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Minimalist E-beam Lithography “Cheap” high-resolution lithography

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					  Minimalist E-beam Lithography:
“Cheap” high-resolution lithography
              is here!
              Ivan Papusha
                Calvin Chu
                Pease Lab
           Stanford REU 2009
                 Lithography
• Optical systems:
  – High throughput
  – Resolution limited by wavelength of light
• E-beam systems:
  – Low throughput
  – Much higher resolution
  – $$$$
              Our Solution
• Buy cheap 1970’s-style
  Hitachi S-2500 SEM from
  Ebay.
• Modify SEM to blank the
  scanning electron beam
  at appropriate times.
• Use large number of
  converted SEMs to
  increase throughput.
                  Results
• Sub-micron
  features
  exposed on
  PMMA-based
  wafers
• Ask us how we
                            75 um
  did it!

				
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posted:8/12/2011
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