MA-COM HI2 Process

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					                               HI2 0.5µm MESFET Process                                                                                             V4

                                                                                               GaAs MESFET Foundry Service
 GaAs MESFET Foundry Service

                               Introduction
                               M/A-COM’s HI2 process utilizes ion implanted MESFET technology to achieve a high performing, low cost process
                               for low noise and medium power applications through 20 GHz. Wafer diameter is 100 mm. The focus is on products
                               for moderate to high volume applications. M/A-COM offers a full compliment of foundry services to meet the re-
                               quirements for custom designing a MMIC-based die or packaged product.

                               Performance Summary
                                   Param.                        Test Conditions                          Freq.                  Typ. Val.
                                   MAG                      VDS = 3V, IDS = 50% IDSS               12 GHz / 18 GHz           13 dB / 11.5 dB
                                    Fmin                    VDS = 3V, IDS = 25% IDSS               12 GHz / 18 GHz            1.3 dB / 1.9 dB
                                     Ga                      Associated Gain at Fmin               12 GHz / 18 GHz            7.5 dB / 6.0 dB
                                     Ft                     VDS = 3V, IDS = 50% IDSS                      ------                    30 GHz
                                   MTTF               VDS = 5V, IDS = 25% IDSS, Tch = 125 oC              ------               2 X 106 hours


                               Electrical Specifications: TA = + 25 oC
                                          Parameter                     Test Conditions             Units          Min.       Typ.           Max.
                                    200 µm PCM FET
                                            IDSS                      VDS = 3V, VGS = 0V          mA/mm            140         185           235
                                           DC GM                   VDS = 3V, IDS = 50% IDSS       mS/mm            150         190           220
                                             Vp                    VDS = 3V, IDS = 2.5% IDSS          V            -0.9       -1.1           -1.4
                                            BVgd                       IG = 0.1 mA/mm                 V             -6         -10            -
                                    Sheet Resistances
                                    NDRS (N- GaAs)                        l = 20 mA               Ohm/sq           470         540           590
                                      NCRS (NiCr)                         l = 10 mA               Ohm/sq           40          50             60
                                     MIM Capacitors
                                   Capacitance/unit area                   f = 1MHz               pF/mm2           360         400           440
                                    Capacitor Leakage                      V = 10 V                  µA             -           -            0.5

                               Applications
                               •   Low noise amplifiers, gain stages up to 20 GHz
                               •   Floating FET mixers
                               •   Transceivers
                               •   Driver amplifiers

M/A-COM Inc. and its affiliates reserve the right to make changes to the product(s)            North America: Tel. (800) 366-2266
or information contained herein without notice. M/A-COM makes no warranty,                     Asia/Pacific: Tel.+81-44-844-8296, Fax +81-44-844-8298
representation or guarantee regarding the suitability of its products for any
                                                                                               Europe: Tel. +44 (1344) 869 595, Fax+44 (1344) 300 020
particular purpose, nor does M/A-COM assume any liability whatsoever arising out
of the use or application of any product(s) or information.
Visit www.macom.com for additional data sheets and product information.
                               HI2 0.5µm MESFET Process                                                                                       V4

                                                                                            GaAs MESFET Foundry Service
 GaAs MESFET Foundry Service



                                                                  HI2 Process - MTTF vs. Temperature

                                                                    227 C      182 C     144 C      112 C       84 C        60 C
                                                            10
                                                       10

                                                             9
                                                        10

                                                             8
                                                        10
                                        MTTF (hours)




                                                             7
                                                        10

                                                             6
                                                        10

                                                             5
                                                        10

                                                             4
                                                        10

                                                       1000

                                                        100
                                                         0.0018     0.002     0.0022     0.0024     0.0026     0.0028       0.003
                                                                                       1/Temp (K)



                                                                        MTTF vs. Temperature
                                                                    Tch = 200 oC, 250 oC at Life Test
                                                                      Activation Energy = 1.1 eV




M/A-COM Inc. and its affiliates reserve the right to make changes to the product(s)          North America: Tel. (800) 366-2266
or information contained herein without notice. M/A-COM makes no warranty,                   Asia/Pacific: Tel.+81-44-844-8296, Fax +81-44-844-8298
representation or guarantee regarding the suitability of its products for any
                                                                                             Europe: Tel. +44 (1344) 869 595, Fax+44 (1344) 300 020
particular purpose, nor does M/A-COM assume any liability whatsoever arising out
of the use or application of any product(s) or information.
Visit www.macom.com for additional data sheets and product information.
                               HI2 0.5µm MESFET Process                                                                                  V4

                                                                                       GaAs MESFET Foundry Service
 GaAs MESFET Foundry Service


                                             Benefits of Using M/A-COM as a Foundry Service:

                                •    Over 17 years of GaAs MMIC production experience
                                •    A complete offering of stable and mature GaAs production processes for commercial handset,
                                     infrastructure, and military applications
                                •    Superior device performance to meet the most stringent specifications
                                •    World-class testing and modeling capabilities
                                •    Shortest production cycle time in the industry
                                •    Proven manufacturer of microwave components and systems for more than 50 years




                                                          M/A-COM Foundry Services Include:
                                •    Support in:
                                         • Layout
                                         • DRC and LVS checking
                                         • Technical consultation
                                •    Provide design kit including transistor models and passive models to assist design




                                       Upon Request, Services Available to Foundry Customer:
                                •    Extract small signal, noise, and large signal models
                                •    Provide transistor characterization data in:
                                         • Small signal measurements
                                         • Load pull measurements
                                •    Perform circuit test at:
                                         • Wafer level
                                         • Package level
                                •    Production qualification testing




M/A-COM Inc. and its affiliates reserve the right to make changes to the product(s)     North America: Tel. (800) 366-2266
or information contained herein without notice. M/A-COM makes no warranty,              Asia/Pacific: Tel.+81-44-844-8296, Fax +81-44-844-8298
representation or guarantee regarding the suitability of its products for any
                                                                                        Europe: Tel. +44 (1344) 869 595, Fax+44 (1344) 300 020
particular purpose, nor does M/A-COM assume any liability whatsoever arising out
of the use or application of any product(s) or information.
Visit www.macom.com for additional data sheets and product information.