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RUDOLPH Technology Inc Auto EL IV Ellipsometer

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					         RUDOLPH Technology Inc. Auto EL IV Ellipsometer
         No. 3502

         OPERATING PRINCIPLE : Null Seeking
         OPERATING WAVELENGTH: 405nm,546nm,633nm
         (BW=± 5nm)
         RESOLUTION & ACCURACY at 633nm:
         Polarizer or Analyzer 0.05◦
         DELTA 0.1◦
         PSI 0.05◦
         Resolution and accuracy of measured film thickness and film
         or substrate refractive index depends on the film–substrate
         system and the film thickness. 3 to 10 angstroms and 0,01
         refractive index units are typical for silicon oxide films on
         silicon.
         ANGLE OF INCIDENCE:
         Pin Locations 70◦ ±.02◦ and 90◦ ±.02◦
         MEASURING TIME:
         Typical 17 seconds
         Maximum *50 seconds
         Add 10 seconds for printout & 10 seconds for wavelength change.
         DISPLAY:
         Display film thickness, index order thickness or substrate N and K as well as prompting message to the operator.
         DIGITAL OUTPUT:
         Serial ASCII. R5–232
         SEMI Equipment Communication Standard – II
         SAMPLE STAGE:
         The standard sample stage has vertical adjustment plus tilt adjustment about vertex of angle of incidence and about
         axis formed by intersection of plane of sample. Maximum sample size 150mm.
         DATA REDUCTION:
         Double absorbing film data reduction software similar to the double transparent film software but with the additional
         capability of calculating the parameters for single or double absorbing films, as well as non–absorbing films. SECS II
         compatibility permits replacement of the operator initiated functions by an external computer, and provides complete
         data transmission of measured and computed results to an external computer. Poly/oxide, poly/ nitride data reduction
         also included.
         AUTOCOLLIMATOR/MICROSCOPE:
         Provides convenient switching between autocollimator and microscope function. Microscope function provides a 4mm
         field of view, 40X magnification and cross hairs for viewing of sample and locating measurement area. Autocollimator
         provides precise and easy sample alignment.
         THERMAL PRINTER:
         Built–in. Dot–matrix format. Alpha–numeric.




EES EQUIPMENT EXCHANGE & SERVICE GmbH · Erpfelweg 6 · D - 88662 Überlingen · Germany ·Telefon: +49 7773 931111 · eMail: info@ees-gmbh.com · www.equipmentexchange.de
           POWER REQUIREMENTS:
           115V ± 10V 50/60Hz 230W or
           230V ± 10V 50/60Hz 230W




EES EQUIPMENT EXCHANGE & SERVICE GmbH · Erpfelweg 6 · D - 88662 Überlingen · Germany ·Telefon: +49 7773 931111 · eMail: info@ees-gmbh.com · www.equipmentexchange.de
EES EQUIPMENT EXCHANGE & SERVICE GmbH · Erpfelweg 6 · D - 88662 Überlingen · Germany ·Telefon: +49 7773 931111 · eMail: info@ees-gmbh.com · www.equipmentexchange.de
EES EQUIPMENT EXCHANGE & SERVICE GmbH · Erpfelweg 6 · D - 88662 Überlingen · Germany ·Telefon: +49 7773 931111 · eMail: info@ees-gmbh.com · www.equipmentexchange.de

				
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posted:5/29/2011
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