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Rotary TableVane Style

VIEWS: 21 PAGES: 30

  • pg 1
									       Rotary Table/Vane Style
              Series MSU
                        Size: 1, 3, 7, 20


                                                                                             CRB2
                                                                                             CRBU2
                                                                                             CRB1
                                                                                             MSU
                                        Peripheral table deflection                          CRJ

                                                            mm or less                       CRA1


Table top deflection
                               High Precision
                       mm or less
                                                                                             CRQ2
                                                                                             MSQ
                                                                                             MSZ
                                                                                             CRQ2X
                                                                                             MSQX

                                                                                             MRQ




        Series MSUB                                                      Series MSUA




                                                                                             D-„




                                                                                       147
                                                                                                                        Rotary Table


                                                                                                               Vane Style/ Size: 1, 3, 7, 20
                                                                Rotary actuator with lightweight,                                       compact table for robotic hands                                                                                                           CRB2


                                                              Series MSUA
                                                                                                                                                                                                                                                                                  CRBU2
                                                                                                                                              Free mount type
               High precision type                            Series                                                                          Can be mounted from three directions: axial, lateral, vertical
                                                                                                                                                                                                                                                                                  CRB1
               Size: 1, 3, 7, 20
                                                        Improved table deflection accuracy:                                                                                  Axial mounting                                 Lateral mounting       Vertical mounting              MSU

                                                        0.03 mm or less                                                                          A
                                                                                                                                                 A                                                                                                                                CRJ
                                                                                                                                              SU
                                                                                                                                                                   Bottom mount                         Top mount

High precision/High rigidity                                                                                                                MS U
                                                                                                                                            M                                                            Tapped holes (4)

                                                                                                                                                                                                                                                                                  CRA1
                     Special bearing
                     (Duplex single row ball bearing)                    Easy alignment when mounting the load                                                                                                                                                                    CRQ2
                                                                           Table inside/outside diameter tolerance H9/h9                                       Tapped holes (4)                                                                                                   MSQ
                                                                           Female threads for load mounting provided in eight places.
                                                                           (Increases freedom in mounting the load)                              B
                                                                                                                                                 B                                                                                                                                MSZ
                                                                           Mounting reference pin holes                                       SU
                                                                                                                                            MS U
                                                                                                                                            M
                                                                                                                                                                 Through-holes (2)                      Tapped holes (2)
                                                                                                                                                                                                                                                                                  CRQ2X
                                                                                                                                                                                                                                                                                  MSQX

                                                                                                                                                                                                                                                                                  MRQ
                                                                         Easy alignment when mounting the body                                                     Tapped holes (2)                Through-holes (2)



Deflection accuracy: Displacement for 180° rotation
                                                                           Mounting reference pin holes
                                                                           (Alignment with center of body)
                Table top
                deflection                                                 Provided on three sides, excluding port side
                                  Peripheral table
                                  deflection
                                                                                                                                                                                                                                                                  Bearing
                                                                           Reference diameter h9
                                                                           (Alignment with center of table rotation)



           Model                    MSUA
                                               (mm)                       Angle adjustable
                                                                          90° ±10°, 180° ±10°
                                                                                                                                                   Basic type      Series MSUB
                                                                                                                                                   Size: 1, 3, 7, 20
                                                                                                                                                                          MSU
 Table top deflection          0.03 (0.1 to 0.2)                          Double vane (MSUB only) 90° ±5°
 Peripheral table deflection   0.03 (0.1 to 0.2)                                                                                                       Single vane and double vane standardized
                                                                           Scale
Values inside ( ) are for Series MSUB
                                                                           indication                                                                  Double vane has the same dimensions as single vane
                                                                                                                                                       (Except size 1)

      Disengageable                                                                                                                                                                                                                              Single vane

      Maintenance work is simplified.
      The drive unit can be replaced with the load mounted.                                                                                      Series Variations
                                                                                                         Angle adjustment
                                                                                                         screws                                  Series             Size          Rotating angle         Vane type                       Applicable auto switch
                                                                                                                                                                      1                                                           D-9,   D-T99
                                                                                                                                                                                        90°
                                   Table unit                                                                                                 High precision          3                                                           D-9„A, D-S99, S9P
                                                                                                                                                                                                       Single vane
                                                                                                                                              type
                                                                                                                                                                      7
                                                                          Auto switch capable                                                   MSUA                                  180°
                                                                                                                                                                                                                                  D-R73, D-T79
                                                                                                                                                                                                                                  D-R80, D-S79, S7P
                                                                                                                                                                     20                                                                                                           D-„
                                   Drive unit                             Since switches can be moved anywhere
                                                                          on the circumference, they can be                                                           1                                Single vane                D-9,   D-T99
                                                                                                                                                                                       90°
                                                                          mounted at positions which accommodate                                Basic type            3                                                           D-9„A, D-S99, S9P
                                                                          the specifications.                                                   MSUB                  7                                Double vane ∗              D-R73, D-T79
                                                                                                                                                                                      180°
                                                                                                                                                                     20                                                           D-R80, D-S79, S7P
                                                                                                                                             ∗ Double vane is available with 90° rotation setting only.

148                                                                                                                                                                                                                                                                         149
                                      Rotary Table: High Precision Type
                                      Vane Style

                                      Series MSUA
                                      Size: 1, 3, 7, 20


                                                                                                      How to Order
                                                                                       Connection port location
                                               Bearing type                                      Nil      Side ported
                                     A    High precision type                                     E       Axial ported
                                                                                             Available with side ported
                                    Free mount type                                          only, when equipped with
                                                                                             auto switch unit.


 Without auto switch                                              MSUA 20                                      90 S

 With auto switch M D SUA 20                                                                                   90 S                    T79 L
                                                                                                                                                                 Number of auto switches
                                                                                                                                                                     S           1 pc. ∗
                           With auto switch
                                 (Built-in magnet)                                                                                                                   Nil         2 pcs. ∗∗
                                                                                                                                                                  ∗ S (1 auto switch) is shipped with a right-
                                         Nominal size (Torque)                                                                                                      hand auto switch.
                                                                                                                                                                 ∗∗ Nil (2 auto switches) is shipped with
                                                                        1        MSUA 1                                                                             a right-hand and a left-hand switch.
                                                                        3        MSUA 3
                                                                                                                                                        Electrical entry/Lead wire length
                                                                        7        MSUA 7
                                                                                                                                                         Nil      Grommet/Lead wire: 0.5 m
                                                                       20        MSUA20
                                                                                                                                                          L       Grommet/Lead wire: 3 m
                                                                                                                                                         C        Connector/Lead wire: 0.5 m
                                                                                    Rotating angle                                                       CL       Connector/Lead wire: 3 m
                                                                    Applicable Symbol Rotating angle                                                     CN       Connector/Without lead wire
                                                                      Single      90      90°                                                          ∗ Available only with R73, R80 and T79 type
                                                                       vane      180      180°                                                           connectors.
                                                                    Rotation adjustment range                                                         ∗∗ Lead wire with connector part nos.
                                                                                                                                                         D-LC05: Lead wire 0.5 m
                                                                    Single vane: Both ends ±5° each                                                      D-LC30: Lead wire 3 m
                                                                                                                                                         D-LC50: Lead wire 5 m
                                                                                                         Vane type
                                                                                                                                              Auto switch
                                                                                                S       Single vane
                                                                                                                                              Nil     Without auto switch (built-in magnet)
                                                                                                                                            ∗Refer to the table below for the applicable auto switch model.

Applicable Auto Switch/Refer to pages 761 to 809 for further information on auto swiches.
                                                                                                                                                             Lead wire length (m) ∗
                                               Indicator light




                                                                                       Load voltage
Applicable            Special     Electrical                      Wiring                                               Auto switch model Lead wire                                  Pre-wired
             Type                                                                                                                                              0.5   3    5 None              Applicable load
 model                function      entry                        (Output)              DC                 AC                                   type                                 connector
                                                                                                                     Perpendicular In-line                    (Nil) (L) (Z) (N)
             Solid                                               3-wire (NPN)                                           S99V       S99
                                                                                       5 V, 12 V                                            Heavy-duty                                           IC circuit
                                                Yes




             state                                               3-wire (PNP)                                           S9PV       S9P
             switch                                                                                                                            cord
MDSUA1                                                                                 12 V                             T99V       T99
                                                                                                                                                                                                            Relay,
MDSUA3                           Grommet                                        24 V 5 V, 12 V 5 V, 12 V, 24 V                     90      Parallel cord
                                                No




                                                                                         5 V, 12 V,     5 V, 12 V,                                                                               IC circuit PLC
             Reed                                                 2-wire                   100 V       24 V, 100 V                 90A     Heavy-duty cord
             switch                                                                                                                97      Parallel cord
                                                Yes




                                                                                                       100 V                       93A     Heavy-duty cord
                                                                 3-wire (NPN)                                                      S79
             Solid                                                                     5 V, 12 V                                                                                                 IC circuit
                                 Grommet                         3-wire (PNP)                                                      S7P
             state
                                                                                                                                   T79
                                                Yes




             switch                                                                      12 V
MDSUA7                           Connector                                                                                         T79C     Heavy-duty                                                        Relay,
MDSUA20                                                                         24 V
                                 Grommet                                                               100 V                       R73         cord                                                           PLC
                                                                  2-wire
             Reed                Connector                                                                                         R73C
             switch              Grommet                                               48 V, 100 V 100 V                           R80                                                           IC circuit
                                                No




                                 Connector                                                        24 V or less                     R80C
∗ Lead wire length symbols:   0.5 m ······ Nil (Example) R73C                                ∗ Auto switches marked with “ ”              Order example: MSUA20 single vane type
                                3 m ······ L (Example) R73CL                                   are made-to-order specifications.          (connection port side location selected)
                                5 m ······ Z (Example) R73CZ                                                                              1. Standard type (Without auto switches), Rotation 90°, side port
                              None ······ N (Example) R73CN                                                                                  location
∗ Auto switches are shipped together (but not assembled).                                                                                    MSUA20-90S
                                                                                                                                          2. With auto switch unit (Without auto switches), Rotation 180°,
                                                                                                                                             side port location
        Refer to pages 796 and 797 for detailed solid state auto
                                                                                                                                             MDSUA20-180S
        switches with pre-wired connectors.                                                                                               3. With auto switch unit + Auto switch R73, Rotation 180°, Side
                                                                                                                                             port location
                                                                                                                                             MDSUA20-180S-R73
150
                                                                              Rotary Table: High Precision Type
                                                                                                     Vane Style                                    Series               MSUA
Specifications

                     Model ∗2                                     MSUA1                         MSUA3                                   MSUA7                             MSUA20
 Vane type                                                                                                        Single vane
 Rotating angle ∗1                                         90° ± 10°     180° ± 10°      90° ± 10°        180° ± 10°             90° ± 10°     180° ± 10°       90° ± 10°           180° ± 10°
 Fluid                                                                                                           Air (Non-lube)
 Proof pressure (MPa)                                                                                    1.05                                                                 1.5
 Ambient and fluid temperature                                                                                          5 to 60°C
 Operating pressure range (MPa)                                  0.2 to 0.7                                        0.15 to 0.7                                           0.15 to 1.0                  CRB2
 Rotation time adjustment range (s/90°)                                                                     0.07 to 0.3 (0.5 MPa)
                        Allowable radial load                      20 N                          40 N                                    50 N                               60 N
                                                                                                                                                                                                      CRBU2
 Shaft load             Allowable thrust load                      15 N                          30 N                                    60 N                               80 N
                                                                                                                                                                                                      CRB1
                        Allowable moment                          0.3 N·m                       0.7 N·m                                 0.9 N·m                            2.9 N·m
 Bearing                                                                                                         Special bearing                                                                      MSU
 Port location                                                                                            Side ported or Top ported
                        Side ported                               M3 x 0.5                                                              M5 x 0.8                                                      CRJ
 Port size
                        Top ported                                                 M3 x 0.5                                                               M5 x 0.8
 Deflection accuracy                                                                                            0.03 mm or less                                                                       CRA1
∗1 Single vane 90° can be adjusted to 90° ± 10° (both ends of rotation ± 5° each)                           ∗ 2 Correspondence to equivalent conventional free-mount types
   Single vane 180° can be adjusted to 180° ± 10° (both ends of rotation ± 5° each)                                Rotary table                Free-mount rotary actuator
                                                                                                                                                                                                      CRQ2
Note) Refer to page 33 for allowable kinetic energy.                                                                MSUA 1                           CRBU2W10
                                                                                                                    MSUA 3                           CRBU2W15                                         MSQ
                                                                                                                    MSUA 7                           CRBU2W20
                                                                                                                    MSUA20                           CRBU2W30
JIS Symbol                                                                                                                                                                                            MSZ
                                                                                                                                                                                                      CRQ2X
                                                                                                                                                                                                      MSQX

                                                                                                                                                                                                      MRQ

Table Rotation Range                                                                           Mass
Angle adjustment is possible as shown in the drawings below using adjustment                                                                                                                    (g)
bolts (A) and (B).                                                                                                                     Basic mass
                                                                                                     Size       Rotating angle                                Auto switch unit + Auto switch 2 pcs.
                                                                                                                                       Single vane
                                                           Adjustment range of
             Adjustment range of
                                                           adjustment bolt (B)                                       90°                     162
             adjustment bolt (A)                                                                      1                                                                       25
                                                                 (S): 10°                                          180°                      161
                    (S): 10°
                                                                                                                     90°                     262
                                  °
                                90




                                                                                                      3                                                                       30
                                                                                                                   180°                      260
                                                                                                                     90°                     440
                                                                                                      7                                                                       50
                                                                                                                   180°                      436
                               22.5°                                                                 20
                                                                                                                     90°                     675
                                                                                                                                                                              60
                                                                                                                   180°                      671
         Positioning pin hole
                                                                                               Allowable Load
                Adjustment bolt (A)                        Adjustment bolt (B)
                                        For 90° rotation                                       Do not permit the load and moment applied to the table to exceed the allowable
                                                                                               values shown in the table below. (Operation above the allowable values can
                        Single vane (S): 80 to 100° adjustable                                 cause adverse effects on service life, such as play in the table and loss of
                                                                                               accuracy.)

             Adjustment range of                             Adjustment range of
              adjustment bolt (A)            180°            adjustment bolt (B)




                     10°                                               10°
                             22.5°                                                                                                                                                                    D-„
                                                                                                 Size       Allowable radial load (N) Allowable thrust load (N) Allowable moment (N·m)
         Positioning pin hole                                                                        1                   20                          15                            0.3
                                                                                                     3                   40                          30                            0.7
                Adjustment bolt (A)                        Adjustment bolt (B)                       7                   50                          60                            0.9
                                       For 180° rotation                                         20                      60                          80                            2.9
                           Single vane (S): 170 to 190° adjustable

                                                                                                                                                                                            151
Series    MSUA
Construction

Internal Construction of Rotary Table




                                                       For 180°                               For 90°                             Single vane
                                                  (Figure in the middle                 (Figure with pressure                  (Figure in the middle
                                                        position)                             to A port)                         position for 180°)




                                        Component Parts
                                        No.            Description                           Material                                    Note
                                         1    Body A                                    Aluminum alloy                                Anodized
                                         2    Body B                                    Aluminum alloy                                Anodized
                                         3    Body C                                    Aluminum alloy                                Anodized
                                         4    Vane shaft                      Stainless steel (MSUA20 is carbon steel)               Single vane
                                         5    Stopper                                         Resin                                  Single vane
                                         6    Stopper seal                                     NBR
                                         7    Table                                     Aluminum alloy                         Anodized, Serigraph
                                         8    Stopper lever                               Carbon steel                   Heat treated, Electroless nickel plated
                                         9    Stopper guide                              Stainless steel                               Nitriding
                                         10   Lever retainer                              Carbon steel                            Zync Chromated
                                         11   Bearing retainer                          Aluminum alloy                                Anodized
                                         12   Bearing                         High carbon chrome bearing steel
                                         13   Special bearing                 High carbon chrome bearing steel
                                         14   Back-up ring                               Stainless steel
                                         15   O-ring                                           NBR
                                         16   With adjustment bolt                        Carbon steel                     Heat treated, Nickel plated
                                         17   Hexagon nut                                 Carbon steel                              Nickel plated
                                         18   Hexagon socket head cap screw              Stainless steel
                                         19   Hexagon socket head cap screw              Stainless steel
                                         20   Hexagon socket head cap screw               Carbon steel                              Nickel plated
                                         21   Button bolt                                 Carbon steel                              Nickel plated
                                         22   Hexagon socket head cap screw              Stainless steel                            SE type only
                                         23   Label
                                        ∗ The plug     is used only when the connection port is type SE.
152
                                                                        Rotary Table: High Precision Type
                                                                                               Vane Style              Series   MSUA
Construction

Internal construction with auto switch

                                                       MDSUA1/3                                           MDSUA7/20




                                                                                                                                        CRB2
                                                                                                                                        CRBU2
                                                                                                                                        CRB1

                                                                              Auto switch units
                                                                                                                                        MSU
                                                                              Auto switches are
                                                                                not included.                                           CRJ
                                                                                                                                        CRA1
                                                          ∗ Refer to page 55 for the component parts.                                   CRQ2
                                                                                                                                        MSQ
∗ The auto switch unit can be retrofitted on a rotary actuator.
  Auto switches should be ordered separately since they are not included.                                                               MSZ
         Model           Auto switch unit part no.                                                                                      CRQ2X
    M(D)SUA 1                  P211070-1                                                                                                MSQX
    M(D)SUA 3                  P211090-1
    M(D)SUA 7                  P211060-1
                                                                                                                                        MRQ
    M(D)SUA20                  P211080-1




                                       Auto switch block unit
                                MDSUA1/3                                                    MDSUA7/20
                                                       For solid state auto          Combination of reed and
              For reed auto switch
                                                             switch                  solid state auto switches
     Right-handed               Left-handed          Combination left & right-handed Combination left & right-handed




  Part no.: P211070-8      Part no.: P211070-9       Part no.: P211070-13              Part no.: P211060-8
∗ The auto switch block unit is included in the auto switch unit.
∗ Auto switch block unit shows the necessary assembly for mounting 1 piece of auto switch to the auto
  switch unit.




                                                                                                                                        D-„




                                                                                                                                  153
Series      MSUA
Dimensions                                                                                                   These drawings indicate the condition when the B port is pressurized.


MSUA1
 MSUA1-„S,SE
                                                      C
                      8 x M3 x 0.5 depth 5

                                         ø5
                                          1




                                                                                          „31

                                                                                                     „38
                                                                              23.5
                  B

                              ø25


           4 x M4 x 0.7 depth 4

                                              22.5°                                        4.5



                                                                                                               025
                                                                                                           +0.
                                                                                                             0
                                                                                                2.5H9
                                                      A                                              Long groove depth 4
                                                                                                     (Positioning pin hole)                                   0
                                                                                 22.5°
                                                                                                                                                  ø35h9      –0.062
                  +0.025
        3 x 3H9    0     depth      3
                                                                                                                                                             +0.043
        ( A , B , C )
                                                                                                                                                 ø17 H9       0
                                                      27                                                                                2.5




                                                                                                                                                                       2
                                                                                                                2 x 4.5 through




                                                                                                                                                                                             12.5
                       6.5




                                                                                                                                                                             6.5
                                   4.2




                                                                                                                                                                                   2
                                                                                                                              0
                                                                                                                     ø36h9   –0.062



                                                                                                                                         27
                                                                                     16
                      10.3




                                                                                                                                                          9




                                                                                                                                                                                      31.5

                                                                                                                                                                                             37
                                   5




                                                                                                                                                                       4.5
                                                                               Angle adjustment bolt
              2 x 4.5 through


                                                                                                                       2 x M3 x 0.5
                                                                                                                                                                                      2

                                                                                                                                                                                             8
                                                                                                                                                                             1
                                                                                                                                                 5




                                                                              Adjustment: Max. 7.5
                                                                                                                                                 0.5
                                                                                                                                 A port                                B port
                                                                     +0.025
                                                           3 x 3H9    0       long groove depth 2.5
                                                           ( A , B , C )                                                                                                     –0.004
                                                                                                                                                                      ø4g6 –0.012
                                                                                                                                                                               0
                                                                                                                                                                      ø9h9 –0.036

                                                                                                                                                       ø29
            4 x M4 x 0.7 depth 8
                                                                                                                                                           0
                                                                                                                                                  ø36h9   –0.062




                                                                                                                                      Top ported: MSUA1-„SE
                             „31




                                                                                                                                        A port           9.5            B port


                                                                                                                                                                         2 x M3 x 0.5
                                                                                                                                  8.5




154
                                       Rotary Table: High Precision Type
                                                              Vane Style                     Series           MSUA
                                                          These drawings indicate the condition when the B port is pressurized.




With auto switch: MDSUA1-„S


                                         ∗1) 24: When using D-90/90A/S99/S99V/S9P/S9PV/T99/T99V
                                             30: When using D-97/93A
                                         ∗2) 60°: When using D-90/90A/97/93A                                                       CRB2
                                             69°: When using D-S99/S99V/S9P/S9PV/T99/T99V
                                                                                                                                   CRBU2
                                                                                                                                   CRB1
                                                                                                                                   MSU
                                                                                                                                   CRJ
                                                                                                                                   CRA1




                                                                                                                      12.5
                                                                                                                                   CRQ2
                                                                                                                                   MSQ
                                                                                                                                   MSZ




                                                                                                                      37
                              Angle adjustment bolt
                                                                                                                                   CRQ2X
                                                                                                                                   MSQX

                                                 2 x M3 x 0.5                                                                      MRQ
                                     (Port location: Side ported type only)
        ∗1
       24




                                                                                                                      28
                                                                          A port                     B port




                                                                                     ø18.5

             ∗2 69°)
             60° (                                                                    ø29




                                                         D-97/93A
  15




                                                              ∗1
                                                             30




                                                                                                                                   D-„




                                                                                                                             155
Series         MSUA
Dimensions                                                                                   These drawings indicate the condition when the B port is pressurized.


MSUA3
 MSUA3-„S/SE
                 8 x M4 x 0.7 depth 7
                                   ø5     C
                                     8




                                                                             „36

                                                                                       „44
           B


                                                                    27
                            ø30



        4 x M4 x 0.7 depth 5.5

                                              22.5°
                                                                         5




                                                                                 025                                          0
                                                                             +0.                                       ø41h9 –0.062
                                                                               0
                                                                      3H9
                                          A                             Long groove depth 5                            ø21H9 +0.052
                                                                                                                              0
                                                                        (Positioning pin hole)
                                                             22.5°
                                         29




                                                                                                                                           2.5
                                                                                                                 3
                +0.025
      3 x 3H9    0       depth 3
                                                                                              2 x 4.5 through
      ( A , B , C )




                                                                                                                                                            15.5
                                                                                                                                                       3
                                                                                                       0
                                                                                                ø42h9 –0.062
                    8




                                                                                                                                                 8
                               5




                                                                     18.3




                                                                                                                29
                    11

                               5




                                                                                                                                                       36
                                                                                                                            11




                                                                                                                                                            45
                                                                         Angle adjustment bolt
           2 x 4.5 through                                                                                                                6



                                                                                                   2 x M5 x 0.8                                        2
                                                                    Adjustment: Max. 8.2
                                                                                                                                                 1.5



                                                                                                                                                            9
                                                                                                                     6




                                                                                                           A port    0.5                 B port
                                                         +0.025
                                               3 x 3H9    0       long groove depth 2.5
                                               ( A , B , C )
                                                                                                                                         ø5g6 –0.004
                                                                                                                                              –0.012
                                                                                                                                                0
                                                                                                                                         ø12h9 –0.043
          4 x M4 x 0.7 depth 8
                                                                                                                            ø34

                                                                                                                              0
                                                                                                                       ø42h9 –0.062



                                                                                                                Top ported: MSUA3-„SE
                         „36




                                                                                                           A port          10         B port


                                                                                                                                       2 x M3 x 0.5
                                                                                                          11




156
                                      Rotary Table: High Precision Type
                                                             Vane Style                      Series         MSUA
                                                          These drawings indicate the condition when the B port is pressurized.




With auto switch: MDSUA3-„S




                                    ∗ 1) 24: When using D-90/90A/S99/S99V/S9P/S9PV/T99/T99V
                                                                                                                                    CRB2
                                         30: When using D-97/93A
                                    ∗ 2) 60°: When using D-90/90A/97/93A                                                            CRBU2
                                         69°: When using D-S99/S99V/S9P/S9PV/T99/T99V
                                                                                                                                    CRB1
                                                                                                                                    MSU
                                                                                                                                    CRJ
                                                                                                                                    CRA1
                                                                                                                                    CRQ2




                                                                                                                       15.5
                                                                                                                                    MSQ
                                                                                                                                    MSZ
                                                                                                                                    CRQ2X
                                                                                                                                    MSQX




                                                                                                                       45
                              Angle adjustment bolt                                                                                 MRQ


                                             2 x M5 x 0.8
                                (Port location: Side ported type only)

                                                                    A port
      ∗1




                                                                                                   B port




                                                                                                                       29
     24




           ∗2 69°)
            60° (                                                                   ø18.5

                                                                                    ø34




                                                                         D-97/93A
15




                                                                              ∗1
                                                                             30




                                                                                                                                    D-„




                                                                                                                              157
Series                MSUA
Dimensions                                                                                      These drawings indicate the condition when the B port is pressurized.


MSUA7
 MSUA7-„S/SE

                                                                                                                    Top ported: MSUA7-„SE
              8 x M4 x 0.7 depth 8     C
                                                                                                                A port                      B port
                                                                                                                                   13
                                 ø6
                                   7




                                                                                                                                             2 x M5 x 0.8




                                                                                                               14
                                                                            „41
                                                                                  „50
              B                                                       33

                         ø37



          4 x M5 x 0.8 depth 7
                                            22.5°
                                                                  5




                                                                                 025
                                                                             +0.
                                                                               0
                                        A                             3H9
                                                                       Long groove depth 5
                                                                       (Positioning pin hole)
                                                         22.5°

                                                                                                                                0
                                                                                                                         ø47h9 –0.062

                                       36                                                                                ø26H9 +0.052
                                                                                                                                0
          +0.030
3 x 4H9    0     depth   4
                                                                                                           4




                                                                                                                                        3
( A , B , C )
                                                                                        2 x 5.5 through




                                                                                                                                                       4.5


                                                                                                                                                             19
               10.5




                                                                                                  0
                                                                                           ø48h9 –0.062

                                                                                                          36
                             7




                                                                           22.3




                                                                                                                                               10.5
               13



                             6




                                                                                                                                                       44


                                                                                                                             11
                                                                                                                                                             58.5


          2 x 5.5 through                                              Angle adjustment bolt
                                                                                                                                        6




                                                                  Adjustment: Max.10.2
                                                                                                                                                       3




                                                                                             2 x M5 x 0.8
                                                                                                                                                             10
                                                                                                                                               1.5
                                                                                                                         7




                                                        +0.030
                                              3 x 4H9    0       long groove depth 3
                                                                                                   A port             0.5                B port
                                              ( A , B , C )
      4 x M5 x 0.8 depth 10
                                                                                                                                        ø6g6 –0.004
                                                                                                                                             –0.012
                                                                                                                                               0
                                                                                                                                        ø14h9 –0.043

                                                                                                                             ø42
                                                                                                                                0
                                                                                                                         ø48h9 –0.062
                      „41




158
                                                                                      Rotary Table: High Precision Type
                                                                                                             Vane Style            Series         MSUA
                                                                                                These drawings indicate the condition when the B port is pressurized.




With auto switch: MDSUA7-„S




                                                                                                                                                                        CRB2
                                                                                                                                                                        CRBU2
                                                                                                                                                                        CRB1
                                                                                                                                                                        MSU
                                                                                                                                                                        CRJ
                                                                                                                                                                        CRA1




                                                                                                                                                   19
                                                                                                                                                                        CRQ2
        25.5 (34.5: Connector type)




                                                                                                                                                                        MSQ




                                                                                                                                                   58.5
                                                     Angle adjustment bolt
                                                                                                                                                                        MSZ
                                                                                                                                                                        CRQ2X
                                                                                                                                                                        MSQX
                                                                    2 x M5 x 0.8
                                                       (Port location: Side ported type only)                                                                           MRQ




                                                                                                                                                   30
                                                30




                                                                                                       A port                       B port




                                                                                                                          ø25
                                                        20.5 (26.5: Connector type)




                                                                                                                         ø42


                                        °
                                      65                                                          Connector Type
                                            8
    4




                                                                                                                                                          34.5




                                                                                                                Connector type
                                                                                                                                                          26.5




                                                                                                                                                                        D-„




                                                                                                                                                                 159
Series               MSUA
Dimensions                                                                                These drawings indicate the condition when the B port is pressurized.


MSUA20
 MSUA20-„S/SE
              8 x M5 x 0.8 depth 10
                                         C
                                                                                                                Top ported: MSUA20-„SE
                                    ø7
                                     8



                                                                                                               A port                          B port
                                                                                                                                  14

                                                                                                                                                2 x M5 x 0.8




                                                                        „48
                                                                               „59
                                                                  38
                      B




                                                                                                              15.5
                              ø42



             4 x M6 x 1 depth 7               22.5°
                                                                  5




                                                                                 025
                                                                             +0.
                                                                               0
                                                                       3H9
                                         A                              Long groove depth 5
                                                                        (Positioning pin hole)
                                                             22.5°
                                                                                                                                     0
                                                                                                                              ø52h9 –0.074

3 x 4H9
          +0.030
                   depth 4               43                                                                                   ø30H9 +0.052
                                                                                                                                     0
           0

                                                                                                                          5




                                                                                                                                                 4
( A, B, C)
                                                                                                 2 x 6.6 through




                                                                                                                                                                    21.5
                    10.5




                                                                                                                                                               5
                                                                                                             0
                                                                                                  ø53.5h9   –0.074
                             7




                                                                 23




                                                                                                                     43




                                                                                                                                                        10.5
                    16


                              6




                                                                                                                                                               46
                                                                                                                                   13
                                                                     Angle adjustment bolt




                                                                                                                                                                    72
           2 x 6.6 through
                                                                 Adjustment: Max. 10.3
                                                                                                                                                  6


                                                                                                                                                               4
                                                                                                       2 x M5 x 0.8

                                                                                                                                                                    13
                                                                                                                                                        2
                                                                                                                              8




                                                                                                             A port
                                                         +0.030                                                               1                         B port
                                               3 x 4H9    0     long   groove depth 3
                                               (A, B, C)                                                                                         ø8g6 –0.005
                                                                                                                                                      –0.014
                                                                                                                                                        0
                                                                                                                                                 ø16h9 –0.043
            4 x M6 x 1 depth 11
                                                                                                                                   ø50
                                                                                                                                       0
                                                                                                                              ø53.5h9 –0.074
                             „48




160
                                                                                       Rotary Table: High Precision Type
                                                                                                              Vane Style                      Series         MSUA
                                                                                                           These drawings indicate the condition when the B port is pressurized.




With auto switch: MDSUA20-„S




                                                                                                                                                                                   CRB2
                                                                                                                                                                                   CRBU2
                                                                                                                                                                                   CRB1
                                                                                                                                                                                   MSU
                                                                                                                                                                                   CRJ




                                                                                                                                                              21.5
                                                                                                                                                                                   CRA1
                                                                                                                                                                                   CRQ2
         25.5 (34.5: Connector type)




                                                        Angle adjustment bolt
                                                                                                                                                                                   MSQ




                                                                                                                                                             72
                                                                                                                                                                                   MSZ
                                                                                                                                                                                   CRQ2X
                                                                                                 2 x M5 x 0.8
                                                                                                                                                                                   MSQX
                                                                                    (Port location: Side ported type only)

                                                                                                                                                                                   MRQ
                                                                                                                    A port                      B port




                                                                                                                                                              31
                                                 31




                                                                                                                                     ø25
                                                      20.5 (26.5: Connector type)




                                                                                                                                     ø50

                                         °
                                       65
                                                                                                                 Connector Type
                                             8
             4




                                                                                                                                                                     34.5




                                                                                                                             Connector type
                                                                                                                                                                     26.5




                                                                                                                                                                                   D-„




                                                                                                                                                                            161
                                       Rotary Table: Basic Type
                                       Vane Style

                                       Series MSUB
                                       Size: 1, 3, 7, 20


                                                                                                       How to Order
                                          Bearing type                               Connection port location
                                           B     Basic type                                  Nil      Side ported
                                                                                              E       Axial ported
                                  Free mount type                                        Available with side ported
                                                                                         only, when equipped with
                                                                                         auto switch unit.

 Without auto switch                             M SUB 20                                                 90 S

With auto switch                      M D SUB 20                                                          90 S                     T79 L
                                                                                                                                                                Number of auto switches
                           With auto switch                                                                                                                         S           1 pc. ∗
                             (Built-in magnet)                                                                                                                      Nil         2 pcs. ∗∗
                                                                                                                                                                 ∗ S (1 auto switch) is shipped with a right-
                                                                                                                                                                   hand auto switch.
    Nominal size (Torque)                                                                                                                                       ∗∗ Nil (2 auto switches) is shipped with
                       1     MSUB 1                                                                                                                                a right-hand and a left-hand switch.
                       3     MSUB 3
                                                                                  Rotating angle                                                     Electrical entry/Lead wire length
                       7     MSUB 7                                Application Symbol Rotating angle                                                  Nil          Grommet/Lead wire: 0.5 m
                      20     MSUB20                                 Single       90        90°                                                         L           Grommet/Lead wire: 3 m
                                                                     vane       180      180°                                                                      Connector/Lead wire: 0.5 m
                                                                                                                                                      C
                                                                    Double                                                                            CL           Connector/Lead wire: 3 m
                                                                     vane        90        90°
                                                                                                                                                      CN           Connector/Without lead wire
                                                                   Rotation adjustment range                                                       ∗ Available only with R73, R80 and T79 type connectors.
                                                                   Single vane: Both ends ±5° each                                                ∗∗ Lead wire with connector part nos.
                                                                   Double vane: Both ends ±2.5° each                                                D-LC05: Lead wire 0.5 m
                                                                                                                                                    D-LC30: Lead wire 3 m
                                                                                                       Vane type                                    D-LC50: Lead wire 5 m
                                                                                            S          Single vane                        Auto switch
                                                                                            D          Double vane                        Nil     Without auto switch (built-in magnet)
                                                                                                                                        ∗Refer to the table below for the applicable auto switch model.

Applicable Auto Switch/Refer to pages 761 to 809 for further information on auto switches.
                                                                                                                                                                Lead wire length (m) ∗
                                                 Indicator light




                                                                                         Load voltage
Applicable             Special     Electrical                       Wiring                                                Auto switch model Lead wire                                  Pre-wired
             Type                                                                                                                                                 0.5   3    5 None              Applicable load
 model                 function      entry                         (Output)              DC                  AC                                   type                                 connector
                                                                                                                        Perpendicular In-line                    (Nil) (L) (Z) (N)
             Solid                                                 3-wire (NPN)                                            S99V       S99
                                                                                          5V,12V                                               Heavy-duty                                             IC circuit
                                                  Yes




             state                                                 3-wire (PNP)                                            S9PV       S9P
             switch                                                                                                                               cord
MDSUB1                                                                                   12V                               T99V       T99
                                                                                                                                                                                                                 Relay,
MDSUB3                             Grommet                                        24 V 5 V, 12 V        5 V, 12 V, 24 V               90      Parallel cord
                                                  No




                                                                                          5 V, 12 V,      5 V, 12 V,                                                                                  IC circuit PLC
             Reed                                                   2-wire                  100 V        24 V, 100 V                  90A     Heavy-duty cord
             switch                                                                                                                   97      Parallel cord
                                                  Yes




                                                                                                          100 V                       93A     Heavy-duty cord
                                                                   3-wire (NPN)                                                       S79
             Solid                                                                       5V,12V                                                                                                       IC circuit
                                   Grommet                         3-wire (PNP)                                                       S7P
             state
                                                                                                                                      T79
                                                  Yes




             switch                                                                        12V
MDSUB7                            Connector                                                                                           T79C     Heavy-duty                                                          Relay,
MDSUB20                                                                           24 V
                                  Grommet                                                                 100 V                       R73         cord                                                             PLC
                                                                    2-wire
             Reed                 Connector                                                                                           R73C
             switch               Grommet                                                48V,100V         100 V                       R80                                                             IC circuit
                                                  No




                                  Connector                                                             24 V or less                  R80C
∗ Lead wire length symbols: 0.5 m ······ Nil (Example) R73C                                        ∗ Auto switches marked with “ ” are               Order example: MSUB20 single vane type
                               3 m ······ L (Example) R73CL                                          made-to-order specifications.                   (connection port side location selected)
                               5 m ······ Z (Example) R73CZ                                                                                          1. Standard type (Without auto switches), Rotation 90°,
                             None ······ N (Example) R73CN                                                                                              side port location MSUB20-90S
∗ Auto switches are shipped together (but not assembled).
                                                                                                                                                     2. With auto switch unit (Without auto switches), Rotation
                                                                                                                                                        180°, Side port location MDSUB20-180S
        Refer to pages 796 to 797 for detailed solid state auto                                                                                      3. With auto switch unit + Auto switch R73, Rotation 180°,
        switches with pre-wired connectors.                                                                                                             Side port location MDSUB20-180S-R73




162
                                                                                                  Rotary Table: Basic Type
                                                                                                                Vane Style                        Series                  MSUB
Specifications

                    Model ∗3                                         MSUB1                           MSUB3                             MSUB7                               MSUB20
  Vane type                                                  Single vane         Double vane   Single vane     Double vane    Single vane        Double vane        Single vane         Double vane
  Rotating angle ∗1                                        90° ± 10° 180° ± 10° 90° ± 5° 90° ± 10° 180° ± 10° 90° ± 5° 90° ± 10° 180° ± 10° 90° ± 5° 90° ± 10° 180° ± 10° 90° ± 5°
  Fluid                                                                                                           Air (Non-lube)
  Proof pressure (MPa)                                                                                 1.05                                                                    1.5
  Ambient and fluid temperature                                                                                        5 to 60°C
  Operating pressure range (MPa)                                    0.2 to 0.7                                      0.15 to 0.7                                           0.15 to 1.0                  CRB2
  Rotation time adjustment range (s/90°)                                                                       0.07 to 0.3 (0.5 MPa)
                         Allowable radial load                        20 N                            40 N                               50 N                                 60 N
                                                                                                                                                                                                       CRBU2
                                                                      15 N                            30 N                               60 N                                 80 N
  Shaft load
                         Allowable thrust load ∗2                                                                                                                                                      CRB1
                                                                      10 N                            15 N                               30 N                                 40 N
                         Allowable moment                            0.3 N·m                         0.7 N·m                           0.9 N·m                               2.9 N·m                   MSU
  Bearing                                                                                                            Bearing
  Port location                                                                                              Side ported or Top ported                                                                 CRJ
                         Side ported                                M3 x 0.5                                                         M5 x 0.8
  Port size
                         Top ported                                                    M3 x 0.5                                                        M5 x 0.8
                                                                                                                                                                                                       CRA1
∗1 Single vane 90° can be adjusted to 90° ± 10° (both ends of rotation ± 5° each)          ∗3 Correspondence to equivalent conventional free-mount types
   Single vane 180° can be adjusted to 180° ± 10° (both ends of rotation ± 5° each)              Rotary table        Free-mount rotary actuator
                                                                                                                                                                                                       CRQ2
   Double vane 90° type can be adjusted to 90° ± 5° (both ends of rotation ± 2.5° each)           MSUB 1                   CRBU2W10
   • Rotation angles other than 90° and 180° (single vane) are available by special order.
∗2 The allowable thrust load is directional. Refer to the allowable load table below for
                                                                                                  MSUB 3                   CRBU2W15                                                                    MSQ
                                                                                                  MSUB 7                   CRBU2W20
   details.                                                                                       MSUB20                   CRBU2W30
                                                                                                                                                                                                       MSZ
JIS Symbol
                                                                                                                                                                                                       CRQ2X
                                                                                                                                                                                                       MSQX

                                                                                                                                                                                                       MRQ

Table Rotation Range                                                                                Mass
Angle adjustment is possible as shown in the drawings below using                                                                                                                                (g)
adjustment bolts (A) and (B).                                                                                    Rotation           Basic mass
                                                                                                      Size        angle                                        Auto switch unit + Auto switch 2 pcs.
                                                            Adjustment range of                                               Single vane   Double vane
                                                             adjustment bolt (B)                                     90°           145           150
     Adjustment range of                                                                                1                                                                      25
      adjustment bolt (A)                                               (S): 10°                                   180°            140
                                                                        (D): 5°                                      90°           230           240
                   (S): 10°
                                 °




                                                                                                        3                                                                      30
                               90




                   (D): 5°                                                                                         180°            225
                                                                                                                     90°           360           375
                                                                                                        7                                                                      50
                                                                                                                   180°            355
                                                                                                                     90°           510           580
                                    5                                                                  20                                                                      60
                              22.                                                                                  180°            505

      Positioning pin hole                                                                          Allowable Load
                  Adjustment bolt (A)                  Adjustment bolt (B)                          Do not permit the load and moment applied to the table to exceed the
                                                                                                    allowable values shown in the table below. (Operation above the
                                        For 90° rotation
                                                                                                    allowable values can cause adverse effects on service life, such as play in
                         Single vane (S): 80° to 100° adjustable                                    the table and loss of accuracy.)
                         Double vane (D): 85° to 95° adjustable
                                                                                                                                                  A        B
                                                180°
          Adjustment range of
                                                                 Adjustment range of
           adjustment bolt (A)
                                                                 adjustment bolt (B)




                   10°                                                  10°
                                  5°
                              22.                                                                                                                                                                      D-„
                                                                                                      Size       Allowable radial load (N) Allowable thrust load (N) Allowable moment (N·m)
                                                                                                        1                    20             A 15         B 10                        0.3
      Positioning pin hole
                                                                                                        3                    40                 30             15                    0.7
                  Adjustment bolt (A)                  Adjustment bolt (B)                              7                    50                 60             30                    0.9
                                    For 180° rotation                                                  20                    60                 80             40                    2.9
                         Single vane (S): 170° to 190° adjustable
               ∗ The double vane type is not available with 180° rotation.

                                                                                                                                                                                             163
Series     MSUB
Construction

Internal Construction of Rotary Table




                                         For 180°                       For 90°                     Single vane                   Double vane
                                      Figure in the                Figure with                  Figure in the middle           Figure with
                                      middle position              pressure to A port           position for 180°              pressure to A port




          Single vane: Size 1, 3, 7, 20                           Double vane: Size 1                         Double vane: Size 3, 7, 20




                                        Component Parts
                                          No. Description                                      Material                               Note
                                           1   Body (A)                                    Aluminum alloy                           Anodized
                                           2   Body (B)                                    Aluminum alloy                           Anodized
                                                                               Stainless steel (MSUB20: Carbon steel)             Single vane
                                           3   Vane shaft
                                                                                            Carbon steel                         Double vane
                                           4   Stopper                                          Resin                             Single vane
                                           5   Stopper                                     Stainless steel                       Double vane
                                           6   Stopper seal                                      NBR
                                           7   Table                                       Aluminum alloy                    Anodized, Serigraph
                                           8   Stopper lever (D)                            Carbon steel              Heat treated, Electroless nickel plated
                                           9   Stopper lever (S)                            Carbon steel              Heat treated, Electroless nickel plated
                                          10   Lever retainer                               Carbon steel                       Zync Chromated
                                          11   Ring collar                                  Carbon steel                       Zync Chromated
                                          12   Bearing                           High carbon chrome bearing steel
                                          13   Bearing                           High carbon chrome bearing steel
                                          14   Back-up ring                                Stainless steel
                                          15   Scraper                                           NBR
                                          16   O-ring                                            NBR
                                          17   Adjustment bolt                              Carbon steel                Heat treated, Nickel plated
                                          18   Hexagon nut                                 Stainless steel
                                          19   Hexagon socket head cap screw               Stainless steel
                                          20   Hexagon socket head cap screw               Stainless steel
                                          21   Hexagon socket head cap screw               Stainless steel
                                          22   Button bolt                                  Carbon steel                         Nickel plated
                                          23   Rubber cap                                        NBR
                                          24   Hexagon socket head set screw               Stainless steel
                                          25   Cover                                       Aluminum alloy                        SE type only
                                          26   Plate                                            Resin
                                          27   Gasket                                            NBR
                                          28   O-ring                                            NBR
                                          29   O-ring                                            NBR
                                          30   Label
                                      ∗ The plug     is used only when the connection port is type SE.
164
                                                                                         Rotary Table: Basic Type
                                                                                                       Vane Style    Series   MSUB
Construction

Internal construction with auto switch
Units are common for both single and double vane.

                                                    MDSUB1, 3                                          MDSUB7, 20




                                                                                                                                      CRB2
                                                                                                                                      CRBU2
                                                                                                                                      CRB1
                                                                            Auto switch unit
                                                                           Auto switches are
                                                                                                                                      MSU
                                                                             not included.
                                                                                                                                      CRJ
                                                     MDSUB 1 double vane
                                                     type has a different figure.                                                     CRA1
                                                        ∗ Refer to page 55 for the component parts.
                                                                                                                                      CRQ2
                                                                                                                                      MSQ
∗ The auto switch unit can be retrofitted on a rotary actuator.
  Auto switches should be ordered separately since they are not included.                                                             MSZ
         Model         Auto switch unit part no.                                                                                      CRQ2X
    M(D)SUB 1                 P211070-1                                                                                               MSQX
    M(D)SUB 3                 P211090-1
    M(D)SUB 7                 P211060-1                                                                                               MRQ
    M(D)SUB20                 P211080-1




                                        Auto switch block unit
                                MDSUB1/3                                                  MDSUB7/20
                                                     For solid state auto          Combination of reed and
              For reed auto switch
                                                           switch                  solid state auto switches
     Right-handed               Left-handed        Combination left & right-handed Combination left & right-handed




  Part no.: P211070-8      Part no.: P211070-9      Part no.: P211070-13             Part no.: P211060-8
∗ The auto switch block unit is included in the auto switch unit.
∗ Auto switch block unit shows the necessary assembly for mounting 1 piece of auto switch to the auto
  switch unit.




                                                                                                                                      D-„




                                                                                                                                165
Series           MSUB
Dimensions                                                                  These drawings indicate the condition when the B port is pressurized.


MSUB1 (Single vane)
    MSUB1-„S/SE

             4 x M3 x 0.5 depth 5

            2 x 4.5 through




          2 x M4 x 0.7 depth 8




                                                                       Long groove depth 5
                                                                       (Positioning pin hole)


                                                                      2 x 4.5 through
       3 x 3H9 +0.025depth 5
                0




                                                            Adjustment bolt ∗



            2 x 4.5 through                                Adjustment:
                                                                                    A port
                                                             Max. 5.75
                                                                                                                  B port
                                                                                2 x M3 x 0.5

        2 x M4 x 0.7 depth 8




                                                                                         Top ported: MSUB1-„SE
                                                                                        A port                  B port

                                                                                                                 2 x M3 x 0.5




∗ If the adjustment bolt is removed, rotation will be
  approximately 270° for the single vane type and 100°
  for the double vane type. Since this will make it
  impossible to satisfy the specifications, operate with
  adjustment within the range of maximum values.




166
                                                                             Rotary Table: Basic Type
                                                                                           Vane Style                 Series         MSUB
                                                                                   These drawings indicate the condition when the B port is pressurized.




    With auto switch: MDSUB1-„S
                                                                                        ∗1) 24: When using D-90/90A/S99(V)/T99(V)/S9P(V)
                                                                                            30: When using D-97/93A
                                                                                        ∗2) 60°: When using D-90/90A/97/93A
                                                                                            69°: When using D-S99(V)/T99(V)/S9P(V)


                                                                                                                                                           CRB2
                                                                                                                                                           CRBU2
                                                                                                                                                           CRB1
                                                                                                                                                           MSU
                                                                                                                                                           CRJ
                                                                                                                                                           CRA1
                                                                                                                                                           CRQ2
                                                                                                                                                           MSQ
                                                                                                                                                           MSZ
                                                                                                                                                           CRQ2X
                                                                                                                                                           MSQX
                                                               Adjustment bolt ∗
                                                                                                                                                           MRQ
                                                                       MSU_018.eps
                                                                                     A port                           B port
              24 ∗1




                                                       2 x M3 x 0.5
                                                      (Port position: Side port type only)




                                       )∗
                                         2
                                   69°
                              60°
                                  (




                                                                             D-97/93A
                                                                                      30 ∗1




∗ If the adjustment bolt is removed, rotation will be                                                                                                      D-„
 approximately 270° for the single vane type and 100° for
 the double vane type. Since this will make it impossible to
 satisfy the specifications, operate with adjustment within
 the range of maximum values.




                                                                                                                                                  167
Series          MSUB
Dimensions                                                                      These drawings indicate the condition when the B port is pressurized.


MSUB1 (Double vane)
   MSUB1-„D

          4 x M3 x 0.5 depth 5
         2 x 4.5 through




    2 x M4 x 0.7 depth 8




                                                                    Long groove depth 5
                                                                    (Positioning pin hole)


  3 x 3H9 +0.025 depth 5
           0
  (A, B, C)                                                                 2 x 4.5 through




                                                            Adjustment bolt ∗


          2 x 4.5 through                                                               A port                             B port
                                                           Adjustment: Max. 5.75

                                                                                     2 x M3 x 0.5




   2 x M4 x 0.7 depth 8




                                                                                                 Top ported: MSUB1-„DE

                                                                                            A port                         B port
                                                                                                                               2 x M3 x 0.5



∗ If the adjustment bolt is removed, rotation will be
  approximately 270° for the single vane type and 100°
  for the double vane type. Since this will make it
  impossible to satisfy the specifications, operate with
  adjustment within the range of maximum values.




168
                                                                             Rotary Table: Basic Type
                                                                                           Vane Style              Series         MSUB
                                                                                These drawings indicate the condition when the B port is pressurized.




    With auto switch: MDSUB1-„D
                                                                                     ∗1) 24: When using D-90/90A/S99(V)/T99(V)/S9P(V)
                                                                                         30: When using D-97/93A
                                                                                     ∗2) 60°: When using D-90/90A/97/93A
                                                                                         69°: When using D-S99(V)/T99(V)/S9P(V)


                                                                                                                                                        CRB2
                                                                                                                                                        CRBU2
                                                                                                                                                        CRB1
                                                                                                                                                        MSU
                                                                                                                                                        CRJ
                                                                                                                                                        CRA1
                                                                                                                                                        CRQ2
                                                                                                                                                        MSQ

                                                      Adjustment bolt ∗
                                                                                                                                                        MSZ
                                                                                                                                                        CRQ2X
                                                                                                                                                        MSQX
                                                                                               A port
                                                                                                                                B port                  MRQ
                                                                      2 x M3 x 0.5
                                                                     (Port location: Side ported type only)
               24 ∗1




                               )∗
                                  2
                            69°
                       60°
                           (
                                                                                                  D-97/93A
                                                                                                      30 ∗1




∗ If the adjustment bolt is removed, rotation will be
  approximately 270° for the single vane type and 100° for
                                                                                                                                                        D-„
  the double vane type. Since this will make it impossible to
  satisfy the specifications, operate with adjustment within
  the range of maximum values.




                                                                                                                                               169
Series          MSUB
Dimensions                                                                     These drawings indicate the condition when the B port is pressurized.


MSUB3 (Single vane/Double vane)
   MSUB3-„S/D                                                                                       Top ported: MSUB3-„SE/DE
                                                                                                   A port                             B port
   4 x M4 x 0.7 depth 7
                                                                                                                                      2 x M3 x 0.5
   2 x 4.5 through




                                                                                                                (Single vane)



2 x M4 x 0.7 depth 8




                                                                      Long groove depth 5
                                                                      (Positioning pin hole)




       +0.025                                                            2 x 4.5 through
3 x 3H9 0 depth 5
( A, B, C )




                                                              Adjustment bolt ∗



    2 x 4.5 through
                                                                                       A port
                                                         Adjustment: Max. 6.25


                                                                                                                                        B port
                                                                             2 x M5 x 0.8

                      2 x M4 x 0.7 depth 8
                                             Chamfer                              Chamfer




                                (Single vane)                       (Double vane)
                         The outside drawings show the single vane type, but only the           ∗ If the adjustment bolt is removed, rotation will be
                         position of the chamfered sections shown in the above drawings           approximately 270° for the single vane type and 100° for
                         differs from single and double vane.                                     the double vane type. Since this will make it impossible to
                                                                                                  satisfy the specifications, operate with adjustment within
                                                                                                  the range of maximum values.

170
                                                Rotary Table: Basic Type
                                                              Vane Style                   Series           MSUB
                                                    These drawings indicate the condition when the B port is pressurized.




With auto switch: MDSUB3
                                                         ∗1) 24: When using D-90/90A/S99(V)/T99(V)/S9P(V)
                                                             30: When using D-97/93A
                                                         ∗2) 60°: When using D-90/90A/97/93A
                                                             69°: When using D-S99(V)/T99(V)/S9P(V)


                                                          ∗ If the adjustment bolt is removed, rotation will be
                                                                                                                                CRB2
                                                            approximately 270° for the single vane type and 100° for
                                                            the double vane type. Since this will make it impossible to         CRBU2
                                                            satisfy the specifications, operate with adjustment within
                                                            the range of maximum values.
                                                                                                                                CRB1
                                                                                                                                MSU
                                                                                                                                CRJ
                                                                                                                                CRA1
                                                                                                                                CRQ2
                                                                                                                                MSQ
                                                                                                                                MSZ
                                                                                                                                CRQ2X
                                                                                                                                MSQX
                             Adjustment bolt ∗                                                                                  MRQ
                                                            A port                                      B port
    24 ∗1




                               2 x M5 x 0.8
                              (Port location: Side ported type only)




                      )∗
                         2
                  (69°
            60°                                       D-97/93A
                                                               30 ∗1




                                                                                                                                D-„




                                                                                                                          171
  Series          MSUB
  Dimensions                                                                      These drawings indicate the condition when the B port is pressurized.


  MSUB7 (Single vane/Double vane)
      MSUB7-„S/D
                                                                                                       Top ported: MSUB7-„SE
                                                                                                    A port                            B port
      4 x M4 x 0.7 depth 7
    2 x 5.5 through                                                                                                                      2 x M5 x 0.8




                                                                                                                 Single vane


2 x M5 x 0.8 depth 10



                                                                       Long groove depth 5
                                                                       (Positioning pin hole)


                                                                         2 x 5.5 through
        +0.030
3 x 4H9 0 depth 6
( A, B, C )




                                                                 Adjustment bolt ∗


     2 x 5.5 through                                         Adjustment: Max. 8.25
                                                                                           A port                                    B port


                                                                             2 x M5 x 0.8



                        2 x M5 x 0.8 depth 10 Chamfer                            Chamfer




                                 (Single vane)                      (Double vane)
                           The outside drawings show the single vane type, but only the             ∗ If the adjustment bolt is removed, rotation will be
                           position of the chamfered sections shown in the above drawings             approximately 270° for the single vane type and 100° for
                           differs from single and double vane.                                       the double vane type. Since this will make it impossible to
                                                                                                      satisfy the specifications, operate with adjustment within
                                                                                                      the range of maximum values.




  172
                                                                                    Rotary Table: Basic Type
                                                                                                  Vane Style                Series            MSUB
                                                                                         These drawings indicate the condition when the B port is pressurized.




   With auto switch: MDSUB7
                                                                                                                   ∗1) 25.5: Grommet type
                                                                                                                       34.5: Connector type
                                                                                                                   ∗2) 20.5: Grommet type
                                                                                                                       26.5: Connector type


                                                                                                                                                                 CRB2
                                                                                                                                                                 CRBU2
                                                                                                                                                                 CRB1
                                                                                                                                                                 MSU
                                                                                                                                                                 CRJ
                                                                                                                                                                 CRA1
                                                                                                                                                                 CRQ2
                                                                                                                                                                 MSQ
                                                            Adjustment bolt ∗                                                                                    MSZ
                                                                                                                                                                 CRQ2X
                                                                                                                                                                 MSQX
                                                                                         A port                                 B port
                                                                                                                                                                 MRQ
                                                           2 x M5 x 0.8
                                                           (Port location: Side ported type only)
            25.5 ∗1




                                                                20.5 ∗2




                                                                               Connector Type
                                                                                                                                 34.5 ∗1




                                                                                        Connector



                                                                                                                                                                 D-„
∗ If the adjustment bolt is removed, rotation will be
                                                                                                                                 26.5 ∗2




  approximately 270° for the single vane type and 100° for
  the double vane type. Since this will make it impossible to
  satisfy the specifications, operate with adjustment within
  the range of maximum values.




                                                                                                                                                        173
Series           MSUB
Dimensions                                                                     These drawings indicate the condition when the B port is pressurized.

MSUB20 (Single vane/Double vane)

   MSUB20-„S/D

                                                                                                  Top ported: MSUB20-„SE
       4 x M5 x 0.8 depth 8
                                                                                                  A port                         B port
      2 x 6.6 through                                                                                                              2 x M5 x 0.8




                                                                                                             (Single vane)
2 x M6 x 1 Depth 12




                                                                       Long groove depth 5
                                                                       (Positioning pin hole)



                                                                       2 x 6.6 through
        +0.030
3 x 4H9 0 depth 6
( A, B, C )




                                                                  Adjustment bolt ∗



   2 x 6.6 through
                                                                                         A port                                 B port


                                                             Adjustment: Max. 8.75


                                                                              2 x M5 x 0.8



                     2 x M6 x 1 depth 12 Chamfer                                 Chamfer




                                 (Single vane)                       (Double vane)           ∗ If the adjustment bolt is removed, rotation will be
                                                                                               approximately 270° for the single vane type and 100° for
                        The outside drawings show the single vane type, but only the           the double vane type. Since this will make it impossible to
                        position of the chamfered sections shown in the above drawings         satisfy the specifications, operate with adjustment within
                        differs from single and double vane.                                   the range of maximum values.


174
                                                                                     Rotary Table: Basic Type
                                                                                                   Vane Style                Series             MSUB
                                                                                          These drawings indicate the condition when the B port is pressurized.




    With auto switch: MDSUB20
                                                                                                                    ∗1) 25.5: Grommet type
                                                                                                                        34.5: Connector type
                                                                                                                    ∗2) 20.5: Grommet type
                                                                                                                        26.5: Connector type


                                                                                                                                                                  CRB2
                                                                                                                                                                  CRBU2
                                                                                                                                                                  CRB1
                                                                                                                                                                  MSU
                                                                                                                                                                  CRJ
                                                                                                                                                                  CRA1
                                                                                                                                                                  CRQ2
                                                                                                                                                                  MSQ
                                                                                                                                                                  MSZ
                                                                Adjustment bolt ∗                                                                                 CRQ2X
                                                                                                                                                                  MSQX

                                                                                       A port                                       B port                        MRQ

                                                            2 x M5 x 0.8
                                                           (Port location: Side ported type only)
         25.5 ∗1




                                                                20.5 ∗2




                                                                                 Connector Type
                                                                                                                                      34.5 ∗1




                                                                                                    Connector


                                                                                                                                                                  D-„
∗ If the adjustment bolt is removed, rotation will be
                                                                                                                                     26.5 ∗2




  approximately 270° for the single vane type and 100° for
  the double vane type. Since this will make it impossible to
  satisfy the specifications, operate with adjustment within
  the range of maximum values.




                                                                                                                                                         175
                     Series MDSU
                     Adjustment of Auto Switch




Table Positioning Pin Hole Rotation Range and Auto Switch Mounting Position
MSU„1/3
 Single vane type                                                                                          Double vane type (MSUB only)
                                                                                                                    Auto Switch for END 1
                                                                                           Auto Switch
                                                                                           for END 2
   Auto Switch
   for END 1




                                                        Auto Switch
                                      Auto Switch       for END 1
                                       for END 2
                                                                                                                      Auto Switch for END 2
MSU„7/20
 Single vane type                                                                                          Double vane type (MSUB only)
                                                                                                                       Auto Switch for END 1
                                                                                          Auto Switch
    Auto Switch                                                                           for END 2
    for END 1




                                                         Auto Switch
                                      Auto Switch        for END 1
                                       for END 2
                                                                                                                         Auto Switch for END 2

• In drawings that show the rotation range, the arrows on the solid line 90° (180°)                      Auto Switch Operating Angle and
  indicate the rotation range of the positioning pin holes on the table surface.                         Hysteresis Angle
  When the pin hole is at END1, the END1 auto switch operates, and when the
  pin hole is at END2, the END2 auto switch operates.                                                       Model         Operating angle        Hysteresis angle
• The arrows on the broken line indicate the rotation range of the internal                               MDSU„1, 3             110°
  magnet. The rotation range of each auto switch can be reduced by moving the                                                                          10°
                                                                                                          MDSU„7, 20              90°
  END1 auto switch clockwise and the END2 auto switch counterclockwise.
                                                                                                         Note) Since the above values are only provided as
                                                                                                               a guideline, they are not guaranteed. In the
                                  Table                                                                        actual setting, adjust them after confirming
                                                                          B port      Auto switch              the auto switch performance.
                                                                                                         Refer to page 144 for operating angle of auto
                                                                                                         switch and angle of hysteresis and the procedure
                                                                                                         for moving the auto switch detection position.




                                                                          A port
                         Positioning pin hole

176
                     Series MSU
                     Specific Product Precautions
                     Be sure to read before handling. Refer to front matters 38 and 39 for Safety Instructions
                     and pages 4 to 13 for Rotary Actuator and Auto Switch Precautions.


                          Selection                                                           Maintenance

     Warning                                                             Caution
1. Ensure the load energy within the product’s                      <High precision type/MSUA>
   allowable energy value.                                          In case a rotary unit and table unit are required for                     CRB2
   Operation with a load kinetic energy exceeding the allowable     maintenance, order with the unit part numbers shown
   value can cause human injury and/or damage to equipment or
                                                                    below.                                                                    CRBU2
   machinery. (Refer to model section procedures in this
   catalog.)                                                                                                                                  CRB1
                                                                            Rotary unit                     Model          Unit part no.
                                                                                                        MSUA 1-„S
     Caution                                                                                            MSUA 1-„SE
                                                                                                                           P402070-2A
                                                                                                                           P402070-2B
                                                                                                                                              MSU
1. When there are load fluctuations, allow a sufficient                                                 MSUA 3-„S          P402090-2A
   margin in the actuator torque.                                                                       MSUA 3-„SE         P402090-2B
                                                                                                                                              CRJ
   In case of horizontal mounting (operation with                                                       MSUA 7-„S          P402060-2A
   product facing sideways), malfunction may occur                                                      MSUA 7-„SE         P402060-2B
                                                                                                                                              CRA1
   due to load fluctuations.                                                                            MSUA20-„S          P402080-2A
                                                                                                        MSUA20-„SE         P402080-2B
                                                                                                                                              CRQ2
                          Mounting
                                                                                                                                              MSQ
     Caution                                                                 Table unit                     Model          Unit part no.      MSZ
1. Adjust the rotation angle within the prescribed                                                     MSUA 1- 90„         P402070-3A
   ranges.                                                                                                                                    CRQ2X
                                                                                                       MSUA 1-180„         P402070-3B         MSQX
   Single vane type: (90°±10°, 180°±10°) (±5° at end of rotation)
                                                                                                       MSUA 3- 90„         P402090-3A
   Double vane type: (90°±10°) (±2.5° at end of rotation)                                                                                     MRQ
   ∗ Series MSUB only.                                                                                 MSUA 3-180„         P402090-3B

   Adjustment outside the prescribed ranges may cause                                                  MSUA 7- 90„         P402060-3A
   malfunction of the product or failure of switches to operate.                                       MSUA 7-180„         P402060-3B
2. Adjust the rotation time within the prescribed values                                               MSUA20- 90„         P402080-3A
   using a speed controller, etc. (0.07 to 0.3 s/90°)                                                  MSUA20-180„         P402080-3B
   Adjustment to a speed slower than 0.3 s/90° can cause
                                                                    Note 1) Note that the rotation angle should not be changed even though
   sticking and slipping or stopping of operation.
                                                                            the rotary unit has been changed. For maintenance, order units
                                                                            with a part number suitable for the model being used.
                                                                    Note 2) Due to the integral construction of the MSUB series, the rotary
                                                                            and table units cannot be ordered separately.




                                                                                                                                              D-„




                                                                                                                                      177

								
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