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					                                  Thin Silicon Membranes
          Juan J. De Pablo, University of Wisconsin-Madison, DMR 0520527
Robert H. Blick (ECE), Mark A. Eriksson (Physics), Irena Knezevic (ECE), Max G. Lagally (MSE),
Zhenqiang Ma (ECE) and Kevin Turner (ME).


  H.-C. Yuan et al., “Complementary
  Single-Crystal Silicon TFTs on
  Plastic,” ECS Trans. 6, 139 (2007).
                                                   n-TFT      p-TFT



                                           Si (110)/<110>    Si (001)/<110>

                                                                                        7.8 GHz Thin-film transistor
                                                                                        on plastic

                                             A complementary thin-film               Macroscale image of such
                                             transistor on plastic using             transistor arrays attached to a
                                             hybrid-orientation Si                   flexible plastic substrate.
                                             nanomembranes.



      Thin Si membranes as
      particle detectors




    2. H. Qin et al., "Subthreshold Field Emission
    from Thin Silicon Membranes," Applied Physics
    Letters 91, 183506, 2007.



  Si nanomembranes placed in groups of four on a sample holder for testing detector applications: (a) overview
  with the red area (B) indicating the total membrane area and the golden area showing the gating electrode. (b)
  Magnification of an actual device region with four membranes (M) forming a pixel. (c) Experimental
  configuration: the backside of the sample is scanned with an electron beam, while the direct current is probed by
  the emitted electrons collected in the anode




              This work was supported by the National Science Foundation through the University of Wisconsin
              Materials Research Science and Engineering Center, DMR-0520527.

				
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