OXFR lateral direction by sanmelody

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									   Functional Specification
                                                         Oxford Danfysik
                                                         Osney Mead, Oxford
                                                         Oxon OX2 0ES UK
                                                         Phone: +44 1865 320300
                                                         Fax: +44 1865 320301

Specification for: NE CAT KB Mirror system   Author: A.Peach


Project Name: NE CAT KB Mirror system        Project Leader: J. Wiatrzyk




File reference :                             Date: 12th February 2003



 Issue      Summary of change                     Date           Approved

 01         provisional                           12/02/2003




Reference documents

 Ref.       Date/Issue    Title
Functional Specification                                                                                    Oxford Danfysik

Specification for: NE CAT KB Mirror system                                                       Project Number: 900406

Page 2 of 23                   Issue: 1                           Date: 12/02/03                       Approved:



1      Introduction .............................................................................................................................. 4
2      System Overview ..................................................................................................................... 5
    2.1 Scope of supply.................................................................................................................... 6
       2.1.1 Mirrors and benders ...................................................................................................... 6
       2.1.2 Mirror motion system ..................................................................................................... 6
       2.1.3 Support system ............................................................................................................. 7
       2.1.4 Vacuum system............................................................................................................. 7
       2.1.5 Factory testing............................................................................................................... 8
       2.1.6 Documentation .............................................................................................................. 8
3      Mirrors ..................................................................................................................................... 9
    3.1 Bender Specification .......................................................................................................... 11
4      Mirror motions ........................................................................................................................ 12
    4.1 General description ............................................................................................................ 12
    4.2 Mirror position specification ................................................................................................ 12
    4.3 Overview of Mirror Movement Mechanics ........................................................................... 13
       4.3.1 External Vertical Jacks ................................................................................................ 13
       4.3.2 In-vacuum Lateral Translation and Rotation ................................................................ 14
       4.3.3 In Vacuum Piezo (VFM only) ......................................................................................... 15
       4.3.4 External Wiring.............................................................................................................. 15
    4.4 Overview of Available Mirror Motions ................................................................................. 16
5      Support System ..................................................................................................................... 18
    5.1 Synthetic granite plinths ..................................................................................................... 18
    5.2 Common mirror subframe................................................................................................... 19
    5.3 Mirror vessel support frame ................................................................................................ 19
    5.4 Access ............................................................................................................................... 19
6      Vacuum System..................................................................................................................... 20
    6.1 Vacuum Vessel .................................................................................................................. 20
7      Factory testing ....................................................................................................................... 22
    7.1 Bakeout & Vacuum Tests ................................................................................................... 22
    7.2 MotionTests........................................................................................................................ 22
    7.3 Fidicialisation...................................................................................................................... 22



A-QA-WI 4 F1                                             Commercial in confidence                       Issue: provisional dated 12/02/03
Functional Specification                                                              Oxford Danfysik

Specification for: NE CAT KB Mirror system                                   Project Number: 900406

Page 3 of 23            Issue: 1                    Date: 12/02/03                Approved:

8    Design standards and manufacturing procedures .................................................................. 23




A-QA-WI 4 F1                                 Commercial in confidence              Issue: provisional dated 12/02/03
Functional Specification                                               Oxford Danfysik

Specification for: NE CAT KB Mirror system                      Project Number: 900406

Page 4 of 23        Issue: 1                 Date: 12/02/03         Approved:


1 Introduction
This specification details the requirements for a Kirkpatrik-Baez (KB) X-ray beam focusing system
to operate on the Phase 1 NE-CAT undulator beamline at the Advance Photon Source (APS).

The mirror system includes the mirrors and 4 cylinder benders designed and supplied by (SESO).




A-QA-WI 4 F1                         Commercial in confidence       Issue: provisional dated 12/02/03
Functional Specification                                                                  Oxford Danfysik

Specification for: NE CAT KB Mirror system                                    Project Number: 900406

Page 5 of 23        Issue: 1                         Date: 12/02/03                  Approved:


2 System Overview
This specification details the mechanics of the mirror system which comprises a pair of
mechanically bent mirrors to focus the monochromatic beam in both horizontal and vertical
directions. The exact position of the focal spot of the X-ray beam will be adjustable by
independantly altering the curvature of the horizontal and vertical mirrors.

The two mirrors are arranged as follows:-

   A Horizontal Focusing Mirror (HFM) 1.2m in length, 85mm wide. The reflective surface will be
    orientated in the vertical plane

   A Vertical Focusing Mirror (VFM) 0.9m in length, 85mm wide. The reflective surface will be
    orientated in the horizontal plane.

The HFM is situated upstream (towards source) of the VFM and both mirrors will be fitted with 4
cylinder benders to provide eliptical bending of the mirrors.

Each mirror will be mounted independently on kinematic mounts and feature two reflective strips.
Both systems will be enclosed in a single rectangular vacuum vessel and each will have an
independent motorised positioning system which provides 5 axes of movement to enable precise
alignment in terms of height, pitch, roll, yaw and transverse movements.

The vessel will be decoupled from the mirror positioning mechanics and shall be supported
separately. The optical elements and positioning systems shall be supported on a high stability
mounting sub frame. Both support systems will have manual adjustment capability in all 6 degrees
of freedom for initial alignment.




                                HFM                                           VFM


          VESSEL
          SUPPORT
          FRAME



                          SYNTHETIC GRANITE PLINTH                    SYNTHETIC GRANITE PLINTH


                                                       SUBFRAME




A-QA-WI 4 F1                                Commercial in confidence                 Issue: provisional dated 12/02/03
Functional Specification                                                    Oxford Danfysik

Specification for: NE CAT KB Mirror system                          Project Number: 900406

Page 6 of 23            Issue: 1               Date: 12/02/03          Approved:

2.1   Scope of supply

2.1.1 Mirrors and benders

(See Section 3)

HFM - The mirror shall comprise of an uncooled substrate of Ultra Low Expansion glass (ULE)
1200mm long by 85 mm wide. The substrate will be ground and polished by SESO to produce a
sideways reflecting mirror surface bent into an elliptical shape.

The surface will have two 25mm wide stripes running along its length, one of Platinum (Pt) and the
other of Rhodium (Rh). The Pt and Rh will be laid down on a binding layer of Chromium and will be
separated by an uncoated stripe 20mm wide.

VFM - The mirror shall comprise of an uncooled substrate of Ultra Low Expansion glass (ULE)
900mm long by 85 mm wide. The substrate will be ground and polished by SESO to produce an
upwards reflecting mirror surface bent into an elliptical shape.

The surface will have two 25mm wide stripes running along its length, one of Platinum (Pt) and the
other of Rhodium (Rh). The Pt and Rh will be laid down on a binding layer of Chromium and will be
separated by an uncoated stripe 20mm wide.

Benders

Both mirrors will be fitted to a SESO 4 Cylinder Benders that interface to the system via 3
kinematic spherical mounts. Each bender incorporates two 4 phase stepper motors (1.2 A max
current) each with 2 limit switches and a home switch. Stepper motor drives and controls are
not included in the scope of supply.

2.1.2 Mirror motion system

(See Section 4)

Each mirror movement system consists of the following items:-

              2 in-vacuum high precision Nanomotion HR8 driven translation stages providing
               transverse translation and yaw rotation (VFM) or pitch rotation (HFM). A Renishaw
               RGH25 in-vacuum incremental encoder will be attached to each translation stage.

              3 out of vacuum 5-phase stepper motor driven vertical jacks, providing vertical
               translation (VFM and HFM), roll and pitch (VFM) or yaw (HFM) rotations. A Renishaw
               RGH24 optical incremental encoder will be fitted externally to each jack.

              3 mechanical movement feedthroughs for the vertical jacks.

              A Piezosystem Jena PAHL40 piezo stack type actuator at one end of the VFM mirror to
               provide fine pitch adjustment over a very small angular range.



A-QA-WI 4 F1                             Commercial in confidence      Issue: provisional dated 12/02/03
Functional Specification                                                Oxford Danfysik

Specification for: NE CAT KB Mirror system                       Project Number: 900406

Page 7 of 23        Issue: 1                 Date: 12/02/03          Approved:

The Nanomotion motors will be supplied with driver units, however controls and software are
not included.

Both the Renishaw RGH25 (UHV) and RGH 24 (in air) optical encoders have effectively the same
technical specification and both have with a resolution of 0.1 m. A reference mark is also included
as an absolute reference which can be postioned as required. The encoders will be suppplied with
interpolator units, however readout units and circuits are not included in the scope of supply.
RGC-3 (3 axis) digital readouts are available from Renishaw. Details on the encoders and
readouts can be found on the Renishaw website at www.renishaw.co.uk .

Controls for 5-phase stepper motion jacks are not included in the scope of supply.

The control electronics and software for the Piezosystem Jena PAHL40 are included in the scope
of supply and will be built up from the following main components and housed in an industrial rack
mount.
   1 off ENT 40/20 Power Supply

 1 off ENV 40 SG Amplifier module 40 mA, with integrated strain gauge controller.
  Analogue input voltage 0 – 10 V
  Output voltage –10 V to 150 V

   1 off EDA 4 RS 232 interface card for ENV system
    The Piezo actuator controller has an RS232 connection, however for fast scanning it should be
    used in analogue mode.

2.1.3 Support system

(See Section 5)

The whole assembly will be mounted on a common sub frame and supported on 3 manually
adjustable feet, providing 6 degrees of freedom for initial system setup.

The mirror system support shall include the following items:-

   Two synthetic granite support plinths

   One painted subframe to support the synthetic granite support plinths.

   One painted mirror vessel support frame.

2.1.4 Vacuum system

(See Section 6)

   One vacuum vessel stainless steel baseplate equipped with ports.

   One vacuum vessel lid fabricated from stainless steel equipped with ports.

A-QA-WI 4 F1                          Commercial in confidence       Issue: provisional dated 12/02/03
Functional Specification                                               Oxford Danfysik

Specification for: NE CAT KB Mirror system                      Project Number: 900406

Page 8 of 23        Issue: 1                 Date: 12/02/03         Approved:

Customer supplied vacuum components not included:-

   Bellows to connect the ion pump to the vacuum vessel flange.

   Ion pumps and associated cables and controllers.

   Vacuum gauges plus associated cables and controller.

   Vacuum valves

2.1.5 Factory testing

(See Section 7)

Optical measurement and inspection of the mirror and testing of bender performance will be
carried out at SESO. The mirror system shall be tested at Oxford Danfysik’s Osney Mead works.
Full specifications and procedures shall be prepared in advance. These shall be submitted to the
customer for information. Customer representatives may witness these tests at Oxford Danfysik’s
works or they visit SESO to witness the mirror metrology.

2.1.6 Documentation

(See Section 8)

A full manual covering the mirror systems shall be written and supplied to the customer. General
arrangement drawings of the systems shall also be provided. Any necessary part drawings for
spares purposes can also be provided. Testing procedures and results shall be included in the
manual.




A-QA-WI 4 F1                         Commercial in confidence       Issue: provisional dated 12/02/03
Functional Specification                                              Oxford Danfysik

Specification for: NE CAT KB Mirror system                     Project Number: 900406

Page 9 of 23         Issue: 1                Date: 12/02/03        Approved:


3 Mirrors
HFM Mirror specification:
  Substrate Material               ULE
  Substrate dimensions ( mm )      1200 mm long x 85 mm wide
                                   Thickness TBA
  Active area                      1100 mm x 70 mm (HFM)
  Orientation                      HFM – reflecting horzontally , varying by +/- 1
                                   degree in pitch in vertical plane
  Shape                            Two actuator bender on a tangential cylinder to
                                   produce an elliptical shape.
  Sagittal slope error             25 rad (5 arc seconds) RMS.
  Unbent tangential radius         > 50 km
  Tangential slope error            2.5 rad (0.5 arc second) RMS.
  Bent Tangential Radius           6.0 km to 2.2 km (HFM)
  Coating                          25mm Rh strip and 25 mm Pt strip with
                                   Chromium binder layer separated by 20mm
                                   uncoated strip
  Thickness of coating             >200Å
  Roughness                        3 Å RMS. Best effort 2 Å RMS for lines parallel
                                   to the length
  Heatload                         Negligible
  Cooling                          None fitted




A-QA-WI 4 F1                        Commercial in confidence       Issue: provisional dated 12/02/03
Functional Specification                                              Oxford Danfysik

Specification for: NE CAT KB Mirror system                     Project Number: 900406

Page 10 of 23        Issue: 1                Date: 12/02/03       Approved:

VFM Mirror specification:
  Substrate Material               ULE
  Substrate dimensions ( mm )      900 mm long & 85 mm wide
                                   Thickness TBA
  Active area                      600 mm x 70 mm
  Orientation                      VFM – reflecting upwards, varying by +/- 1
                                   degree in pitch in the horizontal plane
  Shape                            Two actuator bender on a tangential cylinder to
                                   produce an elliptical shape.
  Sagittal slope error             25 rad (5 arc seconds) RMS.
  Unbent tangential radius         > 50 km
  Tangential slope error            2.5 rad (0.5 arc second) RMS.
  Bent Tangential Radius           5.0 km to 1.5 km (VFM)
  Coating                          25mm Rh strip and 25 mm Pt strip with
                                   Chromium binder layer separated by 20mm
                                   uncoated strip
  Thickness of coating             >200Å
  Roughness                        3 Å RMS. Best effort 2 Å RMS for lines parallel
                                   to the length
  Heatload                         Negligible
  Cooling                          None fitted




A-QA-WI 4 F1                        Commercial in confidence      Issue: provisional dated 12/02/03
Functional Specification                                                     Oxford Danfysik

Specification for: NE CAT KB Mirror system                         Project Number: 900406

Page 11 of 23        Issue: 1                Date: 12/02/03            Approved:

3.1    Bender Specification

Each mirror is fitted with a SESO 4-cylinder bender with a double actuator. The actuators operate
on the 4 cylinders via lever arms. The mirror rests on 2 of the cylinders (located at either end of the
mirror) and is bent by the 2 other cylinders. The cylinders are machined to allow the X-ray beam to
pass through.

The stepper motors are located in a helium atmosphere and separated from vacuum by bellows.
The 4 phase stepper motor drive is fitted with limit switches and a datum switch.

If the electric power supply fails to the bender the radius remains fixed.

Note: Power consumption must be limited or shut down when the radius is adjusted in order to
limit warming of the assembly by the stepper motor.

The bender and mirror is set up by SESO at their factory and should not need any further
adjustment.




A-QA-WI 4 F1                           Commercial in confidence        Issue: provisional dated 12/02/03
Functional Specification                                                        Oxford Danfysik

Specification for: NE CAT KB Mirror system                           Project Number: 900406

Page 12 of 23        Issue: 1                   Date: 12/02/03               Approved:


4 Mirror motions
4.1   General description

The HFM and VFM mirrors shall be mounted inside a single rectangular ultra-high vacuum (UHV)
chamber via structural cast resin (synthetic granite) plinths mounted on a common subframe.

For the HFM, the pitch and x axis movement shall be through the two horizontal drives in the
vacuum. The yaw, roll and vertical motions shall be achieved by a set of 3 stepper motors driven
vertical jacks.

For the VFM, the yaw and x axis movement shall be through the two horizontal drives in the
vacuum. The pitch, roll and vertical motions shall be achieved by a set of 3 stepper motor driven
vertical jacks.

Mirror position shall be referenced to outside vacuum using fiducial points and a level.

                          Z Strip                                                      Z
      HFM                    Selection
                                                          VFM
                                Pitch                                                       Yaw

         Beam                                                  Beam
                                        Roll                                                       Roll
                                                  Y                                                              Y

                          Yaw                                Strip                     Pitch
                                                             Selection
                X                                                        X



Note: X axis is defined as across the beam (lateral), Y axis is defined as along the beam
(longitudinal), whilst the Z axis is defined as vertical.

4.2   Mirror position specification

The mirror system will be positioned in the beamline and fixed to the floor. The position of each
mirror shall be surveyed and adjusted manually to ensure that it is in the correct nominal position
and attitude.

The mirror active surface has a nominal height of Z=1425 mm above the floor and the nominal
centrelines of the active surfaces of each mirror will be centred at this height. However, the support
frames will be mounted on thermo resin grouted steel surface plates (NE-CAT supply) which stand
off the concrete floor by around 25 mm. Therefore the frame designs will assume a height of 1400
mm from the floor to the centrelines of the mirrors.

The common mirror support subframe shall be manually adjustable by means of three adjustable
feet that allow horizontal and vertical adjustment. Full range of foot movement shall be ±25 mm
A-QA-WI 4 F1                              Commercial in confidence           Issue: provisional dated 12/02/03
Functional Specification                                                   Oxford Danfysik

Specification for: NE CAT KB Mirror system                         Project Number: 900406

Page 13 of 23        Issue: 1                 Date: 12/02/03            Approved:

vertical adjustment allowing for variation in floor height and nominal positioning of the mirror
system in roll (Ry), pitch (Rx) and height (Tz). Full range horizontal adjustment shall be ±25 mm
allowing for nominal positioning of the mirror system in yaw (Rz), lateral (Tx) and longitudinal (Ty)
position.

The attitude of the mirror and nominal position of its centre point shall be related to external
fiducials mounted on the system with an accuracy of 1 mm.

4.3   Overview of Mirror Movement Mechanics

Once the frames have been manually positioned on the floor then various motorised fine
adjustments of the mirror substrates inside the vessel shall be available. This allows each mirror to
be set up optically with the rest of the beamline.

4.3.1 External Vertical Jacks

Three vertical jacks will be mounted on each mirror’s synthetic granite plinth, outside the vacuum
vessel.

In the case of the HFM, they provide vertical translation in order to select mirror stripes and provide
pitch and roll and yaw rotations.In the case of the VFM, they provide vertical translation and roll
and pitch rotations. In both cases, the mirror and bender shall be fixed to a rigid base plate which
shall be supported inside the vacuum vessel sitting on three rigid, vertical connecting rods via
cone, flat and vee kinematic mountings. The connecting rods enter the vacuum vessel through the
baseplate via three edge welded bellows feedthrough units and shall be rigidly connected to the
jacks via a thermal break.

Each mirror’s vertical jacks shall be arranged symmetrically about the beam axis with a single one
(jack 1) on the beam axis at one end of the mirror and a pair (jacks 2 and 3) across the beam axis
at the other.

In the case of the HFM, the spacing between centres of jack 1 and jacks 2 and 3 shall be
approximately 1100 mm (Ty) and spacing between jacks 2 and 3 shall be aproximately 240 mm
(Tx).

In the case of the VFM, the spacing between centres of jack 1 and jacks 2 and 3 shall be
approximately 800 mm (Ty) and spacing between jacks 2 and 3 shall be aproximately 240 mm
(Tx).

The jacks shall be actuated by a 5 phase stepper motor driving a 2 mm pitch precision leadscrew
via a 25:1 gearbox. In full step mode, the motor allows 500 steps per revolution providing a
resolution of 0.16 m per step. The maximum range of movement provided by each jack will be 
40 mm.

Each vertical jack will be fitted with an external Renishaw RGH24 optical encoder with a resolution
of 0.1 m. A reference mark is also included as an absolute reference. This can be positioned at
any convenient position (e.g. nominal mid position).



A-QA-WI 4 F1                           Commercial in confidence         Issue: provisional dated 12/02/03
Functional Specification                                                    Oxford Danfysik

Specification for: NE CAT KB Mirror system                          Project Number: 900406

Page 14 of 23        Issue: 1                 Date: 12/02/03            Approved:

Jack travel shall be limited by switches that also act as datum switches with a repeatability of 1 m.
Vertical jack position shall be determined by step counting from the datum point and / or with
reference to the encoder.

4.3.2 In-vacuum Lateral Translation and Rotation

For the HFM, 2 in-vacuum Nanomotion HR8 drives on the support plate provide horizontal
translation and pitch rotation of the bender mounting plate.

For the VFM, 2 in-vacuum Nanomotion HR8 drives on the support plate provide horizontal
translation in order to select mirror stripes and provide yaw rotation of the bender mounting plate.

Note: Nanomotors are electronic motors based on the principles of ultrasonic standing waves in
piezoelectricity and operate similarly to DC servo motors with the high resolution and fast dynamic
performance of piezo actuators.

For both the HFM and VFM, the bender mounting plate shall be located by kinematic mounts
which allow rotation and translation while maintaining the longitudinal (Y) position of the mirror and
bender relative to the source.

The lateral (translation across the beam) and yaw (VFM) or pitch (HFM) rotation shall be used to
align the mirror with the beam.

The mirror assembly shall be kinematically mounted onto a support structure via 3 tooling balls and
3 vees. The support structure shall be kinematically mounted onto 2 independent slideways
mounted at each end of the structure.

The interface between the translation plate and the translation tables comprises of 3 spheres
sitting on a cone, vee and flat. The cone shall be fitted to the translation table at one end, the flat
and vee to the table at the other. Each translation table shall be mounted on 2 pairs of ultra high
vacuum, bakeable, precision rolling element linear slides. The slides themselves shall be mounted
to a rigid translation base plate.

The slides shall be set up so that the pitch change from one position to the other shall be
predictable and reproducible to within 10 µrad, allowing any pitch change to be recovered by
adjusting the pitch drive. The linear slides move with the pitch, roll and vertical motion of the mirror,
consequently the horizontal motion remains in the plane of the mirror at all times. The separation
between the slides shall be approximately 900 mm for the VFM and 1100 mm for the HFM.

Rotation adjustment for Yaw (VFM) or Pitch (HFM) can be achieved by driving the translation
actuators in opposite directions by equal amounts. This requires some relative sliding motion
between the mounting balls and their mounts. Limit switches shall be fitted between the translation
plate and one of the translation tables to limit this rotation.

An adjustable ultra-high vacuum bakeable limit switch prevents over travel on each actuator. A
precision datum switch sets the other end of travel and provides a datum position with a
repeatability of 1.0 µm. Horizontal table position shall be determined by step counting from the
datum point or with reference to the in-vacuum encoders. The nanomotor devices are pre-loaded
at the interface to each translation stage and maintain position even when powered off.
A-QA-WI 4 F1                            Commercial in confidence         Issue: provisional dated 12/02/03
Functional Specification                                                Oxford Danfysik

Specification for: NE CAT KB Mirror system                       Project Number: 900406

Page 15 of 23       Issue: 1                 Date: 12/02/03          Approved:

Note: Should any in-vacuum switches fail, nanomotors can be powered into hard stops and run
continuously without damage.

4.3.3 In Vacuum Piezo (VFM only)

In the case of the VFM, an additional Piezosystem Jena PAHL40 piezo stack type actuator will be
included at the single (jack 1) end in order to provide rapid and very fine pitch adjustment for the
VFM with the mirror pivoting about jacks 2 & 3. The piezo actuator comes supplied with an integral
strain gauge which will provide positioning feedback of the actuator when under closed loop
control.

Note: Since the piezo will be in vacuum, its movement will not be registered by the external jack
encoders. However the piezo controller display can be simply toggled to display its motion in terms
of either microns moved or the applied voltage.

4.3.4 External Wiring

Stepper motor power leads and associated limit switch leads will terminate in a bracket mounted
female ELCO header (one per axis) using the APS standard wiring as given in the customer
specification




A-QA-WI 4 F1                          Commercial in confidence       Issue: provisional dated 12/02/03
Functional Specification                                                Oxford Danfysik

Specification for: NE CAT KB Mirror system                      Project Number: 900406

Page 16 of 23          Issue: 1              Date: 12/02/03          Approved:

4.4     Overview of Available Mirror Motions

HFM Table of Motions
      Motion                      Parameter           Specification
      Pitch                       Drive               UHV Nanomotion HR8 driven translation stages
      (Rotation about Z Axis)     Range                1
                                  Resolution          < 0.2 µrad
                                  Repeatability        < 1 µrad
      Roll                        Drive               Vertical jacks
      (Rotation about Y Axis)     Range                1
                                  Resolution          < 3 µrad
                                  Repeatability       5 µrad
      Yaw                         Drive               Vertical jacks
      (Rotation about X Axis)     Range                1
                                  Resolution          < 0.2 µrad
                                  Repeatability       < 1 µrad
      Vertical (Z Direction)      Drive               Vertical jacks
                                  Range               + 40.0 mm
                                  Resolution           < 0.2 µm / motor step
                                  Repeatability        < 0.5 µm
      Lateral (X Direction)       Drive               UHV Nanomotion HR8driven translation stages
                                  Range               + 25 mm
                                  Resolution          < 0.2 µm
                                  Repeatability        <0.2 µm




A-QA-WI 4 F1                         Commercial in confidence        Issue: provisional dated 12/02/03
Functional Specification                                                Oxford Danfysik

Specification for: NE CAT KB Mirror system                      Project Number: 900406

Page 17 of 23          Issue: 1              Date: 12/02/03         Approved:

VFM Table of Motions
    Motion                        Parameter           Specification
    Pitch (VFM)                   Drive               Vertical jacks
    (Rotation about X Axis)       Range                1
                                  Resolution          0.4 µrad / motor step
                                  Repeatability       < 1 µrad
    Fine Pitch (VFM)              Drive               Piezosystem Jena PAHL40 piezo stack type
                                                      actuator
    (Rotation about X Axis)       Range                20 µrad
                                  Resolution          0.1 µrad
                                  Repeatability       < 1 µrad
    Roll                          Drive               Vertical jacks
    (Rotation about Y Axis)       Range                1
                                  Resolution          < 3 µrad
                                  Repeatability       5 µrad
    Yaw (VFM)                     Drive               UHV Nanomotion HR8driven translation stages
    (Rotation about Z Axis)       Range                1
                                  Resolution          < 0.2 µrad
                                  Repeatability       < 1 µrad
    Vertical (Z Direction)        Drive               Vertical jacks
                                  Range               + 40.0 mm
                                  Resolution           < 0.2 µm / motor step
                                  Repeatability        < 0.5 µm
    Lateral (X Direction)         Drive               UHV Nanomotion HR8driven translation stages
                                  Range               + 25 mm
                                  Resolution          < 0.2 µm
                                  Repeatability        <0.2 µm




A-QA-WI 4 F1                         Commercial in confidence        Issue: provisional dated 12/02/03
Functional Specification                                                                                                                  Oxford Danfysik

Specification for: NE CAT KB Mirror system                                                                               Project Number: 900406

Page 18 of 23                     Issue: 1                                       Date: 12/02/03                                   Approved:


5 Support System
The design of the support system essentially decouples the mirror vessel from the mirrors and
mechanics where the vessel base flange is independantly mounted to the floor. Each mirror’s
vertical jacks will be mounted independantly on a separate synthetic granite plinth and the two
support plinths will be mounted together on a common subframe. For ease of assembly,
transportation and installation it will be possible bolt the vessel baseplate directly to the subframe
arrangement via temporary I beams fixed to the synthetic granite blocks (shown below), however
these will be disconnected once the system is installed.

                                                                                                      2755.0




                                                                                                      2735.0




                                                         HFM                                                                              VFM
                                                                                                                                                                                       8" O/D CONFLAT
       8" O/D CONFLAT                                           1200.0                                                                         900.0                                   (ROTATABLE)
       (Fixed)




        BEAM
      DIRECTION




                                                                                                                                PIEZO (FINE PITCH VFM
          NANOMOTOR                                                                                                             SINGLE JACK END)




          ENCODER




                                                                                                                                                                                 1576.0


                         1400.0

                                                              TEMPORARY VESSEL
                                                              BASEPLATE SUPPORTS


         VESSEL                              SYNTHETIC GRANITE PLINTH                                                       SYNTHETIC GRANITE PLINTH
         SUPPORT
         FRAME
                                                                                                     SUBFRAME


             EXTERNAL
             ENCODER
             FITTED TO
            EACH JACK

                                                                                         FRAME MID
                                                                                     SUPPORT STUDS
                    25.0


                                                                                                                SPOOL PIECE / BELLOWS
                                                                                                                   (CUSTOMER SUPPLY)
                                                                           ION PUMP SUPPORT
                                                                           (CUSTOMER SUPPLY)
                                             REMOVABLE SECTION                                                                                          PHYSICAL ELECTRONICS TITAN
                                             FOR ION PUMP ACCESS
                                             (CAN BE FITTED EITHER SIDE)                                                                                600L/S ION PUMP LOW PROFILE
                                                                                                                                                        (TO BE SUPPLIED BY CUSTOMER)




5.1      Synthetic granite plinths

The plinth material is thermally stable, provides a stiff base and has exceptional vibration damping
properties. A hole in the Synthetic granite plinths allow passage of the ion pump bellows. The
system will be designed around the use of two Physical Electronics TiTan 600 low profile ion
pumps which should be floor mounted.



A-QA-WI 4 F1                                                     Commercial in confidence                                          Issue: provisional dated 12/02/03
Functional Specification                                                 Oxford Danfysik

Specification for: NE CAT KB Mirror system                        Project Number: 900406

Page 19 of 23        Issue: 1                Date: 12/02/03           Approved:

5.2   Common mirror subframe

The synthetic granite plinths shall be supported from the floor by a rigid mild steel frame. The
frame shall be fabricated from box section and finished in an epoxy powder coat for corrosion
protection.

5.3   Mirror vessel support frame

The vessel shall be supported from the floor via a substantial mild steel support frame finished in
an epoxy powder coat for corrosion protection. The additional vessel baseplate support struts can
be fitted separately prior to removing the vessel lid.

5.4   Access

Unless otherwise specified by the customer, it is assumed that access will be predominately from
the left hand side of the mirror system, looking from the source. All components will be removed
from the beamline from this side.




A-QA-WI 4 F1                          Commercial in confidence        Issue: provisional dated 12/02/03
Functional Specification                                                  Oxford Danfysik

Specification for: NE CAT KB Mirror system                         Project Number: 900406

Page 20 of 23         Issue: 1                  Date: 12/02/03         Approved:


6     Vacuum System
6.1    Vacuum Vessel

The vessel shall comprise a stainless steel baseplate onto which is bolted the vessel lid. Access to
the mirror is obtained by removing the lid. The vessel shall be rectangular and fabricated from dull
polished 304L grade stainless steel plates with full penetration welds and cleaned and prepared in
accordance with standard UHV requirements. All flanges shall be Conflats, manufactured from
304L stainless steel and sealed with copper gaskets, with the exception of the large rectangular
vessel baseplate. This bottom flange shall be sealed via a double viton O ring seal which can be
differentially pumped.

Blank flanges (or blank shipping flanges as appropriate) shall be supplied for any flanges that do
not have assemblies fitted as supplied.

All mechanisms inside the UHV space shall use UHV compatible materials with dull polished or
machined finish, which shall be cleaned following Oxford Danfysik procedures for UHV cleanliness.
UHV compatible joining methods (welding, vacuum brazing etc.) shall be used throughout. Lifting
points shall be provided on the vessel lid.

The vessel baseplate shall be fitted with four bosses for mounting fiducials. These shall accept a
standard tooling ball with a 0.25" diameter shank. The positions of the tooling ball centres may be
used to define the position of the mirror.

Table of Dimensions for Mirror vessel:

    Overall Width, (including sealing flange)          845mm approx (main vessel / frame)

    Maximum Overall Height, (from floor)               1600mm approx (closed)

    Overall Length - along beam, (entry flange to      2735mm approx
    exit flange)

    Nominal beam height (beam-in conflat centre        1425 mm
    line from floor)




A-QA-WI 4 F1                            Commercial in confidence       Issue: provisional dated 12/02/03
Functional Specification                                               Oxford Danfysik

Specification for: NE CAT KB Mirror system                       Project Number: 900406

Page 21 of 23       Issue: 1                 Date: 12/02/03         Approved:

Table of Flanges:
  Purpose                      Location                          Size (OD)                      Qty
  Beam in                      Beam inlet port at end 1          NW150 CF (8”O/D)               1
                               (inclined at 7 mrad)              Fixed
  Beam out                     Beam outlet port at end 2         NW150 CF (8”O/D)               1
                               (Level, 5mm higher than inlet)    Rotatable
  Ion pump                     Downwards beneath vessel          NW150 CF (8”O/D)               2
                                                                 Rotatable
  Viewport                     Side of vessel lid, centered on   NW150 CF (8”O/D)               2
                               beam axis and mid point of        Fixed
                               each mirror
  Mirror adjustment jacks      Base of vessel                    NW100 CF (6”O/D)               6
                                                                 tapped flange.
  Mirror loading               Baseplate                         Double Viton O ring            1
  Spare Port                   Side of vessel lid                NW35 CF (2.75” O/D)            1
                                                                 Fixed
  Bender electrical            Baseplate                         NW35 CF (2.75” O/D)            2
  connections                                                    Fixed
  Electrical feedthrough       Baseplate                         NW35 CF (2.75” O/D)            4
                                                                 Fixed
  Venting exchange gas         Baseplate                         NW63 CF (4.5” O/D)             1
                                                                 Fixed
  Ion gauge port               Baseplate                         NW35 CF (2.75” O/D)            1
                                                                 Fixed




A-QA-WI 4 F1                          Commercial in confidence      Issue: provisional dated 12/02/03
Functional Specification                                                  Oxford Danfysik

Specification for: NE CAT KB Mirror system                        Project Number: 900406

Page 22 of 23        Issue: 1                Date: 12/02/03           Approved:


7     Factory testing
7.1   Bakeout & Vacuum Tests

                                                 procedures and be compatible for use with UHV
All materials and processes shall conform to UHV-9
            -9
levels of 10 mbar and a leak rate of less than 10 mbar.l/s. Certificates for materials used in the
fabrication of the in-vacuum mechanics can be provided.

Bake out for the system shall be possible at 150 C, however once the in vacuum Nanomotors,
encoders and mirrors are fitted, bake out will be limited to 100C maximum. The vessel shall be
baked out and vacuum tested at Oxford Danfysik prior to shipment. Vacuum testing shall include
total pressure measurement and RGA scan of the mirror vessel following bakeout.
                                                                                   -7
It is anticipated that vacuum level of the complete system should reach the 10 mbar region or
better.

All vacuum pumps, gauges and equipment must be supplied to Oxford Danfysik in good time for
the vacuum tests.

7.2    MotionTests

The following motion tests shall be carried out on the completed system.
The range, resolution and reproducibility of the pitch, roll, vertical and the lateral and yaw motions
shall be measured in air using a Leica Nivel 20 electronic spirit level with a measuring resolution of
1 rad together with Heidenhain MTK incremental linear encoders with a resolution of 0.1 m.

The range of motions shall be checked in vacuum to verify clearances within the vessel and
correct operation.

7.3   Fidicialisation.

The system is fitted with four tooling ball posts attached to the upper surface of the vessel
baseplate. Three of the balls (A, B and C) define the horizontal datum of the system; two of the
balls (A and C) define the longitudinal axis of the system. The mirror active surfaces will be
referenced to the ball centres and the co-ordinates (X, Y and Z) to a precision of 0.1 mm.
The number of mirror jack steps required to set the mirrors to their nominal height (in horizontal
attitude) will be recorded relative to the lower jack datum switch.




A-QA-WI 4 F1                           Commercial in confidence        Issue: provisional dated 12/02/03
Functional Specification                                              Oxford Danfysik

Specification for: NE CAT KB Mirror system                      Project Number: 900406

Page 23 of 23       Issue: 1                 Date: 12/02/03        Approved:


8 Design standards and manufacturing procedures
The mirror positioning mechanics and vacuum vessel and support shall be designed,
manufactured and tested to the agreed specification and drawings. All Oxford Danfysik
documentation shall be written in English.




A-QA-WI 4 F1                         Commercial in confidence      Issue: provisional dated 12/02/03

								
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