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					“MEMS based seismic and vibration
sensors in Building & Structural Health
Monitoring systems”

        Sean Neylon: Chief Executive Officer, Colibrys Switzerland SA
        • Founder
        • 35+ years of experience in Micro-Electronics and Micro-Systems (MEMS)
        • Former Chairman of NEXUS, the European Microsystems Networking
        Association
        • Formerly with GEC Marconi, Plessey, Micronas, CSEM
    Contents

   The world of Seismic sensing
       SHM in context of Seismic Market supply chain &
        applications
       Sensor Classification & standards
   Driving forces for Structural monitoring
    applications
   Technology Roadmap for MEMS based Strong
    Motion seismic sensors
   Conclusions
                                     Seismic sensing
                   Energy            Applications Defense
                 Subsurface                                          Nuclear, Tunneling,
               imaging (Oil, Gas,                                    Remote monitoring
                 Geothermal)

Geoscience                        Civil                      Civil                      Structural
                               protection                 Engineering                   monitoring


Geotechnics               Rapid response, early    Site evaluation                   Nuclear Power plants
                                                    Shake maps
   Volcanic eruptions                                                               Dams, embankments
                          warning, public           Subsoil, microzonation
   Avalanches,           information               Requalification of              Bridges / Tunnels / Towers
    landslides                                        structures
                                                                                     LNG / Oil / Gas storage
                                 Earthquake        Land Use planning
   Soil/rock mechanics
                             Tsunami                                                Pipeline
                                                   Construction
Geodesy
                                                                                     Landfills
                             Volcanic explosion      Pile driving, Compaction
Geophysics „Free field‟
                                                                                     Tunnel monitoring
                                 Landslip            Tunneling
   Techtonics
                                                                                     Traffic
                                                      Blasting, Mining
   Volcanic
                                                                                              and Road)
                                                                                         (Rail
                                                      Quarrying, Demolition
                                                                                         monitoring
                                                   Industrial equipments
                                                                                     Large Buildings
                                                                                            Medical centers
 Market supply chain
                                                   Insurance
Government        Construction &
                                                    Security
 Agencies           Demolition
                                               ‘Building’ owners
Universities        companies
                                                  Consultants




                System integrator      Regional suppliers
                Sensors, DS , SW +     N. America: Nanometrics,
                 communications            Kinemetric/Metrozet, Reftek
                                       EMEA:
                                           Syscom, Geosig, Guralp
                   Hardware
                                       Asia:
                   integrator              Mitsubishi, Kokusai, Aimil
                  Sensors + data
               recording + interface
                   electronics         Sensor Technology
                                       SM FBAs: Nanometrics,
                   Sensor                   Kinemetrics, Guralp, Harbin
                 manufacturer          SM MEMS: Colibrys, SDI, ADI
                                       Strain, Velocity
     Structural Health Monitoring Sensors

   Broadly 4 families of sensors
        Velocity: Broadband (high sensitivity), Short period and
         Strong motion velocity
        Accelerometers: „Strong Motion“ Class A-D
        Strain/Displacement:
        Positioning: GPS



   Important Standards:
        National e.g. USGS....
        Regional e.g. State of California......
Classification - Strong Motion

   Class A
        Typically electromechanical Force Balance Accelerometers
        5g (±3.5g +1g)
        High sensitivity, high linearity, low frequency response
        Expensive, fragile, low volume capacity, medium power
        Primary application: National (>70km spacing) and Regional (3-30km) networks
   Class B
        Typically MEMS closed loop sensor design
        5g (±3.5g +1g)
        Medium sensitivity, medium linearity, medium frequency response, medium power
        Relatively inexpensive, robust, medium volume,
        Primary application: Regional, Urban (<4Km) networks and Structural Health monitoring,
         Shake maps, modelling validation
   Class C
        Typically MEMS open loop based sensors
        5g (±3.5g +1g)
        Low dynamic range/resolution, low linearity, medium frequency response, low power
        Inexpensive, robust, Medium / high volume,
        Primary application: Earthquake detection & intervention
             Strong Motion Standards
                     Class A

 Specifications: USGS & ANSS specifications (13 June 2007)
Technical:
          Range: >± 4.5 g , (± 3.5 g + 1 g gravity)
          Noise:
                Must: 145dB (0.02-2Hz); 130dB (2-50Hz)
          Nonlinearity: ≤ 1 % (at full scale)
          Temperature: Operating range: -20°C to 70°C, Temperature error
           over full Temperature span: < 2%, Offset drift: < 0.5 mg /°C
          Self-test: Must
          No steps in Bias
          Lifetime: 5 years
                 Strong Motion Standards
                         Class B

   State of California specifications are a dominant standard
        Technical:
              Range: ± 5 g , (± 4 g + 1 g gravity)
              Noise:
                    Must: .03 mg RMS over .02 to 100 Hz BW (87.3dB (0.1-35Hz)
                    Wish: < 500 µg/√Hz in 1 to 100 Hz band
              Nonlinearity: ≤ 1 % (at full scale)
              Temperature: Operating range: -20°C to 70°C, Temperature error
               over full Temperature span: < 2%, Offset drift: < 0.5 mg /°C
              Self-test: Must
              No steps in Bias
              Lifetime: 10 years
    Market size by application & grade
                                     100dB                    120dB                      140dB
                                     1 µg/√Hz                 300ng/√Hz                  30ng/√Hz


                         Class C                    Class B                          Class A


              100                                                    Energy
Market Size




                                                                   Oil and gas,
                                                                    discovery &
                                                                       reservoir
  $Mio




                                                                     monitoring
                                                                                   National earthquake
                                                                                         monitoring

              10
                                                                  Regional & Urban
                                                                      earthquake
                                                                      monitoring
                                    ‘Ground shake’ maps,
                                      Structural modeling
                                         & monitoring
                    Earthquake                                    Subsurface
               1     detection &                              Mining & Downhole
                     intervention                                    imaging



                                                                          TAM: Internal estimates 2007-2010
                                            Performance
                                                                                          Sensor level valuation
                                               S/N Dynamic
                                                range dB              Market size and growth are drivers in
                                                                                               innovation!
9
 Competitive supply base - today
                                          100dB                    120dB             140dB
                                          1 µg/√Hz                 300ng/√Hz         30ng/√Hz


                                Class C                  Class B                 Class A        Nanometrics
                                                                                                Kinemetrics
Price per axis ($)




                     1000
                                                                                                Harbin




                     100
                                                                      Colibrys




                      10
                            MEMS Open          MEMS Closed loop                        FBA
                               loop

                                                 Performance
                                                    S/N Dynamic
                                                     range dB
  10
SF2006 Product Parts

                                            Mechanical Sensor



                                              Closed Loop Sigma-
                                                   Delta ASIC




                                                 PCB + electronic
                                                   components

         Derivative of Oil/Gas „geophone‟
            Class B +/-5g seismic sensor
            State of California compliant
                        RoHS compliant
Competitive position - today
                                              Self noise of Siflex product line vs. Class A and FBA
                           10
                            0                                                                             1g
                           -10
                           -20                                                                          0.1g
                           -30
   Noise PSD (dBg/rtHz)




                           -40                                                                         10mg
                           -50
                           -60                                                                          1mg
                           -70
                           -80                                                                         0.1mg
                                                SF1500SN.A
                           -90                               SF1500SN
                          -100                                                                          10ug
                          -110
                          -120                                                                           1ug
                          -130      Class A
                          -140                                                                         0.1ug
                                    Episensor
                          -150
                          -160
                          -170
                             0.01               0.10             1.00          10.00          100.00     1000.00
                                                                   Frequency (Hz)
 Competitive position - today
                                          100dB                    120dB             140dB
                                          1 µg/√Hz                 300ng/√Hz         30ng/√Hz


                                Class C                  Class B                 Class A
                                                                                                  Nanometrics
                                                                                                  Kinemetrics
Price per axis ($)




                     1000
                                                                                                Harbin




                     100
                                                                      Colibrys

                             Consumer
                              MEMS

                      10
                            MEMS Open          MEMS Closed loop                  FBA
                               loop

                                                 Performance
                                                    S/N Dynamic
                                                     range dB
  13
Competitive position - Roadmap
                                      100dB                    120dB             140dB
                                      1 µg/√Hz                 300ng/√Hz         30ng/√Hz


                            Class C                  Class B                 Class A
                                                                                          Episensor
                                                                                         Kinemetrics
                 1000
Price per axis




                                                                                             Harbin
   in USD




                 100
                                                                  Colibrys



                        Lower cost
                          MEMS
                  10
                        MEMS Open                     MEMS Closed loop                 FBA
                           loop

                                             Performance
                                                Dynamic range dB

14
    Strong Motion Roadmap

   MEMS based Class B sensors
     Smaller size, lower power, improved
      linearity, extended FS range
     Integrated wireless

     Lower power / energy harvesting

   MEMS based ‘Class A’ sensors
       Lower cost, more robust, lower power,
        smaller size
Target specifications
   Goal is to replace traditional electromechanical devices (FBA) with
    closed loop MEMS technology

                           Kinemetrics        MEMS Class A            Colibrys Class B
      Products
                           Class A FBA        Target values                MEMS

                          Seismic           Seismic & Structural   Seismic & structural
      Applications
                          monitoring        monitoring             monitoring

      Full scale rang g        ±4g                  ±5g                       ±5g

                           <100 ng/√Hz
                                            <100 ng/√Hz (0.01 to    1 µg/√Hz (0.1 to 100
      Noise                (0.01 to 100
                                                  100 Hz)                   Hz)
                               Hz)
      Resolution (S/N      24 bits (50 Hz     24 bits (50 Hz BW)    20 bits   (50 Hz BW)   (117
      ratios)              BW) (137 db)           (137 db)                     db)

      Output               Digital (SPI?)      Digital (SPI?)           Digital (SPI?)

      Power                 < 120 mW             < 100 mW                < 100 mW
    Class A MEMS Sensor prototype

   Prototype
        10 g FS
        Inertial MEMS sensor
   Sensor component
        MEMS and FE ASIC in ceramic
         MCM
   PCB board
        FPGA
        Power supplies, clock
        Ethernet controller (for testing)
   Size
        Current board: 10 cm x 10 cm x
         4mm
        Potential to make it much smaller
        Market Beta site sampling
         2011/12
Conclusions:
MEMS continue to be a strong technology for new Strong Motion
Seismic sensor development

My interests are today to:
1. Find potential interested partners for new MEMS Class A
sensors?
2. Understand objectives of Seismic sensor development within
MEMCON FP7 ?
3. Confirm if our market assessment is realistic?
4. Increase awareness: Europe has a real solution in hand to
counter US/HP long term roadmaps
Many thanks for listening to me!

Many thanks to Philippe Krebs at Colibrys for his
assistance in providing market details.



 “multi-cultural, small, fast, flexible, a symbol of
creativity and fertility, strongly territorial, successful
through intelligent mutation” – culture of Colibrys


www.colibrys.com

				
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