Low Temperature Physics Measurement Systems

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					LTSYS
Low Temperature Physics Measurement Systems
Accelerate your semiconductor Research & Development towards nano-scale products.




                                             attocube systems
                                             explore your nanoworld
                                                                                LTSYS
                                                                                Low Temperature Physics Measurement Systems




LTSYS
Low Temperature Physics Measurement Systems




Experience your new working horse in the emerging field of semiconduc-
tor research for the nanoscale age. attocube systems introduces its new
product line of low temperature physics measurement systems. Perform
your experiments time efficiently resulting in your company‘s future na-
noscale products.                                                            attocube systems offers two versions of the basic systems:


With this novel ultra-modular systems a variety of scanning probe            LTSYS-He
microscopy (SPM) techniques as well as a probing station at low tem-         ultra-stable low temperature physics measurement systems
peratures down to 300 mK can be covered within one single device. This       The basic LTSYS-He4 systems are based on a liquid Helium bath cryostat and optimized for highest stability of
is realized by a modular basic system in combination with flexible, high     your measurements. Options as a variable temperature insert (VTI) or a He3 insert allow to cover a large tempe-
end control electronics supporting your individual research task. For this   rature range down to the mK regime to cover your specific experimental requirements.
                                                                             Superconducting magnets up to 15 T are compatible with the system. The compatible microscopy inserts range
system, a variety of microscopy inserts are available which are tailored
                                                                             from Confocal Microscopy (CFM) and Scanning Nearfield Optical Microscopy (SNOM) to Atomic Force Microscopy
for your individual measurement tasks and can simply be expanded for
                                                                             (AFM) for measurements with ultra-high resolution. Furthermore, a probe station module for cryogenic probing
future projects.
                                                                             of your NEMS/MEMS samples is available.




                                                                             LTSYS-Cc
                                                                             cryogen-free low temperature physics measurement system
                                                                             This system includes a cryogen-free closed-cycle cryostat for applications where liquid Helium is not available
                                                                             or desired. Expensive running costs and security issues can be avoided. An optional Adiabatic Demagnetization
                                                                             Refrigerator (ADR) enables ultra-low temperature setups. The automation level allows for ‘set and forget‘ ope-
                                                                             ration for non-expert users. For these systems, a variety of Confocal Microscopy (CFM) inserts as well as the
                                                                             probe station insert are available.




                                                                             Images shown on top from left to right: 1) A color-scale plot of the photoluminescence (PL) versus gate voltage showing the discrete
                                                                             spectral lines of a quantum dot recorded with the attoCFM I at a cryogenic temperature of 1.6 K. (R. J. Warburton et. al., ‘Optical
                                                                             emission from a charge-tunable quantum ring‘, Nature (2000) 405, 926), 2) AFM contact mode image of a gold grating with
                                                                             1 μm period and 10 nm height recorded with the attoAFM I. The contaminated surface is clearly resolved. The noise was determined
                                                                             to be less than 10 pm! 3) Topographic image of quantum dots performed in vacuum at cryogenic temperature (4 K) using the
                                                                             attoSNOM III. The noise in the measurement was determined to be well below 0.1 nm.




                                                                                                                                                                       attocube systems
                                                                                                                                                                       explore your nanoworld
                                                                                                                  LTSYS
                                                                                                                  Low Temperature Physics Measurement Systems



LTSYS-He
ultra-stable low temperature physics measurement systems

:.................................................
                                                                                                                   Specification of the LTSYS-He4 system
This system is based on a liquid Helium bath cryostat and has been optimized for highest stability. This system    
enables e.g. ultra-high resolution imaging using Atomic Force Microscopy (AFM) or long-term investigations of                                
single quantum dots over several weeks. A large variety of microscopy and probing heads covers a broad spectrum                 
of measurement tasks. Superconducting magnets up to 15 T are available with this system.                                           

                                                                                                                   
                                                                                                                             
                                                                                                                                        
                                                                                                                                             
Two LTSYS-He systems are available:                                                                                                        
                                                                                                                                                             
LTSYS-He4: Dependent on the pumping system, tempera-             PRODUCT KEY FEATURES                                                              
tures down to 1.5 K can be achieved. With an additional          > ultra high stability
heating stage the temperature of the sample can be swept                                                           
                                                                 > highest flexibility
up to 70 K. A Variable Temperature Insert (VTI, optional)                                                                 
                                                                 > base temperature: down to 300 mK (with He3
                                                                                                                   
enables sweeping the temperature between 1.5 and 300 K             insert)                                                              
The inserts are cooled by a controlled exchange gas atmo-
                                                                 > compatible with superconducting magnets up
sphere.                                                                                                            
                                                                   to 15 T
                                                                                                                                       
LTSYS-He3: Operating down to 300 mK, this state of the                                                                                   
art system features integrated designs for the He3 insert                                                          
with the high efficiency He bath cryostat. Reduction of the                                                                            
vapor pressure is achieved by an internal sorption pump
(charcoal cooling) optimized for lowest vibrations of the       EXAMPLE APPLICATIONS
complete system.                                                > ultra high resolution imaging in Atomic Force    Specification of the LTSYS-He3 system
                                                                  Microscopy (AFM) on semiconducture struc-
                                                                  tures                                            
The basic system includes the following components:
                                                                > solid state physics and quantum dot optics                                 
> liquid Helium bath cryostat with a 2“ insert                  > materials science research on ceramics, poly-
                                                                  mers, additives, alloys, ..                      
  fitting all attocube microscope and probing inserts
                                                                                                                                                    
> vibration and acoustic noise dampening system                 > quantitative surface characterization in the
                                                                                                                             
  attoDAMP™ enabling high resolution imaging                      sub-micron range
                                                                                                                                        
> high-end SPM controller ASC500 for intuitive                                                                                               
  controling of the microcopy modules                                                                                                      
> Piezo Scan Controller for fine scanning of the sample                                                                                                      
> Piezo Step Controller for sample coarse positioning                                                                                              

                                                                                                                   
Options:                                                                                                                  
                                                                                                                   
> liquid sample heating stage for temperature control from 1.5 to 70 K                                                                          
> variable Temperature Insert (VTI) for temperature control from 1.5 to 300 K                                                   
> He3 insert for base temperatures down to 300 mK                                                                                       

                                                                                                                   
                                                                                                                                       
                                                                                                                                         
                                                                                                                   


                                                                                                                                                                                              attocube systems
                                                                                                                                                                                              explore your nanoworld
                                                                                                                         LTSYS
                                                                                                                         Low Temperature Physics Measurement Systems



LTSYS-Cc
cryogen-free low temperature physics measurement systems

:.................................................                                                                       Specification of the LTSYS-Cc system

                                                                                                                         
This measurement system relies on a pulse-tube based closed-cycle cryostat allowing measurements at low tem-                                            
peratures down to 4 K and high magnetic fields up to 9 T (optional) without the need of liquid coolants. Expensive                                                
running costs for the purchase, transport, and storage of liquid Helium as well as security training for users can be                             
avoided. With the optional Adiabatic Demagnetization Refrigerator (ADR) temperatures of < 100 mK can be achie-                                  
                                                                                                                                                                  
ved. For this system, a variety of SPM inserts as well as the probe station insert are available covering a large area
                                                                                                                                                        
of semiconductor applications.
                                                                                                                         
Two LTSYS-Cc systems are available:                                                                                                              
                                                                                                                                             
                                                             PRODUCT KEY FEATURES
                                                                                                                                             
LTSYS-Cc: Temperatures down to 4 K can be reached            > cryogen-free
with the standard closed-cycle system. Optional,             > very easy to use                                          
superconducting magnets up to 9 T are available.             > base temperature: 4 K, with ADR 100 mK                                
The inserts are cooled by a controlled exchange gas          > compatible with superconducting magnets up                                        
                                                                                                                         
atmosphere.                                                    to 9 T
                                                                                                                         
LTSYS-CcADR: This system allows plug-and-play                                                                                                          
cryogenic measurements at temperatures as low as                                                                                                       
100 mK. The automation level facilitates an opera-           EXAMPLE APPLICATIONS
                                                                                                                         
tion for non-expert users.                                   > confocal microscopy
                                                                                                                                            
                                                             > solid state physics and quantum dot optics
                                                             > materials science research on ceramics, polymers,
The basic system includes the following                        additives, alloys, ..
components:                                                  > semiconductor device characterization
                                                                                                                         Specification of the LTSYS-Cc ADR system
                                                             > electrical and electro-optical measurements
                                                                                                                         
> closed-cycle cryostat with a 2“ insert fitting                                                                                                  
  attocube microscope and probing inserts
> patented vibration and acoustic noise dampening system attoDAMP™                                                       
> high-end SPM controller ASC500 for intuitive controlling of the SPM inserts                                                                           
                                                                                                                                                                  
> Piezo Scan Controller for fine scanning of the sample
                                                                                                                                                  
> Piezo Step Controller for sample coarse positioning                                                                                           
> laser / detector module for sensing and adjusting                                                                      
                                                                                                                                   
                                                                                                                                                                  
> workstation PC with TFT-monitor
                                                                                                                         
                                                                                                                                                  
                                                                                                                                                
Options:                                                                                                                                             

> ADR insert for base temperatures down to 100 mK                                                                        
> superconducting magnets up 9 T                                                                                                   
                                                                                                                                                 
                                                                                                                                                           

                                                                                                                         
                                                                                                                                                       
                                                                                                                                                       



                                                                                                                                                                                                   attocube systems
                                                                                                                                                                                                   explore your nanoworld
                                                                                                                                                                                                                                             LTSYS
                                                                                                                                                                                                                                             Low Temperature Physics Measurement Systems




Overview on available microscope and probing inserts
:........................................................................


                                                                 Confocal Microscopes                                                                  AAAAtomic Force Microscopes                                                        Scanning Nearfield Optical Microscopes                                          Probe Station
                                    attoCFM I                         attoCFM II                        attoCFM III                          attoAFM I                            attoAFM II                        attoSNOM I                          attoSNOM II                    attoSNOM III                          attCPSx4
LTSYS-He4                              yes                                yes                               yes                                  yes                                 yes                                yes                                 yes                             yes                                  yes
LTSYS-He3                              yes                                yes                               yes                              on request                           on request                         on request                         on request                      on request                               yes
LTSYS-Cc                            on request                            yes                               yes                              on request                               no                                 no                                 no                              no                                   yes
LTSYS-CcADR                             no                                yes                               yes                              on request                               no                                 no                                 no                              no                                   yes




Description              low temperature, Scanning          highly stable and compact low     low temperature Scanning Con-     low temperature Atomic Force Micro-    advanced low temperature           cantilever based, low tem-          fiber based, low temperature,   fiber based, low temperature,   cryogenic probe station with
                         Confocal Microscope, highly        temperature, Scanning Confocal    focal Microscope, optimized for   scope, highly compact and stable       Atomic Force Microscope            perature, Scanning Near-Field       Scanning Near-Field Optical     Scanning Near-Field Optical     four ultra stable nano-manipu-
                         modular and flexible               Microscope                        transmission measurements                                                                                   Optical Microscope                  Microscope                      Microscope                      lation stages
Examplary Applications   > solid state physics and quan-    > solid state physics and quan-   > absorption, scattering, and     > ultra high resolution topogra-       > ultra high resolution            > simultaneous ultra high reso-     > simultaneous ultra high       > simultaneous ultra high       > electrical measurements over a
                            tum dot optics                    tum dot optics                    fluorescence properties,          phy imaging                            topography imaging, also           lution topographic and optical      resolution topographic and      resolution topographic and      wide temperature range
                         > high resolution defect analy-    > fluorescence observation          investigation of complex nano   > measurement of magnetic                in combination with optical        reflection measurements             optical imaging                 optical imaging               > semiconductor device
                           sis, surface characterization,   > highly stable long term experi-   structures, single molecules,     sample properties                      measurements                     > investigation of complex nano     > investigation of complex      > investigation of complex        characterization
                           and topography profiles            ments on single quantum dots      and quantum dots                > elasticity measurements              > measurement of magnetic            structures, single molecules,       nanostructures, single          nanostructures, single        > quantum wires and dots inves-
                         > materials science research on    > biological and medical          > low coherence tomography        > materials science research on          sample properties                  and quantum dots                    molecules, and quantum dots     molecules, and quantum dots     tigations
                           ceramics, polymers, additives,     research on tissue samples      > single molecule life-time         ceramics, polymers, additives,       > elasticity measurements          > materials science research on     > materials science             > materials science             > nanoscale electronics
                           alloys, ..                         in cytological and neurological   measurements                      alloys, ..                           > materials science research on      ceramics, polymers, additives,
                         > Raman spectroscopy as well as      applications                                                                                               ceramics, polymers, additives,     alloys, ..
                           fluorescence and diffusion       > fast 3D-imaging                                                                                            alloys, ..
                           measurements




                                                                                                                                                                                                                                                                                                              attocube systems
                                                                                                                                                                                                                                                                                                              explore your nanoworld
                                                                                                                                                                                  LTSYS
                                                                                                                                                                                  Low Temperature Physics Measurement Systems




Unique and patented positioning units for all attocube microscopy and
probing heads.
:........................................................................

Design Concept - The great success of attocube sy-
stems positioners is based on the unique combina-                                               Piezoelectric Actuator
                                                                                                                         Sliding Block
tion of a patented driving technology, the powerful
                                                                               AT REST
design, the selection of high-quality materials, and                                                                     Guiding Rod
                                                           Voltage Piezo




the long experience of the attocube systems staff.
                                                                                                                         Fixed Frame
Our positioners allow you to run your research pro-
                                                                           1
jects reliably under a large variety of conditions such                                  Time

as low temperature, high magnetic fields or ultra-
                                                                                SLIP
high vacuum. The patented driving technology plays
                                                           Voltage Piezo




                                                                           2
an important role in achieving such a bandwidth of
                                                                                                                              x
applications. At the same time it represents a key
factor in the success story of attocube systems,                                         Time


which wouldn‘t have been possible without the abili-                                                                      x
                                                                               STICK
ty of the positioners to move objects over centimeter                                                                      net step is
                                                           Voltage Piezo




                                                                                                                           completed
range with atomic precision.                                                                                                             Positioners during ultra high vacuum testing
                                                                                         3
                                                                                         Time
                                                                                                                                         in the attocube labs.


Travel Mechanism - attocube translation stages are powered using slip-stick motion. The basic principle of translation
stages based on slip-stick inertial motion is the controllable use of the intertia of a sliding block. In our slip-stick iner-
tial translation stages, the sliding block slips along a guided rod to which it is otherwise clamped (sticking) in frictional
engagement. To obtain a net step, the guiding rod is first accelerated very rapidly over a short period of time (typically
microseconds) so that the intertia of the sliding block overcomes the friction. This way, the sliding block disengages from
the accelerated rod and remains nearly nondisplaced. Subsequently the guiding rod moves back to its initial position slowly
enough so that the sliding block this time sticks to it and thus makes a net step. Periodic repetition of this sequence leads
to a step-by-step motion of the sliding block in one direction. A piezo electric ceramics pushes or pulls the guiding rod and                                                                  attocube systems delivers positioning stages for many different working
the exact sequence in the slip and stick motion is controlled by an appropriate voltage signal.                                                                                                environments, which affects the selection of materials and the produc-
                                                                                                                                                                                               tion processes involved. The positioners can be used at low temperatures
                                                                                                                                                                                               down to 10 mK and UHV conditions up to 5E-11 mbar. Furthermore, ne-
                                                                                                                                                                                               arly all attocube systems positioners are made from non-magnetic materi-
                                                                                                                                                                                               als enabling usage in a very strong magnetic field (current max. tested
                                                                                                                                         attocube’s engineers performing a low                 field: 28 T).
                                                                                                                                         temperature test.




Selection of attocube linear and rotary positioners showing the ultra compact design.


                                                                                                                                                                                                                                    attocube systems
                                                                                                                                                                                                                                    explore your nanoworld
attocube systems AG
Königinstrasse 11a RGB
80539 München
Germany

Tel.: +49 89 2877 809-0
Fax: +49 89 2877 809-19
Mail: info@attocube.com
Web: www.attocube.com
                          attocube systems
                          explore your nanoworld