SCANNING ELECTRON MICROSCOPE - DOC

Document Sample
SCANNING ELECTRON MICROSCOPE - DOC Powered By Docstoc
					SCANNING ELECTRON MICROSCOPE
MANUFACTURER: HITACHI MODEL: S2300 APPLICATION: Scanning electron microscopy (SEM) is a method for high-resolution imaging of surfaces. The SEM uses electrons for imaging, as optical microscopes use visible light. The advantages of SEM over optical microscopy include greater magnification (up to 100,000x) and higher depth of field. An incident electron beam is raster-scanned across the sample's surface, and the resulting electrons emitted from the sample are collected to form an image of the surface. Imaging is typically obtained using secondary electrons for a better resolution of fine surface topographical features. Alternatively, imaging with backscattered electrons gives contrast based on atomic number, which solves microscopic composition variations, and gives topographical information.

TECHNICAL SPECIFICATIONS: The main characteristics of the SEM HITACHI S2300 are: Resolution 4.5 nm. (x20 – x200.000) Filament: Tungsten Accelerating Voltaje: 0.5-30 kV 3 lens reduction system 2-stage electromagnetic deflection system Objective lens aperture: 0.1-0.4 mm X Traverse: 0 – 80 mm Y Traverse: 0 – 40 mm Tilt angle: -20º a 90º Work distance: 5 – 35 mm Rotation angle: 360º 1 Oil difusión pump: 400l/sec 1 Oil rotatory pump: 160/min P=10-5 Torr. Temperature: 15 – 30ºC Humidity < 70% Vibration < 5 Hz

Electron optical system

Specimen stage

Evacuating system

Ambient conditions


				
DOCUMENT INFO