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Silicon and Elastomer Fabrication Process Goals Process

VIEWS: 18 PAGES: 1

									                                               SOI/Elastomer  Microfabrication Process
                                                                                           Aaron  Gerratt  and  Dr.  Sarah  Bergbreiter
                                                                                                  Micro  Robotics  Laboratory

Goals                                                                                                Process  Characterization
 Develop  a  process  for  integrating  a  soft  elastomer  into  an  SOI                                                                                                                                                    Silicon  and  elastomer  
 fabrication                                                                                                                                                                                                                 features  delaminated  
 Design  mechanical  devices  for:                                                                                                                                                                                           between  0.8  and  1.6  MPa
   o storing    and  rapidly  releasing  energy                                                                                                                                                                              under  normal  forces  and  
   o improving  friction    along  surfaces  of  electrostatic  inchworm                                                                                                                                                     between  40  and  70  kPa
     motors                                                                                                                                                                                                                  under  shear  forces.  The  
   o improving  robustness  of    microrobot    components                                                                                                                                                                   difference  between  the  two  
                                                                                                                                                                                                                             conditions  can  be  attributed  
Silicon  and  Elastomer  Fabrication  Process                                                                                                                                                                                to  stress  concentrations.

                                                    4)                                                       Stress-­‐strain  curves  for  Sylgard  184                Hysteresis  curves  for  Sylgard  184

                 Bare  SOI  wafer                              DRIE  silicon  trenches

 1)                                                 5)
                                                                                                          SEM  of  the  test  structure  used  to               SEM  of  test  structure  used  to                      SEM  of  test  structure  used  to  
           DRIE  elastomer  trenches                                                                     measure  strain  characteristics  of  the               measure  normal  adhesion
                                                                   DRIE  on  backside                                                                                                                                     measure  shear  adhesion
                                                                                                                        elastomer
 2)                                                 6)
                                                                                                     Micromechanical  Thrusters
        Refill  trenches  with  elastomer                     Release  of  buried  oxide
 3)                                                      Silicon                   Photoresist
                                                         Silicon  dioxide          Elastomer
        Planarize  elastomer  to  silicon  
                    surface



                                                                                                        Micromechanical  silicon  and  elastomer  thruster                   Superimposed  screenshots  of  a  thruster  kicking  a  2  mg  resistor
                                                                                                         and  a  schematic  showing  the  thruster  setup               1  is  at  0  ms,  2  is  at  8  ms,  3  is  at  12  ms,  4  is  at  17  ms,  and  5  is  at  23  ms
         Step  1                 Step  3                 Step  4                 Step  6             Micromechanical  Hinges                                                                                                         Future  Work
                                                                                                                                                                                                                                                 Motor


                                                                                                                                                                                                                                        Spring

                                                                                                                                                                                                                                                                   Solar  Cells/
                                                                                                                                                                                                                                           4-­‐bit  MicrocontrollerPower  Supply
                                                                                                                        Manipulation  of  a  silicon  cantilever  and  elastomer  hinge  with  a  probe                             Develop  new  generation  of  
                                                                                               Work  supported  by  a  DARPA  Young  Faculty  Award.                                                                               robust,  jumping  microrobots
  Silicon  trenches  that  have  been  refilled          Silicon  and  elastomer  features  
      with  elastomer  at  an  aspect  ratio              fabricated  together  in-­‐plane     References
                                                                                               A.  Gerratt,  I.  Penskiy                                    Micromechanisms                               Hilton  Head  2010,  Hilton  Head,  SC,  June  6-­‐10,  2010.
               greater  than  20:1
                                                                                               A.  Gerratt,  I.  Penskiy,  S                              -­‐                                                                                   -­‐8,  2010.
                                                                                               A.  Gerratt,  I.  Penskiy,  S                                                                                    PowerMEMS 2009,  Washington,  DC,  December  1-­‐4,  2009.

								
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