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					                   Name     : Dr. L. Sujatha
             Designation    : Professor & Head
                    email   :,
   Academic Qualification   :      Ph.D (Micro Electro Mechanical Systems) from IITM
                                      in 2008
                                   M.E.(Applied Electronics) from Bharathiar University
                                      in 1996
                                   PGDCA (Computer Applications) from Alagappa
                                      University in 1994
                                   A.M.I.E. (ECE) from Institution of Engineers (INDIA)
                                      in 1991

  Area of Interest/Research      MEMS Sensors
                       Area      Microelectronics
      Teaching Experience : 15 years
      Research Experience : 5 years
                                    1. L.Sujatha and Enakshi Bhattacharya, “Enhancement in
                                       sensitivity of pressure sensors with composite Si/Porous
                                       Silicon membrane ”, J. Micromech. Microeng. 17 (2007) p

                                    2. L.Sujatha and Enakshi Bhattacharya, “Porous Si/Polysilicon
                                       for improved sensitivity pressure sensor”, Physica Status
                                       Solidi –C, 6, No.7, 1759-1762, Feb 2009.

                                    3. L.Sujatha, Vishwas S.Kale and Enakshi Bhattacharya,
         Journal published :
                                       “Critical study of high-sensitivity pressure sensors with
                                       silicon / porous silicon composite membranes, J.
                                       Micro/Nanolith. MEMS MOEMS, Vol. 8, 033070, Sep.

                                    4. L.Sujatha and Enakshi Bhattacharya, “Composite Si/jPS
                                       membrane pressure sensors with micro and macro-porous
                                       silicon”, Sadhana, IISc. Publication, Vol.34, Part 4, 643-
                                       650, August 2009

                               1.     L.Sujatha, V. Vinoth Kumar and Enakshi Bhattacharya,
Conference/FDP/Workshop               “Fabrication of High Sensitivity Pressure Sensor Based on
                                      Porous Silicon”, Proc. of IWPSD-2005, Vol 1, Intl.
     Workshop on Physics of Semiconductor Devices, December
     13-17, 2005, Delhi, p 620-624.

2.   L.Sujatha and Enakshi Bhattacharya, “Formation and
     Characterization of porous silicon for MEMS application”,,
     “International   Symposium    for   Research   Scholars   on
     Metallurgy, Materials Science and Engineering (ISRS-
     2006)”, IITM, Dec 18-20, 2006 p 734-739.

3.   L.Sujatha and Enakshi Bhattacharya, “Silicon/Porous Silicon
     composite membrane for high sensitivity pressure sensor”,
     SPIE Photonics West 2007, MOEMS/MEMS Components
     and their Applications IV Special Focus Topics: Transducers
     at the Micro-Nano Interface, 20 - 25 Jan 2007, San Jose,
     California USA, p 6464O01-08.

4.   Enakshi Bhattacharya and L Sujatha, “Composite Silicon/
     Porous Silicon membranes for low pressure sensors”, Proc.
     of IUMRS-ICAMS 2007, Intl. conference on advanced
     materials, Bangalore, October, 2007.

5.   L. Sujatha and Enakshi Bhattacharya, “Stress measurement
     and reliability study of composite Si/ macro PS for pressure
     sensors”,   International    Workshop    on    Physics    of
     Semiconductor Devices IWPSD 2007 at Indian Institute of
     Technology Bombay, Mumbai 16-20 December 2007 p 737-
     739.        Received Best Poster Award.

6.   L. Sujatha and Enakshi Bhattacharya, “Sensitivity and
     stress effects of composite Si-Micro/Macro PS for
     pressure sensor applications”, SPIE Photonics West 2008,
     MOEMS/MEMS         -2008,    Micro/Nanofabrication:   6882-
     Micromachining and Microfabrication Process Technology
                                     XII, 19 - 24 Jan 2008, San Jose, California USA p 68820H1-

                           7.        L.Sujatha and Enakshi Bhattacharya, “Porous Si/Polysilicon
                                     for improved sensitivity pressure sensor”, 6th International
                                     Conference    on   Porous        Semiconductors   Science   and
                                     Technology (PSST 2008) 10-14 March 2008 at Mallorca,

                           8.        L.Sujatha, V.S.Kale and Enkshi Bhattacharya, “Improvement
                                     in Silicon/Porous Silicon composite membranes” accepted
                                     for the “International conference on MEMS (ICMEMS) to be
                                     held in 3-5, January 2009 at IIT Madras.

                           9.        L.Sujatha and Enakshi Bhattacharya, “Mitigating the
                                     irreversible deformation with pressure in silicon/porous
                                     silicon composite membranes” International Conference on
                                     Reliability, Packaging, Testing and Characterization of
                                     MEMS/MOEMS and nanodevices which is a part of the
                                     SPIE     symposium          on       SPIE    MOEMS-MEMS:
                                     Devices/Applications/Reliability, 7592-31, at San Francisco,
                                     USA during 23-28 Jan 2010.

                                1. Organized a two day workshop on “MEMS Technology and
                                      Applications (MEMSTA 09)” at Rajalakshmi Engineering
                                      College, Chennai on 11th and 12th September 2009
  Workshops Organized           2. Organized a special lecture on “MEMS” by Prof. Ash
                                      Parameswaran, Director of Micromechanics Laboratory,
                                      Simon Frazer University, Canada
                                1.    “Overview of MEMS Technology and Applications” at
                                     Department of Instrumentation and Control Engineering,
Guest Lectures Delivered
                                     SRM University, Kattangulathur on 27.08.09
                                2. “MEMS” at Rajalakshmi Institute of Technology on Jul
                                    3. “MEMS Applications for Automotives” at Department of
                                        Automobile Engineering, REC on 16th Aug 2010

                            National MEMS Design Center supported by Govt. of India
  Sponsored & consultancy
                          : under National Program on Micro and Smart Sensors
          Books published : NIL
                                        “Best   Woman     Engineer”   award   by   Pondicherry
                                 Engineering College, Puducherry and Energy Society of India on
                                 25th October 2007.
       Awards/Fellowships :
                                         “Best Poster” award at the Fourteenth International
                                 Workshop on the Physics of Semiconductor Devices (IWPSD) 2007
                                 organized by IITB and TIFR, Mumbai between 16th – 20th
                                 December 2007.
                                      Research Activities
      Other responsibilities :
                                      Member of Research Advisory Board, REC
                                      Member of Institution of Engineers (India)
            Membership in             Life member of Indian Society for Technical
      Professional Society             Education
                                    Member of Int. Soc. for Photonic Engineers (SPIE)
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