Thin Silicon Membranes
Juan J. De Pablo, University of Wisconsin-Madison, DMR 0520527
Robert H. Blick (ECE), Mark A. Eriksson (Physics), Irena Knezevic (ECE), Max G. Lagally (MSE),
Zhenqiang Ma (ECE) and Kevin Turner (ME).
H.-C. Yuan et al., “Complementary
Single-Crystal Silicon TFTs on
Plastic,” ECS Trans. 6, 139 (2007).
Si (110)/<110> Si (001)/<110>
7.8 GHz Thin-film transistor
A complementary thin-film Macroscale image of such
transistor on plastic using transistor arrays attached to a
hybrid-orientation Si flexible plastic substrate.
Thin Si membranes as
2. H. Qin et al., "Subthreshold Field Emission
from Thin Silicon Membranes," Applied Physics
Letters 91, 183506, 2007.
Si nanomembranes placed in groups of four on a sample holder for testing detector applications: (a) overview
with the red area (B) indicating the total membrane area and the golden area showing the gating electrode. (b)
Magnification of an actual device region with four membranes (M) forming a pixel. (c) Experimental
configuration: the backside of the sample is scanned with an electron beam, while the direct current is probed by
the emitted electrons collected in the anode
This work was supported by the National Science Foundation through the University of Wisconsin
Materials Research Science and Engineering Center, DMR-0520527.