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Emat Ge RCA clean procedure

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					                                       Emat Ge RCA clean procedure
                         Jifeng Liu/Samerkae Jongthammanurak/Kevin McComber
                                                 5/28/08

1.   NH4OH:H2O 1:4 (tank 1) for 5 min.

2.   rinse (rinser 1)

3.   H2O2:H20 1:6 15sec

4.   rinse (rinser 1)

5.   HF 5 sec

6.   rinser (rinser 1)

7.   HCl:H2O 1:4 30sec (tank 2)

8.   rinse (rinser 2)

9.   Spin dry

				
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