Nordic Antenna Integrated RF-MEMS Router (NAME) by frt17672

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									Nordic Antenna Integrated RF-MEMS Router
                 (NAME)
                  Jussi Varis
    VTT Technical Research Centre of Finland
     P.O. Box 1000, FI-02044 VTT, Finland
                   www.vtt.fi
VTT TECHNICAL RESEARCH CENTRE OF FINLAND




                                                            Outline

     1.   Motivation for NAME
     2.   NAME application
     3.   NAME project organisation
     4.   The partners
     5.   Contact information




                       NICe MINT kick-off meeting, May 18th, 2006. Wanha Satama, Helsinki. Jussi Varis, VTT   2
VTT TECHNICAL RESEARCH CENTRE OF FINLAND


                                   What is NAME needed for?
                                       Smart wireless Microsystems



                      GSM/GPRS/UMTS                                                                    Satellite
                      Basestation                                                                   Communication
                                                                                                         and
                                 1000 m                                                               Navigation
                                                                                                   (GPS, GLONASS,
              WLAN                                                                                    GALILEO)
              Basestation
  www
                      R
                  C
                      F                    10m                         R
                                                                       F
                <1W,10Gops
                 > 100 Mbps   Wireless networks

                                                             10m


                                                                                 Mobile Communication
                                                                                multiband- multi-standard
                                                                               (voice, video, e-commerce)
                  WLAN
                                                                                                               Automotive radar
                  WLAN
                                                                                                            (ACC Anti-collision radar,
                                                                                                              parking aid, … etc.)

                          NICe MINT kick-off meeting, May 18th, 2006. Wanha Satama, Helsinki. Jussi Varis, VTT            3
VTT TECHNICAL RESEARCH CENTRE OF FINLAND


                               Where can RF-MEMS be used?
                                               Advanced RF Architectures
                                MEMS                                           FBAR
                 MEMS          Tunable                                         Filters
                 filters        VCO


                                                                                              LO


                                  LO




                                  LO


                                                                                              LO

                       MEMS                      MEMS Routing                               MEMS
       MEMS                                                                                                       MEMS       MEMS
                      switches                 (Switching Matrix)                          Tunable
      Antennas                                                                                                    phase     Antennas
                   (redundancy)                                                             VCO
                                                                                                                  shifter


                           NICe MINT kick-off meeting, May 18th, 2006. Wanha Satama, Helsinki. Jussi Varis, VTT       4
VTT TECHNICAL RESEARCH CENTRE OF FINLAND




                                             NAME Application

• A variety of applications need
  routers
       Co-Operative Vehicle Infrastructure
                                                                                                    in 1
        Systems (CVIS): 5-6 GHz
                                                                        antenna
       Satellite communications systems:
        12-14 GHz, 20 GHz, and 30 GHz                                                                             out 1
       Automotive radars: around 24 GHz                                                      RF-MEMS
       Radio links: 5-40 GHz                                                                  switches
       Sensor networks                                                                                           out 2
• Router with integrated antenna                                        antenna
  for 10-40 GHz range                                                                               in 2
       On-chip solution with an integrated
        antenna using RF-MEMS switch
        network
       Aim to push down to 5 GHz



                       NICe MINT kick-off meeting, May 18th, 2006. Wanha Satama, Helsinki. Jussi Varis, VTT   5
 VTT TECHNICAL RESEARCH CENTRE OF FINLAND



                                              RF-MEMS Switch
• Critical component in NAME
• Capasitive shunt switch
• Thin metal bridge above a
  metal transmission line
      bridge can be pulled down by
       applying voltage; practically
       no current consumption
      low loss
      wide bandwidth
      high isolation
      very linear
      easy to scale dimensions to fit
       almost any desired frequency
       range
      low cost fabrication
• Wafer acts as a substrate only
      glass or quartz best for
       RF/microwave applications

                        NICe MINT kick-off meeting, May 18th, 2006. Wanha Satama, Helsinki. Jussi Varis, VTT   6
VTT TECHNICAL RESEARCH CENTRE OF FINLAND




                                           NAME organisation
                                                                                                        NAME

  • Research institutes:                                                                         Overall Management
                                                                                                         VTT

    VTT, FOI, Sintef,
    Uppsala University,                                  WP100                         WP200
                                                                                                                        WP300                          WP400
                                                   Router Architecture,           Switch Design and
    Vestfold University                             Design, and Test
                                                  FOI, VTT, VUC, Sintef,
                                                                                     Fabrication
                                                                                  Router Fabrication
                                                                                                              Antenna Design, Fabrication,
                                                                                                                       and Test
                                                                                                                                              Integration and System
                                                                                                                                                  Demonstration
                                                                                                                       Uppsala                          VTT
    College                                              Uppsala                     Sintef, VUC



  • Industry partners:
    Advaplan, Ericsson                                                                                Steering group
                                                                                                    Ericsson Microwave,
    Microwave, Elektrobit                                                                             NERA Networks,
                                                                                               Q-Free, Elektrobit Microwave,
                                                                                               Silex Microsystems, Advaplan
    Microwave, NERA
    Networks, Q-Free,                                                                                  Project Manager
                                                                                                          Jussi Varis
    Silex Microsystems                                                                                       VTT



                                                                   WP100                   WP200                   WP300                   WP400
                                                               Robert Malmqvist        Geir Uri Jensen          Anders Rydberg       Tauno Vähä-Heikkilä
                                                                     FOI                    Sintef                 Uppsala                  VTT




                       NICe MINT kick-off meeting, May 18th, 2006. Wanha Satama, Helsinki. Jussi Varis, VTT                    7
VTT TECHNICAL RESEARCH CENTRE OF FINLAND



                VTT Technical Research Centre of Finland
                       (NAME overall management, WP100, WP400)
     • Microtechnologies and Sensors knowledge cluster
     • Circuits and Antennas knowledge centre, 40 research scientists
           analog and digital IC's, small and smart antennas, millimetre wave technology (MMIC's,
            MEMS, imaging), THz technology (bolometers, imaging)
     • Long MEMS experience, RF-MEMS since 1999
           MEMS varactors, capacitive MEMS switches, impedance tuners and matching networks,
            phase shifters
           MEMS switches demonstrated up to 150 GHz
     • Networks and partners: AMICOM NoE, ESA/ESTEC, IRST-Trento, Univ. of
       Michigan, NAME partners
     • Large processing facilities
           CMOS compatible process, SOI process, thin film processes




                       NICe MINT kick-off meeting, May 18th, 2006. Wanha Satama, Helsinki. Jussi Varis, VTT   8
       FOI Swedish Defence Research Agency                                                              (WP100, 400)

                                                               “A very compact        Agile on-chip MMIC receivers (LNA/filter +mixer))
                                                               smart skin X-
                                                               band digital
                                                               beamforming
                                                               antenna”
                                                                                        Area=18mm2
                                       EuMA 2004 Radar Prize
GaAs MMIC 2-18GHz 1:4 active
beamformer/router (5x6mm2)
                               RF MEMS matching networks
                               (Fabricated @ VTT)


                                                               FOI Dept. of Microwave Technology, Div. of Sensor Tech.

                                                               • Antenna system development from RF to sub-mm-wave

                                                               • Expertise in system & circuit design, test and evaluation

RF MEMS X-band 4-bits TTD                                      • CAD & measurement facilities (incl. anechoic chambers)
(4x4mm2)
                               LNA + RF MEMS 3-bits TTD
                               (hybrid circuit)                • Member of European Antenna Centre of Excellence (ACE)

                                                               • 5-15 years experience in RFIC & MMIC design, respectively

                                                               • RF MEMS circuit demonstrators designed, evaluated at FOI
                                  Sintef ICT
                                 (WP100, WP200)



    RF MEMS: IRRFT KMB Project

•   Integrated Reconfigurable
    Radio Front-End
    Technology
•   Headed by SINTEF
•   Partners: Telenor, Norw.
    Army, Nera, Q-Free,
    Intelsat, Norbit
•   Achieve reconfigurability
    in RF/microwave/mm-
    wave front-end systems,
    with respect to frequency,
    band-width, power, beam
    shape, direction ++
•   by using RF MEMS
                       SINTEF switch fabrication process (WP200)

                                                                      RF in
    Capacitive shunt broadside switch
                                            Dielectric

           GND                                            GND



               Combined pull down electrode and signal line
                                                                      RF out
                                   (a)                          (b)
•    Lower electrode: W
           • Issues: roughness, avoid hillocks, sufficient conductivity
•    Dielectric: PECVD Si3N4, 1000 Å
           • Issues: breakdown, roughness
•    Sacrificial layer: Photoresist
           • Key: Sufficient slope for Au climb => Reflow
      • Release: (Barrel O2 etching) or (wet etch + freeze dry)
•    Bridge metal: sputtered Au
           • Stress => influence on Vact and bridge length
•    Thick metal for lines: Electroplated Au
•    Semi-hermetic packaging by BCB seal
                   Microwave and MEMS technology at
                          Uppsala University
                                            (WP100, WP300)
                                                                        The Angstrom Laboratory
                       Ericsson (base-stations)


                           Uppsala University
                           SensysTraffic (R&D)


                           Ericsson
                           Centurion                                           MEMS Technology
                           Powerwave etc.         •Started 1983
                                                  • The base in materials science:
                                                    • mechanical characterization
                                                    • advanced processing
                                                    • new materials for microsystems
Microwave Group          Microstructuring         • 39 dissertations and 35 man-years (2006)
1 Professor              Group                    • One of the largest clean room in north Europe – 2400 sqm
2 Researchers            1 Professor
1 Adjunkt Researcher     1 Researcher
3 Ph.D.-students         5 Ph.D. students
                       Research in Microwave and
                       Microstructuring Technology
    Monolithic antennas                            Microstructuring
  Antenna integrated 24 GHz                   Novel process in Kapton HN
   SiGe transceiver (5 mm2)                   laminates and flexible PCB,
                                              for flexible printed antennas
                                              and microwave circuits




Developed in Uppsala in the EU project
ARTEMIS in collaboration Univ. of Ulm, VTT,
Atmel, SensysTraffic and LAAS
VTT TECHNICAL RESEARCH CENTRE OF FINLAND




                                     NAME Contact Persons

     •   VTT: Jussi Varis, jussi.varis@vtt.fi
     •   FOI: Robert Malmqvist, rma@foi.se
     •   Sintef ICT: Geir Uri Jensen, Geir.Jensen@sintef.no
     •   Uppsala University: Anders Rydberg, anders.rydberg@signal.uu.se
     •   Vestfold University College: Ulrik Hanke, UH@hive.no




                       NICe MINT kick-off meeting, May 18th, 2006. Wanha Satama, Helsinki. Jussi Varis, VTT   14
VTT TECHNICAL RESEARCH CENTRE OF FINLAND



           RF-MEMS in action: 4-element matching network




                       NICe MINT kick-off meeting, May 18th, 2006. Wanha Satama, Helsinki. Jussi Varis, VTT   15

								
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