MiRC Cleanroom Operations by jtl17221


									MiRC Cleanroom Operations

         Microelectronics Research Center
           Georgia Institute of Technology

    Chemical Safety Training
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• Silence your mobile
  phones for this
• Wait until a break
  before answering calls

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•   Terminology
•   Cleanroom hazards
•   Safety Practices
•   Storage and disposal of chemicals
•   Accidents and emergencies

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• MSDS—Material Safety Data Sheet
   – Describes a chemical’s properties, hazards, and safe
     use policies
• Partial Listing
   –   Chemical Property Terms
   –   Exposure, toxic effects, & exposure levels
   –   Storage & handling
   –   Emergency procedures
   –   Safe disposal & transportation

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Sources of Chemical Information
•   MiRC cleanroom website
•   http://grover.mirc.gatech.edu/safety/
•   Read ―How to Translate a MSDS‖
•   Manufacturers/suppliers
    – MSDS included with the first shipment of a

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      II—Cleanroom Hazards
• Potential hazards inside the cleanroom
  – Toxic, flammable, and corrosive gases
  – Acids and bases
  – Solvents
  – Electrical
  – Sharps—razor blades, broken wafers

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   Gas hazards (partial listing)
• Pyroforic (Silane)—burns in contact with
• Flammable (Hydrogen)
• Corrosive (Chlorine)
• Asphyxiant (Nitrogen, Argon)—will not
  support life
• These gases are used in process tools
  – You will not have to handle any of these
    gases in any form
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    Specific Chemical Hazards
• Hydrofluoric Acid
  – Corrosive, penetrates skin, destroys tissues
    and bone
  – Pain delay: 1-24 hrs after exposure
  – Use Calcium Gluconate to treat
  – 2% exposure can be fatal

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   Specific Chemical Hazards
• Acetone and Flammable Solvents
  – high vapor pressure
  – can make breathing difficult
  – extremely flammable
  – Avoid eye contact
  – attack the liver
  – headaches are common sign of exposure,
    seek fresh air

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         III—Safety Practices
•   Gas safety
•   Safe chemical practices
•   Labware
•   Proper (improper) methods
•   Personal protective equipment—PPE
•   Buddy system

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                Gas Safety
• Leave all gas maintenance to staff
• Do not:
  – cycle any valves
  – loosen any fittings
  – disconnect any gas lines
• Be aware of alarms or any unusual odors

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      Safe Chemical Practices
• Be aware of possible chemical reactions
• New chemicals must be approved by MiRC
  staff before bringing them into the
• Read MSDS before using chemicals
  – MSDS are available from web site
  – Users must provide an electronic copy of
    MSDS before brining a new chemical into the

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• Make sure that the
  labware you use is
  compatible with the
  chemicals (or
  mixtures) you pour
  into them
• Example: HF will        Good rule of thumb: use labware
  attack (etch) a glass   made out of the same type of
  container               material chemical is stored in

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   Proper (Improper) Methods
• Improper (shown)
  – Do not rinse wafer, or
    pour solvents down
    the drain
• Proper
  – Rinse wafer into
    separate waste dish
  – Pour the contents of
    the dish into the waste

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  Personal Protective Equipment (PPE)

• The following PPE is
  required while using
  acids in any hood:
  –   Eye protection
  –   Gloves
  –   Face shield
  –   Apron
• Your cleanroom
  garment is NOT
  protective equipment

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      Be Advised
                • Aprons don’t allow
                  airflow and people
                  often sweat when
                  wearing them
                • If the inside of your
                  apron is wet, do not
                  panic. It is unlikely
                  that the chemical has
                  gotten inside the

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               Buddy System
• Two or more people
  must be in the lab at
  any one time
• It is a cleanroom
  violation to be in the
  lab alone
• This is for your
  safety—and it’s the

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           Additional Issues
• Contact lenses
  – They are allowed—with a warning
  – Contact lenses may trap chemicals, making
    eyewash more difficult
  – Wear a face shield over your safety glasses when
    working in the hoods
• Buzzcards come in contact with chemicals
  inside the cleanroom, don’t put it in your
• Irresponsible people endanger everyone
  – Report unsafe practices to the cleanroom staff

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     Wet Sinks/Fume Hoods
• Fume Hood operation
  – The hoods are shared equipment—wipe it
    down before you leave
• Hot plates
  – Can cause severe burns
  – Keep flammables away from the hot plates
• Fume Hood Use
  – Do not use until properly trained

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         Electrical Concerns
• Do not operate equipment with cover
  panels removed
• Do not operate equipment with frayed
• It only takes 0.1 amps to kill you!
• For example:
  – E-beam evaporator--10,000 volts
  – Plasma etchers--high power RF
  – Most equipment runs on 208 volts 60+ amps

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    The Bottom Line on Safety
• Safety is everyone’s responsibility
• You are responsible for your own safety
• Do your homework
  – Read the Material Safety Data Sheet (MSDS)
    for every chemical you work with
  – If you do not understand, ask questions

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IV—Storage and Disposal of Chemicals
• Label all individual containers
• Change label quarterly
• Place old chemicals on storage cart



              PI: Rose, Bob

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       User Chemical Storage
• Use appropriately
  labeled storage
  – A= Acids
  – B= Bases
  – O= Oxidizers
  – P= Photoresist,
  – F=Flammables

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            Chemical Waste
• Acids and Bases
  – Pour down the drain with running city water
• Solvents & photoresist
  – Pour into the solvent waste jugs

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        Empty Waste Bottles
• Empty acid and bases
  – Triple rinse with city water, pour down the drain
• Empty solvent bottles (one gallon bottles)
  – Rinse with acetone, methanol, and isopropanol and
    dump the dirty solvent into the solvent waste
  – Rinse 3 times with city water then pour down drain
• Label rinsed bottles ―RINSED‖ and place them
  in the chemical storage chase on the cart
• Refill the squirt bottles—do no throw away

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          Waste Containers
• Place all used/waste chemicals on the
  chemical waste shelf in the chemical
  storage chase
• Do not pour plating solutions down the
  – Place them on the chemical waste shelf
  – Label the bottle
    • Ex: Chrome Etchant Waste, Gold Plating Waste,

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• Emergency Phones
• Emergency Response Equipment
• Chemical Accidents
  – Responding to a spill
  – Escalation
  – Transporting victims
• Toxic Gas Alarms
• Safety Showers
• Evacuation Routes

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        Emergency Phones
• Emergency phones
  – Located throughout the cleanroom:
    • Hallway
    • Focus Center
    • Outside Mask Shop
  – Dial x42500 (404-894-2500) Georgia Tech
    • Add this number to your mobile phone
  – State the nature of the emergency
  – Do not dial 911—they will not know where
    you are
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    Emergency Response Equipment

• Spill response kits
  – Located inside the cleanroom in the hallway
    between the gowning room and the storage
  – Contains:
     • Acid neutralizer
     • Base neutralizer
     • Absorbent material

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        Responding to a Spill
• You are expected to clean up small spills
  you made yourself
  – You know what you spilled
  – If you cannot, or are not sure what to do, call
    the staff
  – Report all spills regardless of size
  – Report all found spills, water leaks, or
    unknown materials

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•   First person—you—clean it if you can
•   MiRC staff
•   GA Tech Environmental Health and Safety
•   Important—report all spills
    – Call GTPD after hours—as well as MiRC staff

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             Toxic Gas Alarms
• Located on the cleanroom
• Sensors located near the
  gas source
• If the alarm goes off,
  evacuate the cleanroom
  level immediately
• If the alarm is silenced,
  continue to evacuate and
  return only once the staff
  has reopened the

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     Toxic Gases Used—Partial Listing

•   Phosphine
•   Silane
•   Chlorine
•   Boron Trichloride
•   Silicon Tetrachloride
•   Hydrogen Bromide
•   Ammonia
•   Do not take the alarms lightly
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 Emergency Showers/Eyewash
• Use the eyewash if you get any chemicals
  in your eyes
  – Force your eyes OPEN!
  – Buddies—make sure the victim stays in the
    eyewash for at least 15 minutes, they will lose
    track of time in the eyewash and think a few
    seconds is a long time

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         Emergency Shower
• Use the emergency shower whenever you
  are exposed on the torso, head or legs
• Take ALL of your clothes off
  – Your clothing will trap the chemicals next to
    your body
• Anyone not directly assisting the victim
  must leave the cleanroom

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       Transporting a Victim
• Minor injuries—other than chemical
  exposures—require attention proportional
  with the injury
• All chemical exposures require
• Grady Hospital is the only Level One
  trauma center in the area

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    Transportation Procedure
• Call GTPD 404-894-2500 and state the
  nature of the emergency
• For chemical exposures, use the
  Emergency Instruction Booklet located by
  the phone
  – Place a MSDS of the exposed chemical into
    the booklet
  – Print extra copies for the police and
    ambulance drivers (print at least 5 copies)
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Cleanroom Evacuation Routes

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       Evacuation Procedure
• Leave the cleanroom immediately—do not
• Gather at the front of the Pettit Building
  on Atlantic Drive
• Remove your gown outside

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What’s Wrong With This Picture?

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    What’s Wrong With This Picture?
• Do not put yourself in a
  position that increases
  the risk of chemical
• Putting your face at sink
  top level is dangerous
   – Splash hazard
   – Inhalation hazard
• Do not rest your
  hands/arms on the sink

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What’s Wrong With This

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    What’s Wrong With This Picture?

• Do not lean into the
• You expose yourself
  to harmful fumes
• Stay behind the sash
  – (The plastic screen)

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