ITRS 2001 Factory Integration Chapter Material Handling Backup by bkx33432

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									           ITRS 2001 Factory Integration Chapter
             Material Handling Backup Section


                Details and Assumptions for Technology
                             Requirements




2010/2/2                 ITRS Factory Integration TWG    1
                                Backup Outline
       How Metrics were Selected
       Material Handling Technology Requirements Table
       Translating Material Handling Technology Requirements to
        Reality
       Supporting Material for Material Handling Technology
        Requirements
       System Throughput Requirements
            Interbay system values – with sample calculation
            System Throughput Requirements for 2004-2005 transition to direct
             transport – with sample calculation
            Stocker Storage Density (% total WIP carrier volume / Total stocker
             volume) – with sample calculation
       Potential Solution Options




2010/2/2                           ITRS Factory Integration TWG                    2
                      How Metrics were selected
     Almost every metric is a best in class or close to best in class
            Sources are: Rob Leachman’s published 200mm benchmarking data,
             individual IC maker feedback, Trecenti/UMC 300mm joint venture published
             data, and I300I Factory Guidelines for 300mm tool productivity
     It is likely a factory will not achieve all the metrics outlined in the
      roadmap concurrently
            Individual business models will dictate which metric is more important than
             others
            It is likely certain metrics may be sacrificed (periodically) for attaining other
             metrics (Example: OEE/Utilization versus Cycle time)
     The Factory Integration metrics are not really tied to the
      technology nodes as in other chapters such as Lithography
            However, nodes offer convenient interception points to bring in new
             capability, tools, software and other operational potential solutions
     Inclusion of each metric is dependent on consensus agreement
           We think the metrics provide a good summary of stretch goals for
           most companies in today’s challenging environment.


2010/2/2                               ITRS Factory Integration TWG                              3
           Material Handling Technical Requirements
                     YEAR                   2001       2002     2003      2004        2005      2006     2007         2010       2013     2016
                TECHNOLOGYNODE             130 NM     115 NM   100 NM     90 NM       80 NM     70 NM    65 NM        45 NM      32 NM    22 NM
                  WAFER DIAMETER           300 MM     300 MM   300 MM    300 MM      300 MM     300 MM   300 MM      300 MM     450 MM    450 MM
            Material handling total
            capital cost as a % of total   < 3% [1]   < 3%     < 3%      < 2% [2]     < 2%      < 2%     < 2%         < 2%       < 3%     < 3%
            capital cost
            # Of transport system types                                  Some 1
            within a factory                2 [3]       2        2         and        1 [4]       1        1            1             1     1
                                                                         some 2
            MTTR (minutes) (SEMI              4        20       18          15             15    15       15           12         10        8
            E10)
            Failures per 24 hour day
                                             <1        <1      <0.75       <0.5        <0.5      <0.5     <0.5        <0.5       <0.5      <0.3
            over total system (SEMI
            E10)
            System throughput
            ·     Interbay transport        1200      1300     1400       1500
                  (moves/hour)
                                                                                    1625 [4]    1750     1875         2000       2000     2000
            ·    Intrabay transport
                                             170       180      190        200
                 (moves/hour)

            Stocker cycle time (seconds)     15        15       14          12             12    10       10            8         10       10
            Average factory wide carrier
                                             10        10       10          8              5      5        5            5             5     5
            delivery time (in minutes)
            Maximum factory wide             20        20       20          15             15    15       15           12         10        8
            carrier delivery time
            Stocker storage density (%
            Total WIP carrier Volume /
            Total Stocker Volume) [5]
                       Small Stocker (%)     >25       >30      >30        >40         >40       >40      >50         >50         >50      >50
                    Nominal Stocker (%)      >30       >35      >35        >45         >50       >50      >60         >60         >60      >60
            Material Handling
            Equipment lead time              <16       <14      <12        <11         <10       <9       <8           <8         <8       <8
            (weeks)
            Material Handling
            Equipment installation time      <8        <8       <7          <7         <6        <5       <4           <4         <4       <4
            (weeks)
            System downtime required
            to extend system capacity       <180       <90      <90        <60         <30       <30      <15          30         30       30
            when previously planned
            (minutes) [6]
                      Solutions Exist                            Solutions Being Pursued                          No Known Solution




2010/2/2                                                       ITRS Factory Integration TWG                                                        4
           Translating Material Handling metrics to Reality
                         Metric                           Potential Solution it is driving
      Material Handling Capital cost a % of total      Even with 100% Interbay+Intrabay, AMHS
      capital cost of the factory                      solutions must fit this budget

      # of transport systems types in a factory        Direct transport (or integrated interbay &
                                                       intrabay). Needed for hot lot, gating send-
                                                       ahead, & hand-carry TPT targets
      Failures per 24 hr day over total system         Storage and transport redundancy schemes;
                                                       fault tolerant MCS; e-Diagnostics, EES, APC
                                                       for AMHS
      Stocker cycle time per system                    Fundamental capability that permits the AMH
                                                       system to successfully transport hot lots,
                                                       gating send-aheads and hand-carries

      Stocker storage density                          New storage ideas which significantly
                                                       reduce stocker footprint in the fab
                                                       cleanroom
      Downtime required for adding increased           New track and stocker extension designs
      system capacity when previously planned          that permit AMHS retrofit/expansion in a
                                                       working factory with minimum downtime




2010/2/2                                 ITRS Factory Integration TWG                                5
           Material Handling Technology Requirements
       System Throughput Requirements:
             Material handling moves per hour are based on requirements to meet
              demands for a 20,000 wafer starts per month factory and a process of
              ~24 layers

            Interbay Sample Calculation for 2001:

                Interbay MPH         =            24 layers X 25 steps/layer X 20k wspm

                                                      (600 steps X 20k wspm)
                                     =
                                                  (727 Hrs/month X 25 wafers /lot)

                                     =             660 Moves / Hr Average

                                     =            ~1200 Moves / Hr Peak ( i.e., Avg+ 2xStd Dev)

                Note: As the number of layers and steps increase the moves per hour will need
                      to increase – direct relationship




2010/2/2                                 ITRS Factory Integration TWG                             6
           Material Handling Technology Requirements
       System Throughput Requirements for 2004-2005 transition to
        direct transport:
             Transition from 1 interbay and multiple intrabay systems to a single
              direct transport system provides a significant reduction in total system
              wide carrier transport moves
                     Technology Requirement values for system throughput change from 1500
                      mph (moves per hour) interbay and 200 mph for each intrabay system in
                      year 2004 to a total direct transport move requirement of 1625 mph in year
                      2005 – includes production and non-production moves
            Worst Case Sample Calculation for 2004 and 2005:
                     For 2004:

                Interbay MPH         =            27 layers X 28 steps/layer X 20k wspm

                                                      (756 steps X 20k wspm)
                                     =
                                                  (727 Hrs/month X 25 wafers /lot)

                                     =             831 mph Average

                                     =            ~1500 mph Peak ( i.e., Avg+ 2xStd Dev)



2010/2/2                                 ITRS Factory Integration TWG                              7
           Material Handling Technology Requirements
       System Throughput Requirements for 2004-2005 transition to
        direct transport:
            Worst Case Sample Calculation for 2004 and 2005 (continued):

            High throughput         =             20 tools/bay X 125 wafers/hour
                Intrabay MPH                             25 wafers/carrier

                                    =             100 Moves / Hr Average

                                    =             ~200 Moves / Hr Peak ( i.e., Avg+ 2xStd Dev)

                Total moves for 2004:
                      Interbay             =                  831 mph Avg
                      IntrabayX20 bays     =      100 X 20 = 2000 mph Avg
                      Total Average                          2831 mph Avg

                     Total Peak             =                5147 mph Peak ( i.e., Avg+ 2xStd Dev)




2010/2/2                                 ITRS Factory Integration TWG                                8
           Material Handling Technology Requirements
        System Throughput Requirements for 2004-2005 transition to
         direct transport:
            Worst Case Sample Calculation for 2004 and 2005 (continued):
                     For 2005
                Direct Transport MPH =            28 layers X 28 steps/layer X 20k wspm

                                                     (784 steps X 20k wspm)
                                    =
                                                  (727 Hrs/month X 25 wafers /lot)

                                    =              862 mph Average

                                    =             ~1625 mph Peak ( i.e., Avg+ 2xStd Dev)




                    Note: Transition from Inter/Intrabay system to single direct transport
                          (2004 to 2005) will eliminate most intrabay moves and demand a
                          small increase in single system moves




2010/2/2                                ITRS Factory Integration TWG                         9
           Material Handling Technology Requirements
      Stocker Storage Density (% total WIP carrier volume / Total
       stocker volume)
              Stocker storage density is a ratio of the total number of storage bins
               time the volume represented by a rectangular box enclosing all carrier
               features of a single carrier to the total volume displaced by a stocker.
              It is expected that the storage density of conventional stockers cannot
               exceed 66%. At least 1/3 of a stocker’s volume is required exclusion
               space for the carrier handling robot.
             Sample Calculation:

                 12 ft tall stocker
                 with 7 rows of
                 carrier bins =
                                              4 ft
                 ~100 carriers


                                                                                  12 ft
           Carrier Volume, Vc:   1.66 ft3 (.047   m3)
           Stocker Volume, Vs: 4x12x12 = 576 ft3 (16.31 m3)

           % Storage Density = Vc x 100 bins / Vs = (1.66 x 100)/ 576 = 29 %



2010/2/2                                           ITRS Factory Integration TWG           10
                            ITRS 2001
           Factory Integration Chapter Backup Section
             Material Handling – Potential Solutions

                Details and assumptions for Potential Solutions




2010/2/2                     ITRS Factory Integration TWG         11
              Material Handling Potential Solutions
                    Backup Section Content
       Potential Solutions for Direct Transport
            Assumptions
            Vehicle Based Direct Transport System Concept Drawing
            Conveyor Based Direct Transport System Concept Drawing
       Potential Solutions for Integrated Flow and Control
            Assumptions
            Carrier Level Solution with Concept Drawing
                Type 1: Sorter and Metrology Equipment Integration with Stockers
            Wafer level Solutions with Concept Drawings
                Type 2-1: Connected EFEMs (Equipment Front-end Modules)
                Type 2-2: Expanded EFEM
                Type 2-3: Continuous EFEM (Revolving “Sushi Bar”)
       Next Generation Factory Concept
            Shows integration of Direct Transport AMHS potential solutions with
             required operations and controls




2010/2/2                             ITRS Factory Integration TWG                   12
              Material Handling Potential Solutions
       Potential Solutions for Direct Transport - See concept
        diagrams on following pages
       Direct Transports Assumptions
            Vehicle Based Solution:
                  Targeted for high volume 300mm semiconductor manufacturing
                  Research required by end of 2001
                  Development underway by end of 2004
                  Qualification/Production beginning 2005
            Conveyor Based Solution:
                Targeted for both high volume 300mm and 450mm semiconductor
                 manufacturing
                300mm
                   – Research required by end of 2002
                   – Development underway by end of 2004
                   – Qualification/Production beginning 2005
                450mm
                   – Research required by end of 2010
                   – Development underway by end of 2013
                   – Qualification/Production beginning 2014




2010/2/2                             ITRS Factory Integration TWG               13
             Material Handling: Vehicle Based Direct
                   Transport System Concept
           Central Stocker                             Upper Ceiling
           (Large Capacity)
           (High Throughput)                                  OHT
                                                                       Note: Current
                                                                       OHT systems
                                                                       cannot meet
                                                                       the longer-term
                                                                       throughput

                          Branch
                         Under Floor
                                                  Full Direct Transport




2010/2/2                       ITRS Factory Integration TWG                              14
             Material Handling: High Throughput
           Conveyor Based Direct Transport Concept

            Conveyor Type
            Transport




2010/2/2                    ITRS Factory Integration TWG   15
            Material Handling Potential Solutions –
                 Integrated Flow and Control
       Potential Solutions for Integrated Flow and Control - See concept
        diagrams on following pages
       Assumptions:
            Carrier Level integrated Flow and Control
             Type 1: Sorter and Metrology with Stockers
                 Compatible with existing standard carrier
                 Must be collaboration between sorter, metrology and AMHS suppliers to integrate stockers
                  with other equipment
                 Hardware integration primarily owned by stocker supplier
                 Equipment integration work primarily controls interface
                 Requires a carrier 180º rotation during hand-off from stocker robot to tool load port(s)
            Wafer Level Integrated Flow and Control
             Type 2-1: Connected EFEMs
                 Transition from lot handling to single wafer handling systems may require new sorting
                  equipment
                 Contamination control must be addressed by way of a tunnel or mini-environment
                  expansion
                 Bypass required for individual equipment downtimes to prevent cluster shutdown
                 Requires standardized EFEM interfaces (at the interface between the tunnel and EFEM) are
                  recommended for ease of wafer transport "tunnel" integration.




2010/2/2                                  ITRS Factory Integration TWG                                       16
            Material Handling Potential Solutions –
           Integrated Flow and Control (continued)
       Assumptions (continued):
            Wafer Level Integrated Flow and Control
             Type 2-2: Expanded EFEM
                 Transition from carrier handling to single wafer handling systems will require new sorting
                  equipment
                 There must be collaboration between equipment suppliers for EFEMs development
                 Requires new standard physical interface between process/metrology equipment and
                  EFEMs
                 High throughput robot required – Concern about material handling robot downtime impact
                     – Preventative maintenance and unscheduled downtime impact are not clear
                 Required equipment to load port matching and lot integrity are key challenges
            Wafer Level Integrated Flow and Control
             Type 2-3: Continuous EFEM (Revolving “Sushi Bar”)
                 Transition from lot handling to single wafer handling systems will require ultra high speed
                  wafer handling equipment
                     – Lot integrity a key issue
                 Equipment interface robot required to replace current EFEMs wafer handling robot
                 Targeted for 450mm transition

       All configurations above are valid, however it is important to select
        appropriate solution for each factory situation




2010/2/2                                   ITRS Factory Integration TWG                                         17
       Type 1: Carrier Level integrated Flow and Control
             - Sorter and Metrology with Stockers

                                                                                                         OHT Loop



                                  Process Tools
                                                                                       Metro               Stocker
              OHT Loop




                                                                                       Tools
  Stockers




                                                                                                             Sorter
                                                                                                                      Metro


                                       Metro
                                       Tools

                                                                                                 Stocker robot loads
                                                          Process Tools
                                       Metro                                                     Sorters and Metro
                         Sorter                   Stocker robot interfaces directly with         equipment Loadports
                                                  Sorters and Metro equip
                                                                                                End View

             Potential Solutions Require:                                     When Solutions Are Needed:
             Standardized Intrabay Operation                                 •Research Required by 2001
             Integrated Software                                             •Development Underway by 2002
                                                                              •Qualification/Production by 2003


2010/2/2                                                ITRS Factory Integration TWG                                          18
             Type 2-1 :Wafer Level Integrated Flow and
                    Control (Connected EFEM)
               Equipment
                                                                                     Equipment
               Supplier A                       Equipment                            Supplier C
                                                Supplier B
                                      Wafer
                                      Staging


            Carrier
            Staging




           Potential Solutions Require:
           I/F Standard (H/W, S/W)                          When Solutions Are Needed:
               Standardized EFEM                            •Research Required by 2002
           Software                                         •Development Underway by 2004
               Integrated                                   •Qualification/Production by 2005
               Wafer level APC
           Standardized Intrabay Operation
                                                                             Conceptual Only

2010/2/2                               ITRS Factory Integration TWG                               19
           Type 2-2 :Wafer Level Integrated Flow and
                   Control (Expanded EFEM)

                                                                         Standard
                                                                        Tool Widths




    Potential Solutions Require:
    System controller of Equipment Group
        Wafer Dispatcher                                When Solutions Are Needed:
    Module structure of equipment                       •Research Required by 2003
        Standardized I/F                                •Development Underway by 2005
        Standardized Width                              •Qualification/Production by 2006
    Modular Process Steps
    High Speed Wafer Transfer
    Standardized Intrabay Operation                                   Conceptual Only

2010/2/2                          ITRS Factory Integration TWG                               20
  Type 2-3: Wafer Level Integrated Flow and Control
      Continuous EFEM (Revolving Sushi Bar)

                                                        Single
                                                        Wafer
                                                                         Conceptual Only
                                                                  Wafer
                                                                 Transport

  Carrier                                                    Potential Solutions Require:
   Level                                                     Ultra High Speed Wafer Transfer
 Transport
                                                                 Target M/C to M/C 7sec.
                                       Single Chamber        Wafer Level Dispatching
               Stocker                   Process Tool
                           Metrology
             Multi-Wafer     Tool
              Carrier                                            When Solutions Are Needed:
                                                                 •Research Required by 2007
                    Target 450mm                                 •Development Underway by 2010
                                                                 •Qualification/Production by 2013



2010/2/2                         ITRS Factory Integration TWG                                        21
           The Next Generation Factory Concept
                                                                            User’s SCM -
                Planning                                         …..        Supply Chain
                 System                                                     Management

                                        …..                                  Direct
                                                                           Transport
               Mfg.          …..                        …..
     Agile    System
     -Mfg.                             EES                                    Wafer
                                                                           Level Control
                            …..                           …..
                                                                                E-
                                                                            Diagnostic
               Supporting
                System                      …..                              Supplier’s
                                                                               SCM
                                      E-Mfg.
                Direct Transport - Plays key role in next generation factories


2010/2/2                          ITRS Factory Integration TWG                             22
                        Material Handling Standards
            Standards for integrated transport
            systems that perform both interbay
            and intrabay transport functions                                                   Stocker
                                                                                               SEM




                                                                Tall Stocker
           Reticle transport           Transport
           systems                     SEM
               Bay ceiling



            Stocker to transporter




                                                                                Deep Stocker
            interface standards


                                                   Stocker
            Transporter to loadport
            interface standards
            Standards for safety
            counter-measures



                 Fab level


                                   Floor running                                                         Legend:
                                   transport systems                                                     -> Standards Exist
                                                                               Stocker



                                                                                                         -> Standards Are Under Development
                                                                                                         -> Standards Are Needed
                                                         Sub-fab level




2010/2/2                                           ITRS Factory Integration TWG                                                               23

								
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