Magic-Feat Software Integration ISE TCAD by sdfgsg234

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									                          ISE TCAD
               Magic-Feat
           Software Integration




ISE Integrated Systems Engineering
                     Overview
x Introduction
   s   Objectives
   s   State-of-the-art before project
   s   Progress
x Software integration
   s   Integration overview
   s   User interfaces
x Solid modeling
   s   Process emulation and solid modeling
       based on a commercial CAD toolkit (ACIS)



ISE Integrated Systems Engineering       Integration Software   Slide # 2
                      Objectives
x Development of a fully functional 3D process
  simulator
   s   Implantation
   s   Topography: etching/deposition
   s   Diffusion/oxidation
   s   Key factor: meshing, remeshing




ISE Integrated Systems Engineering      Integration Software   Slide # 3
State of the Art before Project
x PROMPT
   s   3D process simulation modules
   s   Sequence of stand-alone modules
   s   Implantation, diffusion:
       present, analytical implantation models not yet up to standards
   s   Topography/litho: cell based
   s   Main problems
        x   Re-discretization cell-based/boundary-mesh
        x   Meshing in general
        x   Moving meshes
        x   Stress-dependent oxidation
   s   DIOS-3D
x Taurus (commercial), Floops (non-commercial)

ISE Integrated Systems Engineering             Integration Software   Slide # 4
           Commercialization
x Commercialization perspective




x Process simulation, meshing critical part of TCAD
  simulation chain
ISE Integrated Systems Engineering    Integration Software   Slide # 5
          Integration Strategy
x PROMPT, PROMPT-2
   s   Separate modules
   s   Different discretization strategies in different modules
   s   DF-ISE as interchange format:
       boundary, mesh, tensor/cell grid
x MAGIC-FEAT
   s   DF-ISE:
       boundary, mesh
   s   Medium-term: API/library based integration




ISE Integrated Systems Engineering          Integration Software   Slide # 6
                Integration: Overview
x External modules to be          Main Process Simulator            External Modules

  integrated more closely
  with main simulator
x Called from main simulator
x Main simulator controls
  simulation flow
x Main simulator only passes
  selected data to external
  tool, receives selected data.
  Other data is kept in main
  simulator.
x Transfer by file (DF-ISE)
  possible, initial choice
x Longer term: Use of APIs /
  shared libraries (also
  question of performance)

                                         Device


      ISE Integrated Systems Engineering                   Integration Software        Slide # 7
Integration of Topography Modules
x   Process step to be simulated by
    external simulator:
    Lithography, Deposition,
    Etching                                    Mesh/Data      Boundary                         Transfer
x   Simulator shares geometry                                                                  boundary
    representation, e.g. DF-ISE
    boundary
x   Intermediate steps for geometry                                              External topography
                                                                                 module
    manipulation required
                                                                                 Boundary -> Boundary
     s   2D to 3D; 3D to 2D; 3D to 3D
     s   Rotation, shifting (3D space)            Main process simulator
                                                  execution suspened
     s   Selection of interfaces to be
         brought to/from external module
     s   Smoothing, optimization,
         decimation
x   Complexity of layer operations
    depends on type of simulation
     s   Lithography, deposition: Addition
         of new layers, eg. resist material,               Remesh                    Boundary:
         poly-Si                                                                     •Select relevant boundary
     s   Etching: Manipulation or removal                                            (A,B), (A,*)
         of existing layers                                                          •Smooth/Optimize/Decimate

                                                           Device


         ISE Integrated Systems Engineering                                Integration Software         Slide # 8
Integration of Implantation Modules
x Process step to be
  simulated by external
  simulator:                    Mesh/Data      Boundary                         Transfer
  Implantation                                                                  boundary

x Simulator shares geometry
  representation, e.g. DF-ISE                                     Implant on boundary
  boundary                                                        representation

x No intermediate steps for
                                   Main process simulator
  geometry manipulation            execution suspened
  required
x Feedback of data sets in
  “abstract” form without
  data structures, i.e., as a
  function of space.
                                            Remesh                    Abstract data sets C(x,y,z)
                                                                      As-impl/damage/amorph




                                            Device


       ISE Integrated Systems Engineering                   Integration Software         Slide # 9
    Integration of Meshing Modules
x Process step to be
  simulated by external                                                                  Mesh or boundary,
                                                                                         and data sets (on
  simulator:                        Mesh/Data       Boundary                             old mesh)
  Mesh generation
x Reasons for meshing step
    s   Adaptation of mesh to new                                          Re-delaunization of
        data                                                               mesh after
                                                                           displacements
    s   Changed shape or topology                                          Or
                                       Main process simulator
x No intermediate steps for            execution suspened                  Generation of new mesh
                                                                           according to meshing
  geometry manipulation                                                    criteria
  required
x Reinterpolation of data
  from old mesh to new mesh

                                       Continuation of simulation               New mesh passed back.
                                             on new meshu
                                                                                Re-interpolation of data onto
                                                                                new mesh.


                                                Device


        ISE Integrated Systems Engineering                          Integration Software         Slide # 10
                     Ion Implantation
x Analytical implantation:
    s   Imp3d (FHG Erlangen)
    s   dual Pearson distribution
    s   Hobler and +1 damage
        models
    s   numerical range scaling
x Monte Carlo implantation:
    s   MCimpl (TU Vienna)
    s   binary collision model
    s   crystalline and amorphous
        materials
    s   damage calculation (Kinchin
        Pease)



    ISE Integrated Systems Engineering   Integration Software   Slide # 11
        Integration: Ligament
x Ligament: First version developed in
  PROMPT-2
x Ligament is a high-level process simulation
  environment/front-end
x Simulator independent language translated
  into simulator specific input file
x Several simulators supported, customizable
x Graphical user interfaces (complete redesign
  since PROMPT-2)



ISE Integrated Systems Engineering   Integration Software   Slide # 12
                                    Ligament Overview
                        Access to Fab Info



                        Process Flows        Recipes     TCAD Info                   Layouts,




                                                                                                          Graphical Layout Editor
                                                                                     Masks
Graphical Flow Editor




                                                         Models
                                                         Calibration parameters




                        Generic Process Flow




                        Simulator Input




                        ISE Integrated Systems Engineering                   Integration Software   Slide # 13
                      Ligament: GUI


                                                                  Layout Editor




Flow Editor




      ISE Integrated Systems Engineering   Integration Software       Slide # 14
  Ligament: Direct Simulation
                                              Direct translation
                                              within flow editor.
                                              Run simulation in
                                              interactive
                                              debugging mode


                                              •Drive process
                                              simulation
                                              •Drive process
                                              emulation




ISE Integrated Systems Engineering   Integration Software    Slide # 15
        Progress & Evaluation
x Evaluation of modules in stand-alone mode
   s   Benchmarks defined
   s   Limited number of examples
   s   At this point limited usability
x Evaluation of modules, integrated into the
  process simulator
   s   Integration of implantation module OK
   s   Integration of topography in process
   s   Integration oxidation/meshing in progress




ISE Integrated Systems Engineering        Integration Software   Slide # 16
   Solid Modeling: Motivation
x Solid modeling software crucial for 3D
  simulation
x Creation of 3D structures with conventional
  solid modeling: CAD-type structures,
  parameterized structures
x Much faster than simulation
x Process emulation: creation of realistic
  structures
x Creation of structures for 3D device
  simulation


ISE Integrated Systems Engineering   Integration Software   Slide # 17
                Solid Modeling
x 3D solid modeling in TCAD, products
   s   PROMPT and PROMPT-2:
        x   GIP/DIP: geometry interpolation, developed into
            direction of CAD
        x   PROSIT: Manhattan structures
x CAD as an alternative?
   s   Dominated by commercial libraries: ACIS, Parasolid, …
x PROCEM is a 3D process emulator
  based on ACIS
x Replacement for GIP, PROSIT


ISE Integrated Systems Engineering         Integration Software   Slide # 18
          Procem – Basic principles

x Modeling principles
   s   Device regions are CSG objects
   s   Well defined scripting functions are provided, to emulate
       process simulation steps, and perform additional
       operations (I/O, DF-ISE boundary generation, meshing,
       visualization, basic geometry transformations etc.)
   s   Process emulation steps are defined using Boolean
       operations
   s   Process emulation flow can be defined using Ligament,
       and are converted to native Procem flow language
   s   Also “device CAD” possible


ISE Integrated Systems Engineering        Integration Software   Slide # 19
       Procem – Process emulation steps
x Implemented process emulation steps
      x   Substrate generation
      x   Patterning with negative/positive masks from layouts
      x   Deposition (isotropic/anisotropic)
          with local and global delooping
      x   Etching (isotropic/anisotropic)
      x   Polishing
      x   Fill
x Generation of consistent DF-ISE boundary
  description for meshing
x Refinement control for tessellation of the model
  geometry upon saving in DF-ISE

   ISE Integrated Systems Engineering        Integration Software   Slide # 20
                  Procem – vs Prosit (advantages)
                                                    Procem
                                                    Regions are CSG objects, with curved boundaries
                                                    Conformal, tessellated output is generated in a
                                                    DF-ISE format for meshing. Refinement control,
                                                    with specified boundary tolerance, is available.




Prosit
Model is represented using a uniform tensor grid.
No smoothing, no boundary simplification and
decimation is available. Resolution problems.




          ISE Integrated Systems Engineering                       Integration Software   Slide # 21
                  Procem – General deposition module
         x Isotropic deposition, with delooping
Original device                              Device with deposited layer




            ISE Integrated Systems Engineering             Integration Software   Slide # 22
Procem – Inverter example
                                          Selected process emulation
                                          steps




     ISE Integrated Systems Engineering       Integration Software   Slide # 23
                   Conclusion
x Goal: Development of a
  fully functional 3D process simulator
   s   Mesh for time dependent geometries
   s   3D oxidation
x 3D “base” simulator as integration platform
   s   Possiblity to use external modules for selected steps
   s   Closer, more efficient API-based integration
       for some critical modules
x Solid modeling remains critical part for daily
  work
   s   PROCEM: New tool for process emulation,
       3D structure editing,
   s   Based on CSG toolkit (ACIS)
ISE Integrated Systems Engineering        Integration Software   Slide # 24

								
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