SYLLABUS Instructor Professor Lih-Sheng Turng ME 601 Lec. 10 ME 964 by emv53904

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									                                 SYLLABUS
                  Instructor: Professor Lih-Sheng Turng
              ME 601 Lec. 10 & ME 964 Advanced Topic –
Fundamentals of Microfabrication & Non-Conventional Manufacturing
                                Fall 2004-2005

No. Week of                    Topic                           Note
              •   Orientation
1     8/30                                                 First class 9/3
              •   Introduction to Course Objectives
              •   Overview of Microfabrication and
                  Nanotechnology
2     9/6                                                 Labor Day (9/6)
              •   Introduction to MEMS and
                  Microsystems
              •   MEMS (Fabrication, History, Process
3     9/13
                  Flows, and Applications)
4    9/20     •   Lithography and Pattern Transfer
5    9/27     •   Surface Micromachining                    Field Trip
6    10/4     •   Surface Micromachining (Cont’d)       Guest lecture (10/4)
7    10/11    •   Bulk Micromachining                    Mid-Term Exam
8    10/18    •   Bulk Micromachining (Cont’d)
9    10/25    •   DRIE and BioMEMS
10    11/1    •   LIGA and Micro-molding
              •   Multi-scale Components and
11    11/8
                  Nanocomposites
              •   Non-Conventional Manufacturing
12   11/15
                  Processes
              •   Non-Conventional Manufacturing        Thanksgiving Recess
13   11/22
                  Processes                                 (11/25-28)
14   11/29    •   Preparation of Independent Projects
              •   MiniTec Conference - Student
15    12/6                                               Project paper due
                  Presentations
16   12/13    •   Summary                               Last class day 12/15
17   12/20    •   Final Exam (7:45 a.m., Tue. 12/21)

								
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