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Innovations in Thin Film
ITFPC09 Processing and Characterisation
NANCY (F) – November 17-20, 2009
Last updated November 13
Tuesday, November 17
Conference at "Faculté des Sciences et Techniques"
Amphitheater A8 - Vandoeuvre les Nancy
1.00 pm Conference registration
2.00 pm Welcome to the participants
J.P. Finance (President of Université Henri Poincaré, Nancy I)
S. Andrieu (Institut Jean Lamour, Nancy)
SESSION 1: OPENING LECTURE
Chair: Stéphane Andrieu (F)
I 1.1 2.10 pm Physics and new materials development for future nanoscale magnetic recording
read heads
(Invited lecture)
Stefan MAAT – HITACHI, San Jose CA (USA)
SESSION 2: MICRO AND NANO-PATTERNING OF THIN FILMS (Topic 5)
NEW PROPERTIES AND APPLICATIONS RESULTING FROM PATTERNED
THIN FILMS (Topic 6)
Chairs: Walid Daoud (AUS) – Omar Elmazria (F)
I 2.1 2.40 pm Nanostructured thin metal films for plasmonics
(Invited lecture)
Alain DEREUX – Institut Carnot de Bourgogne, Dijon (F)
0 2.1 3.10 pm Surface patterning of austenic stainless steel by low temperature plasma assisted nitriding
and physical vapour deposition
G. Marcos, J.F. Pierson, T. Thiriet, Y. Guo, T. Belmonte, T. Czerwiec
CP2S, Institut Jean Lamour, Nancy (F)
0 2.2 3.30 pm Synthesis and characterization of mesoporous Zirconium oxide thin films
A. Mikó, A.L. Demirel, M. Somer
Koc University, Istanbul (TR)
0 2.3 3.50 pm Growth and optical properties of ZnO nanoparticles inside ordered mesoporous thin films
X. Collard1, C. Bouvy1, Y.U. Kwon2, B.L. Su1
1
CMI, University of Namur, Namur (B)
2
Sungkyunkwan University, Suwon (ROK)
0 2.4 4.10 pm Epitaxial growth of [Co/Ni](111) superlattices with perpendicular anisotropy
M. Gottwald1, S. Girod1, S. Andrieu1, S. Mangin1, J.McCord2, E. Fullerton3, J.M.L. Beaujour4,
B.J. Krishnatreya4, A.D. Kent4
1
P2M - Institut Jean Lamour, Vandoeuvre-lès-Nancy (F)
2
Institute for Metallic Materials, IFW Dresden, Dresden (D)
3
CMRR, University of California, San Diego CA (USA)
4
Department of Physics, New York University, New York (USA)
4.30 pm COFFEE BREAK
Jointly organized by the Société Française du Vide – SFV - 19 rue du Renard – 75004 Paris (F) - 1
www.vide.org/itfpc09.html – sfv@vide.org
and Institut Jean Lamour (IJL) – UMR CNRS, Nancy Université, UPV Metz – Nancy (F)
Innovations in Thin Film
ITFPC09 Processing and Characterisation
NANCY (F) – November 17-20, 2009
Last updated November 13
Tuesday, November 17
SESSION 3: NUMERICAL SIMULATION AND THIN FILM CHARACTERISATION (Topic 2)
Chairs: Richard Kouitat (F) – Gérard Henrion (F)
I 3.1 5.00 pm Getting more insight into reactive magnetron sputtering by modelling and
experiments
(Invited lecture)
Diederik DEPLA – University of Ghent (B)
0 3.1 5.30 pm Estimation of residual stress in ferroelectric PbTiO3 thin films by Raman spectroscopy
A. Bartasyte1*, S. Margueron2, J. Kreisel1, P. Bourson2, O. Chaix-Pluchery1, C. Jimenez1,
A. Abrutis3, F. Weiss1, M.D. Fontana2
1
LMGP, CNRS-Grenoble INP, Grenoble (F)
2
LMO, Université P. Verlaine et Supélec, Metz (F)
3
Vilnius University, Dept. of General and Inorganic Chemistry, Vilnius (LT)
*
Now at P2M - Institut Jean Lamour, Nancy (F)
0 3.2 5.50 pm Cellular based simulation of semiconductors thin films
D. Boumba-Sitou1, S. Ould Saad Hamady1, N. Fressengeas1, H. Frezza-Buet2, S. Vialle2,
J. Gustedt3
1
LMOPS, Université Paul Verlaine - Metz – SUPELEC (F)
2
Information Multimodality and Signal – SUPELEC (F)
3
ALGORILLE (INRIA Lorraine - LORIA), Université Nancy II (F)
0 3.3 6.10 pm Internal stress relaxation based method to extract the Young’s modulus of thin films
A. Boé1,2, M. Coulombier2, M.S. Colla2, U. Bhaskar1, A. Zulfiqar1, T. Pardoen2,3, J.P. Raskin1,3
1
Department of electrical engineering, Université catholique de Louvain, Louvain-la-Neuve (B)
2
Institute of mechanics, Université catholique de Louvain, Louvain-la-Neuve (B)
3
CeRMiN, Université catholique de Louvain, Louvain-la-Neuve (B)
0 3.4 6.30 pm Environmental microscopy as a new tool for characterizing the high-temperature behaviour
of nanocomposite films
T. Schmitt, A. Mege, P. Steyer, G. Thollet
MATEIS, INSA de Lyon, Villeurbanne (F)
6.50 pm Exhibitors presentations
7.10 pm Reception sponsored by the Exhibitors
Jointly organized by the Société Française du Vide – SFV - 19 rue du Renard – 75004 Paris (F) - 2
www.vide.org/itfpc09.html – sfv@vide.org
and Institut Jean Lamour (IJL) – UMR CNRS, Nancy Université, UPV Metz – Nancy (F)
Innovations in Thin Film
ITFPC09 Processing and Characterisation
NANCY (F) – November 17-20, 2009
Last updated November 13
Wednesday, November 18
SESSION 4: MICRO AND NANO-PATTERNING OF THIN FILMS (Topic 5)
NEW PROPERTIES AND APPLICATIONS RESULTING FROM PATTERNED
THIN FILMS (Topic 6)
Chairs: Rafael Jimenez Rioboo (E) – Thierry Czerwiec (F)
I 4.1 8.30 am Nanostructured thin films as functional coatings
(Invited lecture)
Walid DAOUD – Monash University Gippsland, Churchill Victoria (AUS)
0 4.1 9.00 am Desoxydation and capillarity instabilities of silicon-on-insulator thin films
F. Cheynis, F.Leroy, E. Bussmann, P. Müller
CINaM, CNRS – Université Aix-Marseille, Marseille (F)
0 4.2 9.20 am Thin metal electrodes for SAW sensors operating at high temperature
T. Aubert1, O. Elmazria1,2, B. Assouar1
1
P2M - Institut Jean Lamour, Vandœuvre-lès-Nancy (F)
2
Ecole Sup. des Sciences et Techniques de l'Ingénieur de Nancy, Vandœuvre-lès-Nancy (F)
0 4.3 9.40 am Reducing switching field and switching field distribution of bit pattern media
T. Hauet, E. Dobisz, S. Florez, T. Thomson, J. Park, B. Lengsfield, J. D. Risner-Jamtgaard,
D. Yaney, E.E. Fullerton, B.D. Terris, O. Hellwig
San Jose Research Center, Hitachi Global Storage Technologies, San Jose CA (USA)
0 4.4 10.00 am Reduction of the critical current for spin-transfer switching in nanomagnets
S. Mangin1, Y. Henry2, J. Cucchiara1, D. Ravelosona3, J. A. Katine4, E.E. Fullerton5
1
P2M - Institut Jean Lamour, Vandoeuvre lès Nancy (F)
2
IPCMS, CNRS – UDS, Strasbourg (F)
3
IEF, CNRS – UPS, Orsay (F)
4
San Jose Research Center, Hitachi Global Storage Technologies, San Jose CA (USA)
5
Center of Magnetic Recording Research, University of California San Diego, CA (USA)
0 4.5 10.20 am Poly (urethaneimide) (PUI) tailored copolymer as specific selective layer for SO2 gas SAW
sensors
I. Ben Youssef1, F. Sarry2, O. Elmazria2, H. Alem1, A. Jonquieres1, R.J. Jiménez Riobóo3
1
LCPM, Ecole Nationale Supérieure des Industries Chimiques, Nancy (F)
2
P2M, Institut Jean Lamour, Vandoeuvre lès Nancy (F)
3
Instituto de Ciencia de Materiales de Madrid (CSIC), Madrid (E)
10.40 am COFFEE BREAK
Jointly organized by the Société Française du Vide – SFV - 19 rue du Renard – 75004 Paris (F) - 3
www.vide.org/itfpc09.html – sfv@vide.org
and Institut Jean Lamour (IJL) – UMR CNRS, Nancy Université, UPV Metz – Nancy (F)
Innovations in Thin Film
ITFPC09 Processing and Characterisation
NANCY (F) – November 17-20, 2009
Last updated November 13
Wednesday, November 18
SESSION 5: THIN FILM PROCESSING AND SURFACE ENGINEERING (Topic 1)
Chair: Laurent Le Brizoual (F)
I 5.1 11.10 am Laser ablation: a way to synthesize clusters and nanostructured thin films
(Invited lecture)
Corinne CHAMPEAUX – Université de Limoges (F)
0 5.1 11.40 am Characterization of Ti1-xAlxN coatings with selective IR reflectivity
V. Godinho1,2, D. Philippon1, T.C. Rojas1, N.N. Novikova3, E.A. Vinogradov3, A. Fernandez1
1
Instituto de Ciencia de Materiales de Sevilla CSIC-US, Sevilla (E)
2
Chemicals and Materials Department, Université Libre de Bruxelles, Bruxelles (B)
3
Institute of Spectroscopy of Russian Academy of Science, Troitsk (Rus)
0 5.2 12.00 am Study of CaTiO3:Pr3+ thin films deposited by radiofrequency reactive magnetron sputtering
for electroluminescence application
L. Sarakha, A. Bousquet, E. Tomasella, P. Boutinaud, R. Mahiou
LMI, Université Blaise Pascal, Aubière (F)
0 5.3 12.20 am Comparison between thin films deposited from pulsed plasma of aniline and fluoroaniline
used as ammonia detection
T. Mérian1, D. Debarnot1, V. Rouessac2, F. Poncin-Epaillard1
1
LPCI, Université du Maine, Le Mans (F)
2
IEM, Montpellier (F)
12.40 am LUNCH provided at the CNRS restaurant
SESSION 6: POSTER SESSION
2.30 pm Poster session
4.00 pm COFFEE BREAK
Jointly organized by the Société Française du Vide – SFV - 19 rue du Renard – 75004 Paris (F) - 4
www.vide.org/itfpc09.html – sfv@vide.org
and Institut Jean Lamour (IJL) – UMR CNRS, Nancy Université, UPV Metz – Nancy (F)
Innovations in Thin Film
ITFPC09 Processing and Characterisation
NANCY (F) – November 17-20, 2009
Last updated November 13
Wednesday, November 18
SESSION 7: INDUSTRY SUPPORTED INNOVATION (Topic 2)
Chairs: Mohammed Belmahi (F) – Edward McRae (F)
0 7.1 4.30 pm Review of characterization of ZnO by spectroscopic ellipsometry
A. Bondaz1, L. Kitzinger1, C. Defranoux2, J.P. Piel2
1
SOPRA Inc, Palo Alto, CA (USA)
2
SOPRALAB, Courbevoie (F)
0 7.2 4.45 pm Sarfus: access to the nanoworld simply with a standard optical microscope
N. Médard
NANOLANE, Montfort-le-Gesnois (F)
0 7.3 5.00 pm Characterization of stress-strain behaviour of thin coatings by low load instrumented
nanoindentation
J. Nohava, G. Berthout
CSM Instruments SA, Peseux (CH)
0 7.4 5.15 pm Characterization of the optical and structural properties of photovoltaic cells and organic
light emitting diodes (OLED) by spectroscopic ellipsometry
M. Kloul1, C. Eypert1, A. Shagaleeva1, L. Yan2
1
Thin Film Division, Horiba Jobin Yvon SAS, Chilly-Mazarin (F)
2
Horiba Jobin Yvon Inc, Edison, NJ (USA)
SESSION 8: THIN FILM PROCESSING AND SURFACE ENGINEERING (Topic 1)
Chairs: Thierry Belmonte (F) – Albano Cavaleiro (P)
0 8.1 5.35 pm Molybdenum thin film nitriding process in expanding microwave plasma using ternary
argon-nitrogen-hydrogen gas mixtures
S. Touimi1, I. Jauberteau1, S. Weber2, A. Bessaudou3, A. Passelergue3, R. Mayet1,
1 1
J.L. Jauberteau , J. Aubreton
1
SPCTS, Faculté des Sciences et des Techniques, Limoges (F)
2
CP2S – Institut Jean Lamour, Nancy (F)
3
XLIM, Université de Limoges, Limoges (F)
0 8.2 5.55 pm Thin nanocrystalline CVD diamond films based on nanodiamond / TiO2 sol-gel composites
K. Haenen1,2, M. Daenen1, L. Zhang3, S.D. Janssens1, P. Cosemans4, A. Hardy1, J. Verbeeck3,
K. Van Bael1,2, M. Nesládek1,2, G. Van Tendeloo3
1
IMO, Hasselt University, Diepenbeek (B)
2
IMEC vzw, Division IMOMEC, Diepenbeek (B)
3
EMAT, University of Antwerp, Antwerp (B)
4
Sirris, Diepenbeek (B)
0 8.3 6.15 pm Methylated mesoporous silica thin films: electro-assisted synthesis and electrochemical
characterization of mass transport
Y. Guillemin1, M. Etienne1, E. Aubert2, A. Walcarius1
1
LCPME, Nancy Université, Villers-les-Nancy (F)
2
CRMM, Nancy Université, Vandoeuvre-lès-Nancy (F)
0 8.4 6.35 pm Control of functional plasma polymer growth including silver nanoparticles
D. Hegemann, E. Körner
EMPA, St.Gallen (CH)
6.55 pm Committees meeting
Jointly organized by the Société Française du Vide – SFV - 19 rue du Renard – 75004 Paris (F) - 5
www.vide.org/itfpc09.html – sfv@vide.org
and Institut Jean Lamour (IJL) – UMR CNRS, Nancy Université, UPV Metz – Nancy (F)
Innovations in Thin Film
ITFPC09 Processing and Characterisation
NANCY (F) – November 17-20, 2009
Last updated November 13
Thursday, November 19
SESSION 9: PROTECTIVE APPLICATIONS OF THIN FILMS (Topic 3)
Chairs: Frédéric Lapostolle (F) – Ray Boxman (IL)
I 9.1 8.30 am Carbon, CN and BCN protective thin films for tribological applications
(Invited lecture)
Ignacio JIMENEZ – CSIC-ICMM, Madrid (E)
0 9.1 9.00 am Structure, oxidation resistance and tribological properties of hard Cr-Al-Si-B-N and
Ti-Al-Si-B-N films
P.V. Kiryukhantsev-Korneev1, J.F. Pierson2, A.N. Sheveyko1, E.A. Levashov1, A. Fabrizi3,
3 3 1
R. Cecchini , C. Paternoster , D.V. Shtansky
1
State Technological University “Moscow Institute of Steel and Alloys”, Moscow (RUS)
2
CP2S, Institut Jean Lamour, Nancy (F)
3
Universite Politecnica Delle Marche, Ancona (I)
0 9.2 9.20 am In situ microscopic approach of oxidation and wear behaviours of arc evaporated CrN-
based nanocomposite coatings
T. Schmitt, P. Steyer, J. Fontaine, N. Mary, F. Sanchette, G. Pot, C. Esnouf
LTDS – MATEIS, Ecole Centrale, Lyon (F)
0 9.3 9.40 am Development of B4C sputter-deposited coatings for mechanical applications
J.C Oliveira, C. Louro, A. Cavaleiro
University of Coimbra, Coimbra (P)
0 9.4 10.00 am Multilayered PVD coatings for solid particle erosion protection
Y. Gachon, X. Badiche, C. Héau, P. Maurin Perrier
HEF R&D, Andrézieux Bouthéon (F)
10.20 am COFFEE BREAK
SESSION 10: THIN FILM PROCESSING AND SURFACE ENGINEERING (Topic 1)
Chairs: Ignacio Jimenez (E) – Ken Haenen (B)
I 10.1 10.50 am Vacuum arc deposition of coatings and thin films
(Invited lecture)
Ray BOXMAN – Tel-Aviv University (IL)
0 10.1 11.20 am Influence of substrate biasing on (Al, Ti)N thin films deposited by a hybrid HIPIMS/DC
sputtering process
A. Guillaumot1, J.C. Oliveira2, C. Dublanche-Tixier3, F. Lapostolle1, A. Billard1, C. Langlade1
1
LERMPS, UTBM, Belfort (F)
2
SEG-CEMUC, University of Coimbra, Coimbra (P)
3
SPCTS, ENSIL, Limoges (F)
0 10.2 11.40 am Low energy high current pulsed electron beam (LEHCPEB) treatment:
an effective way for improving surface microstructure and properties
J. Zou1, J. Wu1,2, T. Grosdidier1, S. Hao2, C. Dong2
1
LETAM, Université Paul Verlaine, Metz (F)
2
Key Laboratory, Dalian University, (CHN)
Jointly organized by the Société Française du Vide – SFV - 19 rue du Renard – 75004 Paris (F) - 6
www.vide.org/itfpc09.html – sfv@vide.org
and Institut Jean Lamour (IJL) – UMR CNRS, Nancy Université, UPV Metz – Nancy (F)
Innovations in Thin Film
ITFPC09 Processing and Characterisation
NANCY (F) – November 17-20, 2009
Last updated November 13
Thursday, November 19
0 10.3 12.00 am Bias enhanced nucleation of diamond on silicon (001):
sequential analysis using XPS and RHEED investigations
C. Sarrieu1, N. Barth1, A. Guise1, J.C. Arnault2, S. Saada2, S. Barrat1, E. Bauer-Grosse1
1
CP2S, Institut Jean Lamour, Nancy (F)
2
LIST, Diamond Sensors Laboratory, CEA, Gif-sur-Yvette (F)
0 10.4 12.20 am PECVD low temperature synthesis of carbon nanotubes coated with aluminium nitride
A. Tailleur1, A. Soussou1, S. Morjan1, M.A. Djouadi1, L. Le Brizoual1, A. Granier1, C. Texier2,
P. Tristan2
1
Institut des Matériaux Jean Rouxel – IMN, Nantes (F)
2
SPCTS, Université de Limoges, Limoges (F)
0 10.5 12.40 am Influence of the organosilicon precursor on the corrosion of aluminium coated sheet by
atmospheric pressure dielectric barrier discharge
N. Boscher1, P. Choquet1, D. Duday1, R. Maurau1, S. Verdier2
1
Dpt de Science et Analyse des Matériaux, CRP Gabriel Lippmann, Belvaux (L)
2
Novelis - Foil Innovation Centre, Belvaux (L))
1.00 pm LUNCH provided at the CNRS restaurant
SESSION 11: POSTER SESSION
2.30 pm Poster session Last time for visiting the exhibition
4.00 pm Social event museum visit and city center
7.00 pm CONFERENCE DINNER
Town Hall (Grands Salons Hôtel de Ville de Nancy, 1place Stanislas)
Jointly organized by the Société Française du Vide – SFV - 19 rue du Renard – 75004 Paris (F) - 7
www.vide.org/itfpc09.html – sfv@vide.org
and Institut Jean Lamour (IJL) – UMR CNRS, Nancy Université, UPV Metz – Nancy (F)
Innovations in Thin Film
ITFPC09 Processing and Characterisation
NANCY (F) – November 17-20, 2009
Last updated November 13
Friday, November 20
SESSION 12: ENERGY, ENVIRONMENT AND HEALTH APPLICATIONS OF THIN FILMS
(Topic 4)
Chair:
O 12.1 9.00 am Sputter deposition of oxide thin films for solid oxide fuel cells
B.H. Christensen, K.P. Almtoft, L.P. Nielsen
Danish Technological Institute, Tribology Centre, Aarhus C (DK)
O 12.2 9.20 am Structure and conductivity of apatite-like lanthanum silicate films for SOFC electrolytes
M. Vieira1, J.C. Oliveira2, A. Shaula2, A. Cavaleiro2
1
Polytechnic Institute of Leiria, Leiria (P)
2
University of Coimbra, Coimbra (P)
O 12.3 9.40 am Structure of Ag-Cu-O sputtered films after air annealing
C. Petitjean, D. Horwat, J.F. Pierson
CP2S, Institut Jean Lamour, Nancy (F)
O 12.4 10.00 am Amino-rich coatings prepared by magnetron sputtering of nylon
J. Kousal, O. Kylián, J. Hanuš, A. Choukourov, H. Biederman
Department of Macromolecular Physics, Charles University in Prague, Prague (CZ)
10.20 am COFFEE BREAK
Jointly organized by the Société Française du Vide – SFV - 19 rue du Renard – 75004 Paris (F) - 8
www.vide.org/itfpc09.html – sfv@vide.org
and Institut Jean Lamour (IJL) – UMR CNRS, Nancy Université, UPV Metz – Nancy (F)
Innovations in Thin Film
ITFPC09 Processing and Characterisation
NANCY (F) – November 17-20, 2009
Last updated November 13
Friday, November 20
SESSION 13: NUMERICAL SIMULATION AND THIN FILM CHARACTERISATION (Topic 2)
Chair: Diederik Depla (B)
I 13.1 10.50 am The molecular dynamic simulations of plasma-polymer interactions
(Invited lecture)
David GRAVES – University of Berkeley CA (USA)
O 13.1 11.20 am Three-dimensional growth simulation: A study of substrate oriented films
A. Besnard, N. Martin, L. Carpentier
Institut FEMTO-ST, ENSMM, UTBM, Besançon (F)
O 13.2 11.40 am Strain gradient plasticity based modeling of the size dependent strength and ductility of thin
polycrystalline metallic films
C. Brugger1, T.J. Massart2, J.P. Raskin3,4, T. Pardoen1,4
1
Institute of mechanics, materials and civil engineering, Université catholique de Louvain (B)
2
BATir CP 194/2, Building Architecture & Town Planning, Université Libre de Bruxelles (B)
3
Department of electrical engineering, Université catholique de Louvain, Louvain-la-Neuve (B)
4
CeRMiN, Université catholique de Louvain, Louvain-la-Neuve (B)
O 13.3 12.00 am Plasma sputtered platinum cluster growth in porous carbon:
a grazing incidence smallangle x-ray scattering study
M. Mougenot1, P. Andreazza2, R. Escalier1, P. Brault1
1
GREMI, Université d’Orléans, ORLEANS (F)
2
CRMD, Université d’Orléans, ORLEANS (F)
O 13.4 12.20 am Electrical characterization of BGAN thin films for “solar blind” ultraviolet photodetectors
application
H. Srour1, S. Ould Saad Hamady1,2,*, B. Assouar3, L. Bouvot3, P. Miska3, J.P. Salvestrini1,2,
T. Baghdadli1, A. Ahaitouf1, S. Gautier1, T. Moudakir2, A. Ougazzaden2
1
LMOPS, Univ. Paul Verlaine and SUPELEC, Metz (F)
2
UMI 2958 Georgia Tech, CNRS, Metz (F)
3
P2M - Institut Jean Lamour, Nancy (F)
12.40 am Closing
Jointly organized by the Société Française du Vide – SFV - 19 rue du Renard – 75004 Paris (F) - 9
www.vide.org/itfpc09.html – sfv@vide.org
and Institut Jean Lamour (IJL) – UMR CNRS, Nancy Université, UPV Metz – Nancy (F)
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