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XPS Data_101609

VIEWS: 16 PAGES: 12

  • pg 1
									  4 Layer PMMA

XPS and Ellipsometry Data




                            1
       SiOx UV Cleaned
             O 1s




                                Si 2s

                    C 1s   Si 2p3

O 2s




                                        2
         4500
                                               XPS Surveys
         4000
                                               O 1s

         3500                                                                       C 1s

         3000
                                                                                                           SiOx-PMMA4
                                                                                                           SiOx-PMMA3
         2500
                                                                                                           SiOx-PMMA2
Counts                                                                                                     SiOx-PMMA1
         2000                                                                                              SiOx-ONBP
                                                                                                           SiOx-Amine
         1500
                                                                                                           SiOx UV Clean

                                                                           N 1s                  Si 2p3
         1000                                                                                          Si 2s
                O 2s

          500




            0
            1000       920   840   760   680   600        520       440       360    280   200       120       40
                                                     Binding Energy (eV)                                                3
C 1s Peak for UV Cleaned SiOx




                                4
SiOx-propyl-NH2-survey-45degTOA

              O 1s



                            C 1s




                     N 1s          Si 2p3

                                        Si 2s
 O 2s




                                                5
N 1s peak of amino-SiOx




                          6
 SiOx-OrthoNitroBenzylPhotocleavage
          (ONBP) – 45 TOA
               O 1s



                             C 1s




                      N 1s               Si 2s
                                    Si 2p3
O 2s




                                                 7
       SiOx-PMMA1

           O 1s



                         C 1s




                  N 1s          Si 2p3

                                     Si 2s
O 2s




                                             8
       SiOx-PMMA2
           O 1s


                         C 1s




                  N 1s          Si 2p3

                                     Si 2s
O 2s




                                             9
Carbon 1s peak of PMMA 3 layer




                                 10
       SiOx-PMMA4
                         C 1s
           O 1s




                  N 1s          Si 2p3

                                     Si 2s
O 2s




                                             11
       Ellipsometry




(nm)




                      12

								
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