Customized Systems Nanostructures and Surface Analysis and Surface Science
and Solutions Thin Film Deposition Preparation Components Applications
Components for Surface Analysis
Multi-pocket Electron Beam Evaporator
Four Individual Pockets
Internal Water Cooling
Extremely High Power Densities
Unique, High Reliability Design
Temperatures Exceeding 3000 K
Co-evaporation of up to 4 Species from Rods or Crucibles
Multi-pocket Electron Beam Evaporator Options:
The SPECS EBE-4 is a combined multipocket mini e-beam Linear motion holder (LMH) for rods and crucibles
evaporator which is capable of evaporating small quanti- Fixed length holder (FLH) for crucibles
ties of almost any material. The material (either from cru- Integrated multi-position manual shutter
cible or rod form) is heated by eletron bombardment from 0.07 cc crucibles from PGR, VC, Mo, Ta and W with
a surrounding filament thereby allowing temperatures in or without lids
excess of 3000K to be reached. Crucible inserts from BN and Al2O3 available
Individual flux measurement electrode for each pocket
Up to 4 pockets can be fitted with a fixed-length holder Thermocouples on individual pockets on customer
or a linear drive which allows a rod feed of up to 25mm request available (compatibel only with fixed length
or can be upgraded by the user later on. All pockets may holders and crucibles)
be used individually or in any combination for true co- PID controller for usage with thermocouple or flux
evaporation. The instrument is therefore highly flexible measurement electrode
and is well suited to a wide range of surface science ap-
plications. Design Features:
Up to four individual movable rods or crucibles.
Main Features: The current linkage to each pocket is separately
Mounting flange: 2.75” (NW 35 CF) wired in vacuum for maximum reliability.
Four individually equipped pockets Fixed thermocouples. Instrument may be used as a
Internal leak-safe water cooling true e-beam heated effusion cell.
In-vacuum length: 210 mm Individual evaporation zones completely enclosed by
In-vacuum diameter: 34 mm a water-cooled copper shroud to suppress crosstalk
Bakeout temperature: 200° C between pockets.
Max. rod diameter: 4 mm Replacement of single filaments from the filament
Up to 25 mm rod feed assembly by using standard tungsten wire.
Crucible size: 0.07 cc Fine control of the electron emission current for
Operating pressure: < 10-10 - 10-5 mbar improved operation at very low rates.
Power supply with controller for simultaneous opera- Power supply allows controlled evaporation from up
tion of up to all four pockets: 300 W to four rods or crucibles simultaneously.
Configuration Options: Applications:
Feature/Pocket 1 2 3 4 Pt: Thin films, surface science. From rod/crucible
Linear Motion Holder Cr: Metalizing, contacting. From rod - sublimes
Fixed Holder Al2O3: Optical films, oxide films. From crucible
Flux Electrode C: Doping, SEM sample preparation. From rod
Individual HV Connection
Au, Ag: Metalising, contacting. From crucible
Crucible or Rod
Cu: Surface science. From crucible
Single Multiposition Shutter Serves all Pockets
Nb: From rod
Technical alterations reserved. The information in this document is provided with greatest Other product and company names mentioned herein are trademarks or trade names of their
care but SPECS does not assume any liability arising from the application or use of the respective companies.
information or product described here. SPECS is a registered trademarks of SPECS GmbH. Printed in February 2010
SPECS Surface Nano Analysis GmbH
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