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					     Semiconductor Equipment and Manufacturing Standards Activities
                        Timeline and Roadmap
                                                            Rev 9 December 2005
                                                       Document Information
                  Created and maintained by Jackie Ferrell and Lance Rist, International SEMATECH Manufacturing Initiative (ISMI)

This document includes a history and status of standards ballots for SEMI Information and Control; Physical Interfaces and Carriers; Metrics;
Environment, Safety, and Health (ESH); Traceability; Microlithography; and Silicon Wafers committees. This report does not include all SEMI
committee activities. Further information about SEMI standards activities is available on the SEMI website at www.semi.org.


This document is intended to be updated frequently as plans and expectations change. The SEMI standards process is open to many contributors and
includes a free flow of ideas and opinions. The International SEMATECH Manufacturing Initiative (ISMI) participates in this process, but cannot
guarantee adherence to schedules. By monitoring the whole picture with this type of tool, it is hoped that ISMI can maximize its ability to assess the
rate of progress and the completeness of the end (standards) products.

The SEMI Standards Activities Timeline and Roadmap shows the individual SEMI documents under development and the stages they are expected to
go through as time progresses. "Passed" indicates the ballot passed committee review. This document does not track procedural reviews. The timeline
divides each year into the four main meetings where ballots are adjudicated (Europe and N.A. Winter meetings are combined). Each standard ballot or
action is listed in the cell that corresponds to the time period of the activity. The cells are color-coded (see the legend at the bottom of that sheet) to
show the stage of an activity, and the text gives the SEMI document number. Cells in the timeline contain "Comments" (designated by a red marker)
about the status and content of each ballot.

Status information is derived from publicly available information on SEMI's website and, thus, depends on the accuracy of that information. Projections
of document actions in the near-term are based on committee actions or forecasts and are subject to change. Future strategic direction and standards
implications may be available in the International Technology Roadmap for Semiconductors (ITRS).

Numerous hyperlinks lead to the SEMI standards web page. The links for the task force names lead to the Task Force Organization Form (TFOF).
Links in cells for ballots lead to the SEMI New Activity Report Form (SNARF).
Ballot submission dates for upcoming cycles are indicated in row 1 as "comments" in cells.




37176b16-462b-43fe-bd9c-4e366380edf5.xls                                   1 of 46                                                                  8/16/2011
                                                                        2002          2002        2002         2002       2003           2003
                                                                        Cycle 1       Cycle 2     Cycle 3      Cycle 4   Cycle 1&2      Cycle 3&4
        SEMI Information and Control                     Document      Winter Mtg    SEMICON     SEMICON      SEMICON    Winter Mtg   SEMICON West
                                                                        US/Jpn         West      Southwest      Japan     US/Jpn        Japan June
           Documents/Standards                            Status       SEMICON      Japan June   Japan Fall              SEMICON           Mtgs
                                                                        Europa         Mtgs                               Europa

        Key e-Manufacturing Related Task Forces
      International Equipment Engineering (IEE) TF
Time Synchronization                                        TBD
Tool Data Interface (TDI) System (J)                        AUX
       Diagnostics Data Acquisition (DDA) (NA)
PR8 Equipment Data Acquisition Solutions                 proposed                   SNARF         3563         3563      2nd Blue
                                                                                     3522        3522A                     3646         3646A
E120 Common Equipment Model (CEM)                            full
(E98.x) OBEM subdocument -XML Mapping                       new         3493                                  3493A
E39 Object Services Standard (OSS)                           full       3449        3449A                                 3639
Guide for Equipment Data Acquisition (EDA) (J)              new         3571
E134 Data Collection Management                              full       3509                                   3509                     3509A
E134.1 SOAP Binding for Data Collection Management       provisional                                                       3721
E125 Meta Data/Equipment Self Description (EqSD)             full       3510                                   3510       3510A          3781
E125.1 SOAP Binding of Equipment Self Description        provisional                                                       3719
E132 Eq Client Authentication and Authorization              full
                                                                        3507                                   3507                     3507A
E132.1 SOAP Binding Equip Client Authent/Authorization   provisional
                                                                                                                          3720
            Data Quality Test Methods TF (NA)                                        TFOF
Data Quality Definition and Interfaces (provisional)     withdrawn
Data Quality Test Specification                          withdrawn
           Integrated Measurement (IM) TF (NA)
                                                                        3529         3529                                 3529           3787
E127 Integrated Measurement Module Comm (IMM)                full
E127.1 SECS-II Protocol for IMM                             full
SEMI E5 Addition of New Error Codes                         new                                                                          3812
     Object-Based Equipment Model (OBEM) TF (J)
                                                                        3479                                              3645
E98 OBEM                                                 provisional
E98.1 OBEM mapping to SECS-II                            provisional    3449        3449A
         Process Control System (PCS) TF (NA)
                                                                          3527             3527              3527      3527A
E133 Automated Process Control Systems Interface           provisional
(E133.1) XML/SOAP binding for E133 data models                new
Specification for Integration of Process Control Systems   withdrawn
  Recipe and Parameter Management (RaP) TF (NA)
E139 Recipe and Parameter Management (RaP)                    full                                 3442                3442
Recipe Structure (doc 3650)                                   new                                          On Hold
E139.x XML Schema for RaP PDE                                 full
RAP Services- XML/ Soap Mapping                               new
RAP Services- SECS II Mapping                                 new
                         XML TF (NA)
E121 - XML Style & Usage Guidelines                            full       3523     3523    3523A             3658      3658A
E128 - XML Message Structures                              provisional             3569     3569             3569       3733
E138 XML Common Components (Data)                              full                3570     3570
Core Components                                               new
#TBD Representation of Measurement Units in XML                full
        Task Forces Not Directly Related to e-Mfg
                   GEM 300 TF (NA)
                                                                          3449     3449A   3567              3567
E5 - SECS-II                                                   full
                                                                                   3372B                     3640
E30 GEM                                                        full                        3567            3567 3640   3725
E37 HSMS                                                       full
E37.1 HSMS-SS Modification (Japan)                             full                3443
E37.2 (HSMS-GS)                                                full                         3601
E40 Process Job Management                                     full                3349B   3349C             3654      3726
E87 Carrier Mgt Std (CMS)                                      full                                3115I     3643      3727
E90 Substrate Tracking                                                   3247…             3247F   3247G     3642      3728
                                                               full
E90 Substrate Tracking Event Report (revision to E90)(T)
E94 Control Job Management                                     full                        3278E   3278F               3729
Guide for 300 mm Standards (GEM300) - 3264 (J)                new        On Hold
E120.1 XML Schema for CEM                                      full
AUX Equip Supplier Basic Op Scenarios for Automation          AUX
     Equipment Control Systems TF (ECS) (NA)
E126 - Equipment Quality Information Parameters (EQIP)         full       3511     3511    3511A            3511B      3722
   Equipment Performance Tracking TF (EPT) (NA)
E116 - EPT Standard                                        provisional   3296B             3565              3648      3724
E116.1 - SECS-II Protocol (EPT)                             provisional                     3564          3647
       Electronic Service Documentation TF (NA)
E36 Equipment Manufacturing Information Tagging                full
E36.1 XML Information Model for Electronic Svc Docs            full
                 Equipment Integration (EITF)
Equipment Integration Aspects Interface                       sunset      3218    On Hold
                       IBSEM TF (NA)
E82 - Interbay/Intrabay SEM                                    full                         3561          3632   3717
E88 - Stocker SEM                                              full       3339C   3339D     3562          3633   3718
Specific Equipment Model for Conveyors                         new
                      Linked Litho (J)
Provisional Handoff and Identification Interface Spec (J)      new
Interlock PIO Interface for Linked Litho Equipment (J)        sunset
Prov Spec for SECS-II Protocol for Linked Litho Equip (J)      new
                Load Port Operations (LPO)
300 mm Load Port Operations                                   sunset
          Metrology & Inspection SEM (MISEM)
E30.1 - Standard Defect Data Set (SDDS)                        full
E30.5 - Metrology Specific Equipment Model                     full                                3427
            Reticle Management (RPM) TF (NA)
E109 - Reticle and Pod Management                              full                3521                   3635
E109.1 - RPM mapping to SECS-II                                full       3449    3449A
               Sensor/Actuator Bus SC (NA)
E54 - Sensor Actuator Network Standard                          full
E54.2 Guide for writing sensor bus standards                    full
E54.3 Mass Flow Controller SDM                                  full
E54.4 - DeviceNet SDM                                           full
E54.5 - Smart Distributed Systems SDM                       withdrawn
E54.6 - Lonworks                                            withdrawn
E54.9 - Modbus/TCP SDM                                          full                        3530
E54.11 Endpoint SDM                                            full
E54.13 - Ethernet/IP SDM                                       full                         3531
E54-16 - LonWorks (replaces E54.6)                             full
                       SANPRO TF (E)
E54.14 SAN Communications for PROFInet (E)                     full                                3714
E54.8 SAN Communications for PROFIBUS-DP (E)                   full
                   A-link Task Force (J)
E54.17 SAN Network Communication for A-Link (J)           full
E54.15 SafetyBUS protocol                                 full
    Vacuum Pump Specific Device Model TF (NA)
(#TBD) Vacuum Pump Specific Device Model                  full
        TSEM, PSEM, HSEM Revision TF (NA)                Sunset
E91 - Prober SEM                                          full       3524   3524A          3638   3638A
E122 - Tester SEM                                         full       3525    3525
E122.1 - Tester SEM mapping to SECS-II                    full                             3636
E123 - Handler SEM                                        full       3526   3526A
E123.1 - Handler SEM mapping to SECS-II                   full                             3637
E130 SECS-II Protocol For PSEM300                         full
E130.1 - Prober SEM mapping to SECS-II                    full                                    3715
       Global Standards Improvement TF (SITF)                                                     TFOF
This TF does not create technical standards
                Wafer ID Reader Writer (J)
E118 Wafer ID Reader Communication Interface (J)          full       3501           3621
E118.1 SECS I and SECS II Protocol (J)                    full                      3558
            Material ID Communication TF (J)
               Carrier ID Reader Writer (J)                                 TFOF
E99 Carrier ID Reader/Writer                              full
                        AMHS TF (J)
AMHS SEM                                                  new
                        EES TF (TW)
                     Sort Map TF (NA)
G81 Map Data Items                                         full
(G81.1) Revision to E81                                    full
(G81.2) Revision to E84                                    full
(G81.3) Revision to E85                                    full
G84 Strip Map Protocol                                     full
G85 Map Data Format                                        full
E142 Specification for Substrate Mapping                   full
E142.1 XML Schema for substrate mapping                    full
E142.2 SECS II protocol for substrate mapping              full
E142.3 Web Services for substrate mapping                  full
      Yield Mgmt System Link Data Format TF (J)
E107 Electric Failure Link Data Format for Yield Mgt   provisional
             Equipment Supplier's Forum (J)
Equip Supplier's Basic Op Scenarios For Automation      AUX
          Standards With No Parent Task Force
E4 - SECS-I                                              full
E32 Material Movement Management                         full
E38 Cluster Tool Module Communications (CTMC)            full      3602   3602A
E38.1 CTMC Mapping to SECS-II                            full      3603   3603A
E41 Exception Mgmt (EM) Std                              full      3604   3604A
E41.1 SECS-II for EM                                     full      3605   3605A
E42 Recipe Management Std (RMS)                          full
E53 Event Reporting                                      full      3606   3606A
E53.1 for SECS-II                                        full      3607   3607A
E58 ARAMS                                                full
E58.1 SECS-II protocol for ARAMS                         full             3608
E81 CIM Framework Domain Architecture                provisional
E84 Enhanced Carrier Handoff Parallel I/O                full
E86 CIM Framework Labor Component                    provisional
E95 Human Interface                                      full
E96 Guide for CIM Framework Technical Architecture       full
E97 CIM Framework Global Decl. & Abstract I/F        provisional
E102 CIM Framework Material Transport & Storage      provisional
E105 CIM Framework Scheduling                        provisional

                         Key
                     TFOF, sunset
                       SNARF
             Proposed Std, Auxilliary Doc.
                      Blue Ballot
                      Validation
           new standard, reapprove, withdraw
                  standards revisions
 2003         2003       2004           2004          2004         2004       2005            2005          2005          2005       2006           2006           2006
Cycle 5&6     Cycle 7   Cycle 1&2      Cycle 3&4   Cycle 5&6       Cycle 7   Cycle 1&2      Cycle 3&4    Cycle 5&6        Cycle 7   Cycle 1&2      Cycle 3&4    Cycle 5&6
SEMICON      SEMICON    Winter Mtg   SEMICON West NA, Japan and   SEMICON    Winter Mtg   SEMICON West NA, Europe,       SEMICON    Winter Mtg   SEMICON West NA, Europe,
Southwest      Japan     US/Jpn       Japan/Taiwan Europe Fall      Japan     US/Jpn        Japan June Japan Fall mtgs     Japan     US/Jpn        Japan June JapanFall mtgs
Japan fall              SEMICON         June Mtgs      Mtgs                  SEMICON           Mtgs                                 SEMICON           Mtgs
                         Europa                                               Europa                                                 Europa




                                                                                                            4259
                                                                                             TFOF

3646B                    3848                         4081                    4081           4160                                   4160A
                                                                                             4215                                    4215
              3731
                                                      4035
                                                                   3571                      3571          3571A                                   3571B
3509B                   3509C           3968                                  4154           4154
                         3721           3721         3721A                                   4154           4254                                    4254
3781A                    3855           3974                                  4151           4151          4151A                                    4252
                         3719           3719         3719A                                   4152           4252                                    4252
                                                                                             4219           4219
3507B                    3852           3970                                  4153           4153           4253                                    4253
                                                                                             4219           4219
                         3720           3720         3720A                    4153           4153           4253                                    4253
                                                                                            Sunset
 3652                    3652           3652         3652A         4070                     sunset
                                                      4065         4065                     sunset

3787A                    3853           3985          4037                    4085
                                        4038
 3730                                   3985          4085                    4085                                                   4164


 3645                    3980           3980                                                                4237          4237      4237A
                                                                                                                         SNARF      #TBD
 3645                    3980           3990
3527B     3850      3905   3983           3983            4024            4024A
                           4024           4161    4161                     4161
                           3982    3982                   3982
3834    withdrawn

          3442             3442A          4082

          3988                     3988   3988
          3981                     3981                                    3981
          3978                     3978           3978    3978A           3978B

3658B                      3658C                                                  4086
3733A                       4034                                          4034A
                    3570   3570A
                                   4084
                    3851   3851A                  3851B           3851C


                    3969   4109           4109    4109A   4109B
          3832                                             4237   4237
3725



3726A     3971      3971   3971A          3971A    4162
3727A     3972              3972           3972    4163    4255            4255
3728A     3973      3973   3973A           4109   4109A   4109B           4109C
                    4016           4016
3729A     3977      3977   3977A          4083            4083A   4083B

3568      3568      3990                  4160    4160
                                          4139

3722      3849                     3984

3724A    3724B             4036           4036A   4159    4159            4256
3723                   3989                            4159   4159           4256


3651           3651             4087
              sunset


3826          3826A    3975     3975A   3561   4080    4155   4155A          4155B
3827          3827A    3976                            4218    4218          4218A
                                4079                                  4238

       3682             3682                   3682A
       3689            sunset
               4013
              sunset




              3732     3732A    3732B


              3885
              3886
              3887
3829          3830
              3831
              3884
                                                              4250           4250
                                4071           4182    4182
                                                       4216   4216           4216A

                       4039                    4039    4184           4184   4184

              3714              3714    4078
                       4011     4011    4077
TFOF
3865                            3865   3865A                   SNARF
       3903    3903    3903A                    4217
       TFOF
       3979                     3979    3979    3979   3979A                  4251
                                       Sunset




               3715



               3870
3763
               TFOF

3621           3870
                       TFOF
                                                4238           4238
                       TFOF

       3757A   3757B   sunset                                                        TBD
                3837
                3696
                3813

                                                                                     TBD
                       4032     4069            4069   4069A           4227
                       4066            4066
                       4067     4067            4067   4067A
                       4068     4068            4068    4227           4227
                     TFOF
                     4139




3833   3866   3866
       3867   3867




                            4220   4220   4248
                                                 TBD
 2006
 Cycle 7
SEMICON
  Japan
                                                       2004           2004          2005         2004       2005          2005           2005           2005
Physical Interfaces & Carriers                        Cycle 1&2      Cycle 3&4   Cycle 5&6       Cycle 7   Cycle 1&2    Cycle 3&4      Cycle 5&6        Cycle 7
                                                      Winter Mtg   SEMICON West NA, Japan and   SEMICON    Winter Mtg    SEMICON       NA, Europe,     SEMICON
and related SEMI Documents                Status
                                                       US/Jpn        Japan June  Europe Fall      Japan     US/Jpn         West      Japan Fall mtgs     Japan
                                                      SEMICON           Mtgs         mtgs                  SEMICON      Japan June
         / Standards                                   Europa                                               Europa         Mtgs


Physical Interfaces and Carriers
     300 mm Wafer Carriers TF (NA)
                                                      3198A          3198B                       4014      4014A         4150            4207
M31 FOSB                                provisional
                                                       3890           3890                                  4108        4108A            4246           4231
M45 Silicon Wafer Shipping System       provisional
                                                       3480           3955         3955A                                                 4231           4231
E47.1 300 mm FOUP                       provisional
                                                      3676B                         4073                    4133                         4246
E119 Reduced Pitch FOBIT                    full       3999           3999                                                               4246           4231
 300 mm Shipping Box Support TF (NA)
Revision to E62 to align M31                full                                                                         4206            4206
         E103 Maintenance TF (E)
E103 FOUP-4-1                               full       3889
      Reticle Handling (RSP) TF (NA)
E100 RSP 6" / 230mm (RSP200)                full                                                                         4204           #TBD
                                                       3999           3999                                                              4245
E111 6" RSP (RSP150)                    provisional
                                                                      4045          4045
                                                       3999           3999                                                               4245
E112 6" Multi RSP (MRSP150)             provisional
                                                                      4046          4046
          Backend PI&C TF (NA)
Thin Wafer Carrier                        sunset      sunset
Integ Measure Physical I/F TF (NA)
Kinematic Mount (IMM) on 300 mm Equip      new
E131 IMM on 300 mm using BOLTS             full
       Global PIC Maintenance TF
E15.1 300 mm Loadport                       full       3873           3966                      3873A
E19, E19.1, E19.2 SMIF                      full                      3655                                  4132         4132
E57 Kinematic Coupling                      full                      4042          4042
                                                       3957           3957
E63 BOLTS                                   full
                                                                      3966
                                                                      3842
E84 Enhanced Parallel I/O                   full
                                                                      4022                       4022
E85 AMHS Hardware Interoperability                full                           4100   4100
                                                                   3966                         4203
E106 PI&C Overview Guide                          full
                                                            3999   3999
                                                            3956   3956                 3956A    4205   4205
E62 FIMS                                      provisional                                4185    4185
                                                                                         4108   4108A
E64 Docking Interface Port                        full             4043   4043           4167    4167
AUX011 FOUP LP Interoperability                  AUX        3965   3965                  4076
           PIC Terminology TF (NA)              sunset
E106 Terminology Alignment                      sunset
        ReticleSMIF Pod Task Force
E19.4 200 mm SMIF                                 full             3656
     International E84 revision TF (NA)         sunset
     RFID Tag Implementation TF (NA)                                             TFOF
(#TBD) RF Air Interface for RFID Tags             full                           4110           4202    4202
     RFID Tag Physical Interface TF (J)                                                 TFOF
E47.1 RFID tag placement zone/orientation        full                                   4112    4112    4112A
RFID Tag dimention for FOUP and RSP              new                                    4111                    4111
Physical Interfaces&Carriers Committee
E1 Plastic & Metal Cassettes                      full
E1.9 300 mm Cassette                              full                                                  4246
E7, Electrical Interfaces for the U.S. Only       full             3959
E11 Plastic/Metal Carrier                     withdrawn
E2 / 2.2 / 2.3 / 2.4 / 2.5                    withdrawn
E15 Tool Loadport                                 full
E19.5 300 mm SMIF                             withdrawn
E20 Cluster Electrical EMO                        full
E21 Cluster Mechanical                            full
E22.1 Cluster End Effector                        full
E23 Cassette Xfer Parallel I/O                    full      3954   3954
E24 Cluster Isolation Valve Interlocks            full      3857
E25 Cluster Module Access Guideline           withdrawn     3858   3952
E26 Radial Cluster Tool Footprint             withdrawn     3861   3953
E26.1 Radial Cluster Tool Footprint 300 mm    withdrawn     3861   3953
E72 Equipment Footprint, Wt, & Ht                 full             4044   4044
E83 Docking Flange                                full                    4072
E92 BOLTS-Light                                   full
E99 Carrier ID R/W Functional Std       full
E99.1 Carrier ID R/W SECS Protocol      full
E101 EFEM                               full   3999
E110 LP Indicator Lights                full
E117 Reticle Load Port                  full   3999
E118 Wafer ID Reader Functional Std     full
                  Key
              TFOF, sunset
                SNARF
     Proposed Std Doc, Auxiliary doc
               Blue Ballot
               Validation
    new standard, reapprove, withdraw
           standards revisions
 2006            2006          2006          2006
Cycle 1&2      Cycle 3&4    Cycle 5&6        Cycle 7
Winter Mtg   SEMICON West NA, Europe,       SEMICON
 US/Jpn        Japan June Japan Fall mtgs     Japan
SEMICON           Mtgs
 Europa




 4246



 4246
 4246




 4245

 4245
4246
                                                               2004           2004          2004         2004       2005            2005          2005          2005
                                                              Cycle 1&2      Cycle 3&4   Cycle 5&6       Cycle 7   Cycle 1&2      Cycle 3&4    Cycle 5&6        Cycle 7
                                                              Winter Mtg   SEMICON West NA, Japan and   SEMICON    Winter Mtg   SEMICON West NA, Europe,       SEMICON
     SEMI Document/Standard                        Status      US/Jpn        Japan June  Europe Fall      Japan     US/Jpn        Japan June Japan Fall mtgs     Japan
                                                              SEMICON           Mtgs         mtgs                  SEMICON           Mtgs
                                                               Europa                                               Europa


Metrics Committee
               EMC Task Force (NA)
E33 Facility Electromagnetic Compatibility            full                    3847
                 ESD/ESC TF (NA)
E43 Measuring Static Charge                           full                                                                                        4241
E78 Electrostatic Compatibility - Equipment           full                                                                         3825           4240
E129 Electrostatic Compatibility - Factory            full                                                                                        4239
       Measurement Systems Analysis TF
E89 Measurement System Analysis                       full    3110D          3110E          4026                                                  4026
              RF Diagnostics TF (NA)
E113 Equip RF Power Delivery                          full     3967           3967          4113                                                  4113
E114 Test Method for RF Cable Assemblies              full
E115 Test for RF Load Impedance/Efficiency            full
(#TBD) Test for RF Power Generator Power Variations full                                                            3451                          3451
Test for RF Applicators and Interfaces            withdrawn                                 3452
E135 Test for RF Generator Transient Response         full     3517                                                                4201
E136 Test for RF Generator Output Power Level         full     3518           3518
300 mm Integrated Reflectance Metrology              new
    International Environmental Control TF
E45 Inorganic Contam. from MiniE                      full
E46 Organic Contam. from MiniE using IMS              full
E108 Outgassing Organic Contam. from MiniE            full
Determining Particulate Contam. from MiniE           new      3128A                        3128B
         Integrated Measurement (EU) TF
E141 Ellipsometer Equipment Metrology                 full                                  3624                   3624A
E104 Integration and Calib of Low Pressure ISPM       full
               E10 Revision TF (NA)
E10 Equipment RAM                                     full                                                          3846
E10 Cluster Tool Equipment RAM                        full
    Equipment Productivity Metrics TF (NA)
E79 Equipment Productivity (OEE)                    full
                                                                     3845
  Factory Level Productivity Metrics TF (NA)
E124 Factory Level Productivity Metrics         provisional
  Fabrication Efficiency Measurement TF (J)
Fabrication Efficiency Measurement (FEM)           new
          Equipment Documentation TF                                        TFOF
                                                                                   4242
       Equipment Cost of Ownership TF
E35 Guide Calculation of COO for SC Equipment      full       3659
E35.1 CEO Comparison Metric                     withdrawn
E140 COO for Gas Delivery Systems                   full      3659

                     Key
                 TFOF, sunset
                   SNARF
          Preview Doc, Auxilliary Doc.
                  Blue Ballot
                  Validation
       new standard, reapprove, withdraw
              standards revisions
 2006            2006          2006          2006
Cycle 1&2      Cycle 3&4    Cycle 5&6        Cycle 7
Winter Mtg   SEMICON West NA, Europe,       SEMICON
 US/Jpn        Japan June Japan Fall mtgs     Japan
SEMICON           Mtgs
 Europa




                3847


 4240
 4239

 #TBD




               3128C
4089
                                                                    2004            2004          2004          2004        2005          2005         2005
                                                                   Cycle 1&2      Cycle 3&4    Cycle 5&6        Cycle 7    Cycle 1&2    Cycle 3&4   Cycle 5&6
                                                                   Winter Mtg   SEMICON West NA, Europe,       SEMICON     Winter Mtg SEMICON West NA, Japan and
           SEMI Document/Standard                      Status       US/Jpn        Japan June Japan Fall mtgs     Japan       US/Jpn     Japan June  Europe Fall
                                                                   SEMICON           Mtgs                                 Europa, SPIE     Mtgs         mtgs
                                                                    Europa


Microlithography Related Activities
                  Micropatterning Committee
P4 Round Quartz PhotoMask Substrates                     full                                                               4137
P6 Registration Marks for Photomasks                     full                      4001
P7 Kinematic Viscosity Determination - Method A          full
P13 Na andK in Positive Photoresist (AAS)                full                      4000
P15 Na and K in Pos Resist MIF Developers (AAS)          full                      4002
P16 Tin in Pos Resist MIF Developers (GFAAS)             full                      4003
P20 Catalog Publication of EB Resist Parameters       proposed
P21 Precision and Accuracy Mask Writing Equipment        full
P24 CD Metrology procedures                              full                      4006
P25 Measuring Depth of Focus and Best Focus              full                      4007
P26 Parameter Checklist Photoresist Sensitivity          full
P27 Parameter Checklist Substrate Resist Thickness       full
P30 Practice for Catalog Publication of CD-SEM           full       3910           3910
P32 Test Method for Trace Metals in Photoresists         full                      3874
P33 Developmental 230mm Sq Hard Surface Masks        provisional                                                            4135
P34 230 mm Square Photomask Substrates                   full                                                               4136
P36 Magnification Reference for CD SEMs                  full
P38 Film Stacks,Multilayers on EUV Mask Blanks           full
Scatterometry Standardization                            new
TBD SEM Specifications TF                                new
                         P5 Revision TF
P5 Specification for Pellicles                           full       3838
P5.1 Pellices for Polychromatic Exposure Systems         full
P5.2 Pellicles for G, H, I-Line Exposure Systems         full
                   Fused Silica Pellicles TF
Fused Silica Pellicle (FSP)                             new
               Reticle Data Management TF (J)
P41 Mask Defect Data Handling with XML                   full
P42 Reticle Data Auto Recipe Xfr to Exposure System       full
Reticle Data Management                                   new
CD Measurement Information Data on Reticle by XML (J)     new                                 4165
                       Order Entry TF (NA)
P10 Data Structures for Photomask Orders                  full   3863                  4099   4099
        Electrical Metrology Test Structures TF (NA)
P18 Overlay Capabilities of Wafer Stepper                 full           4004
P19 Metrology Pattern Cells for IC Manufacture            full   4005    4005   4005
Electrical Critical Dimension Test Structures             new
                       P22 Revision TF (J)
P22 Photomask Defect Classification and Size Definition   full                         4101
                       P29 Revision TF (J)
P29 Halftone/attenuated phase shift masks and blanks      full                  4063   4063   4063A   4063B
                       P31 Revision TF (J)
P31 Catalog Chemical Amplified Photoresist Parameter      full
           Electrical Overlay Test Patterns TF (NA)
Hybrid Overlay-Metrology Test Patterns                    new
          Overlay Metrology Specifications TF (NA)               TFOF
Benchmarking of Optical Overlay                           new    3958                                         3958
           Grid Artifacts & Calibrations Task Force
2-D Reference Grid                                        new
               Terminology of Metrology TF (NA)
P35 Terminology for Litho Metrology                       full   3138A
   Mask Fabrication & Qualification Terminology TF (E)
P43 Photomask Qualification Terminology                   full
                   EUV Mask Task Force (NA)
P37 Extreme Ultraviolet Lithography Mask Substrates       full           4047   4047
Storage and Handling (EUV) Reticle Carrier                new
EUV Mask Frame                                            new                          4189
EUV Reticle Handling Areas                                new                                 4190
EUV Reticle Reference Fiducial Mark                                                           4191
P40 EUV Mask Mounting Reqs, Align Ref Locations           full
  Data Format Mask Pattern Gen, Defect Inspect TF (NA)
P39 Open Artwork System Interchange Standard (OASIS)      full                                4138    4138
              Line Edge Roughness (LER) TF (J)                           TFOF

  Data Format Variable-Shaped-Beam Mask Writers TF
(#TBD) Mask Data Format Var-Shaped-Beam Mask Writers        full   4062   4062   4062
Job deck data format for VSB mask writers (J)               new           4166   4166

                      TFOF, sunset
                        SNARF
               Preview Doc, Auxilliary Doc
                       Blue Ballot
                       Validation
            new standard, reapprove, withdraw
                   standards revisions




Catalog Pub Chemical Amplified (CA) Photoresist Parameter
 2005       2006           2006          2006         2006
 Cycle 7   Cycle 1&2      Cycle 3&4   Cycle 5&6       Cycle 7
SEMICON    Winter Mtg   SEMICON West NA and Europe   SEMICON
  Japan     US/Jpn        Japan June   Fall mtgs       Japan
           SEMICON           Mtgs
            Europa
4165   4165
4166
                                                                           2004           2004          2004         2004       2005           2005
                                                                          Cycle 1&2      Cycle 3&4   Cycle 5&6       Cycle 7   Cycle 1&2      Cycle 3&4
                                                                          Winter Mtg   SEMICON West NA and Europe   SEMICON    Winter Mtg   SEMICON West
            SEMI Document/Standard                            Status       US/Jpn        Japan June   Fall mtgs       Japan     US/Jpn        Japan June
                                                                          SEMICON           Mtgs                               SEMICON           Mtgs
                                                                           Europa                                               Europa


Silicon Wafer Related Activities
                  Annealed Silicon Wafers TF
M21 Addresses to Elements in Cartesian Array                    full
M25 Calibration of LPD Wafer Inspection Sys                 withdrawn
M26 Guide for the Re-Use of Wafer Boxes/Cassettes               full
M27 Precision Over Tolerance (P/T) Ratio of Test Eq             full
M32 Guide to Statistical Specifications                         full       3877
M35 Si Wfr Surface Features Detected by Auto Inspec             full                      3926                                  4117           4117
M44 Conversion Factors for Interstitial Oxygen in Silicon       full                                    4025        4025A
M49 Geometry Msrmnt Equip Silicon Wafers 130nm                  full      3835A
Throughput from Auto Msrmnt Equip for Silicon Wafers           new
Calibrating Scanning Surface Inspect on epi w/ PSL          withdrawn
M47 SOI Wafers for CMOS LSI Applications                        full       3876
                        Terminology TF                                                                              TFOF
M59 Terminology Standard for Silicon Technology                 full       3906                         3906                    4118           4118
        International 300mm Shipping Box Task Force
                                                                          3198A          3198B                                  4108          4108A
M31 Front-Opening 300 mm Wafer Shipping Box                 provisional
                                                                           4014           3890                       4014      4014A           4150
M45 300 mm Wafer Shipping System                            provisional
             General Wafer Specification TF                                                                                     TFOF
          Int'l Basic Product Si Wafer Spec TF
                                                                                                        3907                    4116           4116
M1 Polished Monocrystalline Silicon Wafers                      full
                                                                                                                                               4208
M1.14 350 and 400 mm Polished Si Wafers                     withdrawn
M1.15 300 mm Polished Mono Silicon Wafers (notched)             full       3593
M8 Polished Monocrystalline Si Test Wafer                       full                                                                           4199
M16 Polycrystalline Silicon Wafers                              full
M24 Specification for Silicon Premium Wafers                    full                                                 4092                      4092
                           EPI Wafer TF
M11 Si Epi Wafers (100 nm DSP)                                  full      3290D                         3948                                   4117
M2 Silicon Epitaxial Wafers Discrete Device                     full
M61 Silicon Epitaxial Wafers with Buried Layers                 full                                                 4091       4091
M62 Specification for Silicon Epitaxial Wafers                  full                                                            4115           4115
           Silicon Wafer 5 year review Task Force
M17 Universal Wafer Grid                                     full   3796A
M20 Establishing Wafer Coordinate System                     full   3797A   3960
                Specification Order Form TF
                                                                    3840                          4134   4134
M18 Format Si Wafer Order Entry                              full
                                                                    3876
       Int'l Auto Wafer Surface Inspection (AWSIS) TF
M50 Method for Capture Rate and False Count Rate             full   3770A   3961
M52 Scanning Surf Inspec Sys for Si Wafers (130nm)           full                          3551   3551
M53 Calibration Scanning Surface Inspec Cert PSL             full
M56 CoO for Metrology Equipment Component                    full
Nanotopography Test Unpattern Si Wfr 130-65 nm               new                                         3335B
Wafer Defects Automatic Wafer Inspection by SSIS             new                           4098
Scanning Surface Inspect Sys Si and SOI Wafers 100nm         new
Test Methods for Deposition System                           full   3592
                   Annealed Silicon Wafers TF
M57 Guide for Specifying Silicon Anneal Wafers               full   3432B           3929   4093   4093
               Int'l Advanced Geometry Wafer TF
Method for Determining Roll-Off                              new                                         4209
Quantifying Wafer Edge Geometry Using a Curvature Metric     new
     International 300 mm Reclaim Wafer Remarking TF
M38 Polished Reclaim Silicon Wafers                          full   3595A   3595B                        4195
       Wafer Specifications for MEMS Applications TF
Guide for Wafers for MEMS-related Bonding Applications       new
Wafer geometry for MEMS-related Direct Bonding               new    3908
                        HI-K Dielectrics TF
Test Meth; Work Function Extract Oxide, High-k Gate Stacks   new                                         4210
                              GOI TF
M60 Test for Time Dep Dielec Breakdown Si Wfr SiO2 Films     full           3765           3765   4095
Note: ASTM materials test methods and standards are in the
process of being balloted and approved as SEMI Standards,
designation MFxxxx. These standards and ballots are not
tracked in this document.
                            Key
                       TFOF, sunset
                          SNARF
                 Preview Doc, Auxilliary Doc
                         Blue Ballot
                         Validation
              new standard, reapprove, withdraw
standards revisions
   2005          2005       2006            2006          2006          2006
 Cycle 5&6       Cycle 7   Cycle 1&2      Cycle 3&4    Cycle 5&6        Cycle 7
NA, Japan and   SEMICON    Winter Mtg   SEMICON West NA, Europe,       SEMICON
 Europe Fall      Japan     US/Jpn        Japan June Japan Fall mtgs     Japan
     mtgs                  SEMICON           Mtgs
                            Europa




   4135




   4207
   4246




   4199

   4198




   4211
4098




4244




4195




4210   4210A

4095
                                                       2004           2004          2004         2004       2005            2005          2005          2005
                                                      Cycle 1&2      Cycle 3&4   Cycle 5&6       Cycle 7   Cycle 1&2      Cycle 3&4    Cycle 5&6        Cycle 7
                                                      Winter Mtg   SEMICON West NA, Japan and   SEMICON    Winter Mtg   SEMICON West NA, Europe,       SEMICON
 SEMI ES&H Documents and                               US/Jpn        Japan June  Europe Fall      Japan     US/Jpn        Japan June Japan Fall mtgs     Japan
                                             Status
        Guidelines                                    SEMICON           Mtgs         mtgs                  SEMICON           Mtgs
                                                       Europa                                               Europa



ES&H and Related Activities
           ES&H Committee
  Mfg Equipment Safety Subcommittee
S2 ES&H Semicond Mfg Equip                                                          4103                    4103          4103A                        #TBD
                                              full
                                                      3788B                                                               3788C          3788D
AUX005 Comparison Matrix S2 93A and 2001      Aux
AUX007 Comparison KOSHA and S2                Aux
       S3 Revision Task Force (NA)
S3 Heated Chemical Baths                      full                   2479F                                 2479G          2479H          2479I
          S4 Revision Task Force             Sunset
S4 Segregation/Separation of Gas Cylinders    full
       S6 Revision Task Force (NA)
S6 Safety Guide for Ventilation               full    3188C                        3188D
       S7 Revision Task Force (NA)                                                                          TFOF
S7 Safety Evaluation of Equip                 full                                                                         4230
       Ergonomics Task Force (NA)
S8 Ergonomics Engineering Safety GL           full                                 3662A                   3662A
            S10 Revision TF (E)
S10 Risk Assessment and Risk Evaluation       full     4010
       S11 Rewrite Task Force (NA)
S11 Minienvironment Safety Guidelines         full    3463B                        3463C                   3463C          3463D
       S12 Revision Task Force (NA)
S12 Equipment Decontamination                 full                                                          3836                          3836
Aux. Decontamination/ Decommissioning         AUX      3904                         3904
        S13 Revision Task Force (J)
S13 Operation and Maint Manuals               full    3496D          3496E         3496F
      Fire Protection Task Force (NA)
S14 Fire Risk Assess/Mitigation               full     3856                                                                                            #TBD
AUX004 Fire Safety Evaluation Checklist       Aux
            S16 Revision TF (J)                                                    TFOF
S16 Equipment Disposal                                                                           4094                      4094                        4094A
      Silane Handling Task Force (J)
S18 Silane Family Gases Handling              full
         Hydrogen Peroxide TF (E)
H2O2 risk assessment Guidelines                  new    4008                                    4008
          Worker Protection TF (J)
S19 Personnel Safety                             full
S20 Isolation Devices- Haz Energy Control        full
S21 Guideline for Worker Protection              full                           4097                            4097
            S22 Task Force (NA)
S22 Electrical Design of Semiconductor Mfg       full                   4103            4103    4103A   4226    #TBD
Eq
 High Pressure Equipment Safety TF (NA)
High Pressure Design and Fabrication             AUX            4048                            4048
   Energy Conservation Task Force (J)
S23 Energy and Utility Conservation              full   3497C   3497D           4102    4102
          Workplace Safety TF (J)
S24 Safety for Multi-Employee Work Areas         full   3815    3815            3815A   3815B   4196    4196    4196A
      EH&S Metrics Task Force (NA)
Safety Performance Metrics                       new            3129C                           3129D
  Equipment Installation Safety TF (NA)
Equip Prep, Install, Start-up, Decom DeInstall   new    3041I   3041J   3041K                   3041L
       AMHS Safety Task Force (NA)
Equipment Robotics and Automation Safety         new    3560                                            3560A
     FPD System Safety Task Force (J)
FPD Safety Guideline                             new            3814            3814    3814A   3814B   3814C   3814D
  E-Diagnostics EHS Support TF (NA)
EH&S Information for e-Diagnostics               new            3794                                            3794
 Sgl Integ Failsafe Equip Control Sys (E)
                AGV TF (J)
        Lifting Equipment TF (NA)                               TFOF
             Quality of Reports                                                         TFOF
                                                                                                4225
         ATEX Working Group (E)
Aux Eq in Potentially Explosive Atmosphere       new
       Abatement Systems TF (NA)
F5 Guide for Gaseous Effluent Handling           full                                           4186

                       Key
                TFOF, sunset
                   SNARF
          Preview Doc, Auxilliary Doc
                  Blue Ballot
           Validation
new standard, reapprove, withdraw
       standards revisions
 2006            2006          2006          2006
Cycle 1&2      Cycle 3&4    Cycle 5&6        Cycle 7
Winter Mtg   SEMICON West NA, Europe,       SEMICON
 US/Jpn        Japan June Japan Fall mtgs     Japan
SEMICON           Mtgs
 Europa




3788E




3188E




3463E

3836A
4226A




3560B
                                                                     2004            2004          2004          2004       2005           2005          2005
                                                                    Cycle 1&2      Cycle 3&4    Cycle 5&6        Cycle 7   Cycle 1&2      Cycle 3&4   Cycle 5&6
                                                                    Winter Mtg   SEMICON West NA, Europe,       SEMICON    Winter Mtg   SEMICON West NA, Japan and
          SEMI Document/Standard                           Status    US/Jpn        Japan June Japan Fall mtgs     Japan     US/Jpn        Japan June  Europe Fall
                                                                    SEMICON           Mtgs                                 SEMICON           Mtgs         mtgs
                                                                     Europa                                                 Europa


       Traceability Related Standards
T1 Back Surface Bar Code for Silicon Wafers                 full
T2 Two-Dimensional Matrix Code Symbol Wafer Mark            full                    3991
T3 Wafer Box Labels                                         full
T5 Alpha mark round gallium arsenide wafers                 full                    3992                                   3539A
T6 Report Test Results Electronic Data Interchange (EDI)    full     3996           3993
T8 Mark Glass FPD Substrates 2-D Matrix Code Symbol         full                    3994
(#TBD) Data Matrix symbology for automated ID of EUV        full                    4027                                                   4027         4027A
masks
M13 Alphanumeric Marking of Silicon Wafers                  full
                      Revision to T7 TF
T7 Back Surface Matrix Mark                                 full
                      Revision to T9 TF
T9 MarkMetal Lead-Frame Strips 2D Data Matrix Code          full                    3995
T11 2-D Matrix Mark Hard Reticles                           full
T14 Specification for Micro ID on 300 mm Silicon Wafers     full                   3623A
                         Die Mark TF
Specification for Die Mark                                  new
                Backside Die Wafer Mark TF
Backside Die Wafer Mark Identification                      new
                     Device Tracking TF
T13 Device Tracking: concepts behaviors and services        full     3754
T13.1 SECS-II Support for Device Tracking (DT)              full     3927           3927
T13.2 XML for DT: Concepts, Behavior and Services           full     3928           3928
Specification for substrate traceability (J)                new                                                             4158
Product marking content for die tracing                     new                                                                            4197
            Jig and Implement Trace Task Force
T12 Tracing Jigs and Implements                             full                                   4017
T12.1 SECS for tracking jigs and implements                 full     3871
T12.2 XML for tracking jigs and implements                  full     3872                                                   4156           4156
Jig and Component Traceability (J)                          new                  4157
                       Jig ID Task Force
T15 Jig Identification Concept (J)                          full   4018   4018   4018A
                        Micro ID TF (J)
T14 Specification for Micro ID on 300 mm Silicon Wafers     full
T14.1 Short vertical dimension micro ID on 300 mm si wfrs   full          4064   4064

                           Key
                      TFOF, sunset
                        SNARF
             Preview Doc, Auxilliary document
                       Blue Ballot
                       Validation
            new standard, reapprove, withdraw
                   standards revisions
 2005       2006            2006          2006          2006
 Cycle 7   Cycle 1&2      Cycle 3&4    Cycle 5&6        Cycle 7
SEMICON    Winter Mtg   SEMICON West NA, Europe,       SEMICON
  Japan     US/Jpn        Japan June Japan Fall mtgs     Japan
           SEMICON           Mtgs
            Europa




 4158

				
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