Final_Presentation

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					Wafer Processing Track Upgrade
       Final Presentation
                 Contents
   Personnel
   Background
   Summary
    • Problem
    • Solution
   Specification
   Project Phases
   Budget
                 Contents
   Personnel
   Background
   Summary
    • Problem
    • Solution
   Specification
   Project Phases
   Budget
             Personnel
Undergraduate Members
 (1) Paul Rago (EE)
 (2) Aaron Feldstein (EE)
 (3) David Sidoti (EE)

Advisor
 Dr. Mohammad Tehranipoor

Graduate Phonon Representative
 Thomas Reinwald
                 Contents
   Personnel
   Background
   Summary
    • Problem
    • Solution
   Specification
   Project Phases
   Budget
                  Background


                                                                 Old
                                                              Electronics




           Solitec Wafer Processing Unit Prior to ‘06 – ‘07
                    Senior Design Modifications

Automated wafer-processing system
Used as a preparatory step in fabrication of Phonon devices
Used to clean, apply photoresist, and bake sets of wafers
                         Background
              Old Electronics
- No longer supported
- Limited programmability


           Updated Electronics
- Programmable Logic Controller (PLC)
        Direct Logic D0-09DD1
- Motion Controller
        Galil DMC-40x0
                 Contents
   Personnel
   Background
   Summary
    • Problem
    • Solution
   Specification
   Project Phases
   Budget
         Project Summary
    Problem with current system
• Processing sequence and system parameters
  are essentially static
• Modification of either sequence or any
  parameter takes considerable effort
• Limited customizability means that only one
  type of device can be processed
• Spin motor controlled by old logic board
• Existing Galil motion controller only controls 4
  motors
        Project Summary
         Solution (Overview)

Interface wafer track system
with a computer (onboard)

Write new software

Mount a touch screen
monitor
              Project Summary
              Solution (Procedure)
Steps:
1. Remove PLC and migrate all motors and actuators to
   new 6-axis Galil motion controller
2. Add amplifier module for Galil controller
3. Write software with following features:
      - Graphical-user-interface (GUI)
      - Complete control over the system
      - Ability to modify recipe and physical parameters
      - Log relevant data to a Access server (via network)
                 Contents
   Personnel
   Background
   Summary
    • Problem
    • Solution
   Specification
   Project Phases
   Budget
               Specification
   Galil Motion Controller
    • DMC-40x0
    • 8 Axes of Control
    • 5 VDC Outputs
    • 20-80VDC Input
              Specification
   Amplifier Board
    • 4 outputs
    • 20 Watt per channel
    • Input Voltage: 120V @ 60Hz AC
               Specification
Computer
 • Shuttle Form Factor
      Fits in Chassis
 • Integrated Graphics
 • 512 MB of DDR-SDRAM
 • Under-Clocked Pentium 4D
      No Fan Needed
      Low Power, Low Heat
                 Contents
   Personnel
   Background
   Summary
    • Problem
    • Solution
   Specification
   Project Phases
   Budget
                                   Phases
                  October   November   December   January   February   March   April   May

Familiarize
with System,
Galil language
and Interfacing
Order and
Install Parts



Migrate to New
Controller



Write Software




Test and
Tweak
                            Budget

       Item               Price Per Unit Quantity   Price
6-Axis Galil Controller       $3300         1       $3300
Galil Amplifier Module         $736         1       $736
Touchscreen Monitor            $300         1       $300
  Small Format PC              $400         1       $400
                           Total                    $4736
Questions
                                Reference
   Touchscreen picture from:
    http://www.audiointl.com/Product_Information/Touch_Screens/10.4_Touch_Screens.htm

				
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