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b) Metal nitride films for gate electrodes, barrier layers, ENHANCE
protective coatings, and IC interconnects.
Material systems: TaN, WN, NbN, HfN, ZrN, rare-earth
A unique Marie Curie Initial Training Network
nitrides
c) Metal oxide-based nano-systems (transparent
The multi-site European research training network
conducting oxides; both p- and n- type) for photovoltaic,
“ENHANCE” – “New Materials: Innovative
energy devices, sensors, self-cleaning and photo-catalytic
Concepts for their Fabrication, Integration and SEVENTH FRAMEWORK PROGRAMME (FP7)
coatings.
Characterisation” will be established to deal with the mid
Material systems: ZnO, Ga2O3, In2O3, TiO2, CoO, Co3O4,
and long term issues of concern to the European industry
Cu2O, CuO, Cu-Ti-O, Co-Ti-O
encompassing the whole spectrum of functional materials
d) Composite films, surface coatings (hydrophilic,
for microelectronics, nano-electronics, data storage,
hydrophobic, protective) and resistive coating application
photovoltaic, with emphasis on emerging nano-
in medical devices, hearing aids, and dental devices.
technologies.
Material systems: polymers and organic compounds
e) Metallic nanostructures nano-dots, nano-wires and
This network consists of 3 academic groups from
interconnects for the fabrication of nano-devices as well as
the doping of the above systems in order to tailor their
optical and electrical properties.
Chemistry, 1 from Physics, 3 from Material Science and
Engineering and 1 industrial partner from 6 different
countries: Germany, Finland, The Netherlands, Italy,
ENHANCE
Material systems: Au, Pt, Pd, Fe, Co, Ni, Cu, Mo, W.
Denmark, and Austria.
Marie-Curie Initial Training Network
(MC-ITN)
ENHANCE offers opportunities for young researchers who
Training programme are interested in the development of new materials and
nano-systems using different thin film and nano-structure European Research Training Network of New
The ENHANCE project offers a multidisciplinary research, process technologies such as MOCVD, ALD, PE-ALD,
education and training programme to young researchers MVD/MLD, EBID/IBID. Materials: Innovative Concepts for their
by combining the classical knowledge of chemistry, Fabrication, Integration and Characterisation
materials science, physics and engineering, i.e. the The ENHANCE network offers Marie-Curie
knowledge of precursor molecules, materials properties, fellowships for 13 Early-Stage Researchers Funded by the European Commission
study of physical phenomena, to electronic devices and (ESR/PhDs; for 36 months) and 8 Experienced
circuit integration. Researchers (ER/post-doc; for 12 months) at the
FP7 – The People Programme
partner institutes. All the details including Call: FP7-PEOPLE-ITN-2008
The training of ENHANCE fellows will be based on a conditions for recruitment, available positions, how
structured 3 year academic curriculum, including generic Proposal Number: 238409
to apply, research projects and training programme
skills workshops and on-site research training at the state are available at the network’s web site.
of the art laboratories, facilities under clean room
conditions and training at industrial laboratories. This will Coordinating
provide the young scientists with necessary in-depth Institute:
knowledge in materials synthesis and thin film processing Project Starting Date: 01.10.2009
Ruhr-University Bochum
as well as experimental skills in operating the instruments
and analytical skills in different materials characterisation Inorganic Chemistry II
Duration: 48 months
techniques. Universitätsstr. 150
E-mail: enhance@rub.de 44780 Bochum, Germany
www.enhance-itn.eu www.enhance-itn.eu
Network Partners Research programme
ENHANCE
ENHANCE consists of 8 full network partners and The scientific research programme of the ENHANCE
7 associated partners Overview: The main objectives of ENHANCE (grouped network is mainly focused on the multi-disciplinary field of
into two) are listed below. thin film vapour deposition process technologies of new
Ruhr-University Bochum, Bochum, Germany materials.
Inorganic Chemistry II, Organometallics & Materials Science and Technology: Development and
integration of new material systems The research activities of ENHANCE are divided into seven
Forschungszentrum Jülich GmbH, Germany main work packages:
Institute for Solid State Research - Electronic Materials ENHANCE will develop and integrate
(IFF-IEM) and JARA Fundamentals of Future Information a) New materials, processes and device structures into 1. Precursor chemistry of metals, metal oxides and metal
Technology industrial application, especially in microelectronics (high-k, nitrides for vapour deposition processes
gate electrodes), with the ultimate aim of developing 2. Thin film growth by Metalorganic Chemical Vapour
University of Helsinki, Helsinki, Finland improved devices with lower costs. Deposition (MOCVD), Liquid-Injection Metalorganic
Laboratory of Inorganic Chemistry b) Composite films, nano-coatings and surface coatings, Chemical Vapour Deposition (LI-MOCVD) and Atomic
with multifunctional properties for applications in Vapour Deposition (AVD)
Eindhoven University of Technology, Eindhoven, photovoltaic, sensing, photo-catalysis, as well as in the
The Netherlands creation of novel devices for applications in the energy, 3. Thin films and nano-layer growth by Atomic Layer
Department of Applied Physics; Plasma and Materials medical devices and environmental fields. Deposition (ALD) and Liquid-Injection Atomic Layer
Processing c) Nano-scale fabrication processing of metallic nano-dots, Deposition (LI-ALD)
nano-wires and interconnects and 3-dimensional 4. Plasma-Enhanced Metalorganic Chemical Vapour
Danish Technological Institute, Denmark nanostructures for application in quantum devices and Deposition (PE-MOCVD) and Plasma-Enhanced Atomic
Center for Micro-Technology and Surface Analysis nano-electronics. Layer Deposition (PE-ALD) of thin films and layers
University of Padova, Padova, Italy Education and Training: Qualification of young 5. Growth of composite layers by Molecular Vapour
Department of Chemistry researchers Deposition (MVD) or Molecular Layer Deposition (MLD)
process and their characterisation
Vienna University of Technology, Vienna, Austria 1) Providing young scientists with necessary theoretical 6. Electron Beam Induced Deposition (EBID) and Ion
Institute for Solid State Electronics and Center for Micro knowledge and experimental skills to develop a Beam Induced Deposition (IBID) and characterisation of
and Nano Structuring comprehensive understanding of thin film process nano-structures, nano-dots and nano-wires
technologies and integration of new materials into nano-
AIXTRON AG, Germany scale systems. 7. Thin film analysis, evaluation of functional properties,
Silicon Semiconductor Technologies 2) Offering the multidisciplinary research education and nano-structure characterisations and proto-type test device
training programme to young researchers. structure development
3) The training will be based on a structured academic In ENHANCE the following broad areas of research and the
Associated Partners curriculum, including workshops on generic skills and material systems which are highly relevant for industrial
instrumentation, on-site research training at state-of-the- application have been selected for the scientific research
art research laboratories, facilities under clean room programme.
1. NXP Semiconductors, The Netherlands conditions and training at the industrial laboratories.
2. IMEC, Belgium 4) Highly-skilled young researchers (ESRs/ERs) of a) High-permittivity (k) oxides for MOSFET gate dielectrics,
ENHANCE with good industrial experience and education in memory applications (DRAMs, RRAMs).
3. Carl-Zeiss NTS GmbH, Germany
multidisciplinary fields of science and engineering and Material systems: HfO2, ZrO2, SrTiO3, (Ba, Sr) TiO3
4. Topsoe Fuel Cells, Denmark PhDs in chemistry, physics, materials science or (BST), rare-earth oxides; Dy2O3, Pr2O3, Gd2O3, Er2O3,
5. Widex A/S, Denmark engineering will be able to ensure excellent progress and multi-component rare earth oxides, doped oxides
6. Elos-Pinol, Denmark continuity in European research organizations and RE(HfO2), RE(ZrO2) and complex perovskites SrTiO3, (Ba,
industries after leaving the network. Sr) TiO3 (BST) as well as zirconates.
7. Namlab GmbH, Germany
