FOR IMMEDIATE RELEASE June 15, 2007 Contacts: Ken Finster EHD Technology Group, Inc. (626) 357-7350 kfinster@ehdtg.com
Kath Antista BlueShift Technology, Inc. (978) 691-4200 marketing@blueshifttech.com
Novel In-Vacuum Wafer Cleaning Concept to be Shown at Semicon West - Booth #530 South Hall
Duarte, CA……. BlueShift™ Technologies and EHD Technology Group will demonstrate the concept of surface preparation integrated into vacuum wafer-handling systems at the upcoming Semicon West show in San Francisco, South Hall booth 530. With trends toward highly-integrated vacuum processing and increased number of process steps, the combination of BlueShift’s QuickLink™ vacuum wafer-handling system and EHD’s in-vacuum cleaning technology promises higher throughput and fewer pump/vent cycles.
Electrostatically generated, uniquely-small EHD nanodroplets of various chemicals and materials impact wafer surfaces with variable, controllable impact characteristics to remove particles and residuals. Current development of processing, cleaning, coating, and drying for semiconductor applications includes:
1. Post-process resist strip and sacrificial layer lift-off following implant, deposition, and etch. 2. Post-plating and polishing removal of hydrophobic/hydrophilic residual.
3. Aerosol finishing and drying for removal of trace particles, residuals, and moisture. 4. Post-test cleaning and drying of wafers and test fixtures.
EHD Technology Group is emerging from core technology development of electrostatic aerosolization and entering joint development of alpha tools for surface preparation process development. Commercial versions of the concept to be shown at Semicon West will be developed to suit specific OEM or end-user requirements based upon process development results from alpha tool projects.
About EHD Technology Group EHD Technology Group, Inc. develops electrohydrodynamic (EHD) emission arrays for integration into semiconductor OEM equipment for post-process strip, cleaning, finishing, drying, and coating applications. The company participates in joint development projects with OEMs and end-users to create alpha tools for process development. For more information visit www.ehdtg.com or email info@ehdtg.com. About BlueShift BlueShift Technologies, Inc. develops and markets vacuum automation products for semiconductor manufacturing. BlueShift's linkable QuickLink™ wafer handling platform empowers semiconductor OEMs to cost-effectively adapt existing wafer processing tools to new process requirements while reducing equipment cost. For more information visit www.blueshifttech.com or email marketing@blueshifttech.com.
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