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Enjoy Performance


      Read your email in New York             Carl Zeiss plays a key role in
      before your flight. Surf the Internet   making microchips increasingly
      the same night in Tokyo. Modern         smaller and more powerful: high-
      communication media give us this        resolution optical systems are used
      freedom. Small microchips and           in the fabrication of chips. With in-
      processors are the basis of all the     novative enhancements, we make it
      instruments that make our work          possible to image ever finer struc-
      and leisure time more comfortable       tures on microchips – for more
      and ensure our independence.            performance for you to enjoy.




Semiconductor
Technology
31
Carl	Zeiss	Group
Business	Groups	                             32




               Semiconductor Technology Group


                                                      The Semiconductor Technology Group, which operates as Carl
                                                      Zeiss SMT AG, generated revenues of EUR 864 million (last year:
                                                      EUR 658 million). This represents the strongest growth recorded
                                                      within the Carl Zeiss Group. The new Carl Zeiss SMT factory
                                                      was completed at the end of the 2005/06 fiscal year. It is the
                                                      world’s most advanced lithography optics development and
                                                      production center.




               Strong Revenue Growth –                                During	fiscal	year	2005/06,	Carl	Zeiss	SMT	
               More Employees                                         created	more	than	220	new	jobs	in	Germany	
               Revenues	at	Carl	Zeiss	SMT	AG	rose	by	31	per-          which	were	primarily	filled	by	highly	skilled	
               cent	over	the	year	before.	Incoming	orders		           employees.	With	this	move,	Carl	Zeiss	SMT	is	
               also	showed	a	very	positive	trend	and	are	             underlining	its	confidence	in	Germany	as	a	
               almost	40	percent	above	the	previous	year’s	           high-tech	industrial	location.
               figure.
                                                                      Immersion Optics – Technological Lead
               All	four	divisions	at	Carl	Zeiss	SMT	contributed	      During	the	reporting	year,	the	Lithography	
               to	this	growth.	The	lithography	optics	business	       Optics	Division	achieved	additional	advance-
               posted	a	particularly	strong	increase.	Carl	Zeiss	     ments	in	the	innovative	field	of	immersion	
               successfully	increased	its	technology	leadership	      lithography	with	its	Starlith® 1700i	immersion	
               in	this	area.	Together	with	its	strategic	partner	     lens,	moving	Carl	Zeiss	SMT	further	ahead	of	
               and	customer	ASML	in	Veldhoven,	the	                   the	competition.
               Netherlands,	the	company	expanded	its	global	
               market	leadership	in	wafer	scanners.                   This	technology,	in	which	a	liquid	is	placed	
                                                                      between	the	last	lens	element	and	the	wafer,	
                                                                      enables	imaging	of	tiny	structures	as	small	as	




                                 Precision down to the last detail:
                                 the mechanical parts of the
                                 Starlith® lithography optics also
                                 demand high design efforts.
                                                                                          33




                                                                                                             The purity principle: all assembly
                                                                                                             and inspection steps require
45	nanometers.	This	corresponds	to	a		               Technology of Tomorrow                                  precisely defined climate conditions
performance	increase	of	approximately		              The	microchip	business	is	driven	by	the	                and clean room technology.

30	percent	over	preceding	systems.                   continuous	trend	in	consumer	electronics,	
                                                     resulting	in	increased	demand	for	ever	more	
Furthermore,	the	immersion	liquid	alters	the	        powerful	microchips	featuring	ever	smaller	
light	flow,	thus	creating	greater	depth	of	field.	   structures.
This	facilitates	sub-processes	and	increases	
yield	during	chip	fabrication.                       Carl	Zeiss	SMT	and	its	strategic	partner,	ASML,	
                                                     are	prepared	for	this	development:	during	the	
Outstanding Cooperation                              reporting	year,	Carl	Zeiss	SMT	delivered	the	first	
The	good	cooperation	with	our	partner	ASML	          two	lenses	for	extreme	ultraviolet	lithography	
was	emphasized	by	the	European	SEMI	Award.	          (EUVL)	to	ASML.	This	technology	is	the	next-
Two	executives	from	Carl	Zeiss	SMT	and	ASML	         but-one	lithography	generation	and	will	enable	
jointly	received	this	renowned	award	in	April	       microchips	with	structures	smaller	than	32	
2006.	The	award	jury	honored	their	outstand-         nanometers.	With	EUV	lithography,	Carl	Zeiss	
ing	performance	in	semiconductor	technology,	        SMT	and	ASML	are	implementing	the	technol-
microsystems	and	display	technology.	The	            ogy	generation	for	microchip	fabrication	of	the	
award	is	presented	by	SEMI	Europe,	the	              future.
international	association	of	equipment	
manufacturers	for	the	semiconductor	industry.        “Carl Zeiss SMT has assembled a world-class
                                                     dedicated team that has achieved an incredible
                                                     engineering accomplishment with the Starlith
                                                     1700i 1.2NA lens. This new and revolutionary
                                                     lens technology will transform the landscape of
                                                     semiconductor manufacturing at the leading
                                                     edge in the next few years”.
                                                     Dr. Eli Harari, CEO of SanDisk, Milpitas, in California, USA
Carl	Zeiss	Group
Business	Groups	                           34




                                                                                                      Successful combination: NVision 40
                                                                                                      unites electron-beam observation
                                                                                                      and ion-beam manipulation for
                                                                                                      inspections in semiconductor
                                                                                                      technology, materials research and
                                                                                                      nanotechnology.




               Making Even the Smallest Structures                 During	the	fiscal	year,	Carl	Zeiss	Nano	Technol-
               Visible                                             ogy	Systems	received	the	Top	100	Innovators	
               The	Nano	Technology	Systems	Division	(NTS),	        Award	presented	by	the	Vienna	University	of	
               which	specializes	in	the	imaging	and	analysis	      Economics	and	Business	Administration	which	
               of	even	the	tiniest	structures	and	specimens,	      assesses	the	innovation	management	of	mid-
               was	strengthened	during	the	reporting	year	         sized	companies	in	Germany.
               through	the	acquisition	of	the	ALIS	Corpora-
               tion	in	Peabody,	Massachusetts	(USA).               Analysis and Repair of Lithography
                                                                   Masks
               ALIS	developed	helium-ion	microscopy	which	         The	AIMS TM	and	MeRIT TM	systems	of	the	
               provides	even	higher	resolution	and	contrast	       Semiconductor	Metrology	Systems	Division	
               than	existing	technologies.	This	further	           (SMS)	work	together	hand	in	hand	for	the	
               enhances	the	technology	portfolio	of	the	Nano	      analysis	and	repair	of	defects	on	lithography	
               Technology	Systems	Division.                        masks.	Customers	receive	a	self-contained	
                                                                   system	solution	for	this	key	means	of	produc-
               In	order	to	strengthen	its	presence	in	Japan,	      tion	in	chip	fabrication.
               the	division	signed	an	agreement	with	Tokyo-
               based	SII	NanoTechnology	Inc.,	a	subsidiary	of	     AIMS	systems	check	mask	defects	for	their	
               Seiko	Instruments,	in	March	2006.	The	goal	of	      effects	on	the	lithography	process.	MeRIT	is	the	
               the	strategic	partnership	is	to	provide	mutual	     first	electron	beam-based	repair	system	for	
               support	in	the	sales,	service	and	application	of	   lithography	masks.	It	was	jointly	developed	
               electron	and	ion-beam	systems.	Additionally,	       with	the	partner	company	NaWoTec,	Rossdorf	
               the	two	companies	are	jointly	developing	new	       (Germany),	which	was	acquired	by	Carl	Zeiss	
               solutions	for	nanotechnology,	in	particular	to	     SMT	in	July	2005.
               inspect	the	manufacturing	process	in	semicon-
               ductor	production.	Two	jointly	developed	           The	introduction	of	the	latest	addition	to	the	
               systems,	the	NVision 40	and	the	XVision 300	        AIMS	family,	the	AIMS 45-193i,	was	very	
               were	already	introduced	during	the	reporting	       successful.	This	system	reflects	the	develop-
               period.                                             ment	of	optical	lithography	and	allows	the	
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                                                                                           The first: AIMS 45-193i is the
                                                                                           world’s first inspection system for
                                                                                           checking masks in immersion
                                                                                           lithography.




review	of	mask	defects	under	production	             Innovation – the Key to Success
conditions	present	until	the	next	technology	        The	innovative	power	of	Carl	Zeiss	SMT	is	the	
step	in	the	so-called	45	nanometer	node	is	          key	to	success:	the	company	is	known,	above	
reached.                                             all,	for	its	ability	to	turn	innovations	very	
                                                     quickly	into	marketable	products.	Just	as	
With	MeRIT	and	the	AIMS	analysis	system	for	         important	is	its	flexibility	in	adapting	to	new	
mask	defects,	Carl	Zeiss	Semiconductor	              market	conditions	and	customer	demands,	as	
Metrology	Systems	offers	a	unique	system	            well	as	the	high	quality	of	its	products.
solution	for	mask	repair.
                                                     During	the	reporting	year,	the	Semiconductor		
Precision and Durability                             Metrology	Systems	Group	won	three	of	the	six		
The	Laser	Optics	Division	also	had	a	successful	     Carl	Zeiss	Innovation	Awards	which	are		
fiscal	year	2005/06.	The	division	delivers	          presented	annually.	In	fiscal	year	2005/06,		
components	for	lasers	used	as	a	light	source	in	                                                     	
                                                     Carl	Zeiss	SMT	took	home	prizes	for	its	projects	
lithography.	These	products	from	Carl	Zeiss	         in	the	Leading	Edge	Technology,	Innovative		
SMT	stand	for	maximum	precision	and	                 Business	Design	and	High-risk	Project	catego-
durability.                                          ries.


Carl	Zeiss	SMT	defended	its	market	position		        World’s Most Advanced Factory
in	the	field	of	laser	optics	during	the	reporting	   The	new	Carl	Zeiss	SMT	factory	was	completed	
year.	A	healthy	volume	of	business	was	also	         and	officially	opened	at	the	end	of	the	
reported	for	the	optics	used	in	automated	           2005/06	fiscal	year.	The	new	facility	sets	new	
wafer	inspection.                                    standards:	it	is	the	world’s	most	advanced	
                                                     production	and	development	center	for	
                                                     lithography	optics.	More	than	1,400	employ-
                                                     ees	work	there	on	innovative	technologies	for	
                                                     the	future.