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Optical JIF_HTA.doc - ILPhotonics.com

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					Optical
Job Information Form

Client:                 Department:                    Contact Person:
Phone Number:           Fax Number:                    E-mail address:




DEVICE NAME:      DATA FORMAT:        GLASS SIZE:                        GLASS TYPE:
                  GDSII               SIZE:                 THICKNESS:   Soda Lime:
                  AutoCad dwg         2.5”:                 0.060”:      Quartz:
                  dxf                 3”:                   0.090”:
                  CIF                 4”:                   0.120”:
                  Other:              5”:                   Other:
PRODUCT:                              6”:
1X Master                             7”:
Copy              DATA UNIT:          Other:
                  Microns:
                  Mils:
                  Other:
                                      Additional Information:
DEFECT                                E.g. step & repeat info, …
DENSITY:          DATA SCALE:
2 defects per     1X
square inch       Other:
> 5 m
Other:
                  DATA IS
                  NOT MIRRORED:
                  MIRRORED:
ARE
CHECKPLOTS
REQUIRED?         DATA WINDOW:
Yes:              X:
No:               Y:
 Optical
 Job Information Form (2/2)

   Mask      File name               GDS structure name          Data layer                               Critical         CD
   number                            (if applicable)             (GDS number or AutoCad layer name)       dimension (CD)   tolerance
   1                                                                                                                       
   2                                                                                                                       
   3                                                                                                                       
   4                                                                                                                       
   5                                                                                                                       
   6                                                                                                                       
   7                                                                                                                       
   8                                                                                                                       


   Mask         Digitized data     Image parity       Coating type        Mask title
   number      clear     chrome   RRCD RRCU       AR Chrome      FeO
   1
   2
   3
   4
   5
   6
   7
   8



   Comments:



CD: critical dimension minimum feature
size or minimum spacing                               HTA Photomask                                   Agent in Israel:
RRCD: Right Reading Chrome Down                       1605 Remuda Lane,                               www.ILPhotonics.com
RRCU: Right Reading Chrome Up                         San Jose, CA, USA 95112                         Moshe@ILPhotonics.com
   Digitized data is chrome;          Digitized data is chrome
Right Reading Chrome Down      Right Reading Chrome Up
          (RRCD)                         (RRCU)




   Digitized data is clear;        Digitized data is clear
Right Reading Chrome Down        Right Reading Chrome Up
          (RRCD)                         (RRCU)

				
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posted:3/25/2013
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