14th Workshop on Dielectrics in Microelectronics
June 26-28, 2006 – Hotel Santa Tecla Palace, Santa Tecla (Catania), ITALY
Announcement and Call for Papers
The main objective of the symposium is to bring together specialists who work in the field of dielectrics and all aspects of their applications in the field of microelectronics. The forum is intended to provide an overview of the state of the art in this significant field, and to promote a relatively informal atmosphere for the discussion of the latest research results. The workshop deals with a range of issues in the field of advanced and new dielectrics, such as: growth and deposition, modelling and simulation, physical and electrical properties, reliability and dielectric applications. We invite you to submit an abstract for oral or poster presentation in one or more of the following areas: • • • • • • • • • • • • • • • High-k dielectrics: deposition, characterisation, integration, high-k/metal gates … Low-k dielectrics: deposition, characterisation, integration … SiO2 and oxynitrides: Growth, characterization, reliability, radiation effects and applications. Circuit implications of oxide breakdown Simulation and modeling related to dielectric issues. Non volatile memories based on novel concepts (nanocrystals, SONOS, NROM, PCRAM, etc.) Defects in gate dielectrics and their interface with semiconductors. Dielectrics on alternative substrates (Ge, SiGe, SiC and III-V compounds) Reliability, electrical and physical characterisation of thin and thick dielectrics. Dielectrics in MIM capacitors, MEMS and sensors Ferroelectrics for memory applications Oxidation of IV-IV alloys (such as SiGe, SiC). Properties and reliability Silicon on insulator dielectric studies Light emission from Si/SiO2 superlattices and nanoclusters in dielectrics Dielectrics in sensor applications
INVITED SPEAKERS: Sufi Zafar, IBM, Yorktown; Gilles Reimbold, CEA-LETI, Grenoble; Wilman Tsai, Intel, Santa Clara; Ben Kaczer, IMEC, Leuven; G. La Rosa, IBM, Fishkill; Francesco Priolo, University of Catania; Franz Ungar, Infineon Technologies AG, Germany; Alex Demkov, University of Texas at Austin, Roberto Bez, STM, Agrate; Muralidhar Ramachandran, Freescale, Austin; Chadwin Young, SEMATECH.
PRELIMINARY SUBMISSION DEADLINE: April 6, 2006
Please send your 2 page abstract (including figures) preferably by e-mail (MS Word or pdf file) to abstract-wodim2006@imm.cnr.it , or normal mail to the Chair (no fax submissions). Please state your preference for oral or poster presentation. Submissions will be acknowledged and final notification will be sent in May 2006.
Chair
Salvatore Lombardo, WoDiM 2006 CNR-IMM, Stradale Primosole, 50
Catania, ITALY Tel: + 39 095 5968 223 Fax: + 39 095 5968 321 e-mail: salvatore.lombardo@imm.cnr.it
Web Site: http://www.imm.cnr.it/wodim_2006/index.htm WoDiM Committee: Gérard Ghibaudo, Emmanuel Vincent, Gabriella Ghidini, Blas Garrido Fernandez,
Hans-Joachim Muessig, Andreas Martin, Eric M. Vogel, Paul Hurley, Gérard Sarrabayrouse, Montserrat Nafría Maqueda, Anton Bauer, Alessandro Paccagnella, Jasmine Petry