FOR IMMEDIATE RELEASE June 1, 2006
Laboratory Open for Cleaning Application Demonstrations using Novel EHD Technology
Duarte, CA……. EHD Technology Group announced today the opening of its electrohydrodynamic (EHD) laboratory in Duarte, approximately 25 miles northeast of Los Angeles. The demonstration laboratory has been designed to demonstrate EHD’s unique benefits to the challenges of cleaning nanoscale contaminants from surfaces such as silicon wafers during microchip manufacture.
EHD promises a number of benefits over traditional wafer cleaning technologies. The process generates uniquely-small nanodroplet that can enter fine patterns, and is essentially a dry technology, eliminating surface wetting and attendant watermark problems. EHD uses extremely low amounts of fluids, as little as 2 microliters per minute per nozzle, so operating costs are reduced, and processes become more environmentally green. Because EHD can operate in vacuum environments, it is ideal for use between vacuum processes, as it can reduce contaminants from repeated pump/vent cycles.
The new EHD demonstration laboratory can process wafer segments, or coupons, for demonstration of its capabilities on a wide range of thin films and substrates. The facility can handle whole wafer up to 200 mm in diameter, but cleaning is limited to spots and stripes, with a cleaning beam of approximately 1” in diameter.
EHD Technology Group creates a written report at the conclusion of testing so that prospective EHD users can see the results of various EHD beam settings in terms of surface cleaning effects.
For more information, contact Ken Finster, President & CTO, at (626) 357-7350, or through kfinster@ehdtg.com.
About EHD Technology Group EHD Technology Group, Inc. develops electrohydrodynamic (EHD) emission arrays for integration into semiconductor OEM equipment for post-process strip, cleaning, finishing, drying, and coating applications. The company participates in joint development projects with OEMs and end-users to create alpha tools for process development. For more information visit www.ehdtg.com or email info@ehdtg.com.
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