Preparation of Fluorine Doped Zinc Tin Oxide Coating Layer by cometjunkie58


									Preparation of Fluorine Doped Zinc Tin Oxide Coating Layer on SUS 316 Bipolar
                      Plates by ECR-MOCVD for PEMFC

                              Joong Kee Leea*, Ji Hun Parka,b, , Dong Jin Byunb

    Advanced Energy Materials Processing Laboratory , Battery Research Center, Korea Institute of Science
                    and Technology, P.O.Box 131, Cheongryang Seoul 130-650, South Korea
           Department of Material Science & Engineering, Korea University, Seoul 136-713, South Korea
                                      *E-mail address:

 Fluorine-doped zinc tin oxide (ZnSnOx:F) films on SUS316 were prepared by electron
cyclotron resonance-metal organic chemical vapor deposition (ECR-MOCVD) in order
to achieve the corrosion-resistant and low contact resistance bipolar plates for polymer
electrolyte membrane (PEM) fuel cells. The ZnSnOx:F films coated on SUS316
substrate in the heating range from 200oC to 500oC were characterized by X-ray
diffraction (XRD), auger electron microscopy (AES) and field emission-scanning
electron microscopy (FE-SEM). To simulate the aggressive PEMFC environment, all
electrochemical experiments were conducted in 1M H2SO4 + 2ppm HF solution at 70oC.
 With increases in the heat treatment temperature from 300oC to 500oC, it was shown
that both corrosion resistance and interfacial contact resistance (ICR) substantially
increase. The AES data revealed that the amount of fluorine decreases with increasing
temperature in our experimental range.
 The deposition temperature appears to be one of the critical process parameters on the
formation of the corrosion-protective layer for PEMFC bipolar plates. It could be
confirmed by microstructural evolution before/after potentiodynamic corrosion tests
under the PEMFC environment.

Presentation: Oral preferred

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