(Microsoft PowerPoint - M374hlleithen_2004_IfU.PPT)

Document Sample
(Microsoft PowerPoint - M374hlleithen_2004_IfU.PPT) Powered By Docstoc
					                        $%                &
          '             (                                   $ )           *
                             ,-
                            +,                .



                        !                                                      "
          #

          IfU GmbH          Dipl.-Phys. S. Marke – Mühlleithen 2004   University
    IFU
.         Lichtenau                                                   Dortmund




                      • IfU Diagnostic Systems GmbH
                      • Acoustooptic Spectrometer (AOS)
                      • Motivation of Experiments
                      • Reactor Concept
                      • Imaging Spectrometer
                      • Spectroscopy Results
                      • Yield and Chemical Conversion
                      • Conclusion and Future Work

          IfU GmbH          Dipl.-Phys. S. Marke – Mühlleithen 2004   University
    IFU
.         Lichtenau                                                   Dortmund




                                                                                   1
                                                                                    !
               Developer, Producer and Distributor of
            Fast Optical Emission Spectrometer based on
                 AOTF (acoustooptic tunable filter)

                                                        IfU Diagnostic Systems GmbH
                                                              Gottfried-Schenker-Str. 18
                                                              09244 Lichtenau
                                                              (+49) 037 208 / 889 0
                                                              (+49) 037 208 / 889 29
                                                              www.ifu.de oder info@ifu.de



          IfU GmbH            Dipl.-Phys. S. Marke – Mühlleithen 2004       University
    IFU
.         Lichtenau                                                         Dortmund




     • pulsed magnetron              • multi chamber
       sputtering processes            magnetron sputtering
     • periodic rf/mf                • process control at
       applications                    different regions
     • process control                 inside the discharge




                               }
                Time resolution
                                            two             • imaging spectroscopy at
                                     dimensional              large area applications
                Light sensitivity       Aperture
                                                            • monitoring of voluminous
                                        8x8 mm²               plasma processes
                Spatial resolution


          IfU GmbH            Dipl.-Phys. S. Marke – Mühlleithen 2004       University
    IFU
.         Lichtenau                                                         Dortmund




                                                                                            2
      single-channel
      single-                                            four-
                                                         four-channel




                               Technical parameters AOS 4(5)
                        spectral range           245 nm ......800 nm
                                                                        video
                        spectral resolution      0.05nm @ 250nm ,
                                                 0.5nm @ 800nm
                        wavelength access        5(1) milliseconds
                        time resolution in       200(10) ns
                        pulse mode
                        size                     19” rack, height 4


              IfU GmbH                   Dipl.-Phys. S. Marke – Mühlleithen 2004    University
    IFU
.             Lichtenau                                                             Dortmund




              • Green house effect – reduction of Carbon dioxide
              • Plasma activation of CO2
              • CO2 can be used for chemical synthesis

                                                                         • Optical emission
      !-                  ⇔        / +!+           /- 1
                                                    0 2                    spectroscopy for
          +                ⇔        /        +      -, 2
                                                   / 31                    process control
     + /        +          ⇔ +                          2
                                                   (+-3 1                • Optimisation of
     44444444444444444
     44444444444444444                                                     homogeneous
      !- /          +    ⇔ +             / +!+ /    2
                                                +-- 1                      actiovation using
                                                                           imaging spectroscopy

              IfU GmbH                   Dipl.-Phys. S. Marke – Mühlleithen 2004    University
    IFU
.             Lichtenau                                                             Dortmund




                                                                                                  3
             '
                                      CYRANNUS® I
                                      plasma source
                                      from Iplas GmbH,




                      reactor head
                                      Germany
                                      microwave power:
                                          up to 6 kW

                      reaction tube
                                      flow rates:
                                           about 10 m³/h
                                      (200 m³/h possible
                                      in inefficient mode)
                      plasma source




                                      Gas supply:
                                          Carbon Dioxide,
                                          Argon, Methane,
                                          Hydrogen

          IfU GmbH    Dipl.-Phys. S. Marke – Mühlleithen 2004     University
    IFU
.         Lichtenau                                               Dortmund




                                                             5$




          IfU GmbH    Dipl.-Phys. S. Marke – Mühlleithen 2004     University
    IFU
.         Lichtenau                                               Dortmund




                                                                               4
      $                                                                    (                     $




           IfU GmbH                          Dipl.-Phys. S. Marke – Mühlleithen 2004                     University
    IFU
.          Lichtenau                                                                                     Dortmund




                            $                      $
               $                                                                           $         $

                                             C2                                                Following specimen were
                                                  C2
                                                                                               found in emission spectrum:
                                                                                                   C – Atomic Carbon,
                                                                                                C2,C3, C4 – Carbon cluster
                     OH
                                                       C2                                      O – Atomic Oxygen (triplet)
                            C4    C3 CH                         Hα
                OH
           C                                                                     O                H – Atomic Hydrogen
                                                                                                     OH, CH – Bands
          250   300       350    400   450     500 550 600     650   700   750       800
                                             wavelength [nm]




           IfU GmbH                          Dipl.-Phys. S. Marke – Mühlleithen 2004                     University
    IFU
.          Lichtenau                                                                                     Dortmund




                                                                                                                             5
                      "         (6
                                                                    $

                                                                • Spectrum mode –
                                                                  integration of
                                                                  intensity at selected
                                                                  area for every
                                                                  wavelength
                                                                • Chrongram mode –
                                                                  sampling of pictures
                                                                  for selected
             C2-Emission at 516 nm                                wavelengths
          Central range of plasma source


          IfU GmbH        Dipl.-Phys. S. Marke – Mühlleithen 2004           University
    IFU
.         Lichtenau                                                         Dortmund




                                                                        (      $
                                                         $
                                                         7




          IfU GmbH        Dipl.-Phys. S. Marke – Mühlleithen 2004           University
    IFU
.         Lichtenau                                                         Dortmund




                                                                                          6
                                    +(




          IfU GmbH    Dipl.-Phys. S. Marke – Mühlleithen 2004   University
    IFU
.         Lichtenau                                             Dortmund




          8                                             +(




          IfU GmbH    Dipl.-Phys. S. Marke – Mühlleithen 2004   University
    IFU
.         Lichtenau                                             Dortmund




                                                                             7
                                                                                                                          $

                                                                                  $                                        9,
                                                                                                                          -,
                                 100,00

                                  90,00

                                  80,00

                                  70,00
                conversion [%]




                                  60,00

                                  50,00

                                  40,00

                                  30,00
                                                                                                           CO 2 conversion, 4500 W
                                  20,00
                                                                                                           CH 4 conversion, 4500 W
                                  10,00

                                      0,00
                                             0,5         0,6         0,7          0,8          0,9            1,0         1,1          1,2
                                                                           C/O-ratio [ mol/mol ]




          IfU GmbH                                   Dipl.-Phys. S. Marke – Mühlleithen 2004                                    University
    IFU
.         Lichtenau                                                                                                             Dortmund




      :                                                                              $                                          $

                                                                                   $                                       9,
                                                                                                                          -,
                             100                                                                                                1000

                                 90                                                                                             900

                                 80                                                                                             800
                                                                                                                                       temperature [°C]




                                 70                                                                                             700

                                 60                                                                                             600
           yield [%]




                                 50                                                                                             500

                                 40                                                                                             400

                                 30                                                           CO yield, 4500 W                  300

                                 20                                                           H2 yield, 4500 W                  200

                                 10                                                           temperature                       100

                                  0                                                                                              0
                                      0,5          0,6         0,7          0,8         0,9          1,0            1,1       1,2
                                                                 C/O-ratio, [ mol/mol ]


          IfU GmbH                                   Dipl.-Phys. S. Marke – Mühlleithen 2004                                    University
    IFU
.         Lichtenau                                                                                                             Dortmund




                                                                                                                                                          8
          • Plasma activation of Carbon dioxide adding Methane is able
            to produce synthesis gas,
          • Synthesis reactor handles up to 10 m3/h gas flow,
          • Time resolved emission spectroscopy is able to optimise the
            plasma activation process
             - for conversion of raw material,
             - yield of conversion,
             - pre selection of conversion products,
          • Acoustooptic imaging spectroscopy – useful method to
            investigate large area or volume plasma phenomena. .

             IfU GmbH     Dipl.-Phys. S. Marke – Mühlleithen 2004   University
    IFU
.            Lichtenau                                              Dortmund




                              ;
           • Imaging Spectroscopy
               • spatial resolution 100x100 pixels
               • picture sampling rate 40ms/picture
               • extend the wavelength range to UV
           • Time Resolution
               - wavelength access:      1ms
               - pulse mode:             10ns
               - periodical application: less 10ns (phase shift method)
           • Process Control
               - evaluation of DAC-module
               - AOS-Profibus-implementation

             IfU GmbH     Dipl.-Phys. S. Marke – Mühlleithen 2004   University
    IFU
.            Lichtenau                                              Dortmund




                                                                                 9

				
DOCUMENT INFO
Shared By:
Stats:
views:17
posted:5/21/2010
language:English
pages:9