                                                                                3.3
                                                   6-32 tapped
            25       90 – 115                      thro, 2 places
            51       90 – 141


                                                                                                       Shaft              Wt                   Part                                               M4 x 9.5 deep,
                                                            5.4                                                                                                                                   Ø0.06 vent hole
                                                                                                       length   Flange    kg    Reference      number     £       €            SFr.
                                                                                                       UHV Series                                                                                                                         10.7 across flats
                                                                                                                                                                                                                                                                           Linear             Wt                        Part
                                                                                                       25       DN16CF    0.5   HTBLM-133-1    660036     391     587          920                                                                                         travel             kg      Reference         number      £       €         SFr.
     ■   Shown with DN16CF flange
                                                                                                       25       DN40CF    0.9   HTBLM-275-1    660037     403     604          946                                                         Ø14                             UHV Series
     ■   Metal-seal flanges are non-rotatable with clearance holes                                                                                                                     ■   Shown with DN16CF flange
                                                                                                       51       DN16CF    0.9   HTBLM-133-2    660038     466     699          1095                                                                                        DN16CF             0.5     E-LMD-133-2       665512      489     734       1150
     ■   Shaft flat is oriented visually between two flange bolt holes                                                                                                                 ■   Metal seal flanges are non-rotatable with clearance holes
                                                                                                       51       DN40CF    1.4   HTBLM-275-2    660039     477     716          1121                                                                                        DN40CF             1.4     E-LMD-275-2       665513      667     1000      1567


   All dimensions are nominal in millimetres unless specified Weights given are approximate                                                                                                                                                                        All dimensions are nominal in millimetres unless specified Weights given are approximate

490 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                                                 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 491
                         Section 7.1                                                                                                    Motion and manipulation                           Motion and manipulation                                                                                             Section 7.1
                         Linear motion                                                                                                                                                                                                                                                Linear motion
                         Miniature                                                                                                                                                                                                                                                                               Miniature

                                                                                               UHV and HV series                                                                          UHV Series                Flange       Linear         A                               Wt                           Part
                                                                                                                                                                                                                    size         travel   Min   – Max             B             kg      Reference            number        £       €        SFr.

                                                                                           Features                                                                                       CF       100°C            DN16CF       13       25      38              114           0.9     MBL-133-0            660500        590     885      1298
                                                                                                                                                                                                                    DN16CF       25       25      50              127           0.9     MBL-133-1            660501        840     1250     1974
                                                                                           ■    13 to 25mm linear travel
                                                                                           ■    Manual or motorized actuator                                                              UHV Series                Flange       Linear         A                               Wt                           Part
                                                                                                                                                                                                                    size         travel   Min   – Max             B             kg      Reference            number        £       €        SFr.
                                                                                           ■    Linear position lock
                                                                                                                                                                                          CF       180°C            DN16CF       13       25      38              114           0.9     E-MBL-133-0          660512        660     990      1551
                                                                                           ■    UHV and HV-compatible materials                                                                                     DN16CF       25       25      50              127           0.9     E-MBL-133-1          660513        890     1345     2092
                                                                                           ■    Welded bellows seal
                                                                                           ■    Bakeable to 180°C1                                                                        HV Series                 Flange       Linear         A                               Wt                           Part
                                                                                                                                                                                                                    size         travel   Min   – Max             B             kg      Reference            number        £       €        SFr.
                                                                                           ■    CF and ISO KF port mounts
                                                                                                                                                                                          ISO KF 100°C              DN16KF       13       25      38              114           0.9     K075-MBL-0           660502        660     990      1551
                                                                                                                                                                                                                    DN16KF       25       25      50              127           0.9     K075-MBL-1           660503        845     1255     19860




                                                                                                                                                                                          Motorization options
         E-MBL-133-1
                                                                                                                                                                                                                                                       Option -01                                         Option -02
                                                                                                                                                                                                                                                       In-line 12V DC motor                               In-line 12V DC motor and encoder
                                                                                           Description
                                                                                           Caburn-MDC miniature linear feedthroughs are specifically designed
                                                                                           for in-vacuum light-duty applications. Full revolution of the barrel                                            Travel      Length
                                                                                           translates into 0.6mm of linear travel. These instruments are                                                    13          181
                                            Ø25                                                                                                                                                             25          194
                                                                     Position lock         available in both manual or low voltage 12V DC motor
                                                                                           configurations. Motor options with an integral magnetic encoder are
                                                                                           also available.
                                                                     (0.64mm travel/rev)   Motor controls are not included with the motor options and must                                                                                Ø25

                                                                                           be purchased separately.
                                                                                                                                                                                                            40:1 Gear ratio
                                                                                           Specifications
                                                                                                                                                                                                                                                                           Motor            Add-on           Option
                                                                                           Material                                                                                                                                                    Motorization1       specification    weight kg        number        £       €        SFr.
                                                                                           Flange /actuator body                                      304ss /Anodized aluminium                                                                        Motor               D                0.9              -01           350     520      823

                                                                                           Shaft seal                                                    AM 350 welded bellows                                                                         Motor and encoder C                  0.9              -02           600     900      1410
                B
                                                                                                                                                                        1x10 mbar
                                                                                                                                                                           -11                                                                     1
                                                                                           Vacuum range                                                                                                                                                When ordering motorized options, add the option number and price to the desired UHV or HV
                                                                                                                                                                                                                                                       component part number listed above
                                                                                           Temperature range 1 Manual                                             -20°C to 100°C                                                                       For example: 670036-03
                                                                                           Axial load                                                                            1.1 kg                                                                For total unit weight, add option weight to component weight
                                                                                           Lateral load                                                           2.3 kg maximum
                                                                                           Weight and dimensions                                                          See table
                                                                                           1
                                                                                               UHV units are bakeable to 230°C with actuator removed and 30°C maximum
                                                                                               when motorized




                                                       Ø4.7
                             9.5
                A


                                                      Ø3.2




     ■   Shown with DN16CF flange
     ■   Metal-seal flanges are non-rotatable with clearance holes




   All dimensions are nominal in millimetres unless specified                                                                                                                                                                                     All dimensions are nominal in millimetres unless specified Weights given are approximate

492 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                                    Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 493
                      Section 7.1                                                                                                          Motion and manipulation                     Motion and manipulation                                                                            Section 7.1
                      Linear motion                                                                                                                                                                                                                                   Linear motion
                      Push-pull                                                                                                                                                                                                                                                              Push-pull

                                                                                                  UHV and HV series                                                                    UHV Series        Flange   Linear       A                B               Wt                        Part
                                                                                                                                                                                                         size     travel   Min – Max        Min –    Max        kg      Reference         number        £       €       SFr.

                                                                                              Features                                                                                 CF       100°C    DN16CF   25       90    115        165      191        0.5     SBLM-133-1        663000        350     550     743
                                                                                                                                                                                                         DN16CF   51       90    141        203      254        0.9     SBLM-133-2        663004        441     650     1036
                                                                                              ■    25 to 152mm linear travel                                                                             DN16CF   102      90    192        292      394        1.4     SBLM-133-4        663016        623     940     1464
                                                                                              ■    Manual actuator                                                                                       DN16CF   152      90    242        368      521        1.8     SBLM-133-6        663018        790     1185    1857
                                                                                                                                                                                                         DN40CF   25       90    115        165      191        0.5     SBLM-275-1        663002        364     560     855
                                                                                              ■    Linear position lock
                                                                                                                                                                                                         DN40CF   51       90    141        203      254        0.9     SBLM-275-2        663006        455     690     1069
                                                                                              ■    UHV or HV-compatible materials                                                                        DN40CF   102      90    192        292      394        1.4     SBLM-275-4        663017        637     960     1497
                                                                                              ■    Welded bellows seal                                                                                   DN40CF   152      90    242        368      521        1.8     SBLM-275-6        663019        800     1112    1880

                                                                                              ■    Bakeable to 100°C1
                                                                                              ■    CF and ISO KF port mounts                                                           HV Series         Flange   Linear       A                B               Wt                        Part
                                                                                                                                                                                                         size     travel   Min – Max        Min –    Max        kg      Reference         number        £       €       SFr.

                                                                                                                                                                                       ISO KF 100°C      DN16KF   25       87    112        168      193        0.5     K075-SBLM-1       663008        345     500     811
                                                                                                                                                                                                         DN16KF   51       87    138        206      257        0.9     K075-SBLM-2       663012        436     640     1025
                                                                                                                                                                                                         DN16KF   102      87    189        297      399        1.4     K075-SBLM-4       663020        618     930     1312
                                                                                                                                                                                                         DN16KF   152      87    239        371      523        1.8     K075-SBLM-6       663024        740     1087    1739
                                                                                                                                                                                                         DN40KF   25       91    116        165      193        0.5     K150-SBLM-1       663010        359     550     844
   SBLM-133-1
                                                                                                                                                                                                         DN40KF   51       91    142        203      254        0.9     K150-SBLM-2       663014        450     611     1058
                                                                                                                                                                                                         DN40KF   102      91    193        292      394        1.4     K150-SBLM-4       663022        632     950     1485
                                                                                              Description                                                                                                DN40KF   152      91    243        368      521        1.8     K150-SBLM-6       663026        750     1100    1763
                                          Ø41
                                                                                              Caburn-MDC push-pull linear motion feedthroughs are the most
                                                                                              basic of the manual motion devices offered in this catalogue. They
                                                          Ø35 knob,                           provide quick action linear motion via a stainless steel hand-held
                                                          0.25”-20 UNC thread
                                                                                              actuator shaft. They are typically operated by observing the motion
                                                                 Linear scale and             process through a vacuum viewport. For quick and easy positioning
                                                                 shaft flat shown in          reference the feedthrough body has been laser etched with linear
                     32                                          line for clarity only
                                                                                              travel graduation marks in increments of 0.025” (0.6mm). An
                                                                 Actual orientation
                                                                 varies                       attractive black anodized finish provides high contrast visibility of
                                                                                              the laser etched graduated scale. The actuator can be locked in
                                                                                              position by simply tightening the position lock located at the top
                B
                                                                                              end of the actuator body.
                                                                                              Push-pull linear motion feedthroughs are constructed of the highest
                     Position                                                                 grade vacuum compatible materials. Welded stainless steel bellows
                     lock
                                                                                              and the use of linear bearing shaft supports provide reliability and
                                                                                              smooth operation.
                                                                                              Specifications
                                                                                              Material
                       Ø37
                                                                                              Flange / actuator body                                     304ss /Anodized aluminium
                                                                                              Shaft seal                                                    AM 350 welded bellows
                                                                                              Vacuum range UHV /HV                                     1.3x10-11 mbar/1.3x10-8 mbar
                                                      Ø6.4
                                                                                         19   Temperature range 1 UHV /HV                                            -20°C to 100°C
                                                                                  14.2        Axial load                                                                      4.5 kg
                                                                                              Lateral load                                       2.3 kg @ 50.8 extension maximum
                A                                                                             Weight and dimensions                                                        See table
                                                6-32 tapped                 4.6
                                                                                              1
                                                thro, 2 places                                    UHV units are bakeable to 230°C with actuator removed and 30°C maximum
                                                                                                  when motorized



                                                         5.4


     ■   Shown with DN16CF flange
     ■   Metal-seal flanges are non-rotatable with clearance holes
     ■   Shaft flat is oriented visually between two flange bolt holes



All dimensions are nominal in millimetres unless specified                                                                                                                                                                             All dimensions are nominal in millimetres unless specified Weights given are approximate


Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                          Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk
                          Section 7.1                                                                                                     Motion and manipulation                       Motion and manipulation                                                                            Section 7.1
                          Linear motion                                                                                                                                                                                                                                Linear motion
                          Rack and pinion                                                                                                                                                                                                                                            Rack and pinion

                                                                                                UHV and HV series                                                                       UHV Series        Flange   Linear       A                B               Wt                        Part
                                                                                                                                                                                                          size     travel   Min – Max        Min –    Max        kg      Reference         number        £       €       SFr.

                                                                                            Features                                                                                    CF       100°C    DN16CF   51       90    141        165      216        0.9     RPLM-133-2        666000        522     830     1109
                                                                                                                                                                                                          DN16CF   102      90    192        254      356        1.4     RPLM-133-4        666002        760     1130    1786
                                                                                            ■    50 to 152mm linear travel                                                                                DN16CF   152      90    242        330      483        1.8     RPLM-133-6        666004        880     1330    2068
                                                                                            ■    Manual actuator                                                                                          DN40CF   51       90    141        165      216        1.4     RPLM-275-2        666001        620     940     1457
                                                                                                                                                                                                          DN40CF   102      90    192        254      356        1.8     RPLM-275-4        666003        780     1170    1833
                                                                                            ■    Linear position lock
                                                                                                                                                                                                          DN40CF   152      90    242        330      483        2.3     RPLM-275-6        666005        900     1350    2000
                                                                                            ■    UHV or HV-compatible materials
                                                                                            ■    Welded bellows seal                                                                    HV Series         Flange   Linear       A                B               Wt                        Part
                                                                                                                                                                                                          size     travel   Min – Max        Min –    Max        kg      Reference         number        £       €       SFr.
                                                                                            ■    Bakeable to 100°C1
                                                                                            ■    CF and ISO KF port mounts
                                                                                                                                                                                        ISO KF 100°C      DN16KF   51       87    140        168      219        0.9     K075-RPLM-2       666006        540     810     1269
                                                                                                                                                                                                          DN16KF   102      87    189        257      359        1.4     K075-RPLM-4       666010        750     1120    1763
                                                                                                                                                                                                          DN16KF   152      87    239        333      486        1.8     K075-RPLM-6       666014        870     1320    2045
                                                                                                                                                                                                          DN40KF   51       91    142        164      215        0.9     K150-RPLM-2       666008        560     840     1316
                                                                                                                                                                                                          DN40KF   102      91    193        253      354        1.4     K150-RPLM-4       666012        760     1100    1718
                                                                                                                                                                                                          DN40KF   152      91    243        329      481        1.8     K150-RPLM-6       666016        896     1330    2106
                                                                Linear scale
             RPLM-133-2


                                                                                            Description
                                        32               45
                                                                                            Caburn-MDC rack and pinion linear motion feedthroughs are very
                                              Ø41
                                                                                            similar to push-pull devices, but provide finer control of linear
                                                                                            motion. The rack and pinion drive mechanism is still considered
                                                                                            quick-action when compared to rotating actuator, linear motion
                                                                                            devices. They too are operated by observing the motion process
                                                                                            through a vacuum viewport. For quick and easy positioning
                                                                   (20mm travel/            reference the feedthrough body has been laser etched with linear
                                                                   rev approx)              travel graduation marks in increments of 0.6mm. A 11⁄4 turn on the
                                                                                            handle generates 25mm of linear travel. An attractive black anodized
                                                                   Linear scale and
                                                                   shaft flat shown         finish provides high contrast and visibility of the laser etched
                                                                   in line for clarity      graduated scale. The actuator can be locked in position by simply
                         Position                                  only
                         lock                                                               tightening the position lock located at the top end of the actuator
                    B
                                                                   Actual orientation       body.
                                                                   varies
                                                                                            Rack and pinion linear motion feedthroughs are constructed of high
                                                                                            grade vacuum compatible materials.Welded stainless steel bellows
                                                                                            and the use of linear bearing shaft supports provide reliability and
                                                                                            smooth operation.

                            Ø37                                                             Specifications
                                                                                            Material
                                                                                            Flange /actuator body                                        304ss /Anodized aluminium
                                                                                            Shaft seal                                                      AM 350 welded bellows
                                                         Ø6.4
                                                                                       19   Vacuum range UHV /HV                                        1.3x10-11 mbar /1.3x10-8 mbar
                                                                                14.2
                                                                                            Temperature range 1 UHV /HV                                             -20°C to 100°C
                                                                                            Axial load                                                                         4.5 kg
                                                     6-32
                    A                                tapped               4.6               Lateral load                                    2.3 kg @ 50.8mm extension maximum
                                                     thro,
                                                     2 places                               Weight and dimensions                                                          See table
                                                                                            1
                                                                                                UHV units are bakeable to 230°C with actuator removed

                                                         5.4

     ■   Shown with DN16CF flange
     ■   Metal-seal flanges are non-rotatable with clearance holes
     ■   Shaft flat is oriented visually between two flange bolt holes



   All dimensions are nominal in millimetres unless specified                                                                                                                                                                           All dimensions are nominal in millimetres unless specified Weights given are approximate

496 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                       Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 497
                          Section 7.1                                                                                                          Motion and manipulation                    Motion and manipulation                                                                                         Section 7.1
                          Linear motion                                                                                                                                                                                                                                               Linear motion
                          Pneumatic                                                                                                                                                                                                                                                                        Pneumatic

                                                                                                     UHV and HV series                                                                    UHV Series        Flange         Linear         A                     B               Wt                        Part
                                                                                                                                                                                                            size           travel     Min – Max             Min –    Max        kg      Reference         number        £       €       SFr.

                                                                                                 Features                                                                                 CF        100°C   DN16CF         25         90         115        216      241        0.9     ABLM-133-1       662000-01      495     740     1163
                                                                                                                                                                                                            DN16CF         51         90         141        279      330        1.4     ABLM-133-2       662004-01      550     820     1293
                                                                                                 ■    25 to 51mm linear travel                                                                              DN40CF         25         90         115        216      241        1.4     ABLM-275-1       662002-01      520     770     1222
                                                                                                 ■    Pneumatic actuator                                                                                    DN40CF         51         90         141        279      330        1.4     ABLM-275-2       662006-01      600     900     1410

                                                                                                 ■    Adjustable linear travel stop
                                                                                                 ■    UHV or HV compatible materials                                                      HV Series         Flange         Linear         A                     B               Wt                        Part
                                                                                                                                                                                                            size           travel     Min – Max             Min –    Max        kg      Reference         number        £       €       SFr.
                                                                                                 ■    Welded bellows seal
                                                                                                                                                                                          ISO KF 100°C      DN16KF         25         87         112        218      244        0.9     K075-ABLM-1      662008-01      490     735     1152
                                                                                                 ■    Bakeable to 100°C1                                                                                    DN16KF         51         87         138        282      333        1.4     K075-ABLM-2      662012-01      545     815     1281
                                                                                                 ■    CF and ISO KF port mounts                                                                             DN40KF         25         91         116        216      241        0.9     K150-ABLM-1      662010-01      500     750     1175
                                                                                                                                                                                                            DN40KF         51         91         142        279      330        1.4     K150-ABLM-2      662014-01      590     890     1387
                                                                                                 ■    Complete with 24V DC air control solenoid valve
                                                                                                 ■    240V AC air control solenoid valve optional
                                                                                                                                                                                          Air control                                                                                                     Option
                                                                                                                                                                                                            Description                                                                                   number        £       €       SFr.
                                                                                                                                                                                          solenoid valves
                                                                                                                                                                                                            240V AC Air control solenoid valve                                                            -02           55      81      129
         ABLM-275-2                                  Includes 24V DC solenoid.


                                                                                                 Description
                                                                                                 Pneumatic linear motion feedthroughs provide two-position fast
                                                               Adjustable                        action linear motion. Typical motion applications would include on-
                                                               stop                              off, open-close and in-out motions similar to those of in-vacuum
                         Air fitting
                         for 4                                                                   shutters. Linear travel can be shortened or lengthened by turning
                         OD tube                                                                 the adjustment knob located at the top end of the pneumatic
                         (2 places)
                                                                                                 actuator. Once adjusted the jam nut locks the knob in place. For
                                                                     Solenoid valve remotely     quick and easy positioning the feedthrough body has been laser
                                                                     mounted (not shown)
                                                                                                 etched with linear travel graduation marks in increments of 0.025”
                                                                     Linear scale, shaft flat    (0.6mm). A black anodized finish provides high contrast and visibility
                                                                     and air fittings shown in
                                                                     line for clarity only       of the laser etched graduated scale. Pneumatic linear motion
                                                                                                 feedthroughs are constructed of high grade vacuum compatible
                                                                     Actual orientation varies
                                                                                                 materials. Welded stainless steel bellows and the use of linear
               B                                                                                 bearing shaft supports provide reliability and smooth operation.

                                                                                                 Specifications
                                                                                                 Material
                                                                                                 Flange /actuator body                                       304ss /Anodized aluminium
                                                                                                 Shaft seal                                                    AM 350 welded bellows
                                                                                                 Piston seal                                                             Viton® O-ring
                                                                                                 Vacuum range UHV /HV                                         1x10-11 mbar /1x10-8 mbar
                            Ø37                                                                  Temperature range UHV /HV   1
                                                                                                                                                                       -20°C to 100°C
                                                                                            19
                                                                                                 Axial load                                                            9.1 kg maximum
                                                                                     14.2
                                                                                                 Lateral load                                    2.3 kg @ 50.8mm extension maximum
                                                                                                 Actuator pressure                                                          4 – 5.5 bar
                                                                               4.6
                                                    6-32 tapped                                  Piston surface area                                                           5.7 cm2
                                                    thro, 2 places
              A                                                                                  Solenoid valve                                                               24V DC
                                                                                                 Weight and dimensions                                                        See table
                                                                                                 1
                                                             5.4                                     UHV units are bakeable to 230°C with actuator removed


                                 Ø6.4
     ■   Shown with DN16CF flange
     ■   Metal-seal flanges are non-rotatable with clearance holes
     ■   Shaft flat is oriented visually between two flange bolt holes



   All dimensions are nominal in millimetres unless specified                                                                                                                                                                                          All dimensions are nominal in millimetres unless specified Weights given are approximate

498 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                              Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 499
                       Section 7.1                                                                                             Motion and manipulation                       Motion and manipulation                                                                                                           Section 7.1
                       Linear motion                                                                                                                                                                                                                                                      Linear motion
                       Heavy duty                                                                                                                                                                                                                                                          Heavy duty, pneumatic

                                                                                  UHV Series                                                                                                                                                                  UHV Series

                                                                              Features                                                                                                                                                                    Features
                                                                              ■    50 to 152mm linear travel                                                                                                                                              ■    25 to 76mm linear travel
                                                                              ■    Manual actuator                                                                                                                                                        ■    Pneumatic actuator
                                                                              ■    UHV-compatible materials                                                                                                                                               ■    UHV-compatible materials
                                                                              ■    Welded bellows seal                                                                                                                                                    ■    Welded bellows seal
                                                                                                               1
                                                                              ■    Bakeable to 100°C                                                                                                                                                      ■    Bakeable to 100°C1
                                                                              ■    DN40CF port mount                                                                                                                                                      ■    DN40CF port mount




      HLM-275-2                                                                                                                                                               ALM-275-2                            Includes 24V DC solenoid


                                                                              Description                                                                                                                                                                 Description
                                     Ø51                                      Heavy duty linear motion feedthroughs allow linear displacement of                                                             Ø43                                          Heavy-duty pneumatic linear motion feedthroughs provide two-
                                                                              larger in-vacuum samples and components. This feedthrough has                                                                                                               position fast-action linear motion for heavy sample loads. Typical
                                                                              basic, rotary manual actuation and does not provide position                                                                                                                motion applications would include open-close or in-out motions
                                                           (4.2mm
                                                                              indication. Position must be determined by visual inspection of the                                                                                                         similar to those used for in-vacuum shutters.
                                                           travel/rev)        in-vacuum sample or component. A heavy duty acme thread lead
                                                                              screw provides 25mm of linear travel for every six revolutions of                                                                                                           Specifications
                                                                              the actuator knob. Unlike conventional motion feedthroughs, heavy                                                                          Air fitting for 4 OD tube,       Material
                                                                                                                                                                                                                         2 places
                                                                              duty models have a re-entrant welded bellows configuration.                                                                                Fittings, flange and nose        Flange/actuator body                                        304ss /Anodized aluminium
         Travel Length
                                                                                                                                                                                                                         piece shown aligned              Shaft seal                                                    AM 350 welded bellows
           51
           76
                 109
                 124
                                                                              Specifications                                                                                       Travel   Length
                                                                                                                                                                                                                         for clarity only
                                                                                                                                                                                                                                                          Actuator gaskets                                                                   Viton®
          102    160                                       Ø51                                                                                                                        25     127
                                                                              Material                                                                                                                                                                    Vacuum range                                                               1x10 mbar
                                                                                                                                                                                                                                                                                                                                           -11
          153    210                                                                                                                                                                  51     178
                                                                              Flange /actuator body                                         304ss /Anodized aluminium                 76     229                                                          Temperature range           1
                                                                                                                                                                                                                                                                                                                                  -20°C to 100°C
                                                                              Shaft seal                                                      AM 350 welded bellows                                                      Solenoid valve remotely          Axial load                                                                             9.1 kg
                                                                              Vacuum range                                                                 1x10-11 mbar                                                  mounted (not shown)
                                                                                                                                                                                                                                                          Lateral load                                  9.1 kg @ 76mm extension maximum
                                                           DN40CF
                                                           flange,            Temperature range 1                                                       -20°C to 100°C                                                                                    Solenoid valve                                                                   24V DC
                                                           non-rotatable
                                                           with               Axial load                                                                            9.1 kg                                                     DN40CF flange,             Weight and dimensions                                                         See table
                                                           clearance
                                                           holes
                                                                              Lateral load                                     9.1 kg @ 101.6mm extension maximum                                                              non-rotatable with
                                                                                                                                                                                                                                                          1
                                                                                                                                                                                                                               clearance holes                UHV units are bakeable to 230°C with actuator removed
                                                                              Weight and dimensions                                                              See table
      Travel     Length                                                       1
                                                                                  UHV units are bakeable to 230°C with actuator removed
        51       39 – 90
        76      53 – 129                                                                                                                                                        Travel      Length
       102      60 – 162                                                                                                                                                         25          28 – 53
       153      81 – 234                                                                                                                                                         51          39 – 90
                                                                                                                                                                                 76         50 – 126




                           Ø33                                                                                                                                                                         Ø33
                                                     Nose piece face,             Linear                 Wt                        Part
                                                     10-32 x 9 deep,              travel                 kg        Reference       number        £        €         SFr.        Nose piece face,
                                                     4 places, equally                                                                                                          10-32 x 9 deep,                                                               Linear                 Wt                       Part
                                                     spaced on a 25.4 BC          UHV Series                                                                                    4 places, equally                                                             travel                 kg      Reference        number          £        €            SFr.
                                                     with side vent               51                     0.9       HLM-275-2       661018        583      875       1371        spaced on a 25.4 BC                                                           UHV series
                                                                                                                                                                                with side vent
                                                                                  76                     0.9       HLM-275-3       661000        596      895       1402                                                                                      25                     0.9     ALM-275-1        661050-01       680      1000         1598
                                                                                  102                    0.9       HLM-275-4       661016        750      1125      1763                                                                                      51                     1.4     ALM-275-2        661051-01       860      1280         2021
                                                                                  153                    1.4       HLM-275-6       661017        1007     1510      2365                                                                                      76                     1.4     ALM-275-3        661052-01       880      1320         2068




   All dimensions are nominal in millimetres unless specified Weights given are approximate                                                                                                                                                           All dimensions are nominal in millimetres unless specified Weights given are approximate

500 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                            Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 501
                      Section 7.1                                                                                            Motion and manipulation                           Motion and manipulation                                                                                                           Section 7.1
                      Linear motion                                                                                                                                                                                                                                                         Linear motion
                      Heavy duty, push-pull                                                                                                                                                                                                                                           Heavy duty, tunnel access

                                                                                  UHV Series                                                                                                                                                                    UHV Series

                                                                              Features                                                                                                                                                                      Features
                                                                              ■    50 to 152mm linear travel                                                                                                                                                ■    50 to 152mm linear travel
                                                                              ■    Manual actuator                                                                                                                                                          ■    Manual actuator
                                                                              ■    Linear position lock                                                                                                                                                     ■    Linear position lock
                                                                              ■    UHV compatible materials                                                                                                                                                 ■    UHV-compatible materials
                                                                              ■    Welded bellows seal                                                                                                                                                      ■    Welded bellows seal
                                                                              ■    Bakeable to 100°C1                                                                                                                                                       ■    Bakeable to 100°C1
                                                                              ■    DN40CF port mount                                                                                                                                                        ■    DN40CF port mount




      SLM-275-3 Special                                                                                                                                                         TLM-275-2


                                                                              Description                                                                                                                                                                   Description
                                                                                                                                                                                                                   Ø8
                                            37                                Heavy duty push-pull linear motion feedthroughs allow linear                                                                                                                  Heavy duty tunnel access, push-pull linear motion feedthroughs
                                                                              displacement of heavier samples and components than conventional                                                                                                              allow linear displacement of heavy samples and components. The
                                                                              designs. These devices do not provide position indication. Sample or                                                                       8 wide slot                        push-pull shaft is hollow providing tunnel access for instrumentation
                                                                              component position must be verified visually through a viewport.                                                 Ø35 knob,                                                    leads such as those used for thermocouple temperature
                                                                              Sample linear position can be fixed with an integral position lock                                               0.5”-13 UNC                                                  measurements and other low voltage electrical applications. The
                   Ø35 knob,                                                                                                                                                                   thread
                   0.5”-13 UNC
                                                                              knob mounted on the actuator housing. Unlike conventional motion                                                                                                              vacuum nose piece is shipped with a blank DN16CF flange which
                   threaded,                                                  feedthroughs, heavy duty models employ re-entrant welded bellows                                                                                                              can be removed or modified to accept electrical feedthroughs as
                   no through hole
                                                                              construction allowing the use of sturdier and larger diameter shafts.                                                           32                       Position lock        required. These devices do not provide position indication. Sample
                                                        Position lock         Push-pull linear motion feedthroughs provide two-position fast                                                                                                                or component position must be verified visually through a viewport.
       Travel    Length
                                                                              action motion ideal for applications including open-close or in-out                                                                                                           Sample linear position can be fixed with an integral position lock
                                                                                                                                                                                 Travel      Length
         51     167 – 218
                                                                              motions similar to those used for in-vacuum shutters. Special                                                                                                                 knob mounted on the actuator housing. Unlike conventional motion
                                                                                                                                                                                   51      210 – 260
        102     167 – 269                                                     configurations, such as the 76.2mm version displayed in the                                         102      210 – 311                                                        feedthroughs, heavy duty models employ re-entrant welded bellows
        152     167 – 319                                                                                                                                                         152      210 – 362
                                                                              photograph, may be quoted upon request.                                                                                                                                       construction allowing the use of sturdier and larger diameter shafts.

                                                        Ø51                   Specifications                                                                                                                                                                Specifications
                                                                              Material                                                                                                                                                                      Material
                                                                              Flange /actuator body                                        304ss /Anodized aluminium
                                                                                                                                                                                                                                  37                        Flange/actuator body                                         304ss /Anodized aluminium
                                                        DN40CF flange,        Shaft seal                                                     AM 350 welded bellows
                                                                                                                                                                                                  Ø51                                                       Shaft seal                                                     AM 350 welded bellows
                                                        non-rotatable with
                                                        clearance holes       Vacuum range                                                               1x10 mbar
                                                                                                                                                                -11                                                                                         Vacuum range                                                                1x10-11 mbar
                                                                                                                                                                                                                                   DN40CF flange,           Temperature range           1
                                                                                                                                                                                                                                                                                                                                     -20°C to 100°C
                                                                              Temperature range 1                                                     -20°C to 100°C                                                               non-rotatable with
                                                                              Axial load                                                                              9.1 kg                                                       clearance holes          Axial load                                                                           9.1 kg
       Travel    Length                                                       Lateral load                                      9.1 kg @ 76mm extension maximum                                                                                             Lateral load                                      9.1 kg @ 76mm extension maximum
         51      39 – 90
                                                                              Weight and dimensions                                                            See table                                                                                    Weight and dimensions                                                             See table
        102     60 – 162
                                                                                                                                                                                                                                                            1
        152     82 – 234                                                      1
                                                                                  UHV units are bakeable to 230°C with actuator removed                                          Travel      Length                                                             UHV units are bakeable to 230°C with actuator removed
                                                                                                                                                                                   51        45 – 96
                                                                                                                                                                                  102       66 – 168
                                                                                                                                                                                  152       88 – 240

                            Ø33                  Nose piece face,                                                                                                                                                           19
                                                 10-32 x 9 deep,
                                                 4 places, equally                                                                                                                                                                  DN16CF blank,
                                                 spaced on a 25.4 BC              Linear                 Wt                       Part                                                                                                                          Linear                 Wt                       Part
                                                                                                                                                                                                                                 non-rotatable flange
                                                 with side vent                   travel                 kg      Reference        number        £       €             SFr.                              Ø34                                                     travel                 kg      Reference        number        £        €         SFr.
                                                                                                                                                                                                                                  included, mounted
                                                                                  UHV series                                                                                              8-32 x 12 deep,                            to nose piece              UHV series
                                                                                                                                                                                  6 places, with side vent
                                                                                  51                     1.4     SLM-275-2        674001        740     1090          1739                                                                                      51                     1.4     TLM-275-2        667000        930      1400      2186
                                                                                  102                    1.8     SLM-275-4        674003        890     1330          2092                Ø17.5 counterbore             Ø11.1 thro, 6.4 deep                    102                    1.8     TLM-275-4        667001        1050     1550      2468
                                                                                  152                    2.3     SLM-275-6        674005        950     1400          2233                                                                                      152                    2.3     TLM-275-6        667002        1100     1650      2585


   All dimensions are nominal in millimetres unless specified Weights given are approximate                                                                                                                                                             All dimensions are nominal in millimetres unless specified Weights given are approximate

502 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                              Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 503
                     Section 7.1                                                                                               Motion and manipulation                        Motion and manipulation                                                                                                                               Section 7.1
                     Linear motion                                                                                                                                                                                                                                                                              Multi-motion
                     Heavy duty, micrometer                                                                                                                                                                                                                                                                     Rotary linear, standard

                                                                                  UHV Series                                                                                                                                                                                       UHV and HV series

                                                                              Features                                                                                                                                                                                         Features
                                                                              ■    50mm linear travel                                                                                                                                                                          ■    360° rotary motion and 25mm linear travel
                                                                              ■    Manual, precision micrometer actuator                                                                                                                                                       ■    Manual actuator
                                                                              ■    UHV-compatible materials                                                                                                                                                                    ■    Rotary position lock
                                                                              ■    Welded bellows seal                                                                                                                                                                         ■    UHV or HV-compatible materials
                                                                                                               1
                                                                              ■    Bakeable to 100°C                                                                                                                                                                           ■    Welded bellows seal
                                                                              ■    DN40CF port mount                                                                                                                                                                           ■    Bakeable to 100°C1
                                                                                                                                                                                                                                                                               ■    CF and ISO KF port mounts




                                                  Plus-minus scale
      LMM-275-2                                                                                                                                                                   BRLM-133


                                                                              Description                                                                                                                                                                                      Description
                                    Ø51
                                                                              Heavy duty, micrometer driven linear motion feedthroughs allow                                                                                                                                   Rotary-linear standard devices offer 360° of rotation and 25mm of
                                                                              linear displacement of heavier samples and components with the                                                                                                                                   linear travel via two separate drive knob actuators. Both rotary and
                                                                              accuracy and precision of fine pitch thread micrometers. These                                                                                                    Rotary position lock           linear positions are measured along laser etched scales on actuator
                                                                              devices provide position indication on both rotary and linear scales                                                                                              1:1 Rotary gear ratio          barrel and housing.The 360° rotary scale is graduated in 5°
                                                                                                                                                                                                         Ø41
                                                                              with display resolutions of 0.0025” (0.06mm) on the rotary scale                                                                                                  Linear scale and               increments. The linear scale has both a linear and rotary scale
                                                         (0.64mm              and 0.025” (0.6mm) on the linear scale. A full revolution of the                                                                                                  shaft flat shown in            components, the linear portion is graduated in 0.025” (0.6mm)
                                                         travel/rev)                                                                                                                                                                            line for clarity only.
                                                                              rotary scale translates into 0.025” (0.6mm) of linear travel. Unlike                                                                                                                             increments while the rotary portion is graduated in 0.03mm
                                                                              conventional motion feedthroughs, heavy duty models employ re-                                                                                                    Actual orientation             increments. Full revolution of the linear scale produces 0.6mm of
                                                                                                                                                                                                                                                varies
                                                                              entrant welded bellows construction allowing the use of sturdier                                                                                                                                 linear travel.
                                                                                                                                                                                  Flange        Length
                                                                              and larger diameter shafts.                                                                                                                                       Linear position
                                                                                                                                                                                  DN16CF      170 – 197                                         lock not available
                                                                                                                                                                                  DN40CF      170 – 197
                                                                                                                                                                                                                                                                               Specifications
           219 min                                       Position lock
                                                                              Specifications                                                                                      DN16KF      173 – 198                                         (0.64mm travel/rev)
                                                                                                                                                                                                                                                                               Material
           270 max                                                                                                                                                                DN40KF      168 – 193
                                                         not available        Material                                                                                                                                                                                         Flange/actuator knob                                        304ss /Anodized aluminium
                                                                                                                                                                                                                                                Ø57
                                                                              Flange /actuator body                                        304ss /Anodized aluminium                                                                                                           Shaft seal                                                     AM 350 welded bellows
                                                                              Shaft seal                                                     AM 350 welded bellows                                                                                                             Vacuum range                                                  1x10-11 mbar /1x10-8 mbar
                                                                              Vacuum range                                                                1x10 mbar
                                                                                                                                                                 -11
                                                                                                                                                                                                                                                                               Temperature range                                                       -20°C to 100°C
                                                                              Temperature range 1                                                      -20°C to 100°C                                                                                                          Torque                                                                3.5 Nm maximum
                                                         DN40CF               Axial load                                                               4.5 kg maximum                                                                                                          Axial load                                                              1.8 kg maximum
                                                         flange,
                                                         non-rotatable        Lateral load                                     9.1 kg @ 100mm extension maximum                                                                                                                Lateral load                                      1.8 kg @ 50mm extension maximum
                                                         with
                                                         clearance            Weight and dimensions                                                             See table                                                                                                      Weight and dimensions                                                            See table
                                                         holes                1
                                                                                  UHV units are bakeable to 230°C with actuator removed                                                                                                                                        1
                                                                                                                                                                                                                                                                                   UHV units are bakeable to 230°C with actuator removed
                                                                                                                                                                                                                                                                      19
                                                                                                                                                                                                                                6.4 dia
            39 min                                                                                                                                                                                                                                             14.2
            90 max                                                                                                                                                                Flange        Length                        6-32
                                                                                                                                                                                  DN16CF       90 – 115                       tapped
                                                                                                                                                                                  DN40CF       90 – 115                       thro,
                                                                                                                                                                                                                                                         4.5
                                                                                                                                                                                  DN16KF       87 – 112                       2 places
                                                                                                                                                                                  DN40KF       91 – 116
                                                                                                                                                                                                                                                                                                          Wt                        Part
                                                                                                                                                                                                                                                                                   Description            kg      Reference         number       £       €         SFr.
                          Ø33
                                                                                                                                                                                                                                                                                   UHV Series
                                                    Nose piece face,
                                                                                                                                                                                                                                          5.4                                      DN16CF                 1.4     BRLM-133          672000       873     1186      2052
                                                    10-32 x 9 deep,
                                                    4 places, equally                                                                                                                                                                                                              DN40CF                 1.4     BRLM-275          672002       886     1204      2082
                                                    spaced on a 25.4 BC           Linear                 Wt                       Part
                                                    with side vent                travel                 kg        Reference      number        £        €             SFr.   ■   Shown with DN16CF flange
                                                                                                                                                                                                                                                                                   HV Series
                                                                                  UHV series                                                                                  ■   Metal-seal flanges are non-rotatable with clearance holes
                                                                                                                                                                                                                                                                                   DN16CF                 1.4     K075-BRLM         672004       868     1179      2040
                                                                                  51                     1.4       LMM-275-2      668002        1660     2500          3901   ■   Shaft flat is oriented visually between two flange bolt holes
                                                                                                                                                                                                                                                                                   DN40CF                 1.4     K150-BRLM         672006       873     1186      2052


   All dimensions are nominal in millimetres unless specified Weights given are approximate                                                                                                                                                                                All dimensions are nominal in millimetres unless specified Weights given are approximate

504 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                                          Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 505
                      Section 7.1                                                                                          Motion and manipulation                     Motion and manipulation                                                                                                  Section 7.1
                      Multi-motion                                                                                                                                                                                                                                            Multi-motion
                      Rotary-linear, precision                                                                                                                                                                                                                               Rotary-linear, precision

                                                                                 UHV Series                                                                              UHV Series                             Flange                                             Wt                           Part
                                                                                                                                                                                                                size                A                              kg            Reference      number       £      €        SFr.

                                                                             Features                                                                                    CF                   230°C             DN40CF              254                            3.6           PBRM2-10       670025       1904   2856     4475
                                                                                                                                                                                                                DN40CF              400                            3.6           PBRM2-15       670028       2154   3231     5062
                                                                             ■    Continuous rotary motion and 13mm linear travel                                                                               DN40CF              600                            4.1           PBRM2-23       670031       2404   3606     5650
                                                                             ■    Manual or motorized actuator                                                                                                  DN40CF              800                            4.1           PBRM2-31       670034       2514   3772     5909

                                                                             ■    Rotary position lock
                                                                             ■    UHV-compatible materials                                                             Motorization options
                                                                             ■    Welded bellows seal
                                                                             ■    Bakeable to 230°C1                                                                                                                                                 Option -01                                   Option -02
                                                                                                                                                                                                                                                     Rotary motorization                          Linear motorization
                                                                             ■    CF port mount
                                                                                                                                                                                                                            Ø153


                                                                                                                                                                                                             0.64mm/rev



                                                Linear drive
   PBRM2-10

                                                                                                                                                                                    50:1 Rotary
                                                                             Description                                                                                            gear ratio

                                  Ø76
                                                                             Precision rotary-linear motion feedthroughs are low backlash
                                                                                                                                                                                                                                                                                       Add-on
                                                                             instruments with a rotary display resolution of 0.1° and a linear                                                                                                                               Motor     weight    Option
                                                                             display resolution of 0.03mm. Full revolution of the linear drive                                                                                                       Motorization        1
                                                                                                                                                                                                                                                                             spec.     kg        Number      £      €        SFr.

                                                       (0.64mm travel/rev)   translates into 0.6mm of linear travel with a maximum overall linear                                                                                                    Rotary axis             D         2.3       -01         1164   1747     2737

                                                                             travel of 13mm.Welded stainless steel bellows, a unique off-axis                                                                                           248          Linear axis             D         0.9       -02         1025   1538     2409

                                                                             wobble design and the use of rotary shaft bearing supports provide                                     123                                                          1
                                                                                                                                                                                                                                                     When ordering motorized options, add the option number and price to the desired
                                                                                                                                                                                                                                                     UHV or HV component part number listed above
                                                                             long life and smooth operation. Motorization options are available
                                                                                                                                                                                                                                                     For example: 670025-01-02
     155
                                                                             for both linear and rotary drive components. If motorization is
                                                                                                                                                                                                                                                     For total unit weight, add option weight to component weight
                                                                             required on both drives, add each option number to the end of the
                                                                             base part number.
                                                                             Note The entire linear drive mechanism (manual or motorized) will
                                                                             rotate when the rotary drive is actuated. This must be considered
                                                       Position lock         when allocating space for its installation.
                                                       DN40CF flange,        Motor controls are not included with the motorization options and
                                                       non-rotatable with                                                                                                                         155
                                                       clearance holes
                                                                             must be purchased separately.
                         Ø33                                                                                                                                                                            76
                                                                             Specifications
                                                                             Material
                                                                             Flange/actuator body                                       304ss/Anodized aluminium
                                                                             Shaft seal                                                   AM 350 welded bellows         118
      A
                                                                             Position knob and internal washer                                                 Brass          86
                         Ø9.5                                                                                                                            -11
                                                                             Vacuum range                                                           1x10 mbar
                                                                             Temperature range1                                                  -20°C to 230°C
                                                                             Torque                                                            0.7 Nm maximum                      Top view

                                                                             Axial load
                                                                             Rotary                                                              2.3 kg maximum
                                                                             Linear                                                              0.4 kg maximum
                                                                             Lateral load                                      4.5 kg @ 50mm extension maximum
       13 retracted                                                          Weight and dimensions                                                     See table
       25 extended                          Ø3.2                             1
                                                                                 UHV units are bakeable to 30°C with actuator removed




All dimensions are nominal in millimetres unless specified                                                                                                                                                                         All dimensions are nominal in millimetres unless specified Weights given are approximate


Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                          Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk
                         Section 7.1                                                                                                 Motion and manipulation                      Motion and manipulation                                                                                                                       Section 7.1
                         Multi-motion                                                                                                                                                                                                                                                                         Multi-motion
                         Rotary-linear, direct                                                                                                                                                                                                                                                                              Wobble stick

                                                                                        UHV and HV series                                                                                                                                                                      UHV and HV series

                                                                                    Features                                                                                                                                                                               Features
                                                                                    ■     Continuous rotary motion and 203mm linear travel                                                                                                                                 ■     114mm linear travel and 22° wobble motion
                                                                                    ■     Manual actuator                                                                                                                                                                  ■     Manual actuator
                                                                                    ■     UHV or HV-compatible materials                                                                                                                                                   ■     Angular position lock
                                                                                                                                      ®
                                                                                    ■     Differentially pumped, Dual Viton elastomer                                                                                                                                      ■     UHV or HV-compatible materials
                                                                                          shaft seal                                                                                                                                                                       ■     Welded bellows seal
                                                                                    ■     Bakeable to 100°C1                                                                                                                                                               ■     Bakeable to 100°C1
                                                                                    ■     CF and ISO KF port mounts                                                                                                                                                        ■     CF and ISO KF port mounts




                                                                                                                                                                                                                                         Wobble action
         CRPP-1                                                                                                                                                                       SU-275


                                                                                    Description                                                                                                                                                                            Description
          Ø61 knob, includes
                                                                                    Differentially pumped direct drive rotary-linear motion feedthroughs                                                                                                                   Wobble stick linear-angular motion feedthroughs are basic and
          8-32 socket head set                                                      are a basic and economical solution for vacuum applications                                                                                                                            manual sample motion devices. They provide quick action linear
          screw
                                                                                    requiring both rotary and linear motion. Their simple construction                                                                                            Ø35 knob, 0.5”-13        travel and angular wobble motion via a stainless steel hand-held
                                                                                    provides 11Nm of manual rotational torque.                                                                                                                    UNC thread               actuator shaft with a ball and socket joint design. They are typically
                                                                                                                                                                                                                                                                           operated by observing sample motion through a vacuum viewport.
                                                                                    The rotary shaft is supported by two phosphor bronze bearings and
                                                                                                                                                                                                                                                                           The actuators angular position can be locked in place by tightening
                                                                                    uses dual Viton® elastomer shaft seals. The region between the seals                                   70 min
                                                                                                                                                                                                                                                                           the lock collar located on the port mount flange. Wobble stick
                                                                                    can be differentially pumped through the 1/8” female pipe thread port                                 184 max
                                                                                                                                                                                                                                                                           linear-angular motion feedthroughs are offered with 114mm linear
                                                                                    provided and thus attain UHV compatibility to 1x10-9 mbar.                                                                                                    Angular position
                                                                                                                                                                                                                                                                           travel and a maximum 22° of angular wobble with unrestricted
                                                                                                                                                                                                                                                  lock
                                                                                    Feedthroughs are available on industry standard Conflat® compatible                                                                                                                    mating flange and port diameter. Re-entrant, welded stainless steel
                                                                                                                                                                                                                                                  Linear position
                      203.2 travel
                                                                                    DN40CF metal seal flanges or ISO KF DN40 port mounts.                                                                                                         lock not available       bellows are standard on these products.
                      Position lock
                      not available
                                                               Flange   Min – Max   Specifications                                                                                                                                                                         Specifications
                                                               DN40CF 89 – 292
                                                               DN40KF 88 – 291      Material                                                                                                                                                                               Material
                                                                                                                                                                                                              Ø37
                                                                                    Flange /actuator body                                                   304 Stainless steel                                                                                            Flange/actuator body                                                                304ss
                                                                                    Shaft seal                                                                          Viton®                                                                                             Shaft seal                                                    AM 350 welded bellows
                                                                                    Vacuum range UHV /HV                                  1x10-8 mbar1x10-8 mbar                                              Ø34
                                                                                                                                                                                                                                                                           Vacuum range UHV/HV                                1x10-11 mbar / 1x10-8 mbar
                                                                                    Temperature range UHV /HV     1
                                                                                                                                                             -20°C to 100°C               121 min                                                                          Temperature range UHV/HV      1
                                                                                                                                                                                                                                                                                                                                                   -20°C to 100°C
                                                                                                                                                                                          235 max
                                                                                    Torque                                                                11.3 Nm maximum                                                                                                  Axial load        No lock to support weight                                         9.1 kg
                                                                                    Axial load        No lock to support weight                                          1.1 kg                                                                                            Lateral load                                       91 kg @ 50mm extension maximum
                                                                Ø51
                                                                                    Lateral load                                      2.3 kg @ 50mm extension maximum                                                                                                      Weight and dimensions                                                            See table
          1/8”-27 NPT thread,
          hex socket head                                                           Weight and dimensions                                                             See table
                                                                                                                                                                                                                                                                           1
                                                                                                                                                                                                                                                                               UHV units are bakeable to 230°C with actuator removed
                                                                                    1
                                                                                        UHV units are bakeable to 150°C with actuator removed



                                                                                                                                                                                                                                                    8-32 set screw
                                                                                                                                                                                        Ø6.4 x 9.5 deep
                      Travel stop                                                                                                                                                                                        Ø15.7
                                                               Flange   Min – Max
                                                               DN40CF 32 – 235                                  Wt                        Part                                                                                                                                                         Wt                       Part
                                                                                                                                                                                                                          Ø27
                                                               DN40KF 33 – 236          Description             kg       Reference        number      £         €        SFr.                                                                                                  Description             kg       Reference       number       £       €         SFr.
                                    Ø6.4                                                UHV Series                                                                                                                                                                             UHV Series
                                                                                        DN40CF                  1.4      CRPP-1           672008      213       319      499                                               22º                                                 DN40CF                  1.4      SU-275          696000       928     1391      2180
                                                                                                                                                                                  ■   Shown with DN16CF flange
     ■   Shown with DN16CF flange                                                                                                                                                 ■   Metal-seal flanges are non-rotatable with clearance holes
                                                                                        HV Series                                                                                                                                                                              HV Series
     ■   Metal seal flanges are non-rotatable with clearance holes                                                                                                                ■   Requires 41.3 port for full regular movement
                                                                                        DN40KF                  0.9      K-CRPP-1         672009      229       344      539                                                                                                   DN40KF                  0.9      K150-SU         696001       869     1303      2041



   All dimensions are nominal in millimetres unless specified                                                                                                                                                                                                          All dimensions are nominal in millimetres unless specified Weights given are approximate

508 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                                            Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 509
                            Section 7.1                                                                                                  Motion and manipulation                        Motion and manipulation                                                                                                                     Section 7.1
                            Multi-motion                                                                                                                                                                                                                                                                         Multi-motion
                            Wobble stick, pincer                                                                                                                                                                                                                                                      Wobble stick, rotary pincer

                                                                                              UHV and HV series                                                                                                                                                                     UHV and HV series

                                                                                         Features                                                                                                                                                                              Features
                                                                                         ■     114mm linear travel and 22° wobble, with pincer-grip                                                                                                                            ■     Continuous rotary motion, 114mm linear travel and
                                                                                         ■     Manual actuator                                                                                                                                                                       22° wobble, with pincer-grip
                                                                                         ■     Angular position lock                                                                                                                                                           ■     Manual actuator
                                                                                         ■     UHV or HV-compatible materials                                                                                                                                                  ■     Linear and angular position locks
                                                                                         ■     Welded bellows seal                                                                                                                                                             ■     UHV or HV-compatible materials
                                                                                         ■     Bakeable to 100°C1                                                                                                                                                              ■     Welded bellows seal
                                                                                         ■     CF and ISO KF port mounts                                                                                                                                                       ■     Bakeable to 100°C1
                                                                                                                                                                                                                                                                               ■     CF and ISO KF port mounts



                                                            Blank jaws                                                                                                                                                                         Blank jaws
         VGU-275                                                                                                                                                                            DG-275 Patented design


                                                                                         Description                                                                                                                                                                           Description
                                                                                         Wobble sticks with pincer action are identical to the wobble-linear                                                                                                                   These products are rotary-linear-pincer action wobble sticks
                                                                                         products, except for the addition of an integral and articulated                                                                                                                      identical to the linear and linear-pincer wobble stick products with
                                                                 Ø35 knob,               sample holding pincer mechanism.The pincer is activated via two                                                                                                                       the addition of full 360° rotary motion.The pincer mechanism is
                                                                 0.5”-13 UNC thread
                                                                                         shaft mounted finger grips allowing the pincer jaws to grip 22.4mm                                                                                                                    activated via two shaft mounted finger grips allowing the pincer jaws
                                                                                         maximum sample diameters. These feedthroughs provide quick                                                                                                                            to grip up to 22.4mm sample diameters. These feedthroughs provide
            95 min
           210 max                                                                       action linear-angular motion via a manually activated shaft with ball                                                                                                                 quick action rotary, linear and angular motion with an actuator shaft
                                                                 Angular position lock   and socket joint design. They are typically operated by observing                                                                                                                     ball and socket joint design. Angular and linear positions can be
                                                                                                                                                                                                                   Ø58
                                                                 Linear position lock                                                                                                         216 min
                                                                 not available
                                                                                         sample motion through a vacuum viewport. Angular position can be                                     330 max                                                                          locked with integral lock collars located on the port mount flange
                                                                                         locked with an integral lock collar located on the port mount flange.                                                                                                                 and actuator shaft.

                                                                                         Specifications                                                                                                             Ø51                            Linear position lock        Specifications
                                  Ø37                                                    Material                                                                                                                                                  Angular position lock       Material
                                                                                         Flange /actuator body                                                   304 Stainless steel                                                               Rotary position lock        Flange/actuator body                                                    304ss /Aluminium
                                                                                                                                                                                                                                                   not available
                                  Ø34                                                    Shaft seal                                                    AM 350 welded bellows                                                                                                   Shaft seal                                                    AM 350 welded bellows
                                                                                         Vacuum range UHV /HV                               1x10-11 mbar / 1x10-8 mbar                                                                                                         Vacuum range UHV/HV                                1x10-11 mbar / 1x10-8 mbar
                                                                                                                                                                                                                      Ø37
                                                                                         Temperature range UHV /HV    1
                                                                                                                                                                  -20°C to 100°C                                                                                               Temperature range UHV/HV     1
                                                                                                                                                                                                                                                                                                                                                        -20°C to 100°C
                                                                                         Axial load                                                               0.9 kg maximum                                                                                               Torque                                                                0.3 Nm maximum
                                                                                                                                                                                                                      Ø34
                                                                                         Lateral load                                                             0.9 kg maximum                                                                                               Axial load                                                               0.9 kg maximum
           165 min
           279 max                                                                       Weight and dimensions                                                              See table                                                                                          Lateral load                                                             0.9 kg maximum
                                                                                                                                                                                              165 min
                                                                                         1                                                                                                    279 max                                                                          Weight and dimensions                                                             See table
                                                                                             UHV units are bakeable to 230°C with actuator removed
                                                                                                                                                                                                                                                                               1
                                                                                                                                                                                                                                                                                   UHV units are bakeable to 230°C with actuator removed




                       70                                       32 closed                                           Wt                        Part                                                                                                                                                        Wt                        Part
                                                                                             Description            kg       Reference        number       £         €         SFr.                        70                                    32 closed                         Description            kg       Reference        number       £        €         SFr.
                                                                                             UHV Series                                                                                                                                                                            UHV Series
                                                                                             DN40CF                 1.4      VGU-275          695000       2250      3375      5288                                                                                                DN40CF                 1.4      DG-275           694000       2375     3563      5581


                                                                                             HV Series                                                                                                                                                                             HV Series
                                              22º                                                                                                                                                                               360º
                                                                                             DN40KF                 0.9      K150-VGU         695001       2006      3009      4713                                                                                                DN40KF                 0.9      K150-DG          694002       2491     3737      5854
                                                                                                                                                                                                                                 22º
     ■   Shown with DN16CF flange                                                                                                                                                       ■   Shown with DN16CF flange
     ■   Metal seal flanges are non-rotatable with clearance holes                                                  Wt                        Part                                      ■   Metal-seal flanges are non-rotatable with clearance holes                                                     Wt                        Part
                                                                                             Description            kg       Reference        number       £         €         SFr.                                                                                                Description            kg       Reference        number       £        €         SFr.
     ■   Requires 41.3 port for full regular movement                                                                                                                                   ■   Requires 41.3 port for full regular movement
                                                                                             Jaw kit, blank         0.5      DG-275-BJ        694001       137       205       322                                                                                                 Jaw kit, blank         0.5      DG-275-BJ        694001       137      205       322


   All dimensions are nominal in millimetres unless specified Weights given are approximate                                                                                                                                                                                All dimensions are nominal in millimetres unless specified Weights given are approximate

510 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                                                  Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 511
                          Section 7.1                                                                                       Motion and manipulation                    Motion and manipulation                                                                                        Section 7.2
                          Multi-motion                                                                                                                                                                                                                             Manipulation
                          Wobble stick, wide angle                                                                                                                                                                                                                                 Introduction

                                                                                     UHV and HV series                                                                 Features                                              under vacuum or is let up to air       over non-geared designs, High torque
                                                                                                                                                                                                                             with the bellows in some state of      stepper motors are also available for
                                                                                                                                                                       ■   V-Plane® XY and Z
                                                                                                                                                                                                                             compression, the compressed            these stages. Caburn-MDC rotatable
                                                                                 Features                                                                                  stages
                                                                                                                                                                                                                             bellows’ spring force may force        stages can be used to rotate heavy
                                                                                 ■    13 or 50mm linear travel and 44° or                                              ■   V-Plane® guide                                    the bellows to shift off-axis at       samples or sample support apparatus and
                                                                                      60° wobble, respectively                                                             tubes                                             some point during its travel. The      structures. Two spring energized PTFE
                                                                                 ■    Manual actuator                                                                  ■   Compact XY and Z                                        off-axis shift could be          face seals are at the heart of the
                                                                                                                                                                           stages                                                  sudden and violent               rotatable stage’s sealing mechanism.With
                                                                                 ■    UHV or HV-compatible materials
                                                                                                                                                                       ■   Standard XY and Z                                      causing user injury               provision for differential pumping
                                                                                 ■    Welded bellows seal                                                                                                                      or damage to the                     between the seals, these rotatable stages
                                                                                                                                                                           stages
                                                                                 ■    Bakeable to 230°C                                                                                                             bellows. Caburn-MDC                             can be used in UHV environments with
                                                                                                                                                                       ■   Rotatable axis stages                    recommends that all long-                         bakeout temperatures as high as 200°C.
                                                                                 ■    CF and ISO KF port mounts
                                                                                                                                                                                                                    stroke 38mm diameter bore Z
                                                                                                                                                                       V-Plane® XY and Z stages                     axis V-Plane® stages, with
                                                                                                                                                                       Caburn-MDC’s V-Plane® modular stages         linear travels exceeding
                                                                                                                                                                       are building block components designed       150mm, be fitted with
                                                                                                                                                                       to streamline the implementation of a        guide tubes.
                                                                                                                                                                       sample manipulation system. They can be
         WS-133
                                                                                                                                                                       used as stand alone components or
                                                                                                                                                                                                                    Compact XY
                                                                                                                                                                       combined with other V-Plane®                 and Z stages
                                                                                 Description                                                                           instruments to attain customized motion      Compact stages are small footprint single
         12.7 Linear travel 44° wobble                                                                                                                                 and manipulation solutions. V-Plane® dual    or triple axis stages and are ideally suited
                                                                                 Wide angle wobble sticks, the most basic products of the wobble
                                                                                                                                                                       axis XY stages are micrometer driven         for applications with limited space. They
                                                                                 stick family, provide an economical solution for light duty sample
                                                                                                                                                                       and guided by cross roller bearing slides.   are available in a Z only or XYZ
                                                                                 motion and manipulation. They are stripped down wobble sticks
                                                                                                                                                                       Caburn-MDC micrometers have unique           configuration.
                                                                                 ideally suited for user customization. Under vacuum load the
                                                                                                                                                                       laser etched plus-minus scales that
                                                                                 bellows are compressed and the shaft completely extended into the                                                                  Standard XY and Z stages
                                                                                                                                                                       indicate positive or negative port
                                                                                 vacuum chamber. Offered in two models they provide 44° and 60°
                                                                                                                                                                       displacement.                                Standard XYZ stages are large bore
                                                                     44º         of angular displacement respectively.
                                                                                                                                                                       V-Plane® single axis stages employ           stages which incorporate triple axis                                                                Z
                             3                                                   Specifications                                                                        handwheel and worm gear reduction            motion in a single stage. The XY travels
                                           12.7                                                                                                                        drive mechanisms with linear                 are micrometer driven and guided by
                                                                                 Material
                                                                                                                                                                       displacement measured along the stage’s      cross roller bearing slides. Caburn-MDC
                                                                                 Flange /actuator body                                           304 Stainless steel   frame mounted scale.                         micrometers have unique
                                              63 min    76 min                   Shaft seal                                             AM 350 welded bellows                                                       laser etched plus-
                                              76 max    88 max
                                                                                 Vacuum range UHV /HV                                  1x10-11 mbar / 1x10-8 mbar
                                                                                                                                                                       V-Plane® guide tubes                         minus scales that
                                                                                 Temperature range                                                                     Caburn-MDC guide tubes provide               indicate
                                                                                 UHV                                                              -20°C to 230°C
                                                                                                                                                                       bellows support for V-Plane® manipulator     positive or
                                                                                                                                                                       stages fitted with long-stroke bellows as    negative
                                                                                 HV                                                               -20°C to 150°C
                                                                                                                                                                       well as secondary rotary and linear          port
         50.8 Linear travel 60° wobble                                           Weight and dimensions                                                     See table   motion feedthroughs installed on the         displacement. The
                                                                                                                                                                       stage. They are supplied with both rotary    Z axis employs a
                                                                                                                                                                                                                                                                                   Y                         X
                                                                                                                                                                       and linear bearing supports. For             handwheel and worm gear
                                                                                                                                                                       applications requiring sample heating,       reduction drive mechanism with                                                      0




                                                                                                                                                                       cooling, high voltage biasing,               displacement measured along the stage’s
                                                                                                                                                                       thermocouple temperature                     frame mounted scale.
                                                                           60º                                                                                         measurements, etc., the guide tube tip
                                                                                                                                                                       has been fitted with two slots               Rotatable axis stages
         6.4                                                                                                                                                           180° apart through which                       Rotatable axis stages replace
                                       25.4
                                                                                                   Linear   Wt                Part                                     wires or tubes can be fed.                       conventional rotatable mounting
                                                                                     Description   travel   kg    Reference   number       £         €        SFr.                                                                                                        Intermediate hardware may be required for
                                                                                                                                                                       Four DN16CF and one                                 tables previously offered by
                                                                                                                                                                                                                                                                      ■

                                 101 min                   101 min                   UHV Series                                                                                                                                                                           joining components, these have been omitted
                                 152 max                   152 max
                                                                                                                                                                       DN40CF flange                                       Caburn-MDC.They provide 360°                   for clarity
                                                                                     DN16CF        12.7     1.4   WS-133      693001       180       270      423
                                                                                                                                                                       accessory ports allow                               positioning with greater precision,
                                                                                     DN40CF        50.8     1.4   WS-275      693000       215       320      505
                                                                                                                                                                       the installation of up                              control and ease of use.
                                                                                                                                                                       to five additional                                     Rotatable stages are
                                                                                     HV Series
                                                                                                                                                                       accessory                                                                                    Caution
     ■   Requires 41.3 port for full regular movement
                                                                                     DN16KF        12.7     1.4   K075-WS     693002       175       260      411
                                                                                                                                                                                                                               constructed with worm gear           Anodized aluminium finishes will begin to discolour when
     ■   Position lock not available                                                                                                                                   components. When a                                      drive mechanisms which offer         baked in excess of 150°C.
                                                                                     DN40KF        50.8     1.4   K150-WS     693003       210       315      494
                                                                                                                                                                       manipulator stage is not                              substantial mechanical advantage       This is only a cosmetic condition which does not impact
                                                                                                                                                                                                                                                                    performance or reliability.


   All dimensions are nominal in millimetres unless specified Weights given are approximate                                                                                                                                                                   All dimensions are nominal in millimetres unless specified

512 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                  Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 513
                       Section 7.2                                                                                            Motion and manipulation         Motion and manipulation                                                                                                                          Section 7.2
                                             ®
                       V-Plane                                                                                                                                                                                                                                                                                V-Plane®
                       Dual axis XY stage                                                                                                                                                                                                                                                        Dual axis XY stage

                                                                                          UHV Series                                                              Bore       Travel4      Top              Bottom                                                                  Wt                          Part
                                                                                                                                                                  size       ±       Fig. flange           flange     B         D       E        F         G       H         J     kg         Reference        number         £        €       SFr.
                                                                                                                                                                  38.1       12.7   1     DN40CF           DN40CF     127       –       83       146       157     194       209   10.9       E-XY-15S*        677021         2833     4250    6658
                                                                                      Features                                                                    38.1       12.7   1     DN63CF           DN40CF     143       –       161      146       157     194       209   11.4       E-XY-15          677009         3400     5100    7990
                                                                                      ■   V-Plane® building block component                                       63.5       12.7   1     DN63CF           DN63CF     146       –       161      165       175     210       224   12.7       E-XY-25          677010         4375     6563    10281
                                                                                      ■   Plus or minus 13 and 25mm off centre XY motion                          63.5       12.7   1     DN63CF           DN100CF    149       –       161      165       175     230       244   13.2       E-XY-26          677018         4393     6590    10325
            Bottom view                                                                                                                                           63.5       25.4   1     DN63CF           DN63CF     168       –       161      232       248     235       251   12.7       E-LXY-25         677013         5750     8625    13513
                                                                                      ■   38 to 102mm bore diameters
                                                                                                                                                                  63.5       25.4   1     DN63CF           DN100CF    171       –       161      232       248     256       269   13.2       E-LXY-26         677019         5331     7997    12528
                                                                                      ■   Manual or motorized actuator                                            101.63     12.7   2     DN63CF           DN100CF    165       213     161      184       194     231       244   13.6       E-XY-40          677011         5544     8316    13028
                                                                                      ■   UHV-compatible materials                                                101.6      12.7   2     DN100CF          DN100CF    165       213     161      184       194     231       244   14.5       E-XY-44          677012         5754     8632    13523

                                                                                      ■   Welded bellows seal                                                     101.63     25.4   2     DN63CF           DN100CF    184       213     161      254       267     256       269   14.5       E-LXY-40         677014         6316     9474    14842
                                                                                                                                                                  101.6      25.4   2     DN100CF          DN100CF    184       224     161      254       267     256       269   15.4       E-LXY-44         677015         6711     10066   15770
                                                                                      ■   Bakeable to 230°C
                                                                                                                                                              3
                                                                                                                                                                  101.6 bore diameter is reduced to 63.5 at DN63CF top flange
                                                                                      ■   CF port mounts                                                      4
                                                                                                                                                                  Match sample support structure and stage bore for maximum XY travel
                                                                                                                                                              * E-XY-155 is a stand alone model unsuitable for combination with Z only columns




        XY-15


   Description                                                                                                                                                                                                                                             Motorization options                                Option -01
                                                                                          Figure 1                                                                  Figure 2
   Caburn-MDC’s V-Plane® modular stages are building block                                                                                                                                                            Top flange,
                                                                                                                                                                                                                                                                                                               In-line stepper motor
   components designed to streamline the implementation of a                                Outline for XY-15S only                                                                             X                     tapped holes
                                                                                            139.7 x 166.9                            X
   sample manipulation system. They can be used as stand alone
   components or combined with other V-Plane® instruments to
   attain customized motion and manipulation solutions.
   V-Plane® dual axis XY stages are micrometer driven and guided
                                                                                          111.1                                                                      111.1
   by cross roller bearing slides. Micrometers have unique laser
   etched plus-minus scales that indicate positive or negative port
   displacement. Caburn-MDC V-Plane® dual axis XY stages                                                                                        Y                            55.6                                               Y
                                                                                                55.6
   provide precise motion and manipulation of samples inside                                                                                                                                                                                                                                         Add-on
   ultra-high vacuum environments. Dual axis XY stages can be                                                                                                                              143.5                                                                                    Motor            weight    Option
                                                                                                                                         Top flange,
                                                                                                                143.5                    tapped holes                                                                                                      Motorization  1
                                                                                                                                                                                                                                                                                    spec.            kg        number         £        €       SFr.
   stacked with V-Plane® single axis Z stages and also fitted with                                                                                                                                 250
                                                                                                                                                                                                                                                           XY in-line stepper       D                1.4       -01            626      939     1472
   guide tubes to further expand their capabilities.
                                                                                                                        250                                                                                                                            1
                                                                                                                                                                                                                                                           When ordering motorized options, add the option number and price to the desired UHV or
                                                                                                                                                                                                                                                           HV component part number listed above
   Specifications                                                                                                                                                                                                                                          For example: 670020-01
                                                                                                                                                                         B
   Material                                                                                                                                                                                                                                                For total unit weight, add option weight to component weight
   Flange                                                       304 Stainless steel         B
   Actuator body                                         Anodized aluminium
   Shaft seal                                             AM 350 welded bellows                                                                                                                          Bore
                                                                                                                                                                                                                       Bottom flange,
   Vacuum range                                                    1.3x10-11 mbar                                                                                                                                      tapped holes
   Temperature range 1                                           -20°C to 230°C                                               Bore
                                                                                                                                         Bottom flange,
                                                                                                                                         tapped holes
   Weight and dimensions                                                 See table
   1
       UHV units are bakeable to 30°C maximum when motorized
                                                                                                                                                                                                                                                                                          Far side
                                                                                                                                                                         D
                                                                                                                                                                                                                                                                                                                          Y
                                                                                                                                           .5
                                                                                                                                           .4
                                                                                                                                           .3
                                                                                                                                           .2




                                                                                           172


                                                                                                                                                                                                                                             F
                                                                                                                                .5
                                                                                                                                .4



                                                                                                                                                          F
                                                                                                                                .3
                                                                                                                                .2




                                                                                                                                                                                                                                                                                                                                  H

                                                                                                                                                                                                                                                                                                 X
                                                                                                                                                                                            E                         G
                                                                                                                 E                        G                                                                                                                                                                          J



   All dimensions are nominal in millimetres unless specified                                                                                                                                                                                    All dimensions are nominal in millimetres unless specified Weights given are approximate

514 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                         Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 515
                     Section 7.2                                                                  Motion and manipulation                        Motion and manipulation                                                                                                          Section 7.2
                                              ®
                     V-Plane                                                                                                                                                                                                                                                    V-Plane®
                     Single axis Z stage                                                                                                                                                                                                                           Single axis XY stage

                                                                     UHV Series                                                                  UHV Series                                        Bore     Z          End                    B            Wt                       Part
                                                                                                                                                                                                   size     Travel     view    A       Min    – Max        kg     Reference         number        £       €        SFr.

                                                                 Features                                                                        CF                                   230°C        38.1     152.4      1       335     170.1 – 322.6       17     E-LMTA-1506S      665546        4347    6520     10215
                                                                                                                                                                                                   38.1     203.2      1       386     170.1 – 373.4       19     E-LMTA-1508S      665547        4500    6750     10575
                                                                 ■   V-Plane® building block component                                                                                             38.1     304.8      1       544     226.1 – 530.9       23     E-LMTA-1512S      665548        4600    6900     10810
                                                                 ■   152 to 914mm Z-axis travel                                                    End view 1                                      38.1     406.4      1       704     284.5 – 690.9       26     E-LMTA-1516S      665549        4737    7105     11132
                                                                                                                                                                                                   38.1     609.6      1       1016    401.3 – 1011.0      34     E-LMTA-1524S      665550        5965    8947     14018
                                                                 ■   38 to 102mm bore diameters                                                                             197                    38.1     914.4      1       1501    574.0 – 1988.4      45     E-LMTA-1536S      665551        8421    12632    19789
                                                                 ■   Manual or motorized actuator                                                                             162
                                                                                                                                                                                                   38.1     152.4      2       361     193.0 – 345.4       18     E-LMTA-1506       665534        2917    4375     6854
                                                                                                                                                                                 57
                                                                 ■   UHV-compatible materials                                                                                                      38.1     203.2      2       412     193.0 – 396.2       20     E-LMTA-1508       665535        3333    5000     7833

                                                                 ■   Welded bellows seal                                                                                                           38.1     304.8      2       513     193.0 – 497.8       24     E-LMTA-1512       665536        3947    5921     9276
                                                                                                                                                                                         140       38.1     406.4      2       666     243.8 – 650.2       27     E-LMTA-1516       665537        5000    7500     11750
                                                                 ■   Bakeable to 230°C
                                                                                                                                                                                                   38.1     609.6      2       970     345.4 – 955.0       35     E-LMTA-1524       665538        6667    10000    15667
                                                                 ■   CF port mounts                                                                                                                38.1     914.4      2       1428    497.8 – 1412.2      45     E-LMTA-1536       665539        8947    13421    21026
                                                                                                                                                 DN40CF                                            63.5     152.4      3       356     193.0 – 345.4       20     E-LMTA-2506       665558        4053    6079     9524
                                                                                                                                                 Top – tapped holes
                                                                                                                                                 Bottom – clearance holes                          63.5     203.2      3       406     193.0 – 396.2       22     E-LMTA-2508       665559        5000    7500     11750
                                                                                                                                                                                                   63.5     304.8      3       544     228.6 – 533.4       26     E-LMTA-2512       665560        5132    7697     12059
                                                                                                                                                   End view 2                                      63.5     406.4      3       678     261.6 – 668.0       30     E-LMTA-2516       665561        5883    8750     13708
                                                                                                                                                                                                   63.5     609.6      3       950     330.2 – 939.8       37     E-LMTA-2524       665562        7895    11842    18553
                                                                                                                                                                          225                      63.5     914.4      3       1356    431.8 – 1346.2      48     E-LMTA-2536       665563        9825    14737    23088
                                                                                                                                                                             168                   101.6    152.4      4       356     195.6 – 348.0       23     E-LMTA-4006       665570        5000    7500     11750
     XY-15
                                                                                                                                                                                72                 101.6    203.2      4       406     195.6 – 398.8       25     E-LMTA-4008       665571        5833    8750     13708
                                                                                                                                                                                                   101.6    304.8      4       508     195.6 – 500.4       28     E-LMTA-4012       665572        7500    11250    17625
                                                                 Description                                                                                                                       101.6    406.4      4       635     223.5 – 629.9       32     E-LMTA-4016       665573        8202    12303    19274
                                                                                                                                                                                         172
                                                                                         ®                                                                                                         101.6    609.6      4       894     276.9 – 878.8       39     E-LMTA-4024       665574        13158   19737    30921
                                                                 Caburn-MDC’s V-Plane modular stages are building block
                                                                                                                                                                                                   101.6    914.4      4       1278    355.6 – 1270.0      50     E-LMTA-4036       665575        13500   20250    31725
                                                                 components designed to streamline the implementation of a
                                                                 sample manipulation system. They can be used as stand alone
                                                                 components or combined with other V-Plane® instruments to                       Top – DN40, tapped holes
                                                                                                                                                                                                   Motorization options
                                          Z                                                                                                      Bottom – DN63, clearance holes
                                                                                                                                                                                                                                                                                    Option -01
                                                                 attain customized motion and manipulation solutions. V-Plane®                                                                                                                                                      In-line stepper motor
                                                                 single axis stages employ handwheel and worm gear reduction                       End view 3
                                                                 drive mechanisms with linear displacement measured along the
                                                                 stage’s frame mounted scale. Z axis linear travels of up to
                                                                                                                                                                        225
                             Bore                                914.4mm are available. Caburn-MDC V-Plane® stages provide                                                 168
                                                                 precise sample motion and manipulation of samples inside ultra-                                             72
                                                                 high vacuum environments. Caburn-MDC recommends that all
                                                                 long-stroke 38.1mm diameter bore Z axis V-Plane® stages, with
                                                                 linear travels exceeding 150mm, be fitted with guide tubes.                                                             172
                                                                                                                                                                                                                                       Motor                         Add-on         Option
                                                             A   Specifications                                                                                                                    Motorization1                       Specification                 weight kg      number        £       €        SFr.
                                                                                                                                                                                                   Z In-line stepper                   F                             1.4            -01           458     687      1076
                                                                 Material                                                                        DN40CF
                                                                                                                                                                                               1
                                                                                                                                                 Top – tapped holes                                When ordering motorized options, add the option number and price to the desired UHV or HV component part number listed
                                                                 Flange                                                   304 Stainless steel    Bottom – clearance holes                          above. For example: 665546-01
             B                                                   Actuator body                                         Anodized aluminium                                                          For total unit weight, add option weight to component weight
                                                                                                                                                   End view 4
                                                                 Shaft seal                                        AM 350 welded bellows
                                                                 Vacuum range                                                 1.3x10-11 mbar
                                                                 Temperature range 1                                        -20°C to 230°C                          270
                                                                                                                                                                            194
                                                                                                                                                                                                                                      Z
                                                                 Weight and dimensions                                              See table                                 86
                                                                 1
                                                                                         UHV units are bakeable to 30°C maximum when motorized


                                                                                                                                                                                         209




                                                                                                                                                                                                                                                                                          112
                                                                                                                                                 DN100CF
                                                                                                                                                 Top – tapped holes
                                                                                                                                                 Bottom – clearance holes                                                                                                          60
 ■   All LMTA flanges are non-rotatable




All dimensions are nominal in millimetres unless specified                                                                                                                                                                    All dimensions are nominal in millimetres unless specified Weights given are approximate


Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                       Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk
                      Section 7.2                                                                                Motion and manipulation                      Motion and manipulation                                                                                             Section 7.2
                                          ®
                      V-Plane                                                                                                                                                                                                                                                 V-Plane®
                      Z Axis guide tube                                                                                                                                                                                                                                Z Axis guide tube

                                                                                       UHV Series                                                             UHV Series                         Use2             Flange         Flange       Flange      Wt                      Part
                                                                                                                                                                                     A           with             1              2            3           kg      Reference       number        £       €       SFr.

                                                                                   Features                                                                   CF        230°C        495         665534           DN40           DN40         DN16        4       E-GT-1506       665582        2400    3600    5640
                                                                                                                                                                                     546         665535           DN40           DN40         DN16        4       E-GT-1508       665583        2400    3600    5640
                                                                                   ■   V-Plane® building block component                                                             648         665536           DN40           DN40         DN16        4       E-GT-1512       665584        2400    3600    5640
                                                                                   ■   Used with 38mm bore Z-axis V-Plane® stages with greater                                       800         665537           DN40           DN40         DN16        5.5     E-GT-1516       665585        2500    3800    5875
                                                                                       than 152mm travel                                                                             1105        665538           DN40           DN40         DN16        5.5     E-GT-1524       665586        2600    3900    6110
          Accessory ports
                                                                                                                                                                                     1562        665539           DN40           DN40         DN16        6.5     E-GT-1536       665587        2700    4000    6345
                                                                                   ■   Bakeable to 230°C
                                                                                                                                                                                     Feedthrough multi-port assembly without guide tube                           E-GTFA          1603051       672     912     1579
                                                                                   ■   DN16CF access ports                                                                       2
                                                                                                                                                                                     Use with 38.1 bore single axis Z stages
                                                                                   ■   Linear bearing guide tube support
                                                                                   ■   Includes 6.4 and 9.5mm diameter shaft rotary                           Typical guide tube application
                                                                                       bearing supports
                                                                                                                                                                                 The DN63CF base flange on                                                                 The guide tube extends into
                                                                                                                                                                                 V-Plane® stages with 38.1mm bore                                                          vacuum beyond the linear bearing
      E-GT-1506                                                                                                                                                                  is fitted with a counterbore and                                                          support.The rotary bearing radial
                                                                                                                                                                                 four tapped holes.This counterbore                                                        screws, located at guide tube tip,
                                                                                                                                                                                 and tapped holes provide the                                                              may need removing to properly fit
                                                                                   Description                                                                                   means of attaching the guide tube’s                                                       guide tube through linear bearing
                                                                                   Caburn-MDC guide tubes provide bellows support for                                            linear bearing support.                                                                   housing.
                                                                                   V-Plane® manipulator stages fitted with long-stroke bellows as
                                                                30º
                                                                                   well as secondary rotary and linear motion feedthroughs
                                                                                   installed on the stage. Guide tubes mount directly onto
                                                                                   V-Plane® manipulator stages fitted with DN40CF port flanges
          Flange 3
          DN16CF
                                                                       80º         with a bore clearance suitable for the 28.6mm guide tube                                      The linear bearing support is shown                                                       Other motion products may
          flanges,                                                                 diameter. They are supplied with both rotary and linear bearing                               fastened to the DN63CF base                                                               be attached to the guide tube’s
          4 places,
          non-rotatable                                                            supports. Rotary bearings for 6.4 and 9.5mm diameter shafts                                   flange of a V-Plane® single axis Z                                                        main flange. Shown here is a
          with tapped                                                              are included. For applications requiring sample heating, cooling,                             stage using four vented stainless                                                         precision rotary-linear instrument
          holes
                                                                                   high voltage biasing, thermocouple temperature measurements,                                  steel socket head screws supplied                                                         found in Section 7.1.
                                         41.1
          Flange 2                                                                 etc., the guide tube tip has been fitted with two slots 180°                                  with each guide tube assembly. The
          DN40CF
          flange,                                                                  apart through which wires or tubes can be fed. Four DN16CF                                    linear bearing support requires a
          non-rotatable                                                30º typ     and one DN40CF flange accessory ports allow the installation                                  63.5mm bore in any mating
          with tapped
          holes                                                                    of up to five additional accessory components. When a                                         component.
                             89                                                    manipulator stage is not under vacuum or is let up to air with
                                                                      17.4 typ     the bellows in some state of compression, the compressed
                                                            20.6 ID typ            bellows’ spring force may force the bellows to shift off-axis at                              Six threaded studs are fastened to                                                        The rotary-linear drive shaft
                                                                                   some point during its travel. The off-axis shift could be sudden                              the V-Plane® Z axis stage top flange                                                      extends into vacuum beyond the
                                                  28.6 OD                          and violent causing injury or damage to the bellows.                                          prior to inserting the guide tube                                                         rotary bearing support on the
          Flange 1
                                                             70 typ                Caburn-MDC recommends that all long-stroke 38.1mm                                             through the top flange and bellows.                                                       guide tube tip.
          DN40CF
          flange,                                                                  diameter bore Z axis V-Plane® stages, with linear travels
          non-rotatable                                                            exceeding 150mm, be fitted with guide tubes.
          with clearance
          holes
                             A                                                     Note The linear bearing support requires a 63.5 bore in any
                                                                                   mating component.
                                                    38
                                                                                   Specifications
                                  12
                                                         Rotary bearing for        Material                                                                                      The guide tube assembly is secured                                                        Four mini CF ports can be used for
                                                         Ø6.4 or Ø9.5 shaft,
                                                         installed on guide tube   Flange                                               304 Stainless steel                      to the V-Plane® Z axis stage top                                                          the input or output of sample
                                                                                   Bearings              300 Series stainless steel with Dicronite® coating                      flange using the nuts and washers                                                         voltage biasing as well as
          Linear bearing to be
          attached to baseplate                                                    Vacuum range                                              1x10-11 mbar                        supplied.                                                                                 thermocouple and other
          of LMTA Z-only stage                                                     Temperature range                                    -200°C to 230°C                                                                                                                    instrumentation signals. Insulated
          using the four 6-32 x                          63.5 OD
          9.5 vented screws                                                        Weight and dimensions                                         See table
                                                                                                                                                                                                                                                                           wires exit into vacuum through
          provided                                       48.5 OD                                                                                                                                                                                                           slots on guide tube tip.




   All dimensions are nominal in millimetres unless specified                                                                                                                                                                  All dimensions are nominal in millimetres unless specified Weights given are approximate

518 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                     Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 519
                        Section 7.2                                                                                 Motion and manipulation   Motion and manipulation                                                                                                                      Section 7.2
                        Single axis                                                                                                                                                                                                                                             Single axis
                        Compact Z stage                                                                                                                                                                                                                                         Compact Z stage

                                                                                        UHV Series                                            Bore       Linear   Flange                A                B                                                          Wt                        Part
                                                                                                                                              size       travel   size     Fig      Min – Max        Min – Max          C        D         E       F        G       kg         Reference      number     £      €      SFr.
                                                                                                                                              38.1       25.4     DN40CF   2        221.2 – 246.7    55.9 – 81.3        161      100       57      219      212     4          E-LMT-151      665507     1054   1581   2477
                                                                                    Features                                                  38.1       50.8     DN40CF   2        221.2 – 272.0    55.9 – 106.7       161      100       57      244      212     4          E-LMT-152      665509     1083   1625   2546
                                                                                    ■   25 to 102mm Z-axis travel                             38.1       101.6    DN40CF   2        278.1 – 374.7    74.9 – 176.5       161      100       57      387      133     5          E-LMT-154      665511     1417   2125   3329
                                                                                    ■   13, 38 and 63mm bore diameters                        38.1       152.4    DN40CF   2        349.3 – 501.7    82.6 – 235.0       161      100       57      514      212     6          E-LMT-156      665521     1678   2516   3942
                                                                                                                                              63.5       25.4     DN63CF   2        180.8 – 206.2    55.9 – 81.3        207      117       73      219      250     4          E-LMT-251      665525     1737   2605   4082
                                                                                    ■   Manual or motorized actuator
                                                                                                                                              63.5       50.8     DN63CF   2        180.8 – 231.6    55.9 – 106.8       207      117       73      244      250     4          E-LMT-252      665526     1789   2684   4205
                                                                                    ■   UHV-compatible materials                              63.5       101.6    DN63CF   2        273.1 – 374.7    74.9 – 176.5       207      117       73      387      250     5          E-LMT-254      665527     2349   3523   5519
                                                                                    ■   Welded bellows seal
                                                                                    ■   Bakeable to 230°C1
                                                                                    ■   CF port mounts




         E-LMT-051                 E-LMT-151           E-LMT-254


   Description                                                                                                                                                                                                                        Motorization options                                 Option -01
                                                                                        Figure 1                                               Figure 2
   Compact single axis Z stages have smaller footprints than V-                                                                                                                                                                                                                            Side mount stepper motor
                                                                                                                        C
   Plane® and other stages. They are a practical and economical
   solution for applications with limited space. Models with 25.4 to                                                    D                                                           C
   101.6mm of linear travel and bore diameters from 12.7 to
                                                                                                                                                                                 D
   63.5mm are available. The instrument’s precision drive employs
   a fine pitch lead screw mechanism. Approximate positions can
   be measured along a graduated machinist’s scale with both inch
   and millimetre units included. Top and bottom port flanges are                                 60
   available in DN16CF, DN40CF and DN63CF compatible, tapped                                                                                         12.7 hex
   CF metal seal flanges. Edge welded stainless steel bellows are                                                                                                                                                                                           Motor        Add-on            Option
   used to connect the port flanges on all compact stages.                                                                                                                               E                                            Motorization1         spec.        weight kg         number        £      €      SFr.
                                                                                                                                                                                                                                      Z Side mount          E            1.4               -01           508    763    1195
                                                                                                                         E
   Specifications                                                                                                                                                                                                                 1
                                                                                                                                                                                                                                      When ordering motorized options, add the option number and price to the
   Material                                                                                                                                                                                                                           desired UHV or HV component part number listed above
                                                                                                                                                                                                                                      For example: 665518-01
   Flange / body                                             304 Stainless steel
                                                                                                                                                                                                                                      For total unit weight, add option weight to component weight
   Bellows                                                              AM 350                                                                                                          Ø51
   Vacuum range                                                    1x10-11 mbar
                                                                                                                              Ø35                                              22
   Temperature range           1
                                                               -20°C to 230°C
   Weight and dimensions                                               See table                                                                                                                                                                                                     G
   1
       UHV units are bakeable to 30°C when motorized
                                                                                                              19                                     A
                                                                                                                                                                                                                                                         134
                                                                                              A                                     13.7
                                                                                                                                                                                              Bore     Top flange,
                                                                                                                                    Bore
                                                                                                                                                                                                       tapped holes                                                                   225:1 Gear ratio
                                                                                                              3 4




                                                                                                   B                                                        B

                                                                                                                                                                                                                                                         F max



                                                                                                                                                                                                       Bottom flange,
                                                                                                         DN16CF flanges, non-rotatable                                                                 tapped holes
                                                                                                         with tapped holes




   All dimensions are nominal in millimetres unless specified Weights given are approximate                                                                                                                                   All dimensions are nominal in millimetres unless specified Weights given are approximate

520 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                   Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 521
                    Section 7.2                                                                                     Motion and manipulation   Motion and manipulation                                                                                        Section 7.2
                    Manipulation                                                                                                                                                                                                               Manipulation
                    Mini-Z-shifter                                                                                                                                                                                                                         Mini-Z-shifter

                                                                                              UHV Series                                      UHV Series                                                                                 Wt                   Part
                                                                                                                                                                           Description      Flange    Travel        Min        Max       kg    Reference      number    £     €       SFr.

                                                                                         Features                                             CF              230°C        Mini-Z-Shift     DN16CF    25.4          55         30        0.3   MZ16-25        1601000   325   442     764
                                                                                                                                                                           Mini-Z-Shift     DN16CF    50.8          86         36        0.4   MZ16-50        1601001   453   616     1065
                                                                                         ■    UHV-compatible
                                                                                         ■    Edge welded bellows
                                                                                         ■    14mm clear bore
                                                                                         ■    Bakeable to 230°C
                                                                                         ■    Z Travel 25mm or 50mm
                                                                                         ■    Parallelism of flanges: ± 0.25mm /cm
                                                                                                                                                                                                               A max
                                                                                                                                                                      34
                                                                                         ■    Resolution: 1 x 360° turn = 1mm                                                                                  B min

                                                                                         ■    Both flanges DN16CF tapped M4




                                                                                                                                                         52
                                                                                                                                                                                                                0         10        20




                                                                                                                                                                                      Thumbwheel                    mm scale bar
   Description                                                                                                                                                                         adjustment

   This type of UHV-compatible Z-shifter for applications where
   space is limited. The MZ types are designed for long service life
   and high degrees of constructional stability.




   All dimensions are nominal in millimetres unless specified Weights given are approximate                                                                                                          All dimensions are nominal in millimetres unless specified Weights given are approximate

522 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 523
                        Section 7.2                                                                                        Motion and manipulation         Motion and manipulation                                                                                                                     Section 7.2
                        Triple axis                                                                                                                                                                                                                                                        Triple axis
                        Compact XYZ stage                                                                                                                                                                                                                                           Compact XYZ stage

                                                                                          UHV Series                                                       Bore    ± XY      Z                           A           B                                                         Wt                        Part
                                                                                                                                                           size    travel    Travel      Flange      Min – Max       Min – Max       C     D     E        F      G       H     kg       Reference        number          £      €      SFr.
                                                                                                                                                           38.1    13        51          DN40CF      248 – 299       124 – 175       164   105   70       150    216     198   11       E-PSM-1502       678002          2917   4375   6854
                                                                                      Features                                                             38.1    13        102         DN40CF      299 – 401       124 – 226       164   105   70       150    216     198   11       E-PSM-1504       678003          3000   4500   7050
                                                                                      ■   50 or 102mm Z-axis travel                                        63.5    13        102         DN63CF      299 – 401       147 – 249       178   133   86       162    228     209   13       E-PSM-2504       678007          3947   5921   9276
                                                                                      ■   Plus or minus 13mm off-centre XY motion
                                                                                      ■   38 and 63mm bore diameters
                                                                                      ■   Manual or motorized actuators
                                                                                      ■   UHV-compatible materials
                                                                                      ■   Welded bellows seal
                                                                                      ■   Bakeable to 230°C1
                                                                                      ■   CF port mounts




         PSM-1504
                                                                                                                                                           Motorization options
   Description                                                                                                                                                                                                                                            Option -01                                    Option -02
   Compact triple axis XYZ stages have smaller footprints than V-                                                                                                                                                                                         XY motorization                               Z motorization
   Plane® stages. They are a practical and economical solution for                                                   D                  C

   applications with limited space. Models with 50 and 100mm of                                                                                                             79
   linear travel and bore diameter of 38.1 and 63.5mm are
                                                                                                                                                                                                                                Y
   available. The instruments precision Z drive employs a fine pitch                                                                               Y   E
   lead screw mechanism with approximate positions measured
   along a graduated machinist’s scale with both inch and
   millimetre units included. The XY axes are micrometer driven                           12.7 hex
   and guided by cross roller bearing slides. Micrometers have                                                                                                86                                                       40:1 Gear ratio

   unique laser-etched plus-minus scales that indicate positive or                                                                                                                   225:1                                                 H
                                                                                                                                                       F
   negative port displacement. Caburn-MDC triple axis XY stages                                                                                                                    Gear ratio
                                                                                                                                                                                  (0.1mm/rev)
   provide precise motion and manipulation of samples inside                                           Top flange,
                                                                                                                                                                                                                                                                                         Add-on
   ultra-high vacuum environments. Top and bottom port flanges                                       tapped holes                                                                                             40:1 Gear ratio
                                                                                                                                                                                                                                                                               Motor     weight       Option
                                                                                                                                                                                                                                                                                                                                €
                                                                                                                                                                                   Z                                                                      Motorization   1
                                                                                                                                                                                                                                                                               spec.     kg           number             £             SFr.
   are available in DN40 and DN63-compatible, tapped CF metal                                                                                                                                                  (0.1mm/rev)
                                                                                                                                                                                                                                                          XY In-line stepper   D         1.4          -01                589    884    1385
   seal flanges. Edge welded stainless steel bellows are used to                                                           X                                                                                                                              Z Side mount         E         1.4          -02                684    1026   1608
   connect the port flanges on all XYZ compact stages.                                                    Z                                                                                                           G
                                                                                                                                                                                                                                                      1
                                                                                                                                                                                                                                                          When ordering motorized options, add the option number and price to the desired UHV
                                                                                                                                                                                                      X                                                   or HV component part number listed above
   Specifications                                                                                                                                                                                                                                         For example: 678002-01-02
   Material                                                                                                                                                                                                                                               For total unit weight, add option weight to component weight
   Flange / Body                                                304 Stainless steel                                      Ø27
   Bellows                                                                AM 350
   Vacuum range                                                      1x10-11 mbar
   Temperature range           1
                                                                 -20°C to 230°C                                            Bore

   Weight and dimensions                                                 See table         A

   1
       UHV units are bakeable to 30°C when motorized



                                                                                                                                                       B
                                                                                                                                                                                  Bore Travel     Min – Max
                                                                                                                                                                                  38.1    51      261 – 312
                                                                                                                                                                                  38.1   102      312 – 414
                                                                                                                                                                                  63.5   102      312 – 414
                                                                                                                                  Bottom flange,
                                                                                                                                  tapped holes




   All dimensions are nominal in millimetres unless specified                                                                                                                                                                              All dimensions are nominal in millimetres unless specified Weights given are approximate

524 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                   Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 525
                        Section 7.2                                                                                           Motion and manipulation   Motion and manipulation                                                                                                                              Section 7.2
                        Triple axis                                                                                                                                                                                                                                                              Triple axis
                        Standard XYZ stage                                                                                                                                                                                                                                                  Standard XYZ stage

                                                                                          UHV Series                                                    Bore    ± XY Z                                      B                                                               Wt                              Part
                                                                                                                                                        size    Travel Travel Flange              A     Min – Max          C          D           E     G           J       kg       Reference              number             £       €       SFr.
                                                                                                                                                        38.1    13       102         DN40CF       274   177 – 279          150        164         178   140         32      9        E-PSMA-1504            678030             5965    8947    14018
                                                                                      Features                                                          38.1    13       152         DN40CF       325   177 – 329          150        164         178   140         32      12       E-PSMA-1506            678031             6338    9507    14894
                                                                                      ■   102 to 304mm Z-axis travel                                    38.1    13       203         DN40CF       404   208 – 411          150        164         178   140         32      19       E-PSMA-1508            678032             6711    10066   15770
                                                                                      ■   Plus or minus 13 and 25mm off-centre XY motion                38.1    13       305         DN40CF       564   266 – 571          150        164         178   140         32      21       E-PSMA-1512            678033             7456    11184   17522
                                                                                                                                                        63.5    13       102         DN63CF       297   210 – 312          162        178         196   181         57      20       E-PSMA-2504            678038             7083    10625   16646
                                                                                      ■   38, 63 and 102mm bore diameters
                                                                                                                                                        63.5    13       152         DN63CF       348   210 – 363          162        178         196   181         57      21       E-PSMA-2506            678039             7270    10905   17084
                                                                                      ■   Manual or motorized actuators                                 63.5    13       203         DN63CF       406   216 – 419          162        178         196   181         57      22       E-PSMA-2508            678040             7829    11743   18398
                                                                                      ■   UHV-compatible materials                                      63.5    13       305         DN63CF       513   223 – 528          162        178         196   181         57      23       E-PSMA-2512            678041             7829    11743   18398

                                                                                      ■   Welded bellows seal                                           63.5    25       102         DN63CF       315   228 – 330          206        225         229   187         57      22       E-PSML-2504            678014             7500    11250   17625

                                                                                                                       1
                                                                                                                                                        63.5    25       152         DN63CF       366   229 – 381          206        225         229   187         57      23       E-PSML-2506            678015             7700    11550   18095
                                                                                      ■   Bakeable to 230°C                                             63.5    25       203         DN63CF       429   236 – 439          206        225         229   187         57      24       E-PSML-2508            678016             7800    11700   18330
                                                                                      ■   CF port mounts                                                63.5    25       305         DN63CF       526   236 – 541          206        225         229   187         57      25       E-PSML-2512            678017             8000    12000   18800
                                                                                                                                                        101.6   13       102         DN100CF      315   228 – 330          184        195         252   213         64      22       E-PSMA-4004            678046             7000    10500   16450
                                                                                                                                                        101.6   13       152         DN100CF      371   236 – 388          184        195         252   213         64      23       E-PSMA-4006            678047             8800    13200   20680
                                                                                                                                                        101.6   13       203         DN100CF      429   241 – 444          184        195         252   213         64      24       E-PSMA-4008            678048             9000    13500   21150
                                                                                                                                                        101.6   13       305         DN100CF      533   246 – 551          184        195         252   213         64      25       E-PSMA-4012            678049             10526   15789   24737
                                                                                                                                                        101.6   25       102         DN100CF      335   246 – 348          254        267         264   224         64      24       E-PSML-4004            678022             7917    11875   18604
         PSMA-1506
                                                                                                                                                        101.6   25       152         DN100CF      389   249 – 401          254        267         264   224         64      25       E-PSML-4006            678023             8750    13125   20563
                                                                                                                                                        101.6   25       203         DN100CF      450   259 – 462          254        267         264   224         64      26       E-PSML-4008            678024             9583    14375   22521
   Description                                                                                                                                          101.6   25       305         DN100CF      551   259 – 564          254        267         264   224         64      27       E-PSML-4012            678025             10658   15987   25046

   Standard XYZ stages are large bore stages which incorporate                                                 D                        E
   triple axis motion in a single stage. The XY travels are
   micrometer driven and guided by cross roller bearing slides.
   Caburn-MDC micrometers have unique laser etched plus-minus                                                                       X
   scales that indicate positive or negative port displacement and                                                                                      Motorization options
   are available with either 12.7 or 25.4mm of linear XY                                   C

   displacement. The Z axis employs a handwheel and worm gear
                                                                                                                                                                                                                                                                Option -01                                    Option -02
   reduction drive mechanism with displacement measured along                                                                                                                                                                                                   XY motorization                               Z motorization
                                                                                                                                                                                                                Bore      XY Travel       Length
   the stage’s frame mounted machinist’s scale. Z axis linear travels                                                                           G
                                                                                                                                                                                                                38.1        ±13             216
   of up to 304.8mm are available. Caburn-MDC standard stages                                                                                                                                                   63.5        ±13             228
   provide precise sample motion and manipulation of samples                                                                                                                    40:1 Gear ratio                 63.5        ±25             227
                                                                                                       Y                                                                                                        101.6       ±13             264
   inside ultra-high vacuum environments.                                                                                                                                                                       101.6       ±25             217

                                                                                                                                                                           40:1
   Specifications                                                                              Bore XY Travel Clearance                         95                         Gear
                                                                                                                                                                           ratio
   Material                                                                                    38.1      ±13            76
                                                                                               63.5      ±13            96
   Flange                                                       304 Stainless steel            63.5      ±25           124
                                                            Anodized aluminium                 101.6     ±13           114
   Actuator body
                                                                                               101.6     ±25           143                  Z
   Bellows                                                                AM 350
                                                                                                                                                                                                                                                                                               Add-on
   Vacuum range                                                      1x10-11 mbar                                                                                                                                                                                                    Motor     weight       Option
                                                                                                         Top flange,         Bore                                Bore     XY Travel      Length
   Temperature range 1                                           -20°C to 230°C                        tapped holes                                              38.1          ±13        198                                             112                   Motorization    1
                                                                                                                                                                                                                                                                                     spec.     kg           number             £       €       SFr.
                                                                                                                                                                                                        25:1 Gear ratio
   Weight and dimensions                                                 See table                                                                               63.5          ±13        207                                                                   XY In-line stepper   D         1.3          -01                939     1274    2207
                                                                                                                                                                 63.5          ±25        210
                                                                                                                                                                 101.6         ±13        249                                                                   Z In-line stepper    F         1.3          -02                648     880     1523
   1
       UHV units are bakeable to 30°C when motorized                                                                                            A
                                                                                                                                                                 101.6         ±25        206                                                               1
                                                                                                                                                                                                                                                                When ordering motorized options, add the option number and price to the desired UHV
                                                                                                                                                                                                                                                                or HV component part number listed above
                                                                                                                                                                                                                                                                For example: 678026-01-02
                                                                                           B
                                                                                                                                                                                                                                                                For total unit weight, add option weight to component weight




                                                                                                               J
                                                                                                Bottom flange,
                                                                                               clearance holes




   All dimensions are nominal in millimetres unless specified                                                                                                                                                                                   All dimensions are nominal in millimetres unless specified Weights given are approximate

526 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 527
                        Section 7.2                                                                                              Motion and manipulation   Motion and manipulation                                                                                                                      Section 7.2
                        Rotatable axis                                                                                                                                                                                                                                             Rotatable axis
                        360° Adjustable stage                                                                                                                                                                                                                                        360° Adjustable stage

                                                                                          HV Series                                                        HV Series                                Bore       Flange                                                        Wt                        Part
                                                                                                                                                                                                    size       size     Fig   A         B       C         D         E        kg      Reference         number        £        €        SFr.

                                                                                                                                                           CF                  200°C                38.1       DN40     1     102       57      63        8         55       5       E-RMTG-275        665421        2100     3100     4935
                                                                                      Features                                                                                                      63.5       DN63     2     173       56      114       11        68       9       E-RMTG-450        665422        3900     6000     9165
                                                                                      ■       360° continuous rotary positioning                                                                    108.0      DN100    2     212       56      122       10        119      12      E-RMTG-600        665423        4471     6700     10507
                                                                                      ■       Manual or motorized actuator                                                                          158.8      DN160    2     311       62      159       10        172      18      E-RMTG-800        665424        5588     8382     13132
                                                                                                                                                                                                    209.6      DN200    2     324       62      184       10        178      25      E-RMTG-1000       665425        5950     8900     13983
                                                                                      ■       Rotary position lock
                                                                                      ■       Differentially pumped, dual PTFE elastomer seals
                                                                                      ■       UHV-compatible materials
                                                                                      ■       Bakeable to 200°C1
                                                                                      ■       CF port mounts




                                                                                              Figure 1                                                         Figure 2
                                                                                                                                                                                                                                                     Motorization options                              Option -01
         E-RMTG-450                                                                                                                                                                                                                                                                                    Side mount stepper motor

                                                                                                                                    38
                                                                                                                                   Bore
   Description
                                                                                                                                                                                                  Bore
   Rotatable axis stages replace conventional rotatable mounting
   tables previously offered by Caburn-MDC. They provide 360°
   positioning with greater precision, control and ease of use.
                                                                                                37
   Rotatable stages are constructed with worm gear drive
   mechanisms which offer substantial mechanical advantage over                                                                                   A
   non-geared designs, a feature which allows effortless manual
   operation, even under a full vacuum load. High torque stepper                                                                                               49                                                                                    Motorization1
                                                                                                                                                                                                                                                                             Motor
                                                                                                                                                                                                                                                                             spec.
                                                                                                                                                                                                                                                                                        Add-on
                                                                                                                                                                                                                                                                                        weight kg
                                                                                                                                                                                                                                                                                                       Option
                                                                                                                                                                                                                                                                                                       number        £        €        SFr.
   motors are also available for these stages.                                                                                                                                                                                      A                Side stepper            E&F        1.4            -01           200      300      470

   Caburn-MDC rotatable stages can be used to rotate heavy                                                                                                                                                                                       1
                                                                                                                                                                                                                                                     When ordering motorized options, add the option number and price to the desired UHV or
   samples or sample support apparatus and structures. Two                                     116
                                                                                                                                                                                                                                                     HV component part number listed above

   spring energized PTFE face seals are at the heart of the                                                                                   C
                                                                                                                                                                                                                                                     For example: 665518-01

   rotatable stage’s sealing mechanism. With provision for                                                                                                                                                                                           For total unit weight, add option weight to component weight
                                                                                                                                                            176
   differential pumping between the seals, these rotatable stages
   can be used in UHV environments with bakeout temperatures
   as high as 200°C.                                                                                                      E                                                                                      C
                                                                                                                                                                                       E
   Specifications                                                                                                                                                                                                                                        Bore       Length
                                                                                                                               Ø50                                                                                                                       38.1        103
   Material                                                                                                                                                                                   Ø83
                                                                                                                                                                                                                                                         Others      137
   Flange                                                       304 Stainless steel
   Actuator body                                              Anodized aluminium
   Gasket seals                                                              PTFE                                                                                                                                             D
                                                                                                                                                                                                                                    B
   Vacuum range                                                                                 60
   HV Applications                                                    1x10-8 mbar
                                                                                                                                                  B
   UHV Applications                            Differentially pumped to1x10-2 mbar
   Temperature range 1                                            -20°C to 200°C
   Weight and dimensions                                                 See table
                                                                                                                                                  D
   1
       UHV units are bakeable to 30°C when motorized




                                                                                                                                                                                                                                                         Bore       Length
                                                                                                                                                                                                                                                         38.1           57
                                                                                          ■   Both top and bottom flanges have tapped holes                ■   Both top and bottom flanges have tapped holes                                             Others         74




   All dimensions are nominal in millimetres unless specified                                                                                                                                                                                All dimensions are nominal in millimetres unless specified Weights given are approximate

528 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                    Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 529
                          Section 7.2                                                                                                          Motion and manipulation              Motion and manipulation                                                                                            Section 7.2
                          Load-lock systems                                                                                                                                                                                                                               Load-lock systems
                          Introduction                                                                                                                                                                                                                                                                Introduction

                                                                                                           UHV and HV series                                                        UHV Series         Nominal         Linear           (A) Magnetic      Door              Valve                      Part
                                                                                                                                                                                                       sample          travel           transporter       ID (F)            ID (L)       Reference     number        £       €       SFr.
                                                                                                                                                                                                       35              304.8            584.2             41.41             38.11        E-FEL-112M    1600011       3643    4945    8561
                                                                                                       Features                                                                                        35              609.6            927.1             41.41             38.11        E-FEL-124M    1600012       3909    5306    9186
                                                                                                       ■   Transfer samples from atmosphere to UHV in minutes                                          35              914.4            1231.9            41.41             38.11        E-FEL-136M    1600013       4385    5952    10305
                                                                                                       ■   Choice of 35mm (13/8”), 65mm (23/8”) and 95mm (33/4”)                                       60              304.8            584.2             60.5              63.5         E-FEL-212M    1600015       4440    6026    10434
                                                                                                                                                                                                       60              609.6            927.1             60.5              63.5         E-FEL-224M    1600016       4711    6394    11071
                                                                                                           nominal sample sizes
                                                                                                                                                                                                       60              914.4            1231.9            60.5              63.5         E-FEL-236M    1600017       5187    7040    12189
                                                                                                       ■   Magnetically coupled rotary/linear transporter rod                                          95              304.8            584.2             97.3              101.6        E-FEL-412M    1600019       5070    6882    11915
                                                                                                       ■   Sample chamber with viewport and quick                                                      95              609.6            927.1             97.3              101.6        E-FEL-424M    1600020       5254    7132    12347
                                                                                                           open/close door                                                                             95              914.4            1231.9            97.3              101.6        E-FEL-436M    1600021       5730    7778    13466

                                                                                                       ■   Vertical or horizontal mounting                                                         1
                                                                                                                                                                                                       The nominal ID of 100 series door and gate valve gasket is 38.8 ID when using CCG40

                                                                                                       ■   Type 304 (1.4301) stainless steel construction
                                                                                                       ■   UHV version bakeable to 200°C                                            HV Series          Nominal         Linear           (A) Magnetic      Door              Valve                      Part
                                                                                                                                                                                                       sample          travel           transporter       ID (F)            ID (L)       Reference     number        £       €       SFr.
                                                                                                                                                                                                       35              304.8            584.2             41.41             38.11        E-FEL-112     1600000       2765    3753    6498
                                                                                                                                                                                                       35              609.6            927.1             41.41             38.11        E-FEL-124     1600001       3073    4171    7222
                                                                                                                                                                                                       35              914.4            1231.9            41.41             38.11        E-FEL-136     1600002       3506    4759    8239
                                                                                                                                                                                                       60              304.8            584.2             60.5              63.5         E-FEL-212     1600004       3570    4845    8390
                                                                                                                                                                                                       60              609.6            927.1             60.5              63.5         E-FEL-224     1600005       3850    5225    9048
   Description                                                                                                                                                                                         60              914.4            1231.9            60.5              63.5         E-FEL-236     1600006       4334    5882    10185
   E-FEL fast entry load-lock systems allow quick and easy loading                                     The sample can be moved 305mm (12”), 610mm (24”) or                                             95              304.8            584.2             97.3              101.6        E-FEL-412     1600008       4006    5438    9414
   and unloading of a sample in and out of the vacuum chamber,                                         915mm (36”), from the centre of the entry load lock. It can also                                95              609.6            927.1             97.3              101.6        E-FEL-424     1600009       4382    5947    10298
   without breaking the system vacuum.                                                                 be rotated 360°. Positioning is controlled by sliding an external                               95              914.4            1231.9            97.3              101.6        E-FEL-436     1600010       4823    6546    11334
                                                                                                       sleeve that is magnetically coupled with the transporter rod,                               1
                                                                                                                                                                                                       The nominal ID of 100 series door and gate valve gasket is 38.8 ID when using CCG40
   Samples are loaded on to the E-FEL internal transporter
                                                                                                       connected to the sample holder, inside the system.
   through the quick access door on the sample transfer chamber.
   Loading can be observed through a viewport.                                                                                                                                                     Customer note Load lock systems are shipped in component form, for customer assembly on-site.

   After the transfer chamber is evacuated to the desired level
   through DNCF flange port, the C-Loc gate valve is opened for
   access into the main vacuum chamber.



                                                      B
                                                                                                                                 Quick
                              C      N                                                                                           access         G         H
                                                     Quick-access door                                                            door                F
                                                      ViewportD
                                                              D
              DN40CF
              rotatable                                                                                           A                                                             J
                                                                                                                 Stop clamp      Viewport

                                                                                                                                                                       L
                                                                                                                                                                             K
                          E
                                      C-Loc                                        Stop                     Linear travel
                                    gate valve                 M6 x 15mm deep     clamp                                                                              C-Loc
                                                                                                                                               45°
                                                                                                           DN16CF non-rotatable flange                                gate
                                                                                   Linear guide bar                                                       M
                                                                                                                            DN40CF non-rotatable flange              valve
                                                                              shown in dashed lines*




     E-FEL                    Valve HT                            View dia
     Series                   B                  C                D              E               G                 H                J                K        M            N
     E-FEL-100                279                75.2             E-FEL-100      33.5            62.5              113.3            58               63       60.2         61
     E-FEL-200                314                86.2             E-FEL-200      34.8            74.4              174.5            99               71       58.7         70
     E-FEL-400                522                88.9             E-FEL-400      32.0            93.5              210.1            138              89       72.9         112




   All dimensions are nominal in millimetres unless specified                                                                                                                                                                                       All dimensions are nominal in millimetres unless specified Weights given are approximate

530 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                            Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 531
                    Section 7.2                                                                                  Motion and manipulation                Motion and manipulation                                                                                                                        Section 7.2
                    Load-lock systems                                                                                                                                                                                                                               Load-lock systems
                    Rectangular                                                                                                                                                                                                                                                          Rectangular entry

                                                                                  HV Series                                                              HV Series                                               Non        Linear        Transporter       Valve           Wt                         Part
                                                                                                                                                                                                                 sample     travel        A                 aperture        kg      Reference          number            £          €        SFr.

                                                                              Features                                                                   Elastometer seal                   150°C                203        304.8         584               25.4 x 210.9    48      LLR-812            665609            12000      18000    28200
                                                                                                                                                                                                                 203        609.6         927               25.4 x 210.9    49      LLR-824            665610            12100      18150    28435
                                                                              ■   Fast transfer of samples from atmosphere to UHV                                                                                203        914.4         1232              25.4 x 210.9    50      LLR-836            665611            12300      18450    28905
                                                                              ■   Up to 203mm (8”) diameter sample sizes
                                                                              ■   Magnetically coupled rotary/linear transporter rod
                                                                                                                                                         Flange adaptor
                                                                              ■   Sample chamber with viewport fitted                                                                                                                                                                                            76 x 262 rectangular flange
                                                                                                                                                                                                                                                        25.4                                                     with clearance holes
                                                                                  quick-access door                                                     This drawing only represents the flange adaptor
                                                                              ■   Linear guide to lock rotation                                         used with the rectangular entry load-lock
                                                                              ■   Vertical or horizontal mounting                                       systems presented in this section.
                                                                              ■   Type 304 (1.4301) stainless steel construction                        A photograph and description appear on the
                                                                              ■   Bakeable to 200°C                                                     previous page.
                                                                                                                                                                                                                                    240                                                   215.9
                                                                                                                                                                                                                                                                                                                             131/4” CF flange,
                                                                                                                                                                                                                                                                                                                             non-rotatable with
                                                                                                                                                                                                                                                                                                                             clearance holes




                                                                                                                                                                                                                                                 59.9 typ
   Description                                                                                The quick-access door swings clear for sample entry                      Wt       Part                                                                                59.9                                    133.4
                                                                                              and removal. The tip of the magnetic transporter is        Reference     kg       Number       £          €          SFr.
   E-RFEL rectangular fast entry load-lock                                                                                                                                      665801
                                                                                              accessible through this door.Various sample handling       F1X8          20.9                  2000       3000       4700
   systems allow quick and easy loading and
                                                                                              accessories including Cab-Fast® and
   unloading of a sample in and out of the
                                                                                              Auto-Dock™ sample handling systems are available.
   vacuum chamber without breaking the
                                                                                              Doors are sealed with Viton® elastomer gaskets. High
   system vacuum.
                                                                                              temperature Kalrez® elastomers can be used to
   Samples are loaded on to the E-RFEL                                                        increase the systems bakeout temperature to 200°C.
   internal transporter through the quick-
                                                                                                                                                                                            391                                                             A                              159             255
   access door on the sample transfer
                                                                                                                                                                       DN40CF         171
   chamber. Loading can be observed                                                                                                                                  non-rotatable                                                                                                                                        Valve slot
                                                                                                                                                                                                                                                                                                                         25.4 x 210.8
   through a viewport. After the transfer                                                     Rectangular entry load-lock systems are fitted with
                                                                                                                                                                        flange
                                                                                                                                                                                             139                                                       Stop clamp
   chamber is evacuated to the desired                                                        UHV-rated magnetic transporters and include a
   level through a CF flange port, the C-Loc                                                  transporter guide rod mechanism.The guide rod
   rectangular port valve is opened for                                                                                                                          DN16CF                                                                                                                                                            318
                                                                                              mechanism allows rotation lock during sample                          non-
   access into the main chamber.                                                              transfer. The magnets in the transporter actuator                  rotatable
                                                                                                                                                                   flange
   The sample can be moved 305mm (12”),                                                       (black cylinder in photograph) must be removed for                                                   M16 x 12.7 deep
                                                                                              150°C service or bakeout. The magnets must not be                                                                                                                                                        136.7
   610mm (24”) or 915mm (36”), from the                                                                                                                                 34                                  Stop clamp                                                                               (View Ø)    Root        Rectangular
                                                                                                                                                                                                                                                    Linear travel                     210.8 (door)
   centre of the load lock chamber. It can                                                    subjected to temperatures in excess of 30°C.                                                                                                                                                                       valve       gate valve
                                                                                                                                                                                                               Linear guide bar                                                         openings
                                                                                                                                                                                 75                                                                                                                                           RGV-18
   also be rotated 360° or locked in any                                                                                                                                                                                                                            Quick-access door with
                                                                                                                                                                                                                                                                           viewport
   position during linear transfer.
   Positioning is controlled by sliding an
   external sleeve that is magnetically                                                       Rectangular to circular flange adaptors provide
   coupled with the transporter rod,                                                          connectability between rectangular entry load-lock
   connected to the sample holder, inside                                                     system gate valves and any vacuum chamber fitted
   the system.                                                                                with a 131⁄4”CF mating flange. These flange adaptors      Customer note Load lock systems are shipped in component form, for customer assembly on-site.
                                                                                              are also available in other sizes for use with the full
                                                                                              range of Caburn rectangular gate valves. See Section
                                                                                              1 to order other adaptor sizes.




   All dimensions are nominal in millimetres unless specified Weights given are approximate                                                                                                                                               All dimensions are nominal in millimetres unless specified Weights given are approximate

532 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 533
                     Section 7.2                                                                                                   Motion and manipulation                Motion and manipulation                                                                                                         Section 7.2
                     Magnetic transporters                                                                                                                                                                                                                Magnetic transporters
                     Guided and unguided                                                                                                                                                                                                                                               Guided and unguided

                                                                                                   UHV Series                                                             UHV Series                                  Transporter        Nominal              Transporter        Wt                      Part
                                                                                                                                                                                                                      type               travel               A                  kg     Reference        number              £          €             SFr.

                                                                                               Features                                                                   Ball bearings                    200°C      Unguided           305                  699                4.5    MTM-12           665700              1864       2796          4380
                                                                                                                                                                                                                      Unguided           610                  1041               5.5    MTM-24           665701              1965       2947          4618
                                                                                               ■   UHV-compatible materials                                                                                           Unguided           915                  1346               6.3    MTM-36           665702              2246       3368          5277
                                                                                               ■   All-metal with ball bearing guides                                                                                 Guided             305                  699                4.5    GMTM-12          665700-01           2140       3211          5030
                                                                                                                                                                                                                      Guided             610                  1041               5.5    GMTM-24          665701-01           2351       3526          5525
          High vacuum version                                                                  ■   Magnetically coupled rotary/linear transporter rod
                                                                                                                                                                                                                      Guided             915                  1346               6.3    GMTM-36          665702-01           2632       3947          6168
                                                                                               ■   Vertical or horizontal mounting
                                                                                               ■   Guided and unguided models
                                                                                               ■   2.27kg maximum axial force                                             HV Series                                   Transporter        Nominal              Transporter        Wt                      Part
                                                                                                                                                                                                                      type               travel               A                  kg     Reference        number              £          €             SFr.
                                                                                               ■   1Nm maximum torque                                                               ®
                                                                                                                                                                          Vespel bearings                  150°C      Unguided           305                  584                4.5    MT-12            665100              813        1219          1909
                                                                                                                                                                                                                      Unguided           610                  927                5.5    MT-24            665101              958        1438          2252
                                                                                               ■   Type 304 (1.4301) stainless steel construction
                                                                                                                                                                                                                      Unguided           915                  1232               6.3    MT-36            665102              1007       1510          2365
                                                                                               ■   Bakeable to 200°C                                                                                                  Guided             305                  584                4.5    GMT-12           665100-01           1137       1706          2672
                                                                                               ■   Vacuum range 10-11 mbar                                                                                            Guided             610                  927                5.5    GMT-24           665101-01           1268       1901          2979
                                                                                                                                                                                                                      Guided             915                  1232               6.3    GMT-36           665102-01           1441       2161          3368
      E-GMTM-12 Guided transporter

                                                                                                                                                                          Transporter options
   Description
   MTM series UHV magnetically coupled sample transporters
   allow samples to be moved 305mm (12”), 610mm (24”) or
   915mm (36”), depending on the model, into the chamber.                                                                                                                                                                                          DN40CF, non-rotatable with
                                                                                                                                                                                                                                                   clearance holes
   They can also be rotated 360°. Linear positioning is controlled
   by sliding an external sleeve which is magnetically coupled with
   the transporter rod and sample holder inside the system.
                                                                                                                                                                                                                                                                                                                                25 retracted
   GMTM models have linear guide bar to lock the rotation in any                                                                                                                                                                 Linear travel
   position during linear travel.
                                                                                                                                                                                               0.375”-12
                                                                                                                                                                                               Acme lead
                                                                                                                                                                                               screw
                                                                                                                                                                                                                                                                                                                   Ref           UHV
                                                                                                                                                                                                                                                                                                                   -12            765
                                                                                                                                                                                        Linear guide bar
                                                                                                                                                                                                                                                                                                                   -24           1108
              .250-28 thread x .50 deep                                                                                                                                                                                                                                                                            -36           1913
                 (screw and washer                                              A
                      included)                                                                                                                 31
                                   59                                Linear travel                                                              25.4
                                                                                                                   25.4
                                                  89                                                                                                       9.4
                         89                                       Ø37.5
                                                                               Stop clamp                                                                                      96
                                                                                                                                                                                                                                                          Option -01                                   Option -02
                                                                                                                          15.6                                                                                                                            Guide rod                                    In-line 90V DC motor


                                                                                                                                                   Ø12.7          Ø9.4
                                                                                                 DN40CF                          Ø7.9 thro                       ±0.025
                         Stop clamp                                                         non-rotatable flange
                                              Linear guide bar                                                                      Ø3.6 thro
                                          shown in dashed lines
                                                                                                                                                                                                              45

                                                                                                                                                                               98




                                                                                                                                                                                                                                                                             Motor     Add-on         Option
                                                                                                                                                                                                                                                          Motorization1      spec.     weight kg      number             £         €           SFr.
                                                                                                                                                                                                                                                          Motor 90V DC       B         1.4            -02                1118      1678        2628

                                                                                                                                                                           Motorized UHV transporter                                                  1
                                                                                                                                                                                                                                                          When ordering motorized options, add the option number and price to the desired
                                                                                                                                                                                                                                                          UHV or HV component part number listed above
                                                                                                                                                                           Motorized option includes a linear guide bar.
                                                                                                                                                                                                                                                          For example: 665700-02
                                                                                                                                                                                                                                                          For total unit weight, add option weight to component weight



   All dimensions are nominal in millimetres unless specified                                                                                                                                                                                  All dimensions are nominal in millimetres unless specified Weights given are approximate

534 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                       Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 535
                         Section 7.2                                                                             Motion and manipulation                Motion and manipulation                                                                                                        Section 7.2
                         Quick-access doors                                                                                                                                                                                                          Quick-access doors
                         Blank and viewport                                                                                                                                                                                                                           Blank and viewport

                                                                                    HV Series                                                               Blank door
                                                                                                                                                            Clearance holes
                                                                                                                                                                                                                                                 A                             E       Clearance
                                                                                Features                                                                                                                                                                                                 holes

                                                                                ■   Blank or viewport fitted doors
                                                                                ■   Viton® elastomer door seal                                                                                                                                                D

                                                                                ■   HV-compatible materials
                                                                                                                                                                                                                                                                                       Door ID
                                                                                ■   Bakeable to 150°C
                                                                                                                                                                                                                                                              C
                                                                                ■   CF port mounts
                                                      QD-450-VP-CH              ■   Clearance hole mounting port flange                                                                                                                                                            B




                                                                                                                                                            Flange          Clear       Door                                                             Wt                            Part
                                                                                                                                                            size            holes       diameter      A              B    C       D          E           kg       Reference            number      £      €       SFr.
                                                                                                                                                            DN40CF          6.7         34.92         70             23   44      57         37          1        QD-275-CH            665210      292    438     685
         QD-450-CH                                                                                                                                          DN63CF          8.4         64            114            27   70      96         47          3        QD-450-CH            665211      450    675     1058
                                                                                                                                                            DN100CF         8.4         102           152            33   87      121        67          5        QD-600-CH            665212      485    727     1139
                                                                                                                                                            DN160CF         8.4         25            203            35   118     147        71          9        QD-800-CH            665213      634    951     1489
   Specifications                                                               Description                                                                 DN200CF         8.4         204           253            38   143     172        74          12       QD-1000-CH           665214      875    1313    2056
   Material                                                                     Quick-access doors provide convenient and fast manual loading of
   Flange                                                            304ss      samples in and out of vacuum chambers. Doors are hinged and
   Door Seal                                                         Viton®     fitted with a swing-away hand knob locking mechanism. viewport              viewport door
   Viewport                                                     7056 Glass
                                                                                fitted doors are constructed with Corning type 7056 glass fused to          Clearance holes
                                                                                                                                                                                                                                                 A                             E
                                                                                                                                                                                                                                                                                       Clearance
                                                                                                                                                                                                                                                                                         holes
                                                                                a Kovar® nickel-iron transition sleeve. All access doors are supplied
   Vacuum range                                                1x10-8 mbar      with Viton® elastomer seals suitable for high vacuum service. High
   Temperature range1                                      -20°C to 150°C       temperature Kalrez® elastomers can be used to increase a door’s                                                                                                               D
   Weight and dimensions                                         See table      maximum temperature rating.
   Bolt hole orientation                                         Reference      Quick-access doors with clearance mounting holes are intended
                                                                                                                                                                                                                                View
                                                                                                                                                                                                                                                                                       Door ID3
                                                                                                                                                                                                                                 dia
                                                                                for installation on chamber ports with tapped holes.
   On centreline                                                  QD-275                                                                                                                                                                                      C
                                                                                Socket-cap head bolts must be used.
                                                                                                                                                                                                                                                                                   B




   Straddles centreline                                           QD-450                                                                                    Flange          Clear       Door                                                             Wt                            Part
                                                                                                                                                            size            holes       diameter      A              B    C       D          E           kg       Reference            number      £      €       SFr.
                                                                  QD-600
                                                                                                                                                            DN40CF          6.7         34.9          70             23   44      57         37          1        QD-275-VP-CH         665215      355    533     835
                                                                  QD-800
                                                                                                                                                            DN63CF          8.4         68            114            27   70      96         47          3        QD-450-VP-CH         665216      568    853     1336
                                                                 QD-1000                                                                                    DN100CF         8.4         98            152            33   87      121        67          5        QD-600-VP-CH         665217      671    1007    1577
                                                                                                                                                            DN160CF         8.4         136           203            35   118     147        71          9        QD-800-VP-CH         665218      932    1398    2190
                                                                                                                                                            DN200CF         8.4         136           253            38   143     172        74          12       QD-1000-VP-CH        665219      1208   1813    2840

                                                                                                                                                        2
                                                                                                                                                            Nominal ID of door gasket is 38.8
    1
        Contact factory for high temperature rating                                                                                                     3
                                                                                                                                                            For viewport door ID, use blank door ID in table above




   All dimensions are nominal in millimetres unless specified Weights given are approximate                                                                                                                                      All dimensions are nominal in millimetres unless specified Weights given are approximate

536 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                  Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 537
                     Section 7.2                                                                                       Motion and manipulation                   Motion and manipulation                                                                                                            Section 7.2
                     Port aligners                                                                                                                                                                                                                                                    Port aligners
                     Load-lock gimbal                                                                                                                                                                                                                                                       Standard gimbal

                                                                                   UHV Series                                                                                                                                                            UHV Series

                                                                               Features                                                                                                                                                              Features
                                                                               ■    10° horizontal tilt                                                                                                                                              ■    Independent planes provide 15° tilt about X and Y axis
                                                                               ■    3.2mm axial displacement                                                                                                                                         ■    Tilt position lock for each plane
                                                                                                                                                                                                                      ■   Shown with bellows
                                                                               ■    Micrometer actuators with position lock                                                                                                                          ■    Micrometer or screw adjustment actuators
                                                                                                                                                                                                                      ■   Bellows not included
                                                                               ■    Formed bellows seal                                                                                                                                              ■    UHV-compatible materials
                                                                               ■    Bakeable to 200°C                                                                                                                                                ■    Bakeable to 230°C with screw type actuators
                                                                               ■    CF port mounts                                                                                                                                                   ■    Designed for use with CF port mount formed
                                                                               ■    Includes magnetic transporter extension kit                                                                                                                           bellows adaptors




      AG-150                                                                                                                                                      FGC-275-M



           Parallel axis
                                                                               Description                                                                                                                                                           Description
           adjustment ±3.2                                                     Port aligners are adjustable port flange interfaces that provide                                                    ID Length                                         The standard gimbal geometry consists of three parallel and equidistant
                                                                               motion instruments with angular tilt and axial shift.They can also be                                               69.3 118                                          aluminium plates interconnected in a universal joint geometry.The top
                                                                                                                                                                                                  113.5 169
                                                                               used to correct mate-up between components with minor                                                                                                                 and bottom plates are equally spaced from the centre plate and held in
                                                                    35
                                                                               alignment imperfections.                                                                                                                                              a parallel and neutral position with eight coil springs.Top and bottom
                                                                                                                                                                                                                                                     plates are fitted with precision micrometers used to produce a 15° tilt
                                                                               Load-lock gimbals are unique port alignment instruments specifically
                                                                                                                                                                                                                                                     about the centre plates X and Y axis respectively.When all adjustment
                                                                               designed for the precision alignment of magnetically coupled
                                                                                                                                                                                                                                                     mechanisms are disengaged the springs force the plates back to a
                                                                               transporters as used with circular and rectangular entry load-lock
          140                                                                                                                                                                                                                                        neutral and parallel position. Economical screw type adjustments are
                                                                               systems. Load-lock gimbal port aligners are fitted with precision                    ID Length
                                                                                                                                                                    69.3 118                                                                         also available in place of micrometers.
                                                                               micrometer adjustments for both horizontal tilt (above and below a                                                    Plate ID
                                                                                                                                                                   113.5 169
                                                                               horizontal plane of travel) and side to side parallel axis                                                                                                            Standard gimbals are designed for use with Caburn-MDC formed
                              DN40CF
                                                                               displacement. Load-lock gimbals are intended for horizontal                                                                                                           bellows flexible adaptors with 50.8 and 31.8mm bore diameters.
                              non-rotatable                                    installation with its tilt adjustment micrometer at a bottom 6                                                                                                        Flexible bellows adaptors are not included with standard gimbal
                              flange                                           o’clock position.They include a stainless steel formed bellows                                                                                                        assemblies and must be purchased separately.
                                                                               adaptor which mates between the magnetic transporter and the
                                                                               sample staging chamber. A transporter shaft extension kit to                                                                                                          Specifications
                                                                               compensate for the increase in the transporters overall length is                                                                                                     Material
                                                                 138
                                                                               also included.                                                                                                                                                        Flange                                                             304 Stainless steel
           92                                                                                                                                                                                                                                        Body                                                          Anodized aluminium
                                                                               Specifications
                                                                                                                                                                                                                                         95          Vacuum range                                                               1x10-8 mbar
                                                                               Material
                                                                                                                                                                                                                                                     Temperature range
                                                                               Flange                                                     304 Stainless steel
                                                                                                                                                                                                                                                     Screw type                                                          -20°C to 230°C
                                                                               Body                                         Anodized aluminium
                                                 DN40CF                                                                                                                                                                                              Micrometer type                                                     -20°C to 100°C
                             57                  rotatable   Horizontal tilt   Bellows, formed                                            316 Stainless steel
                                                 flange      adjustment ±10º                                                                                                                                                                         Weight and dimensions                                                         See table
                                        115                                    Vacuum range                                                    1x10-11 mbar
                                                                               Temperature range                                           -20°C to 200°C                                                                          ID Nom Ht
            9.5                   9.5                                          Weight and dimensions                                                 See table                                                                    69.3     76
                                                                                                                                                                                                                                 113.5    152                                    Wt                   Part
                                                                                                                                                                                                                                                         Plate ID   Type         kg    Reference      number      £         €         SFr.
                                                             12.7
                                                                                                                                                                                                                                                         69.3       Micrometer   2     FGC-275-M      676000      612       918       1438
                                                                                                                                                                                                                                                         69.3       Screw        2     FGC-275-S      676001      521       781       1224
                                              91.5
     6-32 UNC thro                                                                                                                                                                                                                                       113.5      Micrometer   3     FGC-450-M      676002      1026      1539      2412
                                        111                                                           Wt                 Part                                                                                                                            113.5      Screw        3     FGC-450-S      676003      908       1362      2134
                                                                                   Description        kg   Reference     number     £         €         SFr.                    Centre of rotation, 2 places at 90º
                                  Shaft extension                                                                                                                                                                                                        69.3       Bellows      1     150-X          400003      89        124       209
                                                                                   Alignment gimble   1    AG-150        665300     742       1113      1743
                                                                                                                                                                                                                                                         113.5      Bellows      2     250-X          400005      200       300       470



   All dimensions are nominal in millimetres unless specified Weights given are approximate                                                                                                                                                      All dimensions are nominal in millimetres unless specified Weights given are approximate

538 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                          Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 539
                     Section 7.2                                                                                  Motion and manipulation                          Motion and manipulation                                                                          Section 7.2
                     In-vacuum accessories                                                                                                                                                                                              In-vacuum accessories
                     Introduction                                                                                                                                                                                                                                 Introduction
   Features                                               Cab-Fast® right-angle sample                  Auto-Dock™ in-line sample                                  Rotary-linear accessories
   ■             ®
       Cab-Fast right angle sample                        handlers                                      handlers                                                   Rotary-linear accessories are an assortment of in-vacuum
       handlers                                           The Cab-Fast® sample handling system          The Caburn-MDC's Auto-Dock™ sample                         hardware components used to complement and expand
   ■   Auto-Dock™ in-line sample                          provides a simple yet versatile means of      handling system is a patented group of                     the capabilities of Caburn-MDC rotary and linear
                                                          loading samples for transportation to         modular sample handling components                                         motion and manipulation
       handlers
                                                          manipulators, parking carousels,              ideally suited for the transfer of samples                                   instruments. Various drive shaft
   ■   Rotary-linear accessories                          deposition stations and other locations       between chambers and typically used in                                         attachments are offered
                                                          inside ultra-high vacuum systems.They         tandem with Caburn-MDC magnetic                                                including universal joints,
                                                          allow the transfer of samples between         transporters. In contrast with the Cab-                                        bellows couplings, extension
                                                               linear drive instruments positioned at   Fast® system,                                                                  couplings, rotary and linear
                                                                right angles. Samples are first         Auto-Dock™ allows the transfer of                                                                   bearings and bearing
                                                             secured to platens using sample            samples between linear drive instruments                                                             mounts, ground shaft
                                                          mounting strips. The loaded platen is         positioned in-line with each other. The                                                              stock, set-screw collars
                                                          placed inside a load-lock sample staging      Auto-Dock™ system is comprised of                                                                    and vented cap screws.
                                                          chamber through the chambers quick-           three basic components, a sample-holder
                                                          access door. Inside, the platen is secured    plate, a vacuum-dock and a transport-
                                                          and attached to the platen fork               dock. Samples are shuttled back and forth
                                                          previously installed to the tip of a          between a vacuum process chamber and
                                                          magnetic transporter. Once the staging        a load-lock’s sample staging chamber
                                                          chamber is evacuated to the                   attached to it by fastening samples to the
                                                          desired vacuum level and the                  sample-holder plate. The sample-holder
                                                          gate valve is                                 plate is manually secured to a transport-
                                                          opened the                                    dock fixed to the tip of an Caburn-MDC
                                                          sample is                                     magnetic transporter inside the load-
                                                          ready for                                     lock’s sample staging chamber. The
                                                          transfer.                                     sample is then transported to the
                                                                                                        process chamber where the vacuum-
                                                                                                        dock component is strategically
                                                                                                        positioned and ready to
                                                                                                        receive the sample-
                                                                                                        holder plate




                                                                                                        Caution
                                                                                                        Anodized aluminium finishes will begin to discolour when
                                                                                                        baked in excess of 150°C.
                                                                                                        This is only a cosmetic condition which does not impact
                                                                                                        performance or reliability.




   All dimensions are nominal in millimetres unless specified                                                                                                                                                                                   All dimensions are nominal in millimetres unless specified

540 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 541
                     Section 7.2                                                                                                       Motion and manipulation                             Motion and manipulation                                                                                                         Section 7.2
                     In-vacuum accessories                                                                                                                                                                                                                                In-vacuum accessories
                     Sample handling systems                                                                                                                                                                                                                                                        Cab-fast® sample handlers
                                     Cab-Fast® right-angle sample                                                Auto-Dock™ in-line sample handlers                                         Sample mount strips                                                                                                            Part
                                                                                                                                                                                                                                     3.1                     31.8                       3.3                                                       €
                                     handlers                                                                    The Auto-Dock™ sample handling system is a group of                                                               Ø 2.9                                                                   Reference       number         £               SFr.

                                                                                                                 modular sample handling components ideally suited for                       SAM-M2                                                                                                        SAM-M1          665039         25      38      59
                                                        ®
                                     The Cab-Fast sample handling system provides a                                                                                                                                    SAM-M1
                                                                                                                 the transfer of samples between vacuum chambers                                                                                                                                           SAM-M2          665040         21      29      49
                                     simple yet versatile means of loading samples for                                                                                                                                              R 30
                                     transportation to manipulators, parking carousels,                          when used with Caburn-MDC magnetic transporters.
                                     deposition stations and other locations inside ultra-                       Auto-Dock™ allows the transfer of samples between                                                                     3.1                                                      0.4
                                                                                                                                                                                                                                                                                                         Caburn-MDC sample mounting strips offer a
                                                                                                                                                                                                                                   Ø
                                     high vacuum systems. They allow the transfer of                             linear drive instruments positioned in-line with each                                                                 2.9                                                               versatile means of fastening samples to Cab-Fast®
                                                                                                                                                                                                                                       (5 places)
                                     samples between linear drive instruments positioned at                      other.The Auto-Dock™ system is comprised of three                                                     SAM-M2                                                    7.9                     sample platens and Auto-Dock™ docking sample-
                                     right angles to each other. They are ideally suited for                     basic components, a docking sample-holder, a vacuum-                                                                                                                                    holders.
                                                                                                                 dock and a transport-dock.                                                                                         6.4 typ
                                     use with magnetically coupled transporters and other                                                                                                                   SAM-M1                                                                                       Sold in packages of 5.
                                                                                                                                                                                                                                                            33.3
                                     motion and manipulation instruments.


                                         Cab-Fast® sample handling tools are designed to transport samples
                                                                                                                                                                                            Dock sample-holder                                                                                                             Part
                                                                                                                                                                                                                                                38.1                M2.5 thro                              Reference       number         £       €       SFr.
                                         in and out of vacuum systems.This diagram shows a dual instrument
                                         arrangement which allows right angle sample transfer.                                                                                                                                                                      (6 places)                             STA-1           665016         119     162     280
                                                                                                                                                                                                                           5.1

                                                                                                                                                                                                                                                                                                         Auto-Dock™ docking sample-holders are
                                                                                                                                                                                                                                                               19.1              31.8                    designed to hold samples during in-vacuum
                                                                                                                                                                                                                                                                                                         sample processing. Samples are secured in place
                                                                                                                                                                                                                                                                                                         using sample mounting strips and screws.
                                                                                                                                                                                                                     6.4
                                                                                                                                                                                                                                     12.7 typ                       3.2      6.2
   Features
   ■    UHV sample handling
   ■    Fast sample transfer                                                                                                                                                               Vacuum-dock                                                                                                                     Part
                                                                                                                                                                                                                                                       70                          12.7                    Reference       number         £       €       SFr.
   ■    304ss construction
                                                                                                                                                                                                                                                             47.0                                          STA-2           665017         103     141     242


                                                                                                                                                                                                                                                                                                         Auto-Dock™ vacuum-docks are designed to
                                                                                                                                                                                                                      31.8 19.1                                                                Ø7.9      receive and hold Auto-Dock™ sample-holders
                                                                                                                                                                                                                                                                                                         during in-vacuum sample processing.They are
                                                                                                                 Auto-Dock™ sample handling tools are ideally suited for for use                                                                                                                         typically fixed inside a vacuum chamber as part
                                                                                                                 with Caburn-MDC magnetic transporters in sample transfer                                                                                                                                of a sample processing structure.
                                                                                                                 load-lock systems.They are designed for in-line sample transfer.                                                                       3.2 dia thro
                                                                                                                                                                                                                                                        (2 places)



       Platen fork                                                              57.7                                                           Part
                                                                                                                             Reference         number         £         €           SFr.   Transport-dock                                                                                                                  Part
                                                                                       39.6     M6 thread
                                                                                                                             FOR-1             7665029        120       180         282                                                                                                                    Reference       number         £       €       SFr.
                                                                                                                                                                                                                                                            42.4
                                                                                                                                                                                                                                                                                                           STA-3           665015         115     165     270
                                           21.0      15.4 6.7
                                                                                                                           Cab-Fast® platen forks are designed to lock on
                                                                                                M3 socket                  to and hold Cab-Fast® platens during the                                                                                                                                      Auto-Dock™ transporter-docks are designed to
                                                                                                cap screw                                                                                                                  12.7   Ø9.5                                                  Ø4.7    20.1     receive, hold and transport Auto-Dock™ sample-
                                                                                                                           transport and transfer of samples between
                                            25.4                                   86
                                                                                                                           chambers or other motion and manipulation                                                                                                                                     holders in and out of vacuum sample processing
                                                                           66.8
                                                                                                                           instruments.                                                                                                                                                                  chambers.They are attached to the end of
                                                                                                             Ø9.5                                                                                                                                                                                        Caburn-MDC magnetic transporter shafts.
                                                     2.5                         50.8                                                                                                                                  Use with extension rod.
                                                                                                                                                                                                                       (Part numbers 680060, 680061, 680062 and 680063)



       Platen sample holder                                                                                                                    Part
                                                                                                                             Reference         number         £         €           SFr.    Screws, non-vented                                                                                                             Part
                                          SAM-3                                                  2.8                                                                                                                                                                                                       Reference       number         £       €       SFr.
                                          Ø76.2,                                       2.0                                   SAM-1             7665026        85        125         200
                                          includes                                                                                                                                                                                                                                4-40 UNC                 SAM-S1          665041         11      16      26
                                                                                                       8-32 x 6 dp           SAM-2             7665027        65        97          153
                                          12 holes                                                                                                                                                                                                                                2.3 long thread
                                                                                                                             SAM-3             7665028        91        124         224
                                          SAM-2                                                                                                                                                                                                                                                          Socket head screws made of 300ss ideal for Cab-
                                          Ø50.8,                                                                                                                                                                                                                                                         Fast® and Auto-Dock™ sample handling systems
                                          includes                                              Ø15.9                      Cab-Fast® sample platens are designed to hold
                                          8 holes
                                                                                                                                                                                                                                                                                                         and come in packages of 25 pieces.These screws
                                                                                                                           samples during in-vacuum sample processing.                                                                                                                                   are not vented and should only be installed into
                                          SAM-1                                                                            Samples can be secured in place using sample                                                                                                                                  tapped through holes.
                                          Ø25.4,                                                         Ø22.2
                                          includes
                                                                                                                           mounting strips and screws.
                                                                                                   1.9
                                          4 holes               4-40 thro typ          11.4




   All dimensions are nominal in millimetres unless specified                                                                                                                                                                                                                                          All dimensions are nominal in millimetres unless specified

542 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                                      Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 543
                    Section 7.2                                                                                                             Motion and manipulation             Motion and manipulation                                                                                                         Section 7.2
                    In-vacuum accessories                                                                                                                                                                                                                    In-vacuum accessories
                    Rotary and linear motion                                                                                                                                                                                                                                          Rotary and linear motion
                                    Rotary-linear accessories                                                                                                                    Bellows coupling                                                                                                               Part
                                                                                                                                                                                                                                                                                                Reference       number         £       €       SFr.
                                    Rotary-linear accessories are an assortment of                                   The components presented in this section can also be                                                                      24
                                    in-vacuum hardware components used to complement                                 used in combination with products presented in the                                                                                                                         ACO4-4          682000         55      80      129
                                    and expand the capabilities of Caburn-MDC rotary and                             Cab-Fast® and Auto-Dock™ accessories sections of this
                                    linear motion and manipulation instruments. Various                              catalogue. Custom designed hardware is also available if                                                                                                                 Bellows couplings for 6.4mm shaft diameters
                                                                                                                                                                                                                    Ø6.4                                           Ø11          Ø15
                                    drive shaft attachments are offered including universal                          required.                                                                                                                                                                provide 0.4 Nm maximum torque at a maximum
                                    joints, bellows couplings, extension couplings, rotary                                                                                                                                                                                                    tilt angle of 5° or maximum axial misalignment of
                                                                                                                     Please contact Caburn-MDC’s technical sales engineers                                                                                                                    0.3mm. They provide zero backlash and uniform
                                    and linear bearings and bearing mounts, ground shaft
                                                                                                                     with your inquiries.                                                                                                                       4 x 6-32 set screw            angular velocity with low vibration.
                                    stock, set-screw collars and vented cap screws.                                                                                                                                       7



                                        Caburn-MDC rotary and linear
                                        accessories can provide intricate
                                        motion paths to mobilize samples                                                                                                         Sleeve coupling                                                              2 x pin spot                                      Part
                                                                                                    Motion instrument input shaft                                                                                                                                                               Reference       number         £       €       SFr.
                                        or devices inside a vacuum system.                                                                                                                                                                 4
                                                                                                                                                                                                                                                                                                ACT-3           683000         11      17      26


                                                                                                  Universal joint coupling                                                                                                                                                                    Sleeve couplings are used to customize and
                                                                                                                                                                                                                                                                Ø12.7
                                                                                                                                                                                                                                                                                              extend 6.4mm diameter shafts inside a vacuum
                                                                                                                                                                                                                                                                                              system. They are fitted with two 6-32 UNC set
                                                                                                                                                                                                                    + 0.013                                                                   screws to lock shafts in position.
                                                                                                                                                                                                            Ø6.4
                                                                                                                                                                                                                    -0
                                                                                                                                                                                                                                                                  2 x 6-32 set screw
                                                                                                                                                                                                                                               14.5
   Features
                                                                  Mitre and bevel gear
   ■    UHV sample handling                                                                                      Radial bearing blocks
   ■    Fast sample transfer                                                                                     with radial bearings
                                                                                                                                                                                 Set screw collar                                                                                                               Part
   ■    304ss construction                                                                                                                                                                                                                                                                      Reference       number         £       €       SFr.
                                                                                                                                                                                                                                   Ø12.7                                                        ACS-22          690000         9       12      21
                                                                                                                                                                                                                                                                         Set screw

                                                                                                                                                                                                                                                                                              Set screw collars are used to create mechanical
                                                                                                    Bellows coupling
                                                                                                                                                                                                                                                                                              stops along a shaft’s length. Supplied with 6-32
                                                                                                                                                                                                                                                                                              UNC set screws for position lock.
                                                                                                                             Output shaft                                                                       + 0.013                                                   6.4
                                                                                                                                                                                                         Ø6.4
                                                                                                                                                                                                                -0




                                                                                                                                                                                 Bearing mount, radial                                                                                                          Part
       Mitre and bevel gear                                                        7.6
                                                                                                                                               Part
                                                                                                                                                                                                                              19                                                                Reference       number         £       €       SFr.
                                        Stainless steel                                            Ø12.7                        Reference      number   £       €      SFr.                                                                                       8
                                                                                                                                                                                                                                                                                                ABME-1          688000         38      57      89
                                                                                                                                AM48-1-S       685000   75      110    176
                                                                   4.7                                                                                                                                                                                                          Retaining
                                                                                                                                                                                                                                                                                ring
                                                                                                                                                                                                                                                                                              Radial bearing mounts are made of vacuum grade
                                                                                                       Ø15.9 pitch            Mitre and bevel gears provide the means of
                                                                                                                                                                                                          32                                          25.4                      grooves       aluminium. They are designed to accept a radial
                                                                                                                              rotary input with 90° output rotation.They
                                                           17.4                                                                                                                                                                                                                               bearing for a 6.4mm shaft diameter.They include
                                                                                                                              accept 6.4mm diameter shafts and come in a
                                                                                                                                                                                                                                                                                              two retainer rings to hold the bearing assembly
                                                                                                                              set of two gears fitted with 6-32 UNC set
                                                                                            3.2                                                                                                                                                                                               in place.
                                                                                                                              screws for fastening to shafts.
                                                            + 0.13                  2 x 6-32 set screw                                                                                                                        + 0.013
                                                        Ø6.4 - 0                                                                                                                                                  Ø12.7                                                  2 x Ø3.6 thro
                                                                                                                                                                                                                              -0



                                                                                                                                                                                 Screws, non-vented                                                                                                             Part
       Universal joint                                                                                                                         Part                                                                                                                                             Reference       number         £       €       SFr.
                                        Stainless steel / Phosphor bronze                                                       Reference      number   £       €      SFr.                                                                S-1
                                                                                                                                                                                                                                           Set screw, 8-32 x 4 thread                           S-1             680100         6       9       14
                                                                              38                           2 x 6-32             AUJ-3          680000   185     270    435
                                         2 x pin spot                                                      set screw                                                                                                                                                                            S-2             680101         9       13      21

                                                                                                                              Universal joints provide rotary motion input
                                                                                                                                                                                                                                           S-2                                                These are 300 series stainless steel socket head
                                                                                                           Ø12.7              with variable angle rotary output for 6.4mm                                                                  Cap screw, 8-32 x 4 thread, with                   screws. They come in packages of 25 pieces.
                                                                                                                              shaft diameters.The maximum operating angle                                                                  flat washer (not shown)
                                            + 0.013                                                                           is 30° at low speeds and 10° at high speeds.
                                        Ø6.4 - 0                         19              11.5




   All dimensions are nominal in millimetres unless specified Weights given are approximate                                                                                                                                                                                                 All dimensions are nominal in millimetres unless specified

544 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                       Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 545
                     Section 7.2                                                                                                            Motion and manipulation                 Motion and manipulation                                                                                                            Section 7.2
                     In-vacuum accessories                                                                                                                                                                                                                                       In-vacuum accessories
                     Rotary and linear motion                                                                                                                                                                                                                                                        Rotary and linear motion

     Linear ball bearing                                                                                                                         Part                                   Precision bearings                                                                                                             Features
                                                                                                                                   Reference     number      £      €      SFr.
                                                                                                                                                                                                                                                                                                                       ■   UHV clean
                                                                                                                                   ALMB-1        687000      41     60     96
                                                                                                                                                                                                                                                                         +.000                                         ■   No lubricants
                                                              Ø12.7                                                                                                                                                                                                  B
                                                                                                                                                                                                                                                                         -0.13
                                                                                                                                  Linear bearings support 6.4mm diameter linear
                                                                                                                                  motion drive shafts.They are constructed of
                                                                                                                                  300 series stainless steel and coated with
                                                                                                                                  Dicronite® dry lubricant suitable for UHV
                                                                                                                                  service.
                                                    Ø6.4                                                                                                                                                                                                +.000                          C
                                                                                                       19                                                                                                                                           A
                                                                                                                                                                                                                                                        -0.13




     Bearing mount, linear                                                                                                                       Part                                                                                 ID                        OD                                                     Part
                                                                                                                                   Reference     number      £      €      SFr.                                                       A                         B                     C                 Reference      number        £       €       SFr.
                                                                                                      24
                                                                                                                                   ALME-1        689000      60     90     141                                                        Stainless steel
                                                               19                                    17.5
                                                                                                                                                                                                                                      6.35 (1⁄4”)               12.7 (1⁄2”)           3.17 (1⁄8”)       PBS63          1551100       33      50      78

                                                                                                                      Retaining
                                                                                                                                  Linear bearing mounts are made of vacuum                                                                   3
                                                                                                                                                                                                                                      9.52 ( ⁄8”)                         7
                                                                                                                                                                                                                                                                22.22 ( ⁄8”)          5.55 (7⁄32”)      PBS95          1551101       45      68      106
                                                                                                                      ring        grade aluminium. They are designed to accept a                                                      5                         11                    3                 PBS5-11        1551102       33      50      78
                                                                                                                      grooves     linear bearing for a 6.4mm shaft diameter. They                                                     5                         16                    5                 PBS5-16        1551103       33      50      78
                                                    32                              25.4
                                                                                                                                  include two retainer rings to hold the bearing
                                                                                                                                                                                                                                      3                         7                     2                 PBS3-7         1551104       41      62      97
                                                                                                                                  assembly in place.
                                                                                                                                                                                                                                      3                         10                    4                 PBS3-10        1551105       41      62      97
                                                          + 0.013                                     4 x Ø3.6 thro
                                                    Ø12.7 - 0


                                                                                                                                                                                        Precision bearings Ceramic                                                                                                     Features
                                                                                                                                                                                                                                                                                                                       ■   UHV clean
                                                                                                                                                                                                                                                                         +.000                                         ■   No lubricants
     Ground stock                                                                                                                                Part                                                                                                                B
                                                                                                                                                                                                                                                                         -0.13
                                                                                                                                   Reference     number      £      €      SFr.                                                                                                                                        ■   Very long life in UHV
                                                                                                                                   ASI-6         684000      7      10     16
                                                                                  A±3                                              ASI-12        684001      9      14     21
                                                                                                                                   ASI-24        684002      18     26     42
                                                                                                                                   MGS3-600      1511300     25     34     59
                                                                                                                                                                                                                                                        +.000                          C
                                                                                                                                   MGS5-600      1511301     37     50     87                                                                       A
                                                                                                                                                                                                                                                        -0.13
                                                           + 0.013       MGS3 = 3mm
                                                  6.3246
                                                           -0            MGS5 = 5mm                                               Precision ground 304 stainless steel shafts
                                                                                                                                  offered in 150, 305 and 610mm lengths. With
                                                  Three standard lengths:           ASI-6           ASI-12     ASI-24
                                                                                                                                  coupling accessories these shafts can be used
                                                                                  150 (6”)       305 (12”)    610 (24”)                                                             ■   Ceramic ball races are used for the most
                                                                                                                                  to extend motion instrument drive shafts.
                                                                                                                                                                                        demanding long life UHV applications          ID                        OD                                                     Part
                                       ■   Custom lengths available on request
                                                                                                                                                                                                                                      A                         B                     C                 Reference      number        £       €       SFr.
                                                                                                                                                                                                                                      Stainless steel
                                                                                                                                                                                                                                      6.35 (1⁄4”)               12.7 (1⁄2”)           3.17 (1⁄8”)       PBC63          1551200       62      93      145
     Extension rods                                                                                                                              Part
                                                                                                                                   Reference     number      £      €      SFr.                                                              3
                                                                                                                                                                                                                                      9.52 ( ⁄8”)                         7
                                                                                                                                                                                                                                                                22.22 ( ⁄8”)          5.55 (7⁄32”)      PBC95          1551201       85      127     199
                                                                                                                                   ER-1          680060      18     26     42                                                         5                         11                    3                 PBC5-11        1551202       47      70      109
                                                                                                                     7.94
                                                                     Length                                      Ø                 ER-2          680061      22     33     52                                                         5                         16                    5                 PBC5-16        1551203       54      81      127
                                                                                                                     7.92
                                                 12.7                                        12.7                                  ER-3          680062      26     39     61                                                         3                         7                     2                 PBC3-7         1551204       45      68      107
                                                                                                                                   ER-4          680063      35     53     82                                                         3                         10                    4                 PBC3-10        1551205       47      71      111


                                                8-32 thread                   2 x Ø2.4 thro            8-32 x 6.4 deep            Extension rods have 8-32 UNC male and
                                                                                                                                  female threads on opposite ends. They can be
                                             Four standard lengths: ER-1                ER-2           ER-3        ER-4
                                                                                                                                  connected end to end for custom length
                                                                      25.4 (1”)      76.2 (3”)       152.4 (6”) 304.8 (12”)
                                                                                                                                  structures.




   All dimensions are nominal in millimetres unless specified                                                                                                                                                                                                       All dimensions are nominal in millimetres unless specified Weights given are approximate

546 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                                       Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 547
                     Section 7.2                                                                                                       Motion and manipulation              Motion and manipulation                                                                               Section 7.2
                     In-vacuum accessories                                                                                                                                                                                                    In-vacuum accessories
                     Vented screws                                                                                                                                                                                                                                           Vented screws
   Description                                                                                                                                                              Vented metric hexagon head                                             Quantity                       Part
                                                                                                                                                       Vented                                                                   Thread   Length    per pack      Reference        number         £       €       SFr.
   When making screw attachments in vacuum it is important to                                                   Vented                                 screw                screws
                                                                                                                spring                                                                                                          M4       6         10            VMH-40-6         1610030        12      17      28
   avoid trapping even the smallest volumes of gas which can give                                               washer
                                                                                                                                                                                                                                M4       12        10            VMH-40-12        1610031        16      22      38
   rise to a ‘virtual leak’ within the system.
                                                                                                                                                                                                                                M4       25        10            VMH-40-25        1610032        51      69      120
   Caburn-MDC offers a full range of vented screws which allow                                                                                                                                                                  M5       6         10            VMH-50-6         1610033        11      15      26
   gas to escape down a machined hole through the middle of the                                                                                                                                                                 M5       12        10            VMH-50-12        1610034        12      17      28
   screw and through a gap in a vented washer (see drawing). For                                                                                                                                                                M5       25        10            VMH-50-25        1610035        37      50      87
   situations where pump-down is accompanied by high bakeout
   temperatures we offer molybdenum disulphide coated screws
   which avoid the problem of seizure due to heat expansion. All
   screws are cleaned and packed ready for UHV use.
                                                                                                                                                                                                                    Vent hole
   Features
   ■   Stainless steel – UHV cleaned
   ■   Optional MoS2 coated for high bakeout applications
                                                                                                                                                                                                      Length
   ■   Additional vented washers are offered in                                                                 Gas
       stainless steel                                                                                        pockets



                                                                                                                                                                                                                                                   Quantity                       Part
                                                                                                                                                                                                                                Thread   Length    per pack      Reference        number         £       €       SFr.
       Vented metric socket head                                                                        Quantity                         Part                                Vented metric set screws
                                                                    Thread            Length            per pack          Reference      number    £            €    SFr.                                                       M2.5     4         10            VMSS-25-4        1610037        17      24      40
       screws                                                       M1.6 1
                                                                                      4                 10                VMS-16-4       1610000   35           48   82                                                         M3       4         10            VMSS-30-4        1610038        10      14      24

                                                                    M1.61             8                 10                VMS-16-8       1610001   47           65   110                                                        M4       5         10            VMSS-40-5        1610039        12      17      28

                                                                    M2                4                 10                VMS-20-4       1610002   12           17   28                                                         M5       6         10            VMSS-50-6        1610040        10      14      24

                                                                    M2                6                 10                VMS-20-6       1610003   11           16   26
                                                                    M2                10                10                VMS-20-10      1610004   16           23   38
                                                                    M2.5              4                 10                VMS-25-4       1610005   10           14   24
                                                                    M2.5              8                 10                VMS-25-8       1610006   14           19   33
                                                                    M2.5              16                10                VMS-25-16      1610007   45           62   106
                                                                    M3                4                 10                VMS-30-4       1610008   9            13   21
                                                   Vent hol e       M3                8                 10                VMS-30-8       1610009   14           19   33                                        Vent hole

                                                                    M3                16                10                VMS-30-16      1610010   45           62   106
                                                                    M4                5                 10                VMS-40-5       1610011   12           17   28
                                                                    M4                10                10                VMS-40-10      1610012   16           22   38                      Length
                                   Length
                                                                    M4                20                10                VMS-40-20      1610013   31           43   73
                                                                    M5                6                 10                VMS-50-6       1610014   17           24   40
                                                                    M5                12                10                VMS-50-12      1610015   15           21   35
                                                                    M5                25                10                VMS-50-25      1610016   38           52   89
                                                                                                                                                                                                                                                   Quantity                       Part
                                                                1
                                                                    This size has gas relief flat in place of vent hole                                                                                                         Thread             per pack      Reference        number         £       €       SFr.
                                                                                                                                                                             Vented spring washers                              M2                 10            VMSW-20          1610042        4       6       9
       Vented hexagonal head screws                                                                     Quantity                         Part                                                                                   M2.5               10            VMSW-25          1610043        4       6       9
                                                                    Thread            Length            per pack          Reference      number    £            €    SFr.
       MoS2 coated                                                  M4                6                 10                VMHMO-40-6     1610078   15           21   35
                                                                                                                                                                                                                                M3                 10            VMSW-30          1610044        4       6       9
                                                                                                                                                                                                                                M4                 10            VMSW-40          1610045        4       6       9
                                                                    M4                12                10                VMHMO-40-12    1610079   23           31   54
                                                                                                                                                                                                                                M5                 10            VMSW-50          1610046        4       6       9
                                                                    M4                25                10                VMHMO-40-25    1610080   54           74   127
                                                                    M5                6                 10                VMHMO-50-6     1610081   17           24   40
                                                                    M5                12                10                VMHMO-50-12    1610082   19           27   45
                                                                    M5                25                10                VMHMO-50-25    1610083   40           55   94


                                                                                                                                                                                  Vent gap


                                                Vent hole




                                     Length


   All dimensions are nominal in millimetres unless specified                                                                                                                                                                                                 All dimensions are nominal in millimetres unless specified

548 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                                          Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 549
                     Section 7.2                                                                               Motion and manipulation      Motion and manipulation                                                                                     Section 7.2
                     In-vacuum accessories                                                                                                                                                                      In-vacuum accessories
                     Vented screws                                                                                                                                                                                                                             Screws

     Vented socket heads                                                           Quantity                      Part                       Vented metric set screws                                                     Quantity                       Part
                                                                Thread    Length   per pack   Reference          number    £    €    SFr.                                                 Thread            Length       per pack    Reference          number         £       €       SFr.
     UNC Thread                                                 6-32      6.4      10         VUNCS-6-32-25      1610095   8    11   19
                                                                                                                                            MoS2 coated                                   M2.5              4            10          VMSSMO-25-4        1610085        20      28      47
                                                                6-32      12.7     10         VUNCS-6-32-50      1610096   11   15   26                                                   M3                4            10          VMSSMO-30-4        1610086        15      21      35
                                                                8-32      6.4      10         VUNCS-8-32-25      1610097   8    11   19                                                   M4                5            10          VMSSMO-40-5        1610087        17      24      40
                                                                8-32      12.7     10         VUNCS-8-32-50      1610098   11   15   26                                                   M5                6            10          VMSSMO-50-6        1610088        16      22      38
                                                                10-32     6.4      10         VUNCS-10-32-25     1610099   6    9    14
                                                                10-32     12.7     10         VUNCS-10-32-50     1610100   10   14   24
                                                                1
                                                                ⁄4”-28    19.1     10         VUNCS-1/4-28-75    1610101   12   17   28




                                                                                                                                                                      Vent hole
                                                   Vent hol e



                                                                                                                                                             Length
                                   Length



                                                                                                                                            Vented spring washers                                                        Quantity                       Part
                                                                                                                                                                                          Thread                         per pack    Reference          number         £       €       SFr.
     Vented socket head screws                                                     Quantity                      Part                       MoS2 coated                                   M2                             10          VMSWMO-20          1610090        6       9       14
                                                                Thread    Length   per pack   Reference          number    £    €    SFr.
     MoS2 coated                                                M2        4        10         VMSM0-20-4         1610048   14   19   33
                                                                                                                                                                                          M2.5                           10          VMSWMO-25          1610091        7       10      16
                                                                                                                                                                                          M3                             10          VMSWMO-30          1610092        7       10      16
                                                                M2        8        10         VMSM0-20-8         1610049   17   24   40
                                                                                                                                                                                          M4                             10          VMSWMO-40          1610093        8       11      19
                                                                M2.5      4        10         VMSM0-25-4         1610050   14   19   33
                                                                                                                                                                                          M5                             10          VMSWMO-50          1610094        9       12      21
                                                                M2.5      8        10         VMSM0-25-8         1610051   19   27   45
                                                                M2.5      16       10         VMSM0-25-16        1610052   45   62   106
                                                                M3        4        10         VMSM0-30-4         1610053   14   19   33
                                                                M3        8        10         VMSM0-30-8         1610054   18   26   42
                                                                M3        16       10         VMSM0-30-16        1610055   49   67   115
                                                                                                                                                  Vent gap
                                                                M4        5        10         VMSM0-40-5         1610056   14   20   33
                                                                M4        10       10         VMSM0-40-10        1610057   20   28   47
                                                   Vent hol e   M4        20       10         VMSM0-40-20        1610058   35   48   82
                                                                M5        6        10         VMSM0-50-6         1610059   20   28   47
                                                                M5        12       10         VMSM0-50-12        1610060   18   26   42
                                                                M5        25       10         VMSM0-50-25        1610061   41   56   96
                                   Length
                                                                                                                                                                                                                         Quantity                       Part
                                                                                                                                                                                          Thread                Size     per pack    Reference          number         £       €       SFr.
                                                                                                                                            Molybdenum screws                             Molybdenum screws     M2 x 8   10          MOM2-8             1611400        192     288     450
                                                                                                                                                                                          Molybdenum screws     M3 x 10 10           MOM3-10            1611401        192     288     450
     Vented spring washers                                                         Quantity                      Part
                                                                Thread             per pack   Reference          number    £    €    SFr.                                                 Molybdenum nuts       M2       10          MOM-2N             1611412        150     225     353
     UNC Thread                                                 6-32               10         VUNCSW-6-32        1610103   4    6    9                                                    Molybdenum nuts       M3       10          MOM-3N             1611413        150     225     330
                                                                8-32               10         VUNCSW-8-32        1610104   4    6    9
                                                                10-32              10         VUNCSW-10-32       1610105   4    6    9                                                Features
                                                                1
                                                                 /4”-28            10         VUNCSW-1/4-28      1610106   4    6    9
                                                                                                                                                                                      ■    Cleaned for UHV with gas relief flats


                                                                                                                                                                                                                         Quantity                       Part
                                                                                                                                                                                          Thread                Size     per pack    Reference          number         £       €       SFr.
                                                                                                                                            Tantalum screws                               Tantalum screws       M2 x 5   1           TAM2-5             1611402        31      46      56
                                                                                                                                                                                          Tantalum screws       M3 x 10 1            TAM3-10            1611403        43      65      86
               Vent gap

                                                                                                                                                                                      Features
                                                                                                                                                                                      ■    Cleaned for UHV with gas relief flats




   All dimensions are nominal in millimetres unless specified                                                                                                                                                                       All dimensions are nominal in millimetres unless specified

550 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 551
                      Section 7.2                                                                                                 Motion and manipulation                  Motion and manipulation                                                                 Section 7.2
                      In-vacuum accessories                                                                                                                                                                                   In-vacuum accessories
                      Heater and sample transfer accessories                                                                                                                                                                Heater and sample transfer accessories

     Ceramic split bushes                                                                                                                                                   Ceramic tubes                                                                                         Features
                                                                                                                                  A
                                                                                                                                                                                                                                                                                  ■     UHV clean
                                                                                                                                  B
                      CSB-2F               CSB-3SF               CSB-3LF
                                                                                                                                                                                                                                                                                  ■     One, two and
                                                                                                                                                                                                                                                                                        four hole
                                                                                                             G                                                                                                                                                                          types
                                                                                                                                                                                                                                                                                  ■     Material 99.7%
                                                                                                                  H
                                                                                                                                                                                                                                                                                        A1203
                                                                                                                                  F                                                                                            B
            CSB-2M                                                                                                                                                                                                                                                                ■     Maximum
                                CSB-3SM                                                                                                                                                                                       A                      C                                  temperature
                                                       CSB-3LM                                                                    C
                                                                                                                                                                                                                                                                                        1700°C
   Description                                                                                                D
                                                                                                                  E

   Ceramic split bushes can be used with UHV manipulators
   to enable sample plate or heater filaments to be                                                                                                                                                           Length    Number      Quantity                       Part
                                                                                                                                  B
   mechanically clamped in position while maintaining                                                                                                                      Product        A      B            C         of holes    per pack    Reference          number         £        €      SFr.
                                                                                                                                  A
   electrical isolation. These items are cleaned to UHV                                                                                                                    Ceramic tube   1.0    0.4          50        1           10          CERT0-50           1611100        22       33     52
   standards and supplied in packs of 10.                                                                                                                                  Ceramic tube   2.0    1.0          50        1           10          CERT1-50           1611101        34       51     80
                                                                                                                                                                           Ceramic tube   3.0    2.0          50        1           10          CERT2-50           1611102        34       52     81
                                                                                                                                      Part                                 Ceramic tube   6.0    4.0          50        1           10          CERT4-50           1611103        38       57     89
     Type             A             B         C           D        E         F             G          H               Reference       number     £      €         SFr.     Ceramic tube   2.0    1.0          300       1           10          CERT1-300          1611105        139      209    327
     Stentite KERZZO – DIN40685                                                                                                                                            Ceramic tube   3.0    2.0          300       1           10          CERT2-300          1611106        106      159    249
     Male             6.85          2.4       –           –        –         4.4           4.1        2.55            CSB-2M          1611405    7      10        16       Ceramic tube   5.0    3.0          300       1           3           CERT3-300          1611107        31       46     72
     Female           6.85          2.4       4.85        5.55     2.8       –             –          –               CSB-2F          1611406    7      10        16       Ceramic tube   10.0   7.0          300       1           3           CERT7-300          1611108        38       57     90
     Male             7.95          3.05      –           –        –         5.3           4.75       2.55            CSB-3SM         1611407    7      10        16       Ceramic tube   3.0    0.8          50        2           10          CERT08-50-2        1611110        21       32     49
     Female           7.95          3.05      5.7         5.55     2.8       –             –          –               CSB-3SF         1611408    7      10        16       Ceramic tube   3.0    0.8          300       2           1           CERT08-300-2       1611111        6        9      15
     Male             9.52          3.05      –           –        –         6.1           6.35       4.1             CSB-3LM         1611409    8      11        19       Ceramic tube   2.7    0.8          50        4           10          CERT06-50-4        1611112        21       32     49
     Female           9.52          3.05      6.5         7.15     4.9       –             –          –               CSB-3LF         1611410    8      11        19       Ceramic tube   2.6    0.6          300       4           1           CERT06-300-4       1611113        6        9      14
                                                                                                                                                                           Ceramic tube   4.6    1.0          50        4           10          CERT1-50-4         1611114        21       32     49
                                              Features                             Specifications                                                                          Ceramic tube   4.5    1.0          300       4           1           CERT1-300-4        1611115        6        9      14
     Machinable
                                              ■     Sample kits in various         Macor® sample kit 4 pieces in following mm sizes
     ceramics
                                                    sizes                          Cylinder                                                     13 diameter x 77 long
                                              ■     Choice of materials            Block                                                                     64 x 8 x 8
                                              ■           ®
                                                    Macor – machinable             Block                                                                    39 x 19 x 6
                                                    glass ceramic                  Block                                                                54 x 20 x 20
                                              ■     Shapal M                       Boron nitride HP grade sample kit
                                                                                   3 pieces in following mm size
                                              ■     Boron Nitride HP grade
                                                                                   Cylinder                                                     10 diameter x 75 long
                                              ■     Customer machining
                                                                                   Block                                                                20 x 20 x 75
                                                    available on request
                                                                                   Plate                                                                    10 x 20 x 5
                                                                                   Shape M sample kit 2 pieces in following mm sizes
                                MGC-1
                                                                                   Cylinder                                                     10 diameter x 50 long
   Description                                                                     Plate                                                                    22 x 9.5 x 3
                                                                                   Mixed ceramic technology All machinable
   Macor® machinable glass ceramic can be worked with
   ordinary tools and does not require firing after machining.                     Shapal M                                                     10 diameter x 50 long
   It has the same electrical and thermal properties as                            Macor                                                        10 diameter x 50 long
   ordinary ceramic. Caburn-MDC will be happy to quote                             XSBH (composite)                                             10 diameter x 50 long
   against your drawings for custom machined parts.                                Boron nitride HP grade                                       10 diameter x 50 long


                                                                                                  Number                              Part
     Description                                                                                  of pieces           Reference       number     £      €         SFr.
     Macor®                                                                                       4                   MGC-1           1611300    100    137       235
     Shapal M                                                                                     2                   SHM-1           1611301    73     100       172
     Boron nitride HP grade                                                                       3                   BNHP-1          1611302    80     109       188
     Mixed ceramic technology                                                                     4                   MCT-1           1611303    84     115      197


   All dimensions are nominal in millimetres unless specified                                                                                                                                                                                  All dimensions are nominal in millimetres unless specified

552 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                           Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 553
                       Section 7.2                                                                                    Motion and manipulation          Motion and manipulation                                                                                                Section 7.2
                       In-vacuum accessories                                                                                                                                                                                       In-vacuum accessories
                       Heater and sample transfer accessories                                                                                                                                                                 Heater and sample transfer accessories

     Kapton® film                                                                     Features                                                                                                                                        Description
                                                                                      ■   Very high electrical insulation                                                                                                             Caburn-MDC can offer sample holders with resistive heating
                                                                                      ■   Flexible – can be cut with scissors                                                                                                         to 900°C and complete sample transfer systems for bringing
                                                                                                                                                                                                                                      samples into the UHV environment and docking them on a
                                                                                      ■   UHV compatible – low outgassing
                                                                                                                                                                                                                                      parking carousel or UHV manipulator. Please contact the sales
                                                                                      ■   Bakeable to 230°C                                                                                                                           office, with details of your application, for a quotation.
                                                                                      ■   Useable to 4k                                                                                                                               The sample loading stage allows the sample holder to be
                                                                                      ■   Dielectric strength: 154V per mm                                                                                                            loaded in a fast entry lock and brought into the UHV analysis
                                                                                      ■   Dielectric constant: 3.5V per mm                                                                                                            chamber. The Omicron sample pick-up fits on to a standard
                                                                                                                                                                                                                                      MTM series magnetic transporter.
                                                                                      ■   Dissipation factor: 0.0026V per mm
                                                                                      ■   Volume resistivity: 1017 Ω cm                                                                                                               From the loading stage the sample holder can be transferred
                                                                                                                                                                                                                                      directly to a transfer head. From the transfer head the sample
                                                                                                                                                                                                                                      can be translated to an omicron sample heater on a UHV
                                                                                                                                                                                                                                      manipulator.




                                                                                                                            Part
                                                                                                                                                                                                                                      Description
     Description                                                                                          Reference         number    £    €    SFr.
                                                                                                                                                                                                                                      The Omicron sample heater which is used in the well-
     Kapton® film, 300 x 25 x 0.13mm thick                                                                KAPF1             1611411   19   29   45
                                                                                                                                                                                                                                      established full lab surface science machine is offered as a self-
                                                                                                                                                                                                                                      assembly component by Caburn-MDC. As offered, the sample
                                                                                                                                                                                                                                      heater includes the sample stage, the acceptor mechanism to
                                                                                                                                                                                                                                      group the sample plate, the resistive heater and the brushes
                                                                                                                                                                                                                                      for direct heating. The sample is electronically isolated.
                                                                                                                                                                                                                                      Sample plates carried on the transfer head TH-C may be
                                                                                                                                                                                                                                      transferred (without use of a wobble stick) to the sample
                                                                                                                                                                                                                                      heater RH1-C or RH2-C.
                                                                                                                                                                                                                                      Azimuthal (secondary) sample motor is optional. This requires
                                                                                                                                                                                                                                      RH2-C and precision dual axis rotary drive type E-PBRM-2. A
                                                                                                                                                                                                                                      K-type thermocouple is included.
                                                                                                                                                                                                                                      Feedthroughs and connector wires are not included.These are
                                                                                                                                                                                                                                      offered as options with the demountable in vacuum
                                                                                                                                                                                                                                      connection block.
                                                                                                                                                       Omicron® type sample heater
                                                                                                                                                       ■     UHV compatible
                                                                                                                                                       ■     Accepts Omicron® style sample plates from transfer
                                                                                                                                                             head (TH-C)
                                                                                                                                                       ■     Sample heating to 900°C (1200°C with optional
                                                                                                                                                             direct heating)
                                                                                                                                                       ■     Fits E-PBRM1-10 or PBRM2-10 and all standard
                                                                                                                                                             UHV manipulators
                                                                                                                                                       ■     Includes K-type thermocouple
                                                                                                                                                       ■     Wiring kits available on request
                                                                                                                                                             Please contact sales office stating length and type of UHV
                                                                                                                                                             manipulator


                                                                                                                                                           Description
                                                                                                                                                           Heater and sample transfer

                                                                                                                                                                 Please contact technical sales for details.




   All dimensions are nominal in millimetres unless specified Weights given are approximate                                                                                                                                All dimensions are nominal in millimetres unless specified Weights given are approximate

554 Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk                                                                                                                               Caburn-MDC Europe Limited Telephone +44 (0)870 428 7646 www.caburn.co.uk 555

				
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