Positioning of objects

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					MEMS Animated Graphic
  Design Aid Project
      (MAGDA)
        Alexandra Baer
      Martin Kellermann
    Verena von Hintzenstern
       Wolfram Schoor

   Supervisor: Dr. Renate Sitte
               Content
 Introduction
 Purpose and realization
 Specific MEMS – elements
 MEMS – materials
 Transformation from 2D to 3D
 3D Visualisation


                 MAGDA 2003 --
                                     2
                 Martin Kellermann
    MEMS Short Introduction
 Micro-Electro Mechanical Systems
 Integrated on a common silicon substrate
 Similar fabrication like Integrated Circuit
 Widely used
 Numerous advantages




                   MAGDA 2003 --
                                                3
                   Martin Kellermann
    The Purpose of MAGDA
 Provide a user friendly way to design
 Pre analyse use under real circumstances
 Compatibility to ANSYS
 3D presentation (VRML)
 Animation




                  MAGDA 2003 --
                                             4
                  Martin Kellermann
               The Basis
 MATLAB program
  used to design IC
 Very limited




                      MAGDA 2003 --
                                          5
                      Martin Kellermann
                    MAGDA
   Functional design
   Fast access
   Improved functions
   Additional functions
   Objects editable
    - geometric shape
    - 3d data
    - material data

                      MAGDA 2003 --
                                          6
                      Martin Kellermann
      Specific MEMS Elements

   MAGDA provides user-friendly construction
    and editing of specific MEMS primitives
    Comb                  Gear                    Coil




                   MAGDA 2003 -- Alexandra Baer          7
                           Comb
   Electrostatic comb drive actuator




   Important factors :
       - number, length and width of fingers
       - gap between fingers (important for different
          force profiles e.g. linear, quadratic, cubic,…)


                     MAGDA 2003 -- Alexandra Baer           8
                      Comb
   Menu to design a 2D comb




                  MAGDA 2003 -- Alexandra Baer   9
                         Gear
   Microengines




• Important factors :
       - size of whole gear
       - number,width and height of teeth


                   MAGDA 2003 -- Alexandra Baer   10
                     Gear
• Menu to design a 2D gear with specific parameters




               MAGDA 2003 -- Alexandra Baer       11
                               Coil
• Used as an induction coil




   Important factors for the magnetic field :
       - number of twists
       - distance between the twist
       - width of twists

                       MAGDA 2003 -- Alexandra Baer   12
                     Coil
• Menu to create a 2D coil




              MAGDA 2003 -- Alexandra Baer   13
          Materials in MEMS
• Various materials undergo
  different deformations
• Use of Silicon and UNCD
  (Ultrananocrystalline
  Diamond) can deform due
  to temperature
• Use of Gold and
  Aluminium can deform
  due to electrical voltage
  and current

                         MAGDA 2003 --
                                                14
                      Verena von Hintzenstern
The Material Menu in MAGDA
 • Contains MEMS specific materials and parameters
 • Input of object thickness




                      MAGDA 2003 --
                                                     15
                   Verena von Hintzenstern
            Input for ANSYS


• Material parameters saved in Data structure
• Library as input for ANSYS
• Shininess and RGB values




                       MAGDA 2003 --
                                                16
                    Verena von Hintzenstern
The Extrude Menu in MAGDA
• Declaration angles and angles by selecting single lines
  Addition of of extrude thickness to the 2D object




                          MAGDA 2003 --
                                                            17
                       Verena von Hintzenstern
          3D Data in MAGDA
• Extrusion
• 3D Data
• New angles
  and thickness




                     MAGDA 2003 --
                                            18
                  Verena von Hintzenstern
            3D Visualisation
             of MEMS-data
   Recognition of shape
       2D vs. 3D


 Power of VRML
  - Animation of simulation
  - Virtual interaction
 Matlab 3D view

                MAGDA 2003 -- Wolfram Schoor   19
       Positioning of objects
 Level based height vs.
  individual object height
 Pushing down complex objects
  (transformation/grouping)
 Creating vertex data
 Stacking objects
 Write data into .wrl file

              MAGDA 2003 -- Wolfarm Schoor   20
               Stack algorithm
 Place objects from level 1
  insert object into list
  according to its size
 For each obj from current
  level:
  search for intersection obj,
  calculate absolute height,
  store object on right
  position in list
 Increase level


                     MAGDA 2003 -- Wolfram Schoor   21
                        Intersection
Base obj a < 90 deg

Case I.a:
Drop obj b < = 90 deg



Case I.b:
Drop obj 90 < b <=(180-a) deg



Case I.c:
Drop obj b >   (180-a) deg


                         MAGDA 2003 -- Wolfram Schoor   22
                        Intersection
Base obj a => 90 deg


Case II.a:
Drop obj b <   90 deg




Case II.b:
Drop obj b >   90 deg




                        MAGDA 2003 -- Wolfram Schoor   23
                     Intersection
(common case)
Case III:
Base obj 0 < a < 180 deg
Drop obj 0 < b < 180 deg




                       MAGDA 2003 -- Wolfram Schoor   24
                           3D View




MAGDA 2003 -- Wolfram Schoor         25
Example: Sensor MAGDA




        MAGDA 2003 --
                             26
       Kellermann & Schoor
Example: Sensor VRML




     MAGDA 2003 -- Wolfram Schoor   27
              Future work

 Remove function
 Curves
 Additional specific MEMS
 Simulation of functionality
 Animation of MEMS



                   MAGDA 2003   28
                             References
•   Modelling and Simulation of MEMS flexibility with spline approximation for fast VR
    visualisation, Kevin Tatur, 2003
•   http://www.microchem.com,2003
•   http://mems.sandia.gov ,2003
•   http://clifton.mech.nwu.edu/~espinosa/micro-nano.html ,2003
•   http://www.camd.lsu.edu/ ,2003
•   http://artemis.cop.uop.edu/~krysac/mems/memstalk/1memstalk.html ,2003
•   http://www.memsguide.com ,2003
   http://www.ansys.com/ansys/mems.whatis.htm
   Subrata Mukherjee “MEMS Application in Sensors and Actuators – Optimal Design of
    MEMS”
   Lionel Houlet, Gilbert Reyne, Tetsuhiko Iizuka, Tarik Bourina, Hiroyuki Fujita ” Magnetic
    Actuator for Optical Switch”
   Emily J. Pryputniewicz, Samuel L. Miller, Maarten P. de Boer, Gordon C. Brown, Ronald R.
    Biederman and Ryszard J. Pryputniewicz “ Experimental and analytical characterization of
    dynamic effects in electrostatic microengines”
   http://www.fujita3.iis.u-tokyo.ac.jp/~limms/projects/rapportpdf/DOC16%20-%20lionel.pdf
   http://www.wtec.org/loyola/mcc/mems_eu/Pages/Chapter-5.html
   http://users.wpi.edu/~chslt/docs/pdf/rjp/Adv%20opt%20meth%20microeng%20rot%20high%
    20speeds%20-%20SEM2000.pdf
   http://users.wpi.edu/~chslt/docs/pdf/rjp/MicroEngDynamicEffects%20%20SympMicroscaleS
    ystems2000%20.pdf
   http://www.sandia.gov/mstc/technologies/micromachines/docs/linkdeseff.pdf

                                         MAGDA 2003                                         29
Example VRML




 MAGDA 2003 -- Wolfram Schoor   30

				
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posted:8/20/2011
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