Introduction to Operation of the XL-30 Scanning Electron Microscope

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					Introduction to Operation of
the XL-30 Scanning Electron
Microscope

Tutorial # 1
Overview of XL-30 Microscope
Control Program
                 Purpose
• Purpose of these tutorials is to enable the
  user to understand the basics of
  OPERATING the XL-30 to obtain Secondary
  Electron and Back Scattered Electron
  Images, and to obtain an Energy Dispersive
  X-Ray Spectrum.
• Very little theory is given.
• If the user’s requirements demand further
  instruction, he or she should seek further
  formal instruction.
Overview
                   Windows 3.1
• The operating program runs
  under Windows 3.1, which
  you may not be familiar
  with.
• If the instrument is on when
  you start, Windows 3.1
  should be running. If it is
  not, click HERE for
  additional instructions.
       XL-30 Operation Program
• Find the XL 30
  Control window in the
  Program Manager
• Click the icon that is
  labeled
  “Microscope Control”
Microscope Control
                       Pages
• The right side of the
  control screen holds
  various pages.
• WHAT page is noted in
  the upper right corner.
• This one is the
  “Settings” page.
               Settings Page
• The Settings Page
  contains three items
  with drop-down tabs:
  – Vacuum
  – Beam
  – Video
                Settings – Beam
• You should not need to
  use this subpage.
• It is used for saturating
  the filament and some
  other adjustments.
• Do not adjust FiL
  Current without
  assistance.
            Settings - Vacuum
• You should not use the
  “ShutDown” or change
  the purge time.
              Settings – Video
• ACB = Auto Contrast &
  Bright
• Videoscope = intensity
  profile
• Histogram = grey levels
  of complete image.
• Measurement = (F7)
  brings up X, Y
  measurement tool.
                          Imaging
• Imaging Page has two
  dropdowns:
  – Imaging
  – Video
     • Video has already been
       described. It is the same
       dropdown that is on the
       Settings Page.
              Imaging – Imaging
• Imaging dropdown
  contains adjustments
  for:
  – Magnification
  – Scan rotation
  – Stigmation (hold shift +
    right click mouse)
  – Tilt correction
  – Split screen viewing
           Image Manipulation
• Nobody uses this.
• Very basic and not user-
  friendly way to add text
  and basic image
  enhancement.
                     Survey
• We don’t have a
  motorized stage on this
  instrument so this page
  is pretty-much
  worthless.
                  Adjustments
• Stay out of this.
                    4 Quadrants
• The idea here is to be able
  to view several different
  signals at the same time.
  Our instrument has SE and
  BE detectors that can be
  viewed here. But why not
  just use the split screen
  mode in “Imaging”?
           Menu Bar Functions




• Next we take a quick look at the Menu Bar and the
  various options.
             Menu Bar – Image!




• Clicking Image! will bring up a box that asks you if
  you are sure you want to do this.
• The idea here is to provide a fast one button
  operation to an INITIAL IMAGE. (sometimes it
  works)
             Menu Bar – Magn.
• Allows for a selection of
  pre-defined
  magnification settings.
• Magnification may also
  be changed by using the
  + and – on the keypad.
            Menu Bar – Magn. 2
• Selecting CHANGE on
  the magnification menu
  allows new presets to
  be entered into the list.
            Menu Bar – Magn. 3
• Selecting “Device
  Display” adjust the
  scale bar for the desired
  output.
• This should be at
  “Display”
             Menu Bar – Beam
• Preset accelerating
  voltage can be selected.
• Spot size (beam
  current) can be
  selected.
           Menu Bar – Beam 2
• Selecting “Change” on
  the Beam menu allows
  the user to input
  desired accelerating
  voltages.
                    Menu Bar – Scan
• Scan speed selection
• Full Frame – normal operation;
• Sel[ected] area, reduced area
  generally at a faster refresh rate.
• Hor[izonatal] line
• Spot
• Most of the above have icon
  buttons that bring up the desired
  utility.
             Menu Bar – Scan
• Normally this is not
  changed, but you can
  change the preset
  speeds and pixel
  density.
• Please reset when
  finished.
          Menu Bar – Detectors
• There are two detectors
  to choose from:
  – Secondary Electron
  – Backscattered Electron.
        Menu Bar – Detectors 2
• If you go to “Change”
  on the detector
  dropdown menu you
  can change the voltage
  on the faraday cage in
  front of the secondary
  electron detector.
                   Menu Bar - Filter
• There are various ways to
  view an image:
   – Live is the signal as received.
     But often the image is clearer
     if you average some frames
     together, especially at a fast
     raster speed.
   – You can also integrate frames
     to increase signal to noise.
   – Freeze – stops the scan
            Menu – Bar Filter 2
• When you click
  “change” on the filter
  dropdown, a listing of
  options for the various
  filtering is shown.
• You can change the
  options to suit your
  need.
               Menu – In/Out
• The In/Out Menu
  contains some useful
  items and others that
  have no relevance.
• We will take a quick
  look at each.
              Menu – In/Out 2
• From the In/Out Image
  selection you can load
  and save files.
• Transfer you data to the
  Dell PC when you have
  finished you session.
  (see Link Maven
  instructions).
                  Menu – In/Out 3
• Parameters
  – You can store
    microscope settings in
    “VCT” files. These files
    have:
     •   Accelerating voltage,
     •   spot size
     •   magnification
     •   stigmator settings
     •   etc.
• Nobody uses this.
              Menu – In/Out 4
• This is pretty useful
  especially if you want to
  label and image.
• With the options here
  you can turn on/off
  what is displayed on the
  data label when the
  image is displayed.
• The options are self-
  explanitory.
                Menu In/Out 5
• Generates a gray scale
  image across the
  screen. Used to
  calibrate a camera or
  video printer, but as we
  use neither.
               Menu In/Out 6
• You really don’t need to
  change anything here,
  and if you do it will
  probably mess up
  something.
                        Icons




• Icons – quick access to useful functions
              Next Tutorial
• The next tutorial will outline the general
  procedure for obtaining a secondary electron
  image.